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A Study on Cooling Conditions of a Linear Motor used in an Exposer for the Manufacturing LCD  

Yang, Hong Cheon (Department of Mechatronics Engineering, The Graduate School of Korea University of Technology and Education)
Lee, Young Nam (Department of Mechanical Engineering, The Graduate School of Korea University of Technology and Education)
Kim, Kwang Sun (Department of Mechatronics Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.11, no.4, 2012 , pp. 31-36 More about this Journal
The high thrust of the linear motor in the exposer generates the high temperature heat by the friction and the electromagnetic forces on its coil. It can cause the thermal deformation and the accuracy of the equipment is finally decreased which has a bad effect on the productivity. In this research, the heat and flow on the linear motor of the exposer has been analyzed. The existing equipment is non-contact fluid refrigerant type. The numerical analysis data of the existing equipment have been acquired and the reliability of the data has been verified. The revised modeling for the next-generation is suggested for cooling the exposer effectively.
Exposer; Linear Motor; CFD; Numerical Analysis;
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  • Reference
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