• 제목/요약/키워드: sintering process

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새로운 BEOL 공정을 이용한 NBTI 수명시간 개선 (Improvement of NBTI Lifetime Utilizing Optimized BEOL Process Flow)

  • 호원준;한인식;이희덕
    • 대한전자공학회논문지SD
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    • 제43권3호
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    • pp.9-14
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    • 2006
  • 본 논문에서는 NBTI 특성 개선을 위한 새로운 BEOL 공정을 제안하였다. 우선 BEOL의 마지막 공정인 수소 금속소결 열처리 공정, 보호막 공정 등이 NBTI에 많은 영향을 끼침을 분석하였다 이를 바탕으로 수소 금속소결 대신 질소 금속소결 공정을 적용하고 보호막 층, 특히 PE-SiN 증착 전에 질소 금속소결공정을 실시하여 NBTI 수명시간을 개선하였다. 제안한 방법을 적용하여도 소자 특성이나 NMOS의 HC 특성이 열화 되지 않음을 분석하여 실제 소자에 적용될 수 있음을 증명하였다.

3D porous ceramic scaffolds prepared by the combination of bone cement reaction and rapid prototyping system

  • 윤희숙;박의균;임지원
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.56.2-56.2
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    • 2012
  • Clinically-favored materials for bone regeneration are mainly based on bioceramics due to their chemical similarity to the mineral phase of bone. A successful scaffold in bone regeneration should have a 3D interconnected pore structure with the proper biodegradability, biocompatibility, bioactivity, and mechanical property. The pore architecture and mechanical properties mainly dependent on the fabrication process. Bioceramics scaffolds are fabricated by polymer sponge method, freeze drying, and melt molding process in general. However, these typical processes have some shortcomings in both the structure and interconnectivity of pores and in controlling the mechanical stability. To overcome this limitation, the rapid prototyping (RP) technique have newly proposed. Researchers have suggested RP system in fabricating bioceramics scaffolds for bone tissue regeneration using selective laser sintering, powder printing with an organic binder to form green bodies prior to sintering. Meanwhile, sintering process in high temperature leads to bad cost performance, unexpected crystallization, unstable mechanical property, and low bio-functional performance. The development of RP process without high thermal treatment is especially important to enhance biofunctional performance of scaffold. The purpose of this study is development of new process to fabricate ceramic scaffold at room temperature. The structural properties of the scaffolds were analyzed by XRD, FE-SEM and TEM studies. The biological performance of the scaffolds was also evaluated by monitoring the cellular activity.

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마이크로파 소결법을 이용한 LTCC 기판 Post 전극 형성에 관한 연구 (A Study of Post Electrode Formation by Microwave Sintering in LTCC Substrate)

  • 김용석;이택정;유원희;장병규;박성열;오용수
    • 마이크로전자및패키징학회지
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    • 제14권4호
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    • pp.43-48
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    • 2007
  • LTCC 기판제작에 있어서 Post 전극형성은 실제 IC 및 수동부품을 탑재하는 Pad 형성 부분으로 전극 표면의 특성에 큰 영향을 미치게 된다. 본 연구에서는 일반적인 전기로를 이용한 post 전극 소성시 발생되는 문제점들 개선하여 마이크로파 소결을 통한 전극 미세 구조의 치밀화 및 이에 따른 신뢰성 기초 평가를 진행하였다. 일반적인 전기로와 마이크로파 소결 조건에 따른 전극과 LTCC 세라믹 상태를 평가하였다. 또한 과소성 및 탈바인더 공정시 Out gas 불충분에 의한 전극 부풀림 현상을 개선할 수 있는 효과를 얻을 수 있었으며 실제 solder ball 형성후 실장형 전극의 고착강도를 측정한 결과 기존 전기로에 비해서 30% 고착강도가 증가 하였다. 또한 소결시간을 기존 전기로 10시간에 비해 30분 정도에서 소결 공정이 이루어지므로 95%정도 시간을 단축시킬 수 있음을 확인하였다. 이는 소성로 설계를 통한 양산성, 효율성에 크게 증대되리라 예상된다.

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Sintering Mixtures in the Stage of Establishing Chemical Equilibrium

  • Savitskii, A.P.
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 1999년도 춘계학술대회 및 발표대회 강연 및 발표논문 초록집
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    • pp.5-5
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    • 1999
  • The Principal deficiency of the existing notion about the sintering-mixtures consists in the fact that almost no attention is focused on the Phenomenon of alloy formation during sintering, its connection with dimensional changes of powder bodies, and no correct ideas on the driving force for the sintering process in the stage of establishing chemical equilibrium in a system are available as well. Another disadvantage of the classical sintering theory is an erroneous conception on the dissolution mechanism of solid in liquid. The two-particle model widely used in the literature to describe the sintering phenomenon in solid state disregards the nature of the neighbouring surrounding particles, the presence of pores between them, and the rise of so called arch effect. In this presentation, new basic scientific principles of the driving forces for the sintering process of a two-component powder body, of a diffusion mechanism of the interaction between solid and liquid phases, of stresses and deformation arising in the diffusion zone have been developed. The major driving force for sintering the mixture from components capable of forming solid solutions and intermetallic compounds is attributed to the alloy formation rather than the reduction of the free surface area until the chemical equilibrium is achieved in a system. The lecture considers a multiparticle model of the mixed powder-body and the nature of its volume changes during solid-state and liquid-phase sintering. It explains the discovered S-and V-type concentration dependencies of the change in the compact volume during solid-state sintering. It is supposed in the literature that the dissolution of solid in liquid is realised due to the removal of atoms from the surface of the solid phase into the melt and then their diffusicn transfer from the solid-liquid interface into the bulk of liquid. It has been shown in our experimental studies that the mechanism of the interaction between two components, one of them being liquid, consist in diffusion of the solvent atoms from the liquid into the solid phase until the concentration of solid solutions or an intermetallic compound in the surface layer enables them to pass into the liquid by means of melting. The lecture discusses peculimities of liquid phase formation in systems with intermediate compounds and the role of the liquid phase in bringing about the exothermic effect. At the frist stage of liquid phase sintering the diffusion of atoms from the melt into the solid causes the powder body to grow. At the second stage the diminution of particles in size as a result of their dissolution in the liquid draws their centres closer to each other and makes the compact to shrink Analytical equations were derived to describe quantitatively the porosity and volume changes of compacts as a result of alloy formation during liquid phase sinteIing. Selection criteria for an additive, its concentration and the temperature regime of sintering to control the density the structure of sintered alloys are given.

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소결층 내 코크스/무연탄 연소 특성의 정량적 평가 (A Quantitative Evaluation of Combustion Characteristics of Coke/Anthracite in an Iron Ore Sintering Bed)

  • 양원;양광혁;최상민;최응수;이덕원;김성만
    • 한국연소학회:학술대회논문집
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    • 한국연소학회 2004년도 제29회 KOSCI SYMPOSIUM 논문집
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    • pp.33-40
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    • 2004
  • Combustion of coke/anthracite in an iron ore sintering bed is characterized quantitatively by introducing newly defined parameters related to propagation and thickness of combustion zone and maximum temperature. The parameters are obtained by sintering pot experiment and I-D, unsteady numerical model which treats solid material as multiple solid phases. Experiments and calculations are performed for various major operating parameters: air inlet velocity, different type of fuels which have different reactivity and diameter of the solid fuel. Effects of the operating parameters on the productivity and quality of the sintering process are investigated and evaluated quantitatively and the results show that optimized air supply rate and diameter of anthracite for replacement of coke can be obtained. This approach can be applied to other kinds of combustors for characterization of the combustion in the solid fuel beds.

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정전류 전기 소결법을 이용한 Ag 전극 배선의 전도성 향상 (Enhancement of Electrical Conductivity for Ag Grid using Electrical Sintering Method)

  • 황준영;문윤재;이상호;강경태;강희석;조영준;문승재
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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    • pp.114.1-114.1
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    • 2011
  • Electrical sintering of the front electrode for crystalline silicon solar cells was performed applying a constant DC current to the printed lines. Conducting lines were printed on glass substrate by a drop-on-demand (DOD) inkjet printer and silver nanoparticle ink. Specific resistance and microstructure of sintered silver lines and were measured with varying DC current. To find the relation between temperature increase with changing applied current and specific resistance, temperature elevation was also calculated. Sintering process finished within a few milliseconds. Increasing applied DC current, specific resistance decreased and grain size increased after sintering. Achieved minimum specific resistance is approximately 1.7 times higher than specific resistance of the bulk silver.

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비가압 성형한 Fe 나노분말응집체의 소결거동 (Sintering Behavior of Fe Nanopowder Agglomerates Prepared by Pressureless Compaction)

  • 유우경;정성수;이재성
    • 한국분말재료학회지
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    • 제15권4호
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    • pp.271-278
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    • 2008
  • Sintering behavior of iron nanopowder agglomerate compact prepared by slurry compaction method was investigated. The Fe nanopowder agglomerates were prepared by hydrogen reduction of spray dried agglomerates of ball-milled $Fe_2O_3$ nanopowder at various reduction temperatures of $450^{\circ}C$, $500^{\circ}C$ and $550^{\circ}C$, respectively. It was found that the Fe nanopowder agglomerates produced at higher reduction temperature have a higher green density compact which consists of more densified nanopowder agglomerates with coarsed nanopowders. The sintering behavior of the Fe nanopowder agglomerates strongly depended on the powder packing density in the compact and microstructure of the agglomerated nanopowder. It was discussed in terms of two sintering factors affecting the entire densification process of the compact.

CO2 레이저를 이용한 Selective Sintering System에 대한 연구 (A Study on Selective Sintering System using CO2 Laser)

  • 전병철
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.181-185
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    • 1996
  • Rapid prototyping is becoming an increasingly importnat techniuqe involved in the design cycles of modern industry. The majority of the rapid prototyping systems currently available use photo-reactive resins and waxes as the raw materials. The models produced by these systems often have relatively poor mechanical and physical properties and as such have a limited application to the production of advance prototypes but are excellently suited to the manufacture of engineering prototyes. This work identifies the need to produed near production grade advance prototypes from a variety of metals and a novel prototyping process based on the techniques of selective laser sintering and conventional machining is proposed. The integration of a carbon dioxide laser and a conventional machine tool to create the opto-mechanical by multi-layer sintering and some of the problems involved are also discussed.

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종자 입정을 이용한 저전압용 ZnO 바리스터의 제조 (Fabrication of Low Voltage ZnO Varistor by Seed Grain Method)

  • 강을손;성건용;김종희
    • 한국세라믹학회지
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    • 제27권4호
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    • pp.473-480
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    • 1990
  • Low-voltage ZnO-based varistors were made by seed grain method at various sintering conditions. Their microstructure and electrical properties were investigated and comlpared with those of the ZnO varistors made by a conventional method at the same sintering condition. During the sintering process, the added seed ZnO grain rapidly grew to be a gaint grain(above 500$\mu\textrm{m}$) provinding easy current path. Therefore the breakdown voltage was lowered as much as the order of 1/10-1/5 in comparison to that of the varistor made by a conventional method. But the grain size of the giant ZnO was little influenced by sintering condition, so the breakdown voltate was also little influenced. The weight loss was decreased by the addition of the seed grain, because the giant grain decreased the evaporation area. Therefore the nonobmic property of the specimen made by seed grain method was little influencedby sintering condition. In this research the low-voltage varistor made by seed grain method showed the least leakage current when sintered at 1150$^{\circ}C$ for zero hour.

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Spark plasma sintering에 의한 Ti-6Al-4V 합금분말의 성형성 (Consolidation Behavior of Ti-6Al-4V Powder by Spark Plasma Sintering)

  • 김재호;이진규;김택수
    • 한국분말재료학회지
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    • 제14권1호
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    • pp.32-37
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    • 2007
  • Using spark plasma sintering process (SPS), Ti-6Al-4V alloy powders were successfully consolidated without any contamination happened due to reaction between the alloy powders and graphite mold. Variation of microstructure and mechanical properties were investigated as a function of SPS temperature and time. Compared with hot isostatic pressing (HIP), the sintering time and temperature could be lowered to be 10 min. and $900^{\circ}C$, respectively. At the SPS condition, UTS and elongation were about 890 MPa and 24%, respectively. Considering the density of 98.5% and elongation of 24%, further improving the tensile strength would obtain by increasing the SPS pressure.