• Journal of IKEEE
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• v.19 no.4
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• pp.535-540
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• 2015

A microstrip gas chamber (MSGC), applied to digital radiography system, was designed and constructed. The microstrip electrodes were fabricated with Chrome(Cr.). by photolithography process on Silicon(Si) wafer and glass substrate. The width of anode and cathode electrodes was $10{\mu}m$, and $290{\mu}m$, respectively. The distance of the electrodes was $100{\mu}m$, and the active area was $50{\times}50mm^2$. And the number of anode was 80. The microstrip electrodes were damaged when discharges occurred over the 600 V of anode voltage. As the result of experiments. It detected the typical output signals of the pulse width, 20 ns, under the condition that the detecting gas was Ar(90%) + $CH_4$(10%), X-ray tube voltage was 42 kV, and tube current was 1 mA.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.11-20
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• 1996

In this paper, the characteristics of therapy radiation diode sensors have been studied by using therapy radiation from the MM22 microtron accelerator. The linearity, reproducibility and error ratio were measured for feasibility as a radiation detector. Energy dependence, sensitivity change after a amount of irradiation and output value according to a number of diodes were also measured for same purpose. We have formed pulse shaping of diode signal with nuclear instruments for portal image reconstruction. The percent depth dose ratio according to field size and depth was compared with that of the detector of a ion chamber. Using thirteen silicon diodes, we can directly read diode outputs on a computer monitor after A/D conversion with 16 channels analog to digital conversion board with 12 bit resolution. The possibility for portal image with diodes has been suggested from output comparison between output value with a human phantom and that without a human phantom.

• The Journal of Korean Institute of Information Technology
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• v.16 no.11
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• pp.61-68
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• 2018

This paper describes design of a 10.525 GHz self oscillating mixer semiconductor IC chip combining voltage controlled oscillator and frequency mixer using silicon CMOS technology for Doppler radar applications. The p-core type VCO included in the self oscillating mixer minimizes the noise contained in the transmitted signal. This noise minimization increases the sensing distance and acts in a direction favorable to the reaching distance and the sensitivity of the motion detection sensor. Simulation results for phase noise show that a VCO designed as a P-core has a noise characteristic of -106.008 dBc / Hz at 1 MHz offset and -140.735 dBc / Hz at 25 MHz offset compared to a VCO designed with N-core and NP-core showed excellent noise characteristics. If a self-oscillating mixer is implemented using a p-core designed VCO in this study, a motion sensor with excellent range and reach sensitivity will be produced.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2016.10a
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• pp.915-918
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• 2016

Virtual testing devices are required due to rapid changes in the health care industry and the increase of the medical or nursing workforce. The importance of devices such as the simulator, blood vessels, and lab equipment for modeling blood flow to the heart is increasing too. In this study, we made heart pump by using a step motor and developed device which simulates arterial, venous blood pressure, and blood flow. We finally evaluated the function of proposed device. The proposed system is composed of the pump for simulating, the valve device to describe the resistance of the artery and vein, and a reducing device showing the characteristics of the venous system. We used BOXER pump for heart simulator and silicon tube for arterial and venous vessels, and designed a reducing device. We also used the pressure sensor to measure arterial blood pressure. For the evaluation of the proposed system, we selected a range of 50~100mmHg of the blood circuit 60 per minute and then compared the blood pressure of a person and the measured blood pressure.

• Journal of Sensor Science and Technology
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• v.28 no.5
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• pp.299-304
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• 2019

Recently, the development of rehabilitation medical technology has resulted in an increased interest in speech therapy equipment. In particular, research on articulation therapy for communication disorders is being actively conducted. Existing methods for the diagnosis and treatment of speech disorders have many limitations, such as traditional tactile perception tests and methods based on empirical judgment of speech therapists. Moreover, the position and tension of the tongue are key factors of speech disorders with regards to articulation. This is a very important factor in the distinction of Korean characters such as lax, fortis, and aspirated consonants. In this study, we proposed a Korean electropalatography (EPG) system to easily measure and monitor the position and tension of the tongue in articulation treatment and diagnosis. In the proposed EPG system, a sensor was fabricated using an AgCl electrode and biocompatible silicon. Furthermore, the measured signal was analyzed by implementing the bio-signal processing module and monitoring program. In particular, the bio-signal was measured by inserting it into the palatal from an experimental control group. As a result, it was confirmed that it could be applied to clinical treatment in speech therapy.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1576-1578
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• 2004

The alumina membrane with nano sized pore was prepared from aluminum by anodic oxidation to apply for storage equipment, gas sensor and stamper. The pore size and cell size of the pores are controlled by anodic oxidation voltage. The alumina thickness was controlled by etching process using 0.2M $H_3PO_4$. The thickness of alumina on Si wafer was very accurately controlled by anodic oxidation time. Nickel with nano-sized grain was electroplated on the Au layer on silicon wafer. The fabricated pores on alumina membrane was the thickness of $7{\sim}10{\mu}m$ with straight nano-sized pore of 307${\sim}$120nm. The alumina by the etching process shows smooth surface. The size of Ni grain was 130nm and 250nm for 10mA/$cm^2$and 20mA/$cm^2$of electroplating currents, respectively.

• Transactions on Electrical and Electronic Materials
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• v.10 no.4
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• pp.135-139
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• 2009

$H_2S$ micro-gas sensors have been developed employing $SnO_2$:CuO composite thin films. The films were prepared by e-beam evaporation of Sn and Cu metals on silicon substrates, followed by oxidation at high temperatures. Results of various studies, such as scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that $SnO_2$ and CuO are mutually non-reactive. The CuO grains, which in turn reside in the inter-granular regions of $SnO_2$, inhibit grain growth of $SnO_2$ as well as forming a network of p-n junctions. The film showed more than a 90% relative resistance change when exposed to $H_2S$ gas at 1 ppm in air at an operating temperature of $350^{\circ}C$ and had a short response time of 8 sec.

• Journal of Advanced Marine Engineering and Technology
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• v.25 no.3
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• pp.631-635
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• 2001

The major problems associated with the manufacturing processes of the microaccelerometer based on the tunneling current concept is the residual stress. This paper deals with finite element analysis of residual stress causing pop up phenomenon which are induced in micromachining processes for a microaccelerometers sensor using silicon on insulator(SOI) wafer. After heating the tunnel gap up to $100^{\circ}C$and get it through cooling process and the additional beam up to $80^{\circ}C$get it through the cooling process. We learn the residual stress of each shape and compare the results with each other, after heating the tunnel gap up to $400^{\circ}Cduring$ the Pt deposition process. The equivalent stresses produced during the heating process of focused ion beam(FIB) cut was also to be about $0.02~0.25Pa/^{\circ}C$and cooling process the gradient of residual stresses of about $8.4\{times}10^2Pa/{\mu}m$ still at cantilever beam and connected part of paddle. We want to seek after the real cause of this pop up phenomenon and diminish this by change manufacturing processes of microaccelerometer sensors.

• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.85-90
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• 2007

This paper presents the growth conditions and characteristics of polycrystalline 3C-SiC (silicon carbide) thin films for M/NEMS applications related to harsh environments. The growth of the 3C-SiC thin film on the oxided Si wafers was carried out by APCVD using HMDS (hexamethyildisilane: $Si_{2}(CH_{3})_{6})$ precursor. Each samples were analyzed by XRD (X-ray diffraction), FT-IR (fourier transformation infrared spectroscopy), RHEED (reflection high energy electron diffraction), GDS (glow discharge spectrometer), XPS (X-ray photoelectron spectroscopy), SEM (scanning electron microscope) and TEM (tunneling electro microscope). Moreover, the electrical properties of the grown 3C-SiC thin film were evaluated by Hall effect. From these results, the grown 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therefore, the 3C-SiC thin film is suitable for extreme environment, Bio and RF M/NEMS applications in conjunction with Si fabrication technology.

• Journal of Sensor Science and Technology
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• v.27 no.3
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• pp.170-174
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• 2018

In this paper, the $TiO_2$/glucose oxidase (GOD) mixture has synthesized through simple and low-cost fabrication methods. The physical properties of the mixture were proved using an FT-IR/NIR spectrometer, an X-Ray diffractometer, and a Raman spectrometer. GOD maintained its bioactivity during all fabrication process. The current characteristics of the glucose biosensor were proportional to the glucose concentration and effective surface area of square pyramid on a silicon substrate. The maximum current change was measured in a pH 7.0 buffer solution. The simple and low-cost fabrication process and surface treatment can be used widely in previous research for improvements in effective surface area.