• 자원리싸이클링
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• 제31권6호
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• pp.60-65
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• 2022

본 논문에서는 반도체용 실리콘 기판 가공 과정에서 발생한 슬러지 재활용을 위해 탄화 반응에 의한 탄화규소(SiC) 분말 합성 공정을 적용한 결과를 제시하고자 한다. 입수한 슬러지는 실리콘 기판을 탄화규소 연마재를 사용하여 가공하는 과정에서 발생하므로 실리콘과 탄화규소가 혼합된 형태였으며 가공 설비로부터 발생한 철 불순물이 포함되어 있었다. 슬러지는 절삭유가 포함되어 있어 점성이 있는 유체 형태였으며 대기 건조를 통해 분말 형태로 변화된 후 산 세정을 통한 철 성분 제거 및 탄화에 의한 탄화규소 분말 합성 과정을 거치게 된다. 슬러지에 포함된 실리콘과 탄화규소의 비율에 따라 탄화 반응에 필요한 탄소량이 달랐으며 탄화규소의 함량이 커질수록 탄소 부족 현상으로 인해 비화학량론적 탄화물(SiC_x, x<1) 형성이 촉진되어 순수한 탄화규소 합성이 이루어지지 않는 것을 확인하였다. 이러한 비화학량론적 탄화물은 잉여 탄소 추가와 고에너지 밀링에 의한 탄화 반응성 증가를 통해 제거할 수 있었으며 결과적으로 산 세정과 밀링 과정에 의해 슬러지로부터 순수한 탄화규소 분말 합성이 가능함을 확인할 수 있었다.

• 한국세라믹학회지
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• 제41권3호
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• pp.197-201
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• 2004

플라즈마 화학기상증착(PECVD)법을 이용하여 Si(100) 웨이퍼에 silicon oxide(SiO$_2$)와 silicon oxynitride(SiON) 후막을 SiH$_4$, $N_2$O, $N_2$가스를 혼합하여 증착하였다. RF power와 rf bias power의 변화에 따른 SiO$_2$ 막과 SiON 막의 특성변화에 대하여 고찰하였다. RF power와 rf bias power가 증가함에 따라 굴절률은 감소하는 경향을 나타내었으며, 막의 굴절률은 1552 nm에서 1.4493-1.4952까지 변화하였다. 이와 같이 rf power가 증가함에 따라 굴절률이 감소하는 이유는 oxygen의 량이 증가하고 nitrogen의 량이 감소하여 즉, O/N 비가 증가하여 굴절률이 감소하는 경향을 나타내었다.

• 반도체디스플레이기술학회지
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• 제4권3호
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• pp.1-4
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• 2005

Silicon oxynitride films were deposited using ammonia as a nitrogen source via PECVD (plasma enhanced chemical vapor deposition) to study the physical properties of the films. Silane and nitrous oxide were used as silicon and oxygen sources, respectively. The composition of the silicon oxynitride films was well controlled by changing the ratios of the sources and confirmed by XPS. The silicon oxynitride films with high oxygen content showed bigger compressive stress and less refractive index, while the values of surface roughness were around 1 nm, irrespective of the variation of the source ratios.

• 한국식품과학회지
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• 제47권2호
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• pp.145-148
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• 2015

메타규산나트륨은 우리나라 식품첨가물공전에 등록되어 있는 품목으로 식용유지류의 여과보조제의 목적 이외에는 사용할 수 없으며, 최종식품 완성 전에 제거하도록 규정되어 있다. 그러나 최근 샥스핀 등 수산물에 중량 증량의 목적으로 메타규산나트륨을 불법 사용하는 사례가 지속적으로 발생함에 따라 메타규산나트륨의 사용 여부를 판별할 수 있는 분석법의 필요성이 대두되고 있다. 그러나 메타규산나트륨의 수용액은 강알칼리성용액으로 식품에 첨가되면 해리되어 그 자체로 분석할 수 없으며, 규소 양의 측정을 통해 간접적인 방법으로 추정할 경우 시료 자체에 천연적으로 존재하는 규소와 구분해야 하는 어려움이 있다. 따라서 본 연구에서는 메타규산나트륨의 첨가 여부를 판별하기 위한 기초 자료 확보를 위해 메타규산나트륨 수용액에 가공되지 않은 상어지느러미를 침지하여 중량의 증가, pH 및 규소 함량 변화를 측정하였고, 이를 모니터링 결과와 비교하였다. 그러나 Robberecht 등(7)의 연구결과 6종의 어류에서 규소가 1.77-84.19 mg/kg의 범위에서 검출된 결과에서 알 수 있듯이, 수산물의 종류와 개체 간에 규소 함량의 편차가 크게 나타날 수 있기 때문에 향후 샥스핀의 규소 함량 모니터링을 지속적으로 수행하여 데이터베이스를 좀 더 보강할 필요가 있을 것으로 판단되며, 그 이후에 대조군과 pH, 수분 및 규소 함량 비교를 통해 메타규산나트륨 사용여부를 유추해 볼 수 있을 것으로 생각된다.

• 한국세라믹학회지
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• 제51권6호
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• pp.539-543
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• 2014

Foam type porous silicon carbide ceramics were fabricated by a polymer replica method using polyurethane foam, carbon black, phenol resin, and silicon powder as raw materials. The influence of the C/Si mole ratio of the ceramic slurry and heat treatment temperature on the porous silicon carbide microstructure was investigated. To characterize the microstructure of porous silicon carbide ceramics, BET, bulk density, X-ray Powder Diffraction (XRD), and Scanning Electron Microscope (SEM) analyses were employed. The results revealed that the surface area of the porous silicon carbide ceramics decreases with increased heat treatment temperature and carbon content at the $2^{nd}$ heat treatment stage. The addition of carbon to the ceramic slurry, which was composed of phenol resin and silicon powder, enhanced the direct carbonization reaction of silicon. This is ascribed to a consequent decrease of the wetting angles of carbon to silicon with increasing heat treatment temperature.

• Journal of Welding and Joining
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• 제8권2호
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• pp.27-39
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• 1990

The effect of silicon and manganese, in the ranges of 0.3% to 1.0wt% Si and 0.7 to 2.6wt%Mn, on the microstructure and mechanical properties of flux cored arc welded deposits have been investigated for the purpose of improving mechanical properties. Microstructure of weld metals was mainly influenced by manganese content, and manganese increased the volum fraction of acicular ferrite and refined the microstructure. Also, tensile properties were governed by manganese content, ultimate tensile strength and yield strength were increased by approximately 82MPa and 58MPa per 1% Mn addition to the deposit. Toughness was improved by increasing Mn content and lowering Si content. Optimal impact properties were obtained at above 1.8wt% Mn and below 0.5wt% Si. Acicular ferrite was predominant factor in improving mechanical properties. Formation of acicular ferrite was promoted by manganese and no direct relationship between AF(acicular ferrite) proportion and oxygen in weld metal was found.

• 한국세라믹학회지
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• 제45권11호
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• pp.675-680
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• 2008

The effect of pore former content on both porosity and pore structure was investigated for porous sintered reaction-bonded silicon nitrides (SRBSNs). A spherical PMMA with $d_{50}=8{\mu}m$ was employed as a pore-former. Its amount ranged from 0 to 30 part. Porous SRBSNs were fabricated by post-sintering at various temperatures where the porosity was controlled at $12{\sim}52%$. The strong tendency of increasing porosity with PMMA content and decreasing porosity with sintering temperature was observed. Measured pore-channel diameter increased $(0.3{\rightarrow}1.1{\mu}m)$ with both PMMA content and sintering temperature.

• 한국주조공학회지
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• 제32권5호
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• pp.211-218
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• 2012

The effects of thickness, silicon and manganese contents on the mechanical properties of 3.3 wt%C-0.1 wt%S thin-section gray cast iron plates were investigated. The eutectic cell counts and volume fraction of pearlite in the matrix decreased with increased thickness and therefore the strength and hardness decreased with it. Even though the eutectic cell count increased with increased silicon content, the volume fraction of pearlite decreased and the strength and hardness decreased with it. The pearlite was refined more with increased manganese content and therefore the strength and hardness increased with it.

• 한국주조공학회지
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• 제25권2호
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• pp.95-101
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• 2005

This study has been carried out to investigate the microstructure of austempered high carbon cast steel with the variation of silicon and heat treatment conditions. The results show that an lower ausferritic structure is formed at the low austemepring temperature ($250{\sim}300^{\circ}C$) and an upper ausferritic structure is formed at the high austemepring temperature ($350{\sim}400^{\circ}C$). As an austempering temperature increased, the retained austenite volume fraction increased, however hardness decreased. Also, as a silicon content increased, the precipitation of cementite was suppressed, therefore 2nd reaction of autempering transformation was delayed.

• 한국표면공학회지
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• 제35권4호
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• pp.211-217
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• 2002

Ti-Si-N films were deposited onto WC-Co substrate by a RF-PECVD technique. The deposition behaviors of Ti-Si-N films were investigated by varying the deposition temperature, RF power, and reaction gas ratio (Mx). Ti-Si-N films deposited at 500, 180W, and Mx 60% had a maximum hardness value of 38GPa. The microstructure of films with a maximum hardness was revealed to be a nanocomposite of TiN crystallites penetrated by amorphous silicon nitride phase by HRTEM analyses. The microstructure of maximum hardness with Si content (10 at.%) was revealed to be a nanocomposite of TiN crystallites penetrated by amorphous silicon nitride phase, but to have partly aligned structure of TiN and some inhomogeniety in distribution. and At above 10 at.% Si content, TiN crystallite became finer and more isotropic also thickness of amorphous silicon nitride phase increased at microstructure.