• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.390-393
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• 2001

This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from $100{\mu}m$ to $150{\mu}m$ thick. The adhesion of the glass coatings was found to be excellent such that it was able to withstand moderate impact tests and temperature cycling to over $300^{\circ}C$ without cracking and delamination. The electrostatic clamping pressure generally followed the theoretical voltage-squared curve except at elevated temperatures and higher applied voltages when deviations were observed to occur. The deviation is due to increased leakage current at higher temperature and applied voltage as the electrical resistivity drops.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.44 no.3
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• pp.63-69
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• 2012

The rice husk is one of the major agricultural residue in KOREA. In this paper, the effects of various pulping conditions on the properties of rice husk pulp and handsheets made of rice husk fiber were evaluated in order to utilize the rice husk as an alternative source for wood pulp. Two typical alkali pulping, such as soda pulping and Kraft pulping were applied with various conditions of the pulping processes. The higher effective alkali and higher pulping temperature resulted in the higher efficiency in removal of lignin and ash, which leaded to the higher strength properties of handsheets made of rice husk fiber, but the lower yield of rice husk pulp. The better efficiency in production of rice husk pulp and the stronger handsheets were obtained by the Kraft pulping.

• Solar Energy
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• v.8 no.1
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• pp.49-56
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• 1988

Thermally treated Korean ilmenite was characterized and used for water splitting to obtain hydrogen by photo-catalytic reaction. Experiments on specific surface area, X-ray diffraction and EDS showed that the formation of FeO, $Fe_2O_3$ and $TiO_2$ ilmenite crystal surface increased the specific surface area with maximum value, phase change of $TiO_2$ at $600^{\circ}C$ and hetrogeneity. The hydrogen evolved in caustic soda solution on these ilmenites indicated that there was a maximum yield point at about $600^{\circ}C$. This point was explained with the change of the surface area due to sintering of newly formed FeO, $Fe_2O_3$ and $TiO_2$, as well as crystal phase change of anatase to rutile at $600^{\circ}C$. Produced hydrogen increased also as the concentration of caustic soda, but become constant at the near 1N solution.

• Journal of the Korean Ceramic Society
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• v.40 no.11
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• pp.1138-1140
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• 2003

To investigate the relation between the sintering degree and the elastic modulus of sintered glass, ball-milled commercial soda-lime-silica glass were used. It was heat-treated at various temperatures and for various times, and then the density and elastic modulus of sintered glass frit were measured. The experimental results showed a strong correlation between them.

• Journal of the Korean Ceramic Society
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• v.52 no.2
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• pp.137-139
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• 2015

In this study, we examined the influence of molten $KNO_3$ flow on mechanical properties and their deviation when a chemical toughening process was applied to soda lime silicate glass ($Na_2O-CaO-SiO_2$). $KNO_3$ melt flow was controlled using three methods: (1) glass tray rotation, (2) impeller stirring, and (3) natural convection. DOL and hardness were found to be enhanced by tray rotation because this rotation was able to maintain the concentration around the glass surface, in contrast to other methods. However, there did not appear to be a statistically significant difference in the 3-point bending strength for the three flow conditions due to the ground edge condition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11a
• /
• pp.390-393
• /
• 2001

This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from 100 $\mu\textrm{m}$ to 150 $\mu\textrm{m}$ thick. The adhesion of the glass coatings was found to be excellent such that it was able to withstand moderate impact tests and temperature cycling to over 300$^{\circ}C$ without cracking and delamination. The electrostatic clamping pressure generally followed the theoretical voltage-squared curve except at elevated temperatures and higher applied voltages when deviations were observed to occur. The deviation is due to increased leakage current at higher temperature and applied voltage as the electrical resistivity drops.

• Proceedings of the Membrane Society of Korea Conference
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• 2003.05a
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• pp.101-105
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• 2003

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.791-794
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• 1997

Based on a systematic ide developed for experience-based expertise acquisition systems, a human-oriented methodology for plant operation is described.

• Proceedings of the Korean Fiber Society Conference
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• 1999.10a
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• pp.291-294
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• 1999

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.11a
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• pp.141-141
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• 2001