• Title/Summary/Keyword: semiconductor and LCD

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Process Simulation for Recovery and Recycling of Waste Chemicals Produced from Semiconductor and LCD Photo Processes (반도체 및 LCD photo 공정에서 발생되는 폐chemical의 재자원화를 위한 공정모사)

  • 유홍진;이윤배;신재식;한성록
    • Proceedings of the KAIS Fall Conference
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    • 2002.05a
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    • pp.127-129
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    • 2002
  • 본 연구는 반도체 및 LCD Photo 공정에서 발생되는 폐액의 재자원화를 위한 공정설계 data와 재자원화 기술의 성능향상을 위한 기초 자료를 제공하는데 있다. 재자원화 증류탑의 설계를 위한 공정모사를 통하여 공정폐액 재자원화의 최적조건을 설계할 수 있는 기초자료를 제안하였다.

Test tool for flow and self-leveling characters of coating materials of siloxane polymer used to semiconductor and electronic parts (반도체와 전자 부품에 사용되는 실록산 고분자 코팅물질의 흐름성 및 자기 퍼짐성 측정 시험장치 연구)

  • Kim, Cheol-Hyun;Cho, Hyeon-Mo;Lee, Myong-Euy
    • Analytical Science and Technology
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    • v.25 no.2
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    • pp.127-132
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    • 2012
  • A test tool for self-leveling and flowing characters of coating materials used to semiconductors and electronic parts, especially for protection of LCD and PDP connectors, was designed, and the test tool was evaluated using polymeric siloxane coating materials which have various viscosities. The test results showed that the designed test tool was effective to measure self-leveling and flowing properties of coating materials. Therefore, considering that the viscosity is not directly correlated with self-leveling and flowing properties, we believe that this test tool will be a very useful tool for measurement instead of classical method using viscosities of coating materials. Particularly, the measurement of self-leveling and flowing properties using the test tool would be expected to be used in the area of selecting suitable protective coating materials for LCD (Liquid Crystal Display), PDP (Plasma Display Panel) and semiconductor connection parts.

Stage System for LCD Exposure Equipment Using Touch-type Displacement Sensor (접촉형 변위센서를 이용한 LCD노광기용 스테이지 시스템)

  • Yim, Kwang-Kuk;Seo, Hwa-Il;Cho, Hyun-Chan;Kim, Kwang-Sun;Kang, Heung-Seok
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.1 s.18
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    • pp.7-10
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    • 2007
  • In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

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Analysis of New Air Control System in Clean Stocker(II) (Clean Stocker내 새로운 방식의 기류제어에 관한 연구(II))

  • Choi, Gi-Han;Han, Chang-Woo;Lee, Sang-Ryong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.6
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    • pp.1178-1186
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    • 2002
  • Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker. Up to now, stockers typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker. This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, in order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and experiment was also conducted using actual clean stocker for TFT-LCD manufacturers and CFDesign, was used for simulating airflow in stocker. As a result, open ratios of exits can be obtained by the analysis of static pressure regain and was verified by experiment and simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

53.1 Low power and low EMI display technologies based on the total image systematic approach

  • Okumura, Haruhiko;Baba, Masahiro;Takagi, Ayako;Sasaki, Hisashi;Matsuba, Mitsunori
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1081-1085
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    • 2009
  • We have already developed EMI reducing techniques using lossless compression by vertically differential EMI suppression method (VDE[1]). It applies lossless modulo reduction and data bit mapping optimization for low voltage differential signaling (LVDS) transmission lines, that reduces the probability of transient bit and EMI by 12 dB [6][7]. We also improved and optimized the VDE for low power LCD interface. With this modified VDE algorithm[8], the developed FPGA was measured the reduction of the power consumption of LCD circuit by more than 15 % compared to the conventional methods in the case of 14-in LCD with SXGA resolution. The VDE algorithm is based on the total image systematic approach. In the VDE method, the present image signals are subtracted for the 1H delayed image signals and transferred to a column driver through a PCB. As the vertical correlations for image signals are very high, we expected that most of the vertically subtracted image signals remain 0 level and transient cycles become very long. As a result, the power consumption and EMI are extremely reduced for the transferred image signals on a PCB. In this paper, we discussed our proposed method by emphasizing the fact that systematic approach are important based on not only display point of view but also total system point of view.

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Micro Grooving of Glass Using Micro Abrasive Jet Machining (Micro Abrasive Jet Machining을 이용한 유리의 미세 홈 가공)

  • Choi, Jong-Soon;Park, Keong-Ho;Park, Dong-Sam
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.10
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    • pp.178-183
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    • 2001
  • Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

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Micro Groove Cutting of Glass Using Abrasive Jet Machining (Abrsive Jet Machining을 이용한 유리의 미세 홈 가공)

  • 최종순;박경호;박동삼
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.11a
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    • pp.963-966
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    • 2000
  • Abrasive jet machining(AJM) process is similar to the sand blasting, and effectively removes hard and brittle materials. AJM has applied to rough working such as deburring and rough finishing. As the needs for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro groove cutting of glass. Diameter of hole and width of line in this groove cutting is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro groove cutting in glass, but the size of machined groove was increased about 2~4${\mu}{\textrm}{m}$. therefore, this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD parts.

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A Study on Cooling Conditions of a Linear Motor used in an Exposer for the Manufacturing LCD (LCD 제조용 노광기에 사용되는 리니어 모터의 냉각조건에 대한 연구)

  • Yang, Hong Cheon;Lee, Young Nam;Kim, Kwang Sun
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.4
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    • pp.31-36
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    • 2012
  • The high thrust of the linear motor in the exposer generates the high temperature heat by the friction and the electromagnetic forces on its coil. It can cause the thermal deformation and the accuracy of the equipment is finally decreased which has a bad effect on the productivity. In this research, the heat and flow on the linear motor of the exposer has been analyzed. The existing equipment is non-contact fluid refrigerant type. The numerical analysis data of the existing equipment have been acquired and the reliability of the data has been verified. The revised modeling for the next-generation is suggested for cooling the exposer effectively.

A Low-Power Two-Line Inversion Method for Driving LCD Panels

  • Choi, Sung-Pil;Kwon, Kee-Won;Chun, Jung-Hoon
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.16 no.4
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    • pp.481-487
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    • 2016
  • A new two-line based inversion driving method is introduced for low power display-driver ICs. By inserting a timing offset between the chopper stabilization and the alternation of LCD polarity, we can reduce power consumption without noticeable degradation in the display quality. By applying the proposed scheme to 12" LCD applications, we achieved 7.5% and 27% power saving in the display-driver IC with white and black patterns, respectively.