• Title/Summary/Keyword: sliding system

Search Result 1,761, Processing Time 0.032 seconds

Thermal, Tribological, and Removal Rate Characteristics of Pad Conditioning in Copper CMP

  • Lee, Hyo-Sang;DeNardis, Darren;Philipossian, Ara;Seike, Yoshiyuki;Takaoka, Mineo;Miyachi, Keiji;Furukawa, Shoichi;Terada, Akio;Zhuang, Yun;Borucki, Len
    • Transactions on Electrical and Electronic Materials
    • /
    • v.8 no.2
    • /
    • pp.67-72
    • /
    • 2007
  • High Pressure Micro Jet (HPMJ) pad conditioning system was investigated as an alternative to diamond disc conditioning in copper CMP. A series of comparative 50-wafer marathon runs were conducted at constant wafer pressure and sliding velocity using Rohm & Haas IC1000 and Asahi-Kasei EMD Corporation (UNIPAD) concentrically grooved pads under ex-situ diamond conditioning or HPMJ conditioning. SEM images indicated that fibrous surface was restored using UNIPAD pads under both diamond and HPMJ conditioning. With IC1000 pads, asperities on the surface were significantly collapsed. This was believed to be due to differences in pad wear rates for the two conditioning methods. COF and removal rate were stable from wafer to wafer using both diamond and HPMJ conditioning when UNIPAD pads were used. Also, HPMJ conditioning showed higher COF and removal rate when compared to diamond conditioning for UNIPAD. On the other hand, COF and removal rates for IC1000 pads decreased significantly under HPMJ conditioning. Regardless of pad conditioning method adopted and the type of pad used, linear correlation was observed between temperature and COF, and removal rate and COF.

A Nonlinear Speed Control of a Permanent Magnet Synchronous Motor Using a Sequential Parameter Auto-Tuning Algorithm for Servo Equipments (서보 설비를 위한 순차적 파라미터 자동 튜닝 알고리즘을 사용한 영구자석 동기전동기의 비선형 속도 제어)

  • Kim, Kyeong-Hwa
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.19 no.2
    • /
    • pp.114-123
    • /
    • 2005
  • A nonlinear speed control of a PMSM using a sequential parameter auto-tuning algorithm for servo equipments is presented. The nonlinear control scheme gives an undesirable output performance under the mismatch of the system parameters and load conditions. Recently, to improve the performance, an adaptive linearization scheme, a sliding mode control and an observer-based technique have been reported. Although a good performance can be obtained, the performance is not satisfactory any more under specific conditions such as a large inertia variation, a fast speed transient or an increased sampling time. The simultaneous estimation of principal parameters giving a direct influence on speed dynamics is generally not simple. To overcome this problem, a a sequential parameter auto-tuning algorithm at start-up is proposed, where dominant parameters are estimated in a prescribed regular sequence based on the method that one parameter is estimated during each interval. The proposed scheme is implemented on a PMSM using DSP TMS320C31 and the effectiveness is verified through simulations and experiments.

Effects of nitrogen doping on mechanical and tribological properties of thick tetrahedral amorphous carbon (ta-C) coatings (질소 첨가된 ta-C 후막코팅의 기계 및 트라이볼로지적 특성연구)

  • Gang, Yong-Jin;Jang, Yeong-Jun;Kim, Jong-Guk
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2016.11a
    • /
    • pp.156-156
    • /
    • 2016
  • The effect of nitrogen doping on the mechanical and tribological performance of single-layer tetrahedral amorphous carbon (ta-C:N) coatings of up to $1{\mu}m$ in thickness was investigated using a custom-made filtered cathode vacuum arc (FCVA). The results obtained revealed that the hardness of the coatings decreased from $65{\pm}4.8GPa$ to $25{\pm}2.4GPa$ with increasing nitrogen gas ratio, which indicates that nitrogen doping occurs through substitution in the $sp^2$ phase. Subsequent AES analysis showed that the N/C ratio in the ta-C:N thick-film coatings ranged from 0.03 to 0.29 and increased with the nitrogen flow rate. Variation in the G-peak positions and I(D)/I(G) ratio exhibit a similar trend. It is concluded from these results that micron-thick ta-C:N films have the potential to be used in a wide range of functional coating applications in electronics. To achieve highly conductive and wear-resistant coatings in system components, the friction and wear performances of the coating were investigated. The tribological behavior of the coating was investigated by sliding an SUJ2 ball over the coating in a ball-on-disk tribo-meter. The experimental results revealed that doping using a high nitrogen gas flow rate improved the wear resistance of the coating, while a low flow rate of 0-10 sccm increased the coefficient of friction (CoF) and wear rate through the generation of hematite (${\alpha}-Fe_2O_3$) phases by tribo-chemical reaction. However, the CoF and wear rate dramatically decreased when the nitrogen flow rate was increased to 30-40 sccm, due to the nitrogen inducing phase transformation that produced a graphite-like structure in the coating. The widths of the wear track and wear scar were also observed to decrease with increasing nitrogen flow rate. Moreover, the G-peaks of the wear scar around the SUJ2 ball on the worn surface increased with increasing nitrogen doping.

  • PDF

Characteristics of Multipath Delay Spread in Domestic Cellular Environment (국내 이동전파환경에서의다중경로에 의한 지연확산특성)

  • Dong-Doo Lee
    • The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.5 no.4
    • /
    • pp.47-63
    • /
    • 1994
  • An important parameter in characterizing mobile communication channel is delay spread. This paper presents the results of measured delay profiles and calculated distribution funcations of delay spread for typical cellular service environments at Taejon and vicinities. The measurement system uses 1023 chip length, 5 Mbps PN code and sliding correlation method. It has been evaluated by using commercial hardware channel simulator for reliability of out data. As results the value of mean delay spread is 2.08 $\mu\textrm{s}$for suburban area. 2.12 $\mu\textrm{s}$ for urban area and 1.3 $\mu\textrm{s}$ for national/local road. Delay spread is less then 3.4$\mu\textrm{s}$, 2.8$\mu\textrm{s}$ and 1.5 $\mu\textrm{s}$ for probability of 50% and 4.5$\mu\textrm{s}$, 4.2$\mu\textrm{s}$ and 2.9$\mu\textrm{s}$ for probability of 90% at each tested site. The difference of delay spread is within 7% between going and returning status along same street. In this experiment, we found delay spread for suburban area is larger than reported foreign test results.

  • PDF

CFD Analysis of Trap Effect of Groove in Lubricating Systems: Part I - Variation in Cross-Sectional Shape of Groove (그루브의 Trap 효과에 대한 CFD 해석: 제 1부 − 그루브 단면 형상의 변화)

  • Hong, Sung-Ho
    • Tribology and Lubricants
    • /
    • v.32 no.3
    • /
    • pp.101-105
    • /
    • 2016
  • Trap effect of groove is evaluated in a lubricating system using computational fluid dynamics (CFD) analysis. The simulation is based on the standard k-ε turbulence model and the discrete phase model (DPM) using a commercial CFD code FLUENT. The simulation results are also capable of showing the particle trajectories in flow field. Computational domain is meshed using the GAMBIT pre-processor. The various grooves are applied in order to improve lubrication characteristics such as reduction of friction loss, increase in load carrying capacity, and trapping of the wear particles. Trap effect of groove is investigated with variations in cross-sectional shape and Reynolds number in this research. Various cross-sectional shapes of groove (rectangular, triangle, U shaped, trapezoid, elliptical shapes) are considered to evaluate the trap effect in simplified two-dimensional sliding bearing. The particles are assumed to steel, and defined a single particle injection condition in various positions. The “reflect” boundary condition for discrete phase is applied to the wall boundary, and the “escape” boundary condition to “pressure inlet” and “pressure outlet” conditions. The streamlines are compared with particles trajectories in the groove. From the results of numerical analysis in the study, it is found that the cross-sectional shapes favorable to the creation of vortex and small eddy current are effective in terms of particle trapping effect. Moreover, it is found that the Reynolds number has a strong influence on the pattern of vortex or small eddy current in the groove, and that the pattern of the vortex or small eddy current affects the trap effect of the groove.

Tribological Behaviors on nano-structured surface of the diamond-like carbon (DLC) coated soft polymer

  • No, Geon-Ho;Mun, Myeong-Un;Ahmed, Sk.Faruque;Cha, Tae-Gon;Kim, Ho-Yeong;Lee, Gwang-Ryeol
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.02a
    • /
    • pp.356-356
    • /
    • 2010
  • Tribological behaviors of the hard film on soft substrate system were explored using the hard thin film of diamond-like carbon (DLC) coated the soft polymer of polydimethysiloxane (PDMS). A DLC film with the Young's modulus of 100 GPa was coated on PDMS substrate with Young's modulus of 10 MPa using plasma enhanced chemical vapor deposition (PECVD) technique. The deposition time was varied from 10 sec to 10 min, resulting in nanoscale roughness of wrinkle patterns with the thickness of 20 nm to 510 nm, respectively, at a bias voltage of $400\;V_b$, working pressure 10 mTorr. Nanoscale wrinkle patterns with 20-100 nm in width and 10-30 nm height were formed on DLC coating due to the residual stress in compression and difference in Young's modulus. Nanoscale roughness effect on tribological behaviors was observed by performing a tribo-experiment using the ball-on-disk type tribometer with a steel ball of 6 mm in diameter at the sliding speed of 220 rpm, normal load of 1N and 25% humidity at ambient temperature of $25^{\circ}C$. Friction force were measured with respect to thickness change of coated DLC thin film on PDMS. It was found that with increases the thickness of DLC coating on PDMS, the coefficient of friction decreased by comparison to that of the uncoated PDMS. The wear tracks before and after tribo-test were analyzed using SEM and AFM.

  • PDF

A Study on the Joint Controller for a Humanoid Robot based on Genetic Algorithm (유전 알고리즘을 이용한 휴머노이드 로봇의 관절 제어기에 관한 연구)

  • Kong, Jung-Shik;Kim, Jin-Geol
    • Journal of the Korean Institute of Intelligent Systems
    • /
    • v.17 no.5
    • /
    • pp.640-647
    • /
    • 2007
  • This paper presents a joint controller for a humanoid robot based on genetic algorithm. h humanoid robot has basically instability during walking because it isn't fixed on the ground. Moreover nonlinearities of the joints increase its instability. If one of them isn't satisfied, the robot may fall down at the ground during walking. To attack one of those problems, joint controller is proposed. It can perform tracking control preciously and reduce the effect of nonlinearities by gear, limitation of the input voltage, coulomb friction and so on. This controller is based on fuzzy-sliding mode controller (FSMC) and compensator and control gains are searched by a proposed genetic algorithm. It can reduce the effect by nonlinearities. Also, to improve the tracking performance, the proposed controller has motion controller. From the given controller, a humanoid robot can moved more preciously. Here, all the processes are investigated through simulations and it is verified experimentally in a real joint system for a humanoid robot.

Incipient motion criteria of uniform gravel bed under falling spheres in open channel flow

  • Khe, Sok An;Park, Sang Deog;Jeon, Woo Sung
    • Proceedings of the Korea Water Resources Association Conference
    • /
    • 2018.05a
    • /
    • pp.149-149
    • /
    • 2018
  • Prediction on initial motion of sediment is crucial to evaluate sediment transport and channel stability. The condition of incipient movement of sediment is characterized by bed shear stress, which is generated from force of moving water against the bed of the channel, and by critical shear stress, which depends on force resisting motion of sediment due to the submerged weight of the grains. When the bed shear stress exceeds the critical shear stress, sediment particles begin rolling and sliding at isolated and random locations. In Mountain River, debris flow frequently occurs due to heavy rainfall and can lead some natural stones from mountain slope into the bed river. This phenomenon could add additional forces to sediment transport system in the bed of river and also affect or change direction and magnitude of sediment movement. In this paper, evaluations on incipient motion of uniform coarse gravel under falling spheres impacts using small scale flume channel were conducted. The drag force of falling spheres due to water flow and length movement of falling spheres were investigated. The experiments were carried out in flume channel made by glass wall and steel floor with 12 m long, 0.6 m wide, and 0.6 m deep. The bed slopes were selected with the range from 0.7% to 1.5%. The thickness of granular layer was at least 3 times of diameter of granular particle to meet grain placement condition. The sphere diameters were chosen to be 4cm, 6 cm, 8 cm, 10 cm. The spheres were fallen in to the bed channel for critical condition and under critical condition of motion particle. Based on the experimental results, the Shields curve of particles Reynold number and dimensionless critical shear stress were plotted. The relationship between with drag force and the length movement of spheres were plotted. The pathways of the bed material Under the impact of spheres falling were analyzed.

  • PDF

Deep Learning-based Approach for Classification of Tribological Time Series Data for Hand Creams (딥러닝을 이용한 핸드크림의 마찰 시계열 데이터 분류)

  • Kim, Ji Won;Lee, You Min;Han, Shawn;Kim, Kyeongtaek
    • Journal of Korean Society of Industrial and Systems Engineering
    • /
    • v.44 no.3
    • /
    • pp.98-105
    • /
    • 2021
  • The sensory stimulation of a cosmetic product has been deemed to be an ancillary aspect until a decade ago. That point of view has drastically changed on different levels in just a decade. Nowadays cosmetic formulators should unavoidably meet the needs of consumers who want sensory satisfaction, although they do not have much time for new product development. The selection of new products from candidate products largely depend on the panel of human sensory experts. As new product development cycle time decreases, the formulators wanted to find systematic tools that are required to filter candidate products into a short list. Traditional statistical analysis on most physical property tests for the products including tribology tests and rheology tests, do not give any sound foundation for filtering candidate products. In this paper, we suggest a deep learning-based analysis method to identify hand cream products by raw electric signals from tribological sliding test. We compare the result of the deep learning-based method using raw data as input with the results of several machine learning-based analysis methods using manually extracted features as input. Among them, ResNet that is a deep learning model proved to be the best method to identify hand cream used in the test. According to our search in the scientific reported papers, this is the first attempt for predicting test cosmetic product with only raw time-series friction data without any manual feature extraction. Automatic product identification capability without manually extracted features can be used to narrow down the list of the newly developed candidate products.

Seismic damage mitigation of bridges with self-adaptive SMA-cable-based bearings

  • Zheng, Yue;Dong, You;Chen, Bo;Anwar, Ghazanfar Ali
    • Smart Structures and Systems
    • /
    • v.24 no.1
    • /
    • pp.127-139
    • /
    • 2019
  • Residual drifts after an earthquake can incur huge repair costs and might need to replace the infrastructure because of its non-reparability. Proper functioning of bridges is also essential in the aftermath of an earthquake. In order to mitigate pounding and unseating damage of bridges subjected to earthquakes, a self-adaptive Ni-Ti shape memory alloy (SMA)-cable-based frictional sliding bearing (SMAFSB) is proposed considering self-adaptive centering, high energy dissipation, better fatigue, and corrosion resistance from SMA-cable component. The developed novel bearing is associated with the properties of modularity, replaceability, and earthquake isolation capacity, which could reduce the repair time and increase the resilience of highway bridges. To evaluate the super-elasticity of the SMA-cable, pseudo-static tests and numerical simulation on the SMA-cable specimens with a diameter of 7 mm are conducted and one dimensional (1D) constitutive hysteretic model of the SMAFSB is developed considering the effects of gap, self-centering, and high energy dissipation. Two types of the SMAFSB (i.e., movable and fixed SMAFSBs) are applied to a two-span continuous reinforced concrete (RC) bridge. The seismic vulnerabilities of the RC bridge, utilizing movable SMAFSB with the constant gap size of 60 mm and the fixed SMAFSBs with different gap sizes (e.g., 0, 30, and 60 mm), are assessed at component and system levels, respectively. It can be observed that the fixed SMAFSB with a gap of 30 mm gained the most retrofitting effect among the three cases.