• Title/Summary/Keyword: silicon nanomembrane

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Thermo-Field emission in silicon nanomembrane ion detector for mass spectrometry (실리콘 나노 박막의 열-전계 방출효과를 이용한 분자 질량분석)

  • Park, Jong-Hoo
    • Journal of the Korean Applied Science and Technology
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    • v.30 no.4
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    • pp.586-591
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    • 2013
  • This paper describes the characteristics of thermo-field emission in a freestanding silicon nanomembrane under ion bombardment with various thermal and field conditions. The thermal effect and field effect in thermo-field emission in silicon nanomembrane are investigated by varying kinetic energy of ions and electric field applied to the silicon nanomembrane surface, respectively. We found that thermo-field emission increases linearly as the electric field increases, when the electric field intensity is lower than the threshold. The thermo-field emission (schottky effect) increases proportionally to the power of temperature, which agree well with the predictions of a thermo-field emission model.

Transferrable single-crystal silicon nanomembranes and their application to flexible microwave systems

  • Seo, Jung-Hun;Yuan, Hao-Chih;Sun, Lei;Zhou, Weidong;Ma, Zhenqiang
    • Journal of Information Display
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    • v.12 no.2
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    • pp.109-113
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    • 2011
  • This paper summarizes the recent fabrication and characterizations of flexible high-speed radio frequency (RF) transistors, PIN-diode single-pole single-throw switches, as well as flexible inductors and capacitors, based on single-crystalline Si nanomembranes transferred on polyethylene terephthalate substrates. Flexible thin-film transistors (TFTs) on plastic substrates have reached RF operation speed with a record cut-off/maximum oscillation frequency ($f_T/f_{max}$) values of 3.8/12 GHz. PIN diode switches exhibit excellent ON/OFF behaviors at high RF frequencies. Flexible inductors and capacitors compatible with high-speed TFT fabrication show resonance frequencies ($f_{res}$) up to 9.1 and 13.5 GHz, respectively. Robust mechanical characteristics were also demonstrated with these high-frequency passives components.