• 제목/요약/키워드: silica dispersion

검색결과 188건 처리시간 0.03초

사파이어 웨이퍼 CMP 공정 신뢰성 향상을 위한 혼합 나노실리카 콜로이달 슬러리 (Mixed Nano Silica Colloidal Slurry for Reliability Improvement of Sapphire Wafer CMP Process)

  • 정찬홍
    • 한국신뢰성학회지:신뢰성응용연구
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    • 제14권1호
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    • pp.11-19
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    • 2014
  • A colloidal silica slurry has been manufactured by mixing nano silica powders having different grain size to improve the reliability of Sapphire wafer CMP process. The main reliability problem of CMP process such as the breaking of wafer can be prevented by reducing the size of particles in a slurry. While existing commercial colloidal silica slurries are usually made of single grain size silica powder of about 120nm, in the present study 40nm and 100nm silica powders are mixed to achieve a similar removal rate. The new colloidal silica slurry showed wafer removal rate of $3.04{\mu}m/120min$ while that of a commercial colloidal silica slurry was $3.03{\mu}m/120min$. The roughness was less than $4{\AA}$ and scratch was 0. It is also expected that the reduction of the size of nano silica particles can improve the dispersion stability and prolong the useful life of the slurry.

Mechanical Properties of Styrene-Butadiene Rubber Reinforced with Silica by in situ Tetraethoxysilane Hydrolysis over Acid Catalyst

  • Li, Qingyuan;Li, Xiangxu;Cho, Ur Ryong
    • Elastomers and Composites
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    • 제53권2호
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    • pp.57-66
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    • 2018
  • Styrene-butadiene rubber (SBR), reinforced with different contents of silica (with or without modification using silane coupling agents), was prepared by a modified sol-gel method involving hydrolyzation of tetraethoxysilane over an acid catalyst. The structures of the as-prepared samples were characterized using various techniques, such as scanning electron microscopy, X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and thermogravimetric analysis. The mechanical properties of the as-prepared samples were discussed in detail. The results revealed an increasing of the storage modulus (G') with increase in the silica content without modification. In contrast, G' decreased after modification using silane coupling agents, indicating a reduction in the silica-silica interaction and improved dispersion of silica in the SBR matrix. Both tensile stress and hardness increased with increase in the silica content (with modification) in the SBR matrix, albeit with low values compared to the samples with un-modified silica, except for the case of silica modified using (3-glycidyloxypropyl) trimethoxysilane (GPTS). The latter observation can be attributed to the special structure of GPTS and the effort of oxygen atom lone-pair.

합성(合成)고무 보강제(補强劑) Silica의 화학처리(化學處理)에 관(關)한 연구(硏究)(I) -Silica의 MDI 처리(處理)- (Studies on the Chemical Treatment of Silica for Synthetic Rubber Reinforcement(I) - Silica Treatment by MDI-)

  • 진제용;김홍선;최세영
    • Elastomers and Composites
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    • 제30권1호
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    • pp.20-31
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    • 1995
  • The purpose of this study is to investigate the reinforcement of inorganic filler silica, treated by MDI about SBR vulcanizate. The characteristics of vulcanization, physical properties, surface properties and dynamic properties were investigated after mixing those silica with SBR and unmodified silica with SBR. In this experiment only the quantity of silica was variable. In the vulcanization characteristics tested by rheometer, S-series showed the fastest scorch $time(t_{10})$ and optimum cure $time(t_{90})$. And in test or tensile characteristics hardness, tensile strength, 100%, 300% modulus and elongation were all appeared in the order of M>S-series. The characteristic bonding of urea between unmodified silica and MDI could be confirmed in IR spectrum. The shapes of silicas treated chemically were observed by SEM. And the dispersion of the filler in the SBR composite was uniform. In the dynamic characteristics by the RDS, the order of elastic modulus G' values was as follows : M>S-series, and also the order of damping values was as follows : M>S-series.

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Zinc Surfactant Effects on Nr/Tespd/Silica and SBR/Tespd/Silica Compounds

  • Kim, Kwang-Jea;Vanderkooi, John
    • Elastomers and Composites
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    • 제39권4호
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    • pp.263-273
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    • 2004
  • The effects of zinc surfactant (ZB) on the bis(triethoxysilylpropyl)disulfide (TESPD)-silica mixture in natural rubber (NR) and solution butadiene-co-styrene rubber(S-SBR) were compared with respect to their rheological property, processability, physical properties, and silica dispersion. In the NR compound, addition of the ZB increased the reversion resistance time (T-2), the tensile modulus, and the BO time; however, lowered the viscosity, the HBU, and tans values. In the S-SBR copound, addition of the ZB increased the $tan{\delta}$ values while lowered the T-2, the tensile modulus the BO time, the viscosity, and the HBU of the compound. In the NR compounds, addition of the ZB significantly increased the processability and mechanical property. However, in the S-SBR compounds, it improved the processability the mechanical property was not improved.

전기장분산법을 이용한 나노와 마이크로 혼합된 콤포지트의 전기적 특성 (Electrical Properties for Micro-and-Nano- Mixture Composites using Electric Field Dispersion)

  • 김정호;조대령;박재준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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    • pp.32-32
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    • 2010
  • A epoxy/multilayered silicate nanocomposite was prepared by a new AC electric application method and micro silica particle was poured into the nanocomposite in order to prepare epoxy/micro-and-nano- mixed composites (EMNC). Electric insulation breakdown strength was measured in a sphere-sphere electrode system designed for the prevention of edge breakdown and the data were estimated by Weibull plot. As the exfoliated silicate nano-plates were homogeniously dispersed in the micro silica particles, the insulation property was higherd.

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친환경 GIS Spacer용, 에폭시-나노-마이크로실리카 혼합 콤포지트의 교류 전기적, 기계적 특성 (AC Electrical and Mechanical Properties of Epoxy-Nano-Microsilica Mixed Composites for Eco-Friendly GIS Spacer)

  • 박재준
    • 전기학회논문지
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    • 제67권9호
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    • pp.1181-1188
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    • 2018
  • In order to develop new insulating materials for GIS Spacer using environmentally friendly insulating gas, three kinds of dispersed liquid nano composites of solid epoxy /nano layered silicate filled material were prepared. And the epoxy/nano/micro silica composite was prepared by mixing epoxy/nano 3 phr dispersion/4 kinds of filler contents(40,50,60, 70wt%). The electrical insulation breakdown strengths of the nano and nano/micro mixed composites were evaluated by using 8 kinds of samples including the original epoxy. The mechanical tensile strength of the epoxy / nano / micro silica composite were evaluated, also. The TEM was measured to evaluate the internal structure of nano/micro composites. As a result, it was confirmed that the layered silicate nano particles was exfoliated through the process of inserting epoxy resin between silicate layers and the layers. In addition, dispersion of nano / micro silica resulted in improvement of electrical insulation breakdown strength with increase of filling amount of dense tissue with nanoparticles inserted between microparticles. In addition, the tensile strength showed a similar tendency, and as the content of microsilica filler increased, the mechanical improvement was further increased.

Analysis of PVDF Coating Properties with Addition of Hydrophobically Modified Fumed Silica

  • Lee, Nam Kyu;Kim, Young Hoon;Im, Tae Gyu;Lee, Dong Uk;Shon, MinYoung;Moon, Myung Jun
    • Corrosion Science and Technology
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    • 제18권6호
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    • pp.232-242
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    • 2019
  • In this study, hydrophobically modified fumed silica was added to the PVDF coating to improve corrosion protection performance. Two types of silane modifiers, trimethylchlorosilane (TMCS) and hexamethyldisilazane (HMDZ), were used for hydrophobic modification of the fumed silica. The composition of modified fumed silica was analyzed by Fourier transform infrared, X-ray photoelectron spectroscopy, and elemental analysis. The dispersion of modified fumed silica in the PVDF coating was observed by the transmission electron microscopy, and the hydrophobicity of PVDF coating was analyzed by the water contact angle. Surface properties were examined by the field emission scanning electron microscopy and scanning probe microscopy. Potentiodynamic polarization was conducted to confirm corrosion protection performance of PVDF coating in terms of hydrophobically-modified fumed silica contents. As a result, the average surface roughness and the water contact angle of the PVDF coating increased with modifier contents. The results of the potentiodynamic polarization test showed an increase of the Ecorr values with increase of the hydrophobicity of PVDF coating. Thus, it clearly indicates that the corrosion protection performance of PVDF coating improved with the addition of the hydrophobic-modified fumed silica that prevents the penetration of moisture into the PVDF coating.

Material and rheological properties of (glycidoxypropyl) trimethoxysilane modified colloidal silica coatings

  • Kang Hyun Uk;Park Jung Kook;Kim Sung Hyun
    • Korea-Australia Rheology Journal
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    • 제16권4호
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    • pp.175-182
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    • 2004
  • Colloidal coating solution was prepared to enhance the hydrophilic property of the film surface. Water and ethanol were used as the dispersion media and (glycidoxypropyl) trimethoxysilane (GPS) as a binder in the colloidal silica coatings. Ethylene diamine was added to the colloidal silica solution as the curing agent. The colloidal silica solution was regarded as a hard-sphere suspension model with low volume fraction of the silica particles. Rheological properties of the silica suspensions modified with GPS have been investigated as a function of pH and concentration. The acidic solution showed high viscosity change by fast hydrolysis reaction and adsorption of the organic binders on the surface of silica particles. However, the hydrolysis was slow at the basic condition and the binders combined with themselves by condensation. The viscosity change was smallest at pH 7. The viscosity increased with the curing time after adding ethylenediamine, and the increase of viscosity at low pH was higher than that at high pH. The hydrophilic properties of the coating film were investigated by the contact angle of water and film surface. The smallest contact angle was shown under the strong acidic condition of pH 2.

Zn-Ion Coated Structural $SiO_2$ Filled LDPE: Effects of Epoxy Resin Encapsulation

  • Reddy C. S.;Das C. K.;Agarwal K.;Mathur G N.
    • Macromolecular Research
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    • 제13권3호
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    • pp.223-228
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    • 2005
  • In the present work, a low-density polyethylene (LDPE) composite, filled with Zn-ion coated structural silica encapsulated with the diglycidyl ether of bisphenol-A (DGEBA), was synthesized using the conventional melt-blending technique in a sigma internal mixer. The catalytic activity of the Zn-ions (originating from the structural silica) towards the oxirane group (diglycidyl ether of bisphenol-A (DGEBA): encapsulating agent) was assessed by infrared spectroscopy. Two composites, each with a filler content of $2.5 wt\%$ were developed. The first one was obtained by melt blending the Zn-ion coated structural silica with LDPE in a co-rotating sigma internal mixer. The second one was obtained by melt blending the same LDPE, but with DGEBA encapsulated Zn-ion coated structural silica. Epoxy resin encapsulation of the Zn-ion coated structural silica resulted in its having good interfacial adhesion and a homogeneous dispersion in the polymer matrix. Furthermore, the encapsulation of epoxy resin over the Zn-ion coated structural silica showed improvements in both the mechanical and thermal properties, viz. a $33\%$ increase in the elastic modulus and a rise in the onset degradation temperature from 355 to $371^{\circ}C$, in comparison to the Zn-ion coated structural silica.

ASR Resistance of Ternary Cementitious Systems Containing Silica Fume-Fly Ash Using Modified ASTM C 1260 Method

  • Shon, Chang-Seon;Kim, Young-Su;Jeong, Jae-Dong
    • 콘크리트학회논문집
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    • 제15권3호
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    • pp.497-503
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    • 2003
  • Supplementary cementitious materials (SCM) such as fly ash, ground granulated blast furnace slag and silica fume are now being extensively used in concrete to control expansion due to alkali-silica reactivity (ASR). However, the replacement level of a single SCM needed to deleterious ASR expansion and cracking may create other problem and concerns. For example, incorporating silica fume at levels greater than 10% by mass of cement may lead to dispersion and workability concerns, while fly ash can lead to poor strength development at early age, The combination of silica fume and fly ash in ternary cementitious system may alleviate this and other concerns, and result in a number of synergistic effects. The aim of the study was to enable evaluation of more realistic suitability of a silica fume-fly ash combination system for ASR resistance based on an in-house modification of ASTM C 1260 test method. The modification can be more closely identified with actual field conditions. In this study three different strengths of NaOH test solution(1N, 0.5N, and 0.25N) were used to measure the expansion characteristics of mortar bar made with a reactive aggregate. The other variable included longer testing period of 28 days instead of a conventional 14 days.