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Electrical Properties of DC Sputtered Titanium Nitride Films with Different Processing Conditions and Substrates

  • Jin, Yen;Kim, Young-Gu;Kim, Jong-Ho;Kim, Do-Kyung
    • Journal of the Korean Ceramic Society
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    • v.42 no.7 s.278
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    • pp.455-460
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    • 2005
  • Deposition of TiN$_{x}$ film was conducted with a DC sputtering technique. The effect of the processing parameters such as substrate temperature, deposition time, working pressure, bias power, and volumetric flowing rate ratio of Ar to N$_{2}$ gas on the resistivity of TiN$_{x}$ film was systematically investigated. Three kinds of substrates, soda-lime glass, (100) Si wafer, and 111m thermally grown (111) SiO$_{2}$ wafer were used to explore the effect of substrate. The phase of TiN$_{x}$ film was analyzed by XRD peak pattern and deposition rate was determined by measuring the thickness of TiNx film through SEM cross-sectional view. Resistance was obtained by 4 point probe method as a function of processing parameters and types of substrates. Finally, optimum condition for synthesizing TiN$_{x}$ film having lowest resistivity was discussed.

Structural and Electrical Properties of Gallium Doped Zinc Oxide Films

  • Song, Pung-Keun;Yuzo Shigesato;Mika Oguchi;Masayuki Kamei;Itaru Yasui
    • The Korean Journal of Ceramics
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    • v.5 no.4
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    • pp.404-408
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    • 1999
  • Gallium doped zinc oxide(GZO) films were deposited on soda-lime glass substrates without substrate heating $(T_s<50^{\circ}C$) by dc planar magnetron sputtering using GZO ceramic oxide targe with different inert gas (Ar, or Ne). For the GZO films deposited under different total gas pressure $(P_{tot})$, structural and electrical properties were investigated by XRD and Hall effect measurements. Crystallinity of GZO films deposited using Ar was degraded with increase in $(P_{tot})$, suggesting that it was heavily affected by kinetic energy of sputtered Zn particles$(PA_{zn})$ arriving at substrate surface. Whereas, crystallinity of GZO films deposited at lower Ptot than 3.0 Pa using Ne gas was degraded with decrease in $(P_{tot})$. This degradation was considered to be result of film damage caused by the bombardment of high-energy neutrals ($Ne^{\circ}$). On the basis of a hard sphere collision processes, the average final energy of particles (sputtered Zn, $Ar^{\circ}$and $Ne^{\circ}$)arriving at substrate surface were estimated.

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Evaluation of Residual Strength in Damaged Brittle Materials (취성재의 손상후 잔류강도 평가)

  • Oh, Sang-Yeob;Shin, Hyung-Seop;Suh, Chang-Min
    • Proceedings of the KSME Conference
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    • 2001.11a
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    • pp.137-142
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    • 2001
  • In structural applications, brittle materials such as soda-lime glasses and ceramics are often subjected to multiaxial stress. Brittle materials with crack or damaged by foreign object impacts are abruptly fractured from cracks, because of their properities of very high strength and low fracture toughness. But in most cases, the residual strength has been derived from tests under uniaxial stress such as a 4-point bend test. The strengths under multiaxial stresses might be different from the strength. In comparable tests, the residual strength under biaxial stress state by the ball-on-ring test was greater than that under the uniaxial one by the 4-point bend test. In the case that crack having 90deg. to loading direction, the ratio of biaxial to uniaxial flexure strength was 1.12. At a different crack angle to loading direction when it was evaluated by the 4-point bend test, the residual strength was different and the ratio of 45deg. to 90deg. was 1.16.

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Development of Experimental Setup for Impact Punching in Brittle Materials and Analysis of Punching Mechanism (취성재료의 펀칭가공을 위한 충격 장치 개발 및 펀칭기구 해석)

  • Sin, Hyeong-Seop;Kim, Jin-Han;O, Sang-Yeop
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.4
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    • pp.629-636
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    • 2001
  • In order to investigate the possibility of impact punching in brittle materials, an experimental setup was developed. In the setup, a long bar as a punch was used to apply the impact load to the specimen plate and measure the applied impact force during the impact punching process. Impact punching tests with various shape of punches were performed in soda-lime glass and silicon wafer under a different level of contact pressure. The damage appearance after the impact punching was examined according to the applied contact pressure. The minimum contact pressure required for a complete punching in glass specimens without development of radial cracks around the punched hole was sought at each condition. The minimum contact pressure increased with increasing the thickness of specimens and decreasing the end radius of punches. The profile of impact forces was measured during the impact punching experiment, and it could explain well the behavior of the punching process in brittle material plates. The measured impact force increased with increasing the contact pressure applied to the plates.

Correlation between health behaviors and experiences of oral diseases in adolescents (청소년의 건강행태와 구강질환 경험의 관련성)

  • Kim, Mi-So;Park, Hyang-Suk;Kim, Yoon-Sin
    • Journal of Korean society of Dental Hygiene
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    • v.15 no.3
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    • pp.513-521
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    • 2015
  • Objectives: The purpose of the study was to investigate the correlation between health behaviors and experiences of oral diseases in Korean adolescents. Methods: This study used the results of the seventh, eighth, and ninth adolescent health behavior online survey which was completed by a self-administered questionnaire targeting 222,264 middle school and high school students in September, 2011, June, 2012, and from June to July, 2013. The questionnaire consisted of four questions of socio-economic characteristics of the subjects, three questions of health behaviors, and four questions of eating habits. Data were analyzed by SPSS 18.0 program. Results: Oral health knowledge and behaviors were closely correlated to smoking, alcohol drinking, and toothbrushing after meal. Liking for fruit, soda, snack, and vegetable had a significant influence on oral diseases. Smoking and alcohol drinking had a significant relation to oral disease prevalence rate. Conclusions: In Korea, the prevalence rate of oral diseases is still high in the adolescents. Therefore, continuous dental health education program is very important to decrease the oral disease morbidity. The incentive program for the adolescents will improve the concern for the oral health.

Production Process of Foamed Glass by Compressive Shaping (가압성형 방법에 의한 발포유리의 제조공정)

  • Lee, Chul-Tae
    • Applied Chemistry for Engineering
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    • v.24 no.3
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    • pp.239-246
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    • 2013
  • Principle of foamed glass manufacturing process first starts with putting vitreous material powder into a mold. After the foaming calcination, foamed body should be annealed after separation from the mold. For this reason, existing manufacturing process could not be a continuous type process. In this study, in order to develop a continuous production process of foamed glass, the possibility of new foam glass manufacturing process was investigated by foaming calcination of the compact body obtained from compression-molding of vitreous raw materials in stead of using a mold. Through the experimental results of the foaming calcination of the compact body with adding various foaming agents such as $Na_2CO_3$, $CaCO_3$ and petroleum coke, into hydrated soda-lime vitreous raw materials, it was shown that developing a continuous process without using any molds for manufacturing foamed glass would be possible.

Application of Enzymatic Hydrolysis for the Yield Optimization in Froth-Flotation of ONP

  • Ryu, Jeong-Yong;Song, Bong-Keun;Song, Jae-Kwang
    • Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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    • 2006.06a
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    • pp.129-136
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    • 2006
  • Although cleaner and cheaper deinking of ONP could be performed at the neutral or low alkaline condition excessive loss from froth-flotation is unavoidable and so reduction of alkali or caustic soda dosage sacrifices recycling yield. Now the new trade-off regarding alkali dosage versus flotation yield is urgently required in order to set the optimized neutral or low alkaline deinking process of ONP. Lipase from Thermomyces Lanuginosus has an effect on desizing and deacetylation reaction and it could be applied to the stock of pre flotation secondary stage in order to reduce the flotation reject without the sacrifice of optical properties of flotation accepts. Instead of inorganic base, lipase could be applied as a biochemical catalyst for the selective modification of valuable hydrophobic particles in deinking stock, for example cellulose fines and inorganic fillers covered by hydrophobic additives or contaminants. When the enzymatic hydrolysis of ester bond could be made on the surface of hydrophobic particulates, unwanted float of fine particles could be prevented. Now the enhancement of flotation selectivity or the modification of the hydrophobicity of deinking stock is expected to be promoted by the enzymatic pre treatment. And the reduction of recycling cost with the saves of raw material, recovered paper would be possible as a result.

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Photoelectric Conversion Properties of Dye-sensitized Solar Cell in the Transparent Electrode of Textured-AZO/AZO/Glass (Textured-AZO/AZO/Glass 투명전극을 갖는 염료감응 태양전지의 광전변환 특성)

  • Xu, Bing;Park, Choon-Bae;Hoang, Geun-C.
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.1
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    • pp.37-43
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    • 2012
  • We were studied that AZO conductive thin film can substitute for FTO electrode in dye sensitized solar cell. Three types of AZO films were deposited on soda-lime glass(AZO/glass, AZO/AZO/glass, textured AZO/AZO/glass) using RF magnetron sputtering process and investigated their properties of electrical, optical, and photoelectric conversion rate. The textured AZO/AZO/glass has the lowest resistivity of $3.079{\times}10^{-4}\;{\Omega}cm$ among other films. And the optical transmittance rate was better than both non textured AZO/AZO/glass and FTO/glass in the visible region. After manufacturing dye solar cells using the three types of AZO films, the textured AZO/AZO/glass showed the highest photoelectric conversion rate of 3.68% among AZO samples. But the transformation rate was slightly lower than FTO cells (4.52%). However, the conductive film of textured AZO/AZO/glass can be applicable to use an electrode in solar cells as cost-effective products.

Finite Element Analysis and Experimental Study About Damage Behavior of Glass by Oblique Impact of Steel Ball (강구 경사충돌에 의한 유리의 손상 거동에 대한 실험적 연구 및 유한요소 해석)

  • Seo, Chang-Min;Kim, Seong-Ho;Kim, Dong-Gyun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.5
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    • pp.899-905
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    • 2001
  • The damage behavior of soda-lime glass was studied due to a steel ball of 1mm and 2mm at oblique impact test. The thickness of glass specimen were 3mm and 5mm and oblique degrees of impact were 90$^{\circ}$,70$^{\circ}$ and 50$^{\circ}$. After the steel ball impact test, the crack patterns were investigated using a stereo-microscope. In addition, the finite element method was performed to analyze the stresses distribution and variation in the oblique impacted glass by steel ball. As a result of the impact test, the crack length of 90$^{\circ}$impacted glass was the largest and that of 50$^{\circ}$impacted glass was the smallest. In particular, as the impact velocity and diameter of the steel ball increased, the difference of crack length was prominent. The finite element analysis showed the maximum principle stresses distribution in contact area of glass specimen. The result of analysis was accorded with the crack growth behavior by the oblique impact test.

Crystal structure analysis of CIGS solar cell absorber by using in-situ XRD

  • Kim, Hye-Ran;Kim, Yong-Bae;Park, Seung-Il
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.319-319
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    • 2010
  • 칼코젠계 태양전지의 광흡수층으로 사용되는 CuInSe2은 직접천이형 반도체로 광흡수계수가 $1{\times}105cm-1$로 매우 높고, 전기광학적 안정성이 우수하여 실리콘 결정질 태양전지를 대체할 고효율 태양전지로 각광받고 있다. 광흡수층의 밴드갭 에너지가 증가하면 태양전지의 개방전압(Voc)이 증가하여 광변환 효율을 향상시킬 수 있으므로, CuInSe2에서 In의 일부를 Ga으로 치환하여 에너지 밴드갭의 변화를 주는 연구가 많이 진행되고 있다. 그러나 화합물내의 Ga 조성비가 증가하면 단락전류(Jsc), 충진률(fill factor)이 낮아져 태양전지 효율을 저하시키게 되므로 CIGS 박막의 적절한 화합물 조성비를 갖도록 최적조건을 확립하는 것이 매우 중요하다. 본 실험에서는 광흡수층 형성을 위해 Sputtering법으로 금속 전구체를 증착하고, 고온에서 셀렌화 열처리를 수행하는 Sequential process(2단계 증착법)를 이용하였다. soda-lime glass 기판에 Back contact으로 Mo를 증착하고, 1단계로 CuIn0.7Ga0.3 조성비의 타겟을 이용하여 Sputtering법으로 $0.5{\sim}2{\mu}m$ 두께의 CIG 전구체를 증착하였다. 2단계로 CIG 전구체의 셀렌화열처리를 통하여 CIGS 화합물 구조의 박막을 형성시켰다. 이때 형성된 CIGS 화합물 박막의 두께는 동일하게 함으로써, 열처리온도에 의한 박막의 구조변화를 비교하였다. 증착된 CIGS 박막은 고온 엑스선회절분석을 통해 증착 두께와 온도 변화에 따른 CIGS 층의 구조 변화를 확인하고, 동일한 증착조건으로 Buffer layer, Window layer, Grid 전극을 형성하여 태양전지셀 특성을 평가함으로써 CIGS 태양전지 광흡수층의 결정구조에 따른 광변환 효율을 비교하였다.

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