• Title/Summary/Keyword: single point measurement

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Precision Measurement of Silicon Wafer Resistivity Using Single-Configuration Four-Point Probe Method (Single-configuration FPP method에 의한 실리콘 웨이퍼의 비저항 정밀측정)

  • Kang, Jeon-Hong;Yu, Kwang-Min;Koo, Kung-Wan;Han, Sang-Ok
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.60 no.7
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    • pp.1434-1437
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    • 2011
  • Precision measurement of silicon wafer resistivity has been using single-configuration Four-Point Probe(FPP) method. This FPP method have to applying sample size, shape and thickness correction factor for a probe pin spacing to precision measurement of silicon wafer. The deference for resistivity measurement values applied correction factor and not applied correction factor was about 1.0 % deviation. The sample size, shape and thickness correction factor for a probe pin spacing have an effects on precision measurement for resistivity of silicon wafer.

Windowed Quaternion Estimator For Gyroless Spacecraft Attitude Determination

  • Kim, Injung
    • 제어로봇시스템학회:학술대회논문집
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    • 2001.10a
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    • pp.167.5-167
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    • 2001
  • Single point attitude determination method provides an optimal attitude minimizing the Wahba loss function. However, for the insufficient number of measurement vectors, the conventional single point methods has no unique solution. Thus, we introduce the sequential method to and an optimal attitude minimizing the windowed loss function. In this paper, this function is de ned as the sum of square errors for all measurement vectors within the axed sliding window. For simple implementation, the proposed algorithm is rewritten as a recursive form. Moreover, the covariance matrix is derived and expressed as a recursive form. Finally, we apply this algorithm to the attitude determination system with three LOS measurement sensors.

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Development of longitudinal acceleration wave decomposition method with single point measurement (단일 위치에서의 측정을 이용한 가속도 종파 분리 방법의 개발)

  • Jung, B.;Park, Y.;Park, Youn-Sik
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2006.05a
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    • pp.629-633
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    • 2006
  • We investigated a new longitudinal acceleration wave decomposition method in time domain. The proposed method separates up- and down-stream waves with an axial strain and axial acceleration measured at a single point on the transmission path. The advantages such as low computation load and easy implementation would be possible by developing time domain under the following assumptions; low frequency range, uniform cross sectional area and elastic wave propagation. We confirmed the feasibility and performance of the method through experiment using Split Hopkinson Pressure Bar (SHPB). The method can be effective in several applications, including active vibration control with wave view point, where real time wave decomposition is necessary.

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Development of Multi-point Heat Flux Measurement for Steel Quenching (강재 열처리용 다점 열유속 측정 기술 개발)

  • Lee, Jungho;Oh, Dong-Wook;Do, Kyu Hyung;Kim, Tae Hoon
    • Journal of the Korean Society for Heat Treatment
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    • v.25 no.4
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    • pp.181-189
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    • 2012
  • The demand on quantitative measurement of the heat flux is motivated in making higher-quality steel product through a water quenching process of plate mill. To improve a spatial degree of heat flux measurement, the multi-point heat flux measurement was carried out by a unique experimental technique that has a combination of the existing single-point heat flux gauge. The corresponding heat flux can be easily determined by Fourier's law in a conventional way. The multi-point heat flux gauge developed in this study can be applicable to measure the surface heat flux, the surface heat transfer coefficient during a water quenching applications of steelmaking process. The results exhibit different heat transfer regimes; such as single-phase forced convection, nucleate boiling, and film boiling, that are occurred in close proximity on the multi-point heat flux gauge quenched by water impinging jet.

Experimental verification and improvement of heat transfer tube local wall temperature measurement method

  • Jiabao Liu;Xiaxin Cao;Peixun Yang
    • Nuclear Engineering and Technology
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    • v.55 no.12
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    • pp.4317-4328
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    • 2023
  • To ensure the measuring accuracy of the wall temperature, the outer wall temperature measurement values by using three kinds of thermocouple welding methods were analyzed and evaluated in the paper, including single-point flush-mounted in the wall groove method, single-point insert-mounted in the wall groove, and outer surface direct welding method, based on the application of a tube-in-tube condensing heat exchanger. And the impacts of silver, tin, and thermal resistance adhesive as filling materials on wall temperature measurement were also investigated, and the results were compared to that obtained without filling materials. The results showed that the wall temperatures measured by the three welding methods were lower than the theoretically calculated value. And the wall temperature measured by the outer surface direct welding method was lowest under the same experimental conditions. The wall temperatures measured by single-point flush-mounted and insert-mounted in the wall groove methods were also affected by different welding filling materials. It was found that the greater the thermal resistance of filling materials, the smaller the heat loss. By analyzing the reasons for the low measured value of wall temperature, a new wall temperature measurement method was developed to improve the accuracy of the current measurement method. Meanwhile, the outer wall temperature measurement experiments of vertical and horizontal heat transfer tubes were carried out to validate and calibrate the improved outer wall temperature measurement method. The results showed that the average outer wall temperature deviation measured by the improved wall temperature measurement method ranged from - 0.82% to +2.29% for vertical tubes and - 4.75% to - 1.44% for horizontal tubes, and the improved measurement method had good measurement accuracy.

Development of On-machine Measurement System utilizing a Capacitive-type Sensor (정전용량형 센서를 이용한 기상계측시스템의 개발)

  • 김건희;박순섭;박원규;원종호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.391-395
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    • 2002
  • This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

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A Study on the Improvement of Water-Leakage Detection Reliability in Local Heating System (지역난방배관의 누수감지 신뢰성 향상에 관한 연구)

  • 신춘식;안영주;변기식
    • Journal of the Korean Society of Safety
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    • v.14 no.1
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    • pp.66-72
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    • 1999
  • Local heating transportation pipe has sensor and return lines to detect water-leakage. There are impulse and resistance comparison measurement types for a water-leakage detection. The impulse type shows large detection error within a measurement range. Since the resistance comparison type can find a comparative accurate single water-leakage point in the measurement range of heating pipe, it has been used to detect water-leakages these days. However if the multi water-leakages are happened in the measurement range of transportation pipe. the resistance comparison type shows a detection error point by the parallel resistance between a detection sensor line and ground. But the detection error will be minimized by the divided transportation pipe loops. In this research, it suggests the design of remote controlled detection system which can divide a large pipe loop and a possible single water-leakage measurement process in each divided loops.

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An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method

  • Kang, Jeon-Hong;Ying, Gao;Cheng, Yuh-Chuan;Kim, Chang-Soo;Lee, Sang-Hwa;Yu, Kwang-Min
    • Journal of Electrical Engineering and Technology
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    • v.10 no.1
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    • pp.325-330
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    • 2015
  • With approval from the Asia Pacific Metrology Program Working Group on Materials Metrology (APMP WGMM), an international comparison for sheet resistance standards for silicon wafers was firstly conducted among Korea Research Institute of Standards and Science (KRISS) in Korea, CMS/ITRI in Taiwan, and NIM in China, which are national metrology institutes (NMIs), from August 2011 to January 2012. The sheet resistance values of the standards are $10{\Omega}$, $100{\Omega}$, and $1000{\Omega}$; the measurement was conducted in sequence at KRISS, CMS/ITRI, NIM, and KRISS again using the four-point probe method with single and dual configuration techniques. The reference value for the measurement results of the three NMIs was obtained through averaging the values of the three results for each sheet resistance range. The differences between the reference value and the measured values is within 0.22% for $10{\Omega}$, 0.17% for $100{\Omega}$, and 0.12% for $1000{\Omega}$. Therefore, the international consistency for conducting sheet resistance measurements is confirmed within 0.22% through the APMP WGMM approved comparison.

Evaluation of Robot Calibration Performance based on a Three Dimensional Small Displacement Measuring Sensor (3차원 미소변위센서 기반 로봇 캘리브레이션 성능 검토)

  • Nguyen, Hoai-Nhan;Kang, Hee-Jun
    • Journal of Institute of Control, Robotics and Systems
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    • v.20 no.12
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    • pp.1267-1271
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    • 2014
  • There have been many autonomous robot calibration methods which form closed loop structures through the various attached sensors and mechanical fixtures. Single point calibration among them has been used for on-site calibration due to its convenience of implementation. The robot can reach a single point with infinitely many configurations so that single point calibration algorithm can be set up and easily implemented relative to the other methods. However, it is not still easy to drive the robots' sharp edge to its corresponding edge of the fixture. This is error-prone process. In this paper, we propose a 3 dimensional small displacement measuring sensor and a robot calibration algorithm based on this sensor. This method relieves the difficulty of matching two edges in the single point calibration and improves the resulting robot accuracy. Simulated study is carried out on a Hyundai HA06 robot to show the effectiveness of the proposed method over the single point calibration. And also, the resulting robot accuracy is compared with that from 3D laser tracker based calibration to show the dependency of robot accuracy on range of the workspace where the measurement data are collected.

The Automated Measurement of Tool Wear using Computer Vision (컴퓨터 비젼에 의한 공구마모의 자동계측)

  • Song, Jun-Yeop;Lee, Jae-Jong;Park, Hwa-Yeong
    • 한국기계연구소 소보
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    • s.19
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    • pp.69-79
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    • 1989
  • Cutting tool life monitoring is a critical element needed for designing unmanned machining systems. This paper describes a tool wear measurement system using computer vision which repeatedly measures flank and crater wear of a single point cutting tool. This direct tool wear measurement method is based on an interactive procedure utilizing a image processor and multi-vision sensors. A measurement software calcultes 7 parameters to characterize flank and crater wear. Performance test revealed that the computer vision technique provides precise, absolute tool-wear quantification and reduces human maesurement errors.

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