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Masato YAMASHITA, "Resistivity Measurement by Dual-Configuration Four-Probe Method". The Japan Society of Applied Physics, Vol. 42, No. 2A, pp 695-699, February 2003.
DOI
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2 |
ISO "Guide to the Expression of Uncertainty in Measurement", 1991.
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3 |
ASTM F84, "Test Method for Measuring Resistivity of Silicon Wafers with In-Line Four-Point Probe"
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4 |
Lydon J. Swartzendruber, "Correction Factor Tables for Four-Point Probe Resistivity Measurements on Thin, Circular Semiconductor Samples", NBS technical note 199, April 1964.
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5 |
ASTM F1529-97, "Standard Test Method for Sheet Resistance Uniformity Evaluation by In-Line Four-Point Probe with the Dual-Configuration Procedure", 1997.
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KRISS-99-079-ET, "측정불확도 평가 및 표현방법", 1999.
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Arther Uhlir, JR. "The Potentials of Infinite Systems of Sources and Numerical Solutions of Problems in Semiconductor Engineering", Bell System Technical Journal, Vol. 34, No. 1, pp. 105-128, 1954.
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8 |
L. B. Valdes, "Resistivity Measurements on Germanium for Transistors", Proceedings of the Institute of Radio Engineers New York"., Vol. 42, pp. 420-427, Feb., 1954.
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9 |
VF. M. SMITS, "Measurement of Sheet Resistivities with the Four-Point Probe", Proceedings of the Institute of Radio Engineers, pp 711-718, May 1958.
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10 |
EA-4/02, "Expression the uncertainty of measurement in calibration", 1999.
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11 |
J. R. Ehrstein and M. C. Crparlom, NIST Special Publication 260-131, 1999. (The Certification of 100 mm Diameter Silicon Resistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe Measurements.)
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