Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on Cooling Conditions of a Linear Motor used in an Exposer for the Manufacturing LCD

LCD 제조용 노광기에 사용되는 리니어 모터의 냉각조건에 대한 연구

  • Yang, Hong Cheon (Department of Mechatronics Engineering, The Graduate School of Korea University of Technology and Education) ;
  • Lee, Young Nam (Department of Mechanical Engineering, The Graduate School of Korea University of Technology and Education) ;
  • Kim, Kwang Sun (Department of Mechatronics Engineering, Korea University of Technology and Education)
  • 양홍천 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 이영남 (한국기술교육대학교 대학원 산업기술공학과) ;
  • 김광선 (한국기술교육대학교 메카트로닉스공학부)
  • Received : 2012.12.04
  • Accepted : 2012.12.18
  • Published : 2012.12.31
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Abstract

The high thrust of the linear motor in the exposer generates the high temperature heat by the friction and the electromagnetic forces on its coil. It can cause the thermal deformation and the accuracy of the equipment is finally decreased which has a bad effect on the productivity. In this research, the heat and flow on the linear motor of the exposer has been analyzed. The existing equipment is non-contact fluid refrigerant type. The numerical analysis data of the existing equipment have been acquired and the reliability of the data has been verified. The revised modeling for the next-generation is suggested for cooling the exposer effectively.

Keywords

References

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