• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.11
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• pp.683-689
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• 2015

For the formation of $N^+$ doping, the antimony ions are mainly used for the fabrication of a BJT (bipolar junction transistor), CMOS (complementary metal oxide semiconductor), FET (field effect transistor) and BiCMOS (bipolar and complementary metal oxide semiconductor) process integration. Antimony is a heavy element and has relatively a low diffusion coefficient in silicon. Therefore, antimony is preferred as a candidate of ultra shallow junction for n type doping instead of arsenic implantation. Three-dimensional (3D) profiles of antimony are also compared one another from different tilt angles and incident energies under same dimensional conditions. The diffusion effect of antimony showed ORD (oxygen retarded diffusion) after thermal oxidation process. The interfacial effect of a $SiO_2/Si$ is influenced antimony diffusion and showed segregation effects during the oxidation process. The surface sputtering effect of antimony must be considered due to its heavy mass in the case of low energy and high dose conditions. The range of antimony implanted in amorphous and crystalline silicon are compared each other and its data and profiles also showed and explained after thermal annealing under inert $N_2$ gas and dry oxidation.

• Journal of Environmental Science International
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• v.16 no.9
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• pp.1077-1083
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• 2007

[ $V_2O_5/TiO_2$ ] catalyst impregnated ceramic candle filters are in principle, capable of performing shallow-bed dust filtration plus a catalytic reaction, promoted by a catalytic deposited in their inner structure. Pilot-scale $V_2O_5/TiO_2$ catalyst impregnated ceramic candle filters were prepared, characterized and tested for their activity towards the SCR reaction. The effect on NO conversion of operating temperature, gas hourly space velocity, amount of deposited catalyst, pressure drops and long-term experiment (life of catalytic filter) was determined. The following effects of $V_2O_5/TiO_2$ catalyst impregnated ceramic candle filters in SCR reaction are observed: (1) It increases the activity and widens the temperature window for SCR. (2) When the content of $V_2O_5$ catalyst increases further from 3 to 9wt.%, activity of NO increases. (3) NO conversion at first increases with temperature and then decreases at high temperatures (above $400^{\circ} over), possibly due to the occurrence of the ammonia oxidation reaction.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.10-13
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• 2000

The notching effect in etching of un doped amorphous silicon gate had different characteristics and mechanism comparing with reported ones. The undoped amorphous silicon was etched by using HBr gas plasma, First, in the region of small line width, the potential was increased as a result of ions in the exposed surface of oxide, and the incident ions between the small line width were deflected more wide range, therefore the depth of notching was shallow and wide, Second, in the region of large line width of gate, electrons were charged on the top of photoresist and the side of gate, a part of ions deflected, The deflected ions were locally charged positive on the side of gate, and then the potential difference was produced, therefore, ions stored up more at independent line than at dense line, and nothing became deeper by Br ion bombardment.

• Journal of Environmental Science International
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• v.17 no.11
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• pp.1265-1271
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• 2008

Aerated submerged bio-film (ASBF) pilot plant has been developed. The presented studies optimized an inexpensive method of enhanced wastewater treatment. The objectives of this research were to describe pilot scale experiments for efficient removal of dissolved organic and nitrogen compounds by using ASBF reactor in plug-flow reactor (PFR) and improve understanding of dissolved organic matter and nitrogen compounds removal rates with dynamic relationships between heterotrophs and autotrophs in the fixed-film reactor. This research explores the possibility of enhancing the performance of shallow wastewater treatment lagoons through the addition of specially designed structures. This direct gas-phase contact should increase the oxygen transfer rate into the bio-film, as well as increase the micro-climate mixing of water, nutrients, and waste products into and out of the bio-film. This research also investigated the efficiency of dissolved organic matter and ammonia nitrogen removals in the ASBF. As it was anticipated, nitrification activity was highest during periods when the flow rate was lower, but it seemed to decline during times when the flow rate was highest. And ammonia nitrogen removal rates were more sensitive than dissolved organic matter removal rates when flow rates exceeded 2.2 L/min.

• Wind and Structures
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• v.21 no.6
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• pp.625-639
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• 2015

Monopiles have been most widely used for supporting offshore wind turbines (OWTs) in shallow water areas. However, multi-member lattice-type structures such as jackets and tripods are also considered good alternatives to monopile foundations for relatively deep water areas with depth ranging from 25-50 m owing to their technical and economic feasibility. Moreover, jacket structures have been popular in the oil and gas industry for a long time. However, several unsolved technical issues still persist in the utilization of multi-member lattice-type supporting structures for OWTs; these problems include pile-soil-interaction (PSI) effects, realization of dynamically stable designs to avoid resonances, and quick and safe installation in remote areas. In this study, the effects of PSI on the dynamic properties of bottom-fixed OWTs, including monopile-, tripod- and jacket-supported OWTs, were investigated intensively. The tower and substructure were modeled using conventional beam elements with added mass, and pile foundations were modeled with beam and nonlinear spring elements. The effects of PSI on the dynamic properties of the structure were evaluated using Monte Carlo simulation considering the load amplitude, scouring depth, and the uncertainties in soil properties.

• Korean Journal of Materials Research
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• v.16 no.5
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• pp.318-322
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• 2006

Short-term high temperature degradation test was conducted on Hastelloy X, a candidate tube material for high temperature gas-cooled reactors (HTGR), to evaluate the variation of microstructure and mechanical property in air at $1050^{\circ}C$ during 2000 h. The dominant oxide layer was Cr-oxide and a very shallow Cr-depleted region was observed below the oxide layer. At the beginning of degradation, the island shape $M_6C$ precipitate (M=Mo-rich, Fe, Ni, Cr) was observed in matrix region. After 2000 h degradation, precipitate shape was changed to the chain shape and increased amount of precipitate. These results influenced mechanical property of the specimen which exposed in high temperature. Yield strength was decreased from 115MPa to 89 MPa after 24 h and 2000 h exposure, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.219-219
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• 1999

플라즈마 이온 주입은 진공 chamber 내에 주입하려는 이온이 포함된 플라즈마를 발생시킨 후 처리하고자 하는 시편에 negative high voltage pulse를 인가함으로써 시편 주위에 형성되어 있는 이온들을 시편에 주입하는 방법이다. 이러한 플라즈마 이온 주입 방법은 금속의 내마모성, 내부식성, 강도 및 경도를 증가시키고, 고분자 화합물의 표면 개질에 있어서 친수성 또는 소수성과 같은 표면 처리를 쉽고 간단하게 처리할 수 있다. 그리고 반도체 공정의 shallow junction doping을 효과적으로 처리할 수 있으며 특히, 대면적의 시편에 균일하게 이온을 주입할 수 있다. 플라즈마 이온 주입 방법에서 중요한 요소는 dose, 즉 이온 주입한 양과 처리하려는 시편에 주입되는 이온의 에너지이다. 여기서, 플라즈마내에 생성된 이온들의 비율을 정확히 안다면 시편에 주입되는 이온의 양과 주입되는 이온의 에너지를 충분히 예견할 수 있다. 질소 플라즈마의 경우에는 N+와 N2+가 생성되므로, 시편에 주입된 질소 이온의 실질적인 이온당 질소 원자수는 1$\times$N+% + 2$\times$N+%가 되고, N2+의 경우는 N+ 주입 에너지의 1/2 로 시편내에 주입되게 된다. 또한 질소 플라즈마의 경우 N2+ 이온이 상대적으로 N+이온보다 많다면 N+가 많은 경우보다 이온 주입 깊이는 얕아지게 된다. 본 실험에서는 Dycor M-100 residual gas analyzer와 potical emission spectrometer (Ocean Optics SQ 2000)를 사용하여 압력과 RF power를 변화시키며 플라즈마내에 생성되어지는 질소 이온의 비율을 측정하였다. 또한 Langmuir probe를 이용하여 속도차에 의한 각 이온들의 존재비율을 계산하였다. 여기에서 질소 가스의 압력이 낮을수록 N+보다 N2+의 존재비율이 높음을 보였다. 이것은 압력이 낮은 영역에서 일반적으로 전자의 평균온도가 높기 때문으로 여겨진다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.59-59
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• 1999

DLC(diamond-like carbon)필름은 다이아몬드와 유사한 강도, 낮은 마차계수, 높은 Optical band gap, NEA(negative electron affinity)등의 우수한 특성을 가지고 있어, 내마모 코팅이나 정보저장 매체의 윤활 코팅, FED(field emission display)의 전계방출소자등 다양한 분야에의 응용이 연구되고 있다. DLC 필름은 PECVD(plasma enhanced chemical vapor deposition), IBAD(ion beam assisted deposition), Laser ablation, Cathodic vacuum arc등의 process를 이용하여 증착되고 있다. 특히 이러한 필름의 물성은 입사되는 이온의 에너지에 의해 좌우되는데, Lifshitz 등의 연구에 의하여 hyperthermal species를 이용한 DLC 필름의 성장은 초기에 subsurface로의 shallow implantation이 일어난 후 높은 sp3 fraction을 갖는 필름이 연속적으로 성장한다는 subplantation model이 제시 되었다. 본 연구에서는 기판과 subplantation 영역이 이후 계속하여 증착되는 순수 DLC 필름의 특성 변호에 미치는 영향에 대하여 관심을 가지고 실험을 행하였다. 본 실험에서는 상기 제시되어 있는 방법보다도 더욱 정확하고도 독립적으로 탄소 음이온의 에너지와 flux를 조절할 수 있는 Cs+ ion beam sputtering system을 이용하여 탄소 음이온의 에너지를 40eV에서 200eV까지 변화시키며 필름을 증착하였다. Si(100) 웨이퍼를 기판으로 사용하였고 증착 압력은 5$\times$10-7torr 였으며 인위적인 기판의 가열은 하지 않았다. 또한 Ion beam deposited DLC film의 growth process를 연구하기 위하여 200eV의 탄소 음이온을 시간(증착두께)을 변수로 하여 증착하였고, 이 때에는 Kaufman type의 gas ion beam을 이용하여 500eV의 Ar+ ion으로 pre-sputering을 행하였다. 탄소 음이온의 에너지와 증착두께에 따라 증착된 film 내의 sp3/sp2 ratio 의 변화를 XPS plasmon loss 와 Raman spectra를 이용하여 분석하였다. 또한 증착두께에 따른 interlayer의 결합상태를 관찰하기 위하여 AES와 XPS 분석을 보조로 행하였다.

• Korean Chemical Engineering Research
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• v.58 no.2
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• pp.307-312
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• 2020

Fluidized bed reactors operated in subatmospheric pressure has been focused because several industrial applications such as vacuum drying and plasma cvd requires reduced pressure fludization. However, the hydrodynamics of fluidized beds in subatmospheric pressure has not been extensively investigated. The pressure drop in the fluidized bed has been measured with variation of downstream pressures from 1.33 to 101.3 kPa in the shallow and deep fluidized beds under the sub-atmospheric pressures. The obtained minimum fluidization velocity of powders is a function of pressure due to the changes of gas density and mean free path. We can experimentally determine the critical Knudsen number and the critical pressure to define the slip regime significantly to influence the hydrodynamics of fluidized beds.

• 한국신재생에너지학회:학술대회논문집
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• 2008.10a
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• pp.200-202
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• 2008

동해 울릉분지에서는 시추선 RemEtive를 사용하여 UBGH-X-01 가스하이드레이트 탐사가 2007년에 실시되었다. 본 연구에서는 천부 가스하이드레이트가 확인된 UBGH1-10 정점에서 무인잠수정(Quantam WROV)을 사용하여 획득된 푸쉬코어와 해저지형 분석을 수행되었다.UBGH1-10 정점은 seismic chimneys의 탄성파 특성이 발달된 지역이다. 이곳에서는 해저표면으로부터 수 m 하부에서 가스하이드레이트가 발견되었다. 이 정점은 수 m 높이의 얕은 둔덕들이 무인잠수정에 부착된 비디오 카메라에 의해서 관찰되었다.이곳에서 채취된 길이 약40 cm의 푸쉬코어는 생물교란된 뻘질 퇴적물로 구성되어 있으며, 가스하이드레이트와 chemosynthetic community는 관찰되지 않았다. 푸쉬코어는 X-ray fluorescence scanner를 사용하여 퇴적물의 26가지 원소 조성을 분석하였다. UBGH1-10 정점의 산화환원환경은 Mo/Al과 Mn/Ti 원소비를 이용하여 천부 가스하이드레이트가 발견되지 않은 UBGH1-9와 UBGH1-1 정점과 대비하였다. 이 정점의 일차생산력은 Ba/Al 원소비를 이용하여 다른 정점과 대비하였다. 천부 가스하이드레이트가 발견된 UBGH1-10 정점은 활발한 가스방출과 관련된 생물집단 서식 또는 자생광물 형성의 흔적이 발견되지 않으며, 퇴적물에서도 산화환원환경과 일차생산력의 큰 차이가 관찰되지 않는다.