Transferrable single-crystal silicon nanomembranes and their application to flexible microwave systems |
Seo, Jung-Hun
(Department of Electrical and Computer Engineering, University of Wisconsin-Madison)
Yuan, Hao-Chih (Department of Electrical and Computer Engineering, University of Wisconsin-Madison) Sun, Lei (Department of Electrical and Computer Engineering, University of Wisconsin-Madison) Zhou, Weidong (Department of Electrical Engineering, University of Texas) Ma, Zhenqiang (Department of Electrical and Computer Engineering, University of Wisconsin-Madison) |
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