• 제목/요약/키워드: single crystal growing process

검색결과 39건 처리시간 0.022초

연속성장법에 의한 Mn-Zn Ferrite 단결정 성장 (Manganese Zinc Ferrite Singel Crystal Growth by Continuous Crystal Growing Method)

  • 정재우;오근호
    • 한국세라믹학회지
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    • 제29권7호
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    • pp.539-543
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    • 1992
  • The continuous growth method was developed for Mn-Zn Ferrite single crystals. It is a new process that the polycrystalline MnχZn1-χFe2O4 raw materials are supplied continuously from the powder feeding system to the crucible heated by R.F. induction and melted in the crucible, and after the single crystals seed is attached to crucible's hole, the crystals are pulled downward with rotation. Growing the crystals by using the growth method different from the conventional Bridgman or Floating Zone method, we defined the factors having effect on the crystal growing through the pre-experiments. They are temperature distribution in the crucible, melt velocity according to its height, wettability between the crucible's bottom and melt. Therefore, Mn-Zn Ferrite single crystals were to be grown by attaining the appropriate melt height in the crucible, powder feeding rate, temperature gradient between the crucible and interface, crystal growing speed, and this method was confirmed to have possibility for single crystal growing.

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초크랄스키 단결정 장치내 실리콘 용융액 운동의 자기장효과 (Magnetic field effects of silicon melt motion in Czochralski crystal puller)

  • 이재희
    • 한국결정성장학회지
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    • 제15권4호
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    • pp.129-134
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    • 2005
  • 초크랄스키 단결정장치내 실리콘 유동의 자기장효과에 대한 수치해석을 하였다. 8" 단결정 성장과정에서 난류 모형을 사용하여 수송현상을 계산하였다. 도가니 회전수가 작으면 자연대류가 지배적이었다. 도가니 회전수가 증가할수록 강제대류가 증가되며 온도 분포는 더 넓어진다. cusp 자기장을 인가하면 도가니근처의 유동이 크게 감소하며 온도분포는 전도의 경우와 비슷해진다.

Controlling of the heterogeniously growing GaN polycrystals using a quartz ring in the edge during the HVPE-GaN bulk growth

  • Park, Jae Hwa;Lee, Hee Ae;Park, Cheol Woo;Kang, Hyo Sang;Lee, Joo Hyung;In, Jun-Hyeong;Lee, Seong Kuk;Shim, Kwang Bo
    • Journal of Ceramic Processing Research
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    • 제19권5호
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    • pp.439-443
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    • 2018
  • The outstanding characteristics of high quality GaN single crystal substrates make it possible to apply the manufacture of high brightness light emitting diodes and power devices. However, it is very difficult to obtain high quality GaN substrate because the process conditions are hard to control. In order to effectively control the formation of GaN polycrystals during the bulk GaN single crystal growth by the HVPE (hydride vapor phase epitaxy) method, a quartz ring was introduced in the edge of substrate. A variety of evaluating method such as high resolution X-ray diffraction, Raman spectroscopy and photoluminescence was used in order to measure the effectiveness of the quartz ring. A secondary ion mass spectroscopy was also used for evaluating the variations of impurity concentration in the resulting GaN single crystal. Through the detailed investigations, we could confirm that the introduction of a quartz ring during the GaN single crystal growth process using HVPE is a very effective strategy to obtain a high quality GaN single crystal.

AlN 단결정 성장에 관한 도가니 형태의 의존성에 관한 연구 (A study on the dependance of crucible dimension on AlN single crystal growth)

  • 인경필;강승민
    • 한국결정성장학회지
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    • 제25권1호
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    • pp.1-5
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    • 2015
  • AlN 단결정의 특별한 용도로 이를 개발하기 위한 노력이 전 세계적으로 매우 활발하게 이루어지고 있다. 이러한 AlN을 기반으로 하는 자외선 LED는 생활, 의학, 자동자 등에 유용한 용도로서 살균, 정화, 경화 및 분석 등 분야에 이용된다. 이에 실험을 통해 PVT법으로 카본 도가니를 사용하여 AlN 단결정을 성장시켰으며 실험 중 3가지 형태의 도가니를 이용하여 성장에 미치는 영향을 분석하였으며, 그 온도 조건은 $1900{\sim}2100^{\circ}C$이고 실험 압력으로는 1~200 Torr였다. 그 결과, 높이가 높은 형태의 도가니를 사용할 경우 증발량은 기준 형태보다 증가 하는데 그쳤다. 반면, 넓은 형태의 도가니는 더욱 많은 증발양의 증가를 보였으며, 기준 형태에 비하여 훨씬 안정하다는 것을 알았다. 또한, 제한된 크기의 도가니를 이용한 PVT법에서의 도가니 형태의 변화에 따른 결과는 성장률에 따른 최적 조건, 성장 결정의 품질변화 및 성장 조건 안정성에 영향을 주는 것을 알았다.

$LiTaO_3$ 단결정 성장과 용기 및 분위기의 영향 (Crystal Growth of $LiTaO_3$ and the Effect pf Crucible Type and Atmosphere)

  • 박승익;채승욱;김정돈;주기태;정수진
    • 한국세라믹학회지
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    • 제31권1호
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    • pp.39-46
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    • 1994
  • LiTaO3 single crystals were growth without cracking using Pt-Rh crucible and Ir crucible. The starting composition to get the melt of congruent melting composition, which has been dependent upon the experimental procedure, was taken after fixing the total growing process by the result of preliminary experiments. The Rh contamination from the Pt-Rh crucible was to be neglected if the crystal had been grown under inert atmosphere, which resulted in the crystal color being slightly yellow. This color was decolored after 24 hour's annealing at 1200℃ under air atmosphere. The optimum conditions for the crystal growing and the diameter control were so dependent upon the crucible material in spite of using the crucible of the same size. The liquid-solid interface of LiTaO3 crystal of 1" diameter has been flat if the rotation speed was 45rpm.

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Flux법에 의한 초전도체 YBa2Cu3O7-x 단결정 육성 (Growth of Superconductor YBa2Cu3O7-x Single Crystal by Flux Method)

  • 오근호;김호건;명중재
    • 한국세라믹학회지
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    • 제27권1호
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    • pp.48-54
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    • 1990
  • YBa2Cu3O7-x(=YBCO) single crystals were grown by flux method and the growing process of crystals was investigated. YBCO and 3BaO-7CuO composition powders were mixed by the ratio of 25 : 75(wt%), and the mixtures were melted at 105$0^{\circ}C$ in a electric furnace with no temperature-gradient. Then the melt was cooled at a rate 2-1$0^{\circ}C$/h in the above furnace. YBCO single crystal plate with average size of $1.5\times$2.0$\times$0.1㎣ were obtained in the cavities between crucible and solidified ingot, and the single crystals were oriented to <001> direction. The ingots of flux parts were analyzed by XRD and EDS for the purpose of presuming the growing process of the crystals. It was assumed that the divorced eutectic reaction, by which YBCO crystals were grown first and then BaCuO2 and CuO crystals, occured in the case of cooling rate faster than 2$^{\circ}C$/h. When the cooling rate was 2$^{\circ}C$/h, it was assumed that quasi-equilibrium eutectic reaction occured, so that YBCO, BaCuO2 and CuO crystals were grown at the same time.

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8인치 실리콘성장을 위한 커스프 MCZ계에서 축방향 산소분포에 대한 연구 (A numerical study on the optimum operation condition for axial oxygen concentration in 8 inch silicon growth by cusp MCZ)

  • 이승철;윤종규
    • 한국결정성장학회지
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    • 제7권3호
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    • pp.406-417
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    • 1997
  • 초크랄스키법들 의한 8인치 실리콘 단결정 성장계에 대칭과 비대칭 커스프 자장을 인가하여 결정을 성장시켰을 때 축방향으로 일정한 산소농도분포를 가질 수 있는 적절한 인가 자장의 크기와 비대칭도에 대한 수치해석적 연구를 수행하였다. 결정이 성장할 때 커스프 자장의 형태가 유지되는 방법으로 도가니의 위치를 변화시키는 방법과 인가코일의 위치를 변화시키는 방법을 비교하였다. 대칭 커스프 자장이 인가된 경우, 축방향으로 일정한 산소농도를 얻을 수 있는 자장의 강도변화는 결정이 성장함에 따라 아래로 볼록한 형태를 띠었다. 축밟향으로 일정한 산소농도분포를 갖기 위해 도가니의 위치를 변화시키는 방법과 코일의 위치를 변화시키는 방법을 비교한 결과 비슷한 산소농도의 표준편차값을 가짐을 알 수 있었다. 비대칭 자장이 인가된 경우, 축방향으로 일정한 산소농도 분포를 얻기 위해서는 비대칭도는 결정이 성장함에 따라 점차 증가하는 양상을 보였다.

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사파이어 단결정의 초크랄스키 성장공정에 대한 유한요소분석 (Finite element analysis for czochralski growth process of sapphire single crystal)

  • 임수진;신호용;김종호;임종인
    • 한국결정성장학회지
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    • 제21권5호
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    • pp.193-198
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    • 2011
  • 최근 사파이어 결정은 LED 응용부품에 사용되고 있고, CZ 성장공정은 고 품질의 사파이어 단결정을 성장시키기 위한 중요한 기술중의 하나이다. 고 품질의 단결정을 성장하기 위해서는 CZ 성장로 내부의 열 및 질량 전달현상의 제어가 필요하다. 본 연구에서는 유도 가열된 CZ 성장로에 대한 사파이어 결정의 성장공정을 FEM을 사용하여 수치적으로 분석하였다. 본 연구의 결과, 성장로의 rpm이 증가함에 따라 고온부는 도가니 표면에서 융액의 내부로 이동하고, 고-액 계면은 평편한 형태로 변화되는 것으로 분석되었다. 또한 성장된 결정의 고-액 계면은 초기에 형성된 결정의 shoulder 형상에 의해서도 영향을 받는 것으로 나타났다.

Verneuil법에 의한 $SiO_2$를 첨가한 Sapphire 단결정 성장 (SiO2 Doped Sapphire single Crystal Growth by Verneuil Method)

  • 조현;오근호;최종건;박한수
    • 한국세라믹학회지
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    • 제29권10호
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    • pp.822-826
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    • 1992
  • SiO2 doped sapphire single crystals were grown by Verneuil method using feed material which prepared by adding SiO2 in Al2O3. Crystal growing were attempted with varing doping amount of SiO2 from 0.01 to 1.0 wt% and when the doping amount of SiO2 were 0.01~0.04 wt%, single crystals could be attained. Starting materials for feed powder were 99.99% purity alumina and extra pure SiO2 powder. Mixing these two materials by wet milling for 24 hours and drying the mixture and then was calcined at 900~110$0^{\circ}C$ for 2~4 hours. The grown crystals had yellowish color and were somewhat transparent. During growing process the flow range of oxygen was 5~7.5ι/min and of hydrogen was 13~25ι/min, the average growth rate was 7.0~11 mm/hr. The pressure of gases were fixed at 5psi. The color of crystal was appeared and mechanical property of sapphire was developed by doping of SiO2.

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쵸크랄스키 단결정 장치에서의 실리콘유동 (Silicon melt motion in a Czochralski crystal puller)

  • 이재희;이원식
    • 한국결정성장학회지
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    • 제7권1호
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    • pp.27-40
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    • 1997
  • The heat in Czochralski method is transfered by all transport mechanisms such as convection, conduction and radiation and convection is caused by the temperature difference in the molden pool, the rotations of crystal or crucible and the difference of surface tension. This study delvelops the simulation model of Czochralski growth by using the finite difference method with fixed grids combined with new latent heat treatment model. The radiative heat transfer occured in the surfce of the system is treated by calculating the view factors among surface elements. The model shows that the flow is turbulent, therefore, turbulent modeling must be used to simulate the transport phenomena in the real system applied to 8" Si single crystal growth process. The effects of a cusp magnetic field imposed on the Czochralski silicon melt are studied by numerical analysis. The cusp magnetic field reduces the natural and forced convection due to the rotation of crystal and crucible very effectively. It is shown that the oxygen concentration distribution on the melt/crystal interface is sensitively controlled by the change of the magnetic field intensity. This provides an interesting way to tune the desired O concentration in the crystal during the crystal growing.

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