• 한국가스학회:학술대회논문집
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• 1997.09a
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• pp.260-265
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• 1997

Analysis of trace impurities in the bulk .gas has been very important with the development of semi-conductor related industry. In the paper, we reported the analysis of the trace impurites of carbon monoxide and methane in the bulk helium and hydrogen by the GC-TCD with a cold nitrogen trap. We compared these results by the paraallel analysis. All data showed a good correspondence, showing reliable statistical error ranges.

• Journal of Korean Institute of Industrial Engineers
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• v.25 no.1
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• pp.35-46
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• 1999

The introduction of general purpose machining centers and the information system based on computer network has added a new control problem to the classical job shop control problems: a routing problem. A routing problem is to determine the machine on which a part will be processed. The modern manufacturing systems are given much system status information including the arrival time of the future parts via the computer network for automation. This paper presents and tests the performance of a routing procedure, LARP(Look-Ahead Routing Procedure) which uses look-ahead information on the future arrival of parts in the system. The manufacturing system considered in this paper has multi-stations which consists of general purpose machines and processes parts of different types. The application of LARP under many operating conditions shows that the reduction of part flow time and tardiness from the cases without using this information is up to 8% for flow time and 21% for tardiness. The procedure introduced here can be used for many highly automated systems such as an FMS and a semi-conductor fabrication system for routing where the arrivals of parts in the near future are known.

• Journal of the Korean Society of Safety
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• v.33 no.2
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• pp.28-31
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• 2018

In display and semi-conductor manufacturing process, there are numerous unstable factors such as particle concentration, minimal vibration, changes in magnetic field, or electrostatic that becomes an issue to be managed and controlled. In the recent, X-ray ionization is widely used that is neutralized by separating air or gas molecules in the area where the static must be resolved. The mono-type of X-ray ionizer was not capable to be used in $8^{th}$ generation panels manufacturing plant due to its insufficient ionizing coverage since the panel itself is approximately in $2m{\times}3m$. To resolve the current problem, the development of new type called, "Multi-type X-ray ionizer" has resulted in covering enough ionizing space in $8^{th}$ generation panels industry. Comparing mono and multi types with MCNPX code simulation, the multi one indicates more X-ray flux, efficiency, and ionization performance in comparison with either a mono-type or multi-type in array format. In addition, the ionizing efficiency of overlapping area with multi-type showed 30% higher effectiveness rate as to the ordinary mono-type.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2003.05a
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• pp.674-677
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• 2003

Modern society is information-oriented society that allow letters in electron, telecommunication, computer, highly Information-Communication and information processing by great development of semi-conductor technologies. All businesses are depending on computer. Also, Great many user according to development who is worth watching eagerly of computer network and utilization of database and technology could collect, search, handle, transmit and store data at the same time using computer. But, while processing and use of information that use computer become convenient, exposure of data became serious relatively. For these reason, Security problem of data that need the secret rose. Accordingly, new encryption methods to use computer for security of data are presented and are developed continuously. Studied about DES, 3DES, RSA, ECC algorithm to select cipher algorithm to use in research hereafter in this treatise.

• 한국연소학회:학술대회논문집
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• 2000.12a
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• pp.168-174
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• 2000

A diode laser sensor system based on absorption spectroscopy techniques has been developed to measure $CO_2$ concentration and temperature non-intrusively in high temperature combustion environments using a 2.0 ${\mu}m$ DFB(Distributed Feedback) laser. Two optics was fabricated in pig-tail fashion and all optical components were implemented in a single box. The evolution of measurement sensitivity was done using test cell by changing sweep frequency and $CO_2$ concentration. Gas temperature was determined from the ratio of integrated line strengths. Species concentration was determined from the integrated line intensity and the measured temperature. The result show that the system has 2% error in wide operation frequency range and accuracy of $CO_2$ concentration was about 3%. The system was applied to measure temperature and concentration in the combustion region of a premixed $CH_4$ +air triangular flame. The measurement results of gas temperature agreed well with thermocouple results. Many considerations were taken into account to reduce optical noise, etalon effect, beam steering and base line matching problem. The evaluations results and actual combustion measurement demonstrate the practical and applicability for in-situ and real time combustion monitoring in a practical system.

• Journal of the Korean Operations Research and Management Science Society
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• v.22 no.2
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• pp.79-97
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• 1997

Many dispatching rules have been developed for the on-line control of product flow in a job shop. The introduction of a flexible manufacturing system (FMS) has added a new requirement to classical job shop control problem : the selection of machines by parts of different types. An FMS can keep a great deal of information on the status of the system, such as information on what is scheduled in the near future, with great accuracy. For example, the knowledge of the time when the next part will arrive at each machine can be neneficial for the routing. This paper tests the effects of the use of this knowledge for part routing on the parts flow time (sum of the time for waiting and service) under a simple routing procedure- a look-ahead routing procedure. A test under many operating conditions shows that the reduction of part flow time from the cases without using this information is between 1% and 11%, which justifies more study on this routing procedure at real production sites when machine capacity is a critical issue. The test results of this paper are also valid for other highly automated systems such as the semi-conductor fabrication plants for routing when the arrivals of parts in the near future are known.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.3
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• pp.1002-1007
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• 2012

The manufacturing method of the pillar is one of the main process where it is used in vacuum glazing and semi-conductor display field. Pillar can be arranged by screen printing method. However it may unable to spread all pattern of metal mask according to the ingredient of the mixture. In addition, spreaded mixture doesn't maintain the original shape according to the viscosity. In this research, the pillar tried to be arranged through the screen printing by using the inorganic compound of the alumina and silica base. This study suggested a method in which it can decrease the test frequency and design the composition of the vacuum glass pillar by using the mixture design.

• Journal of Industrial Technology
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• v.24 no.A
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• pp.17-22
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• 2004

In the study, we have developed a straightening system for 304 micro wires that are normally used in the medical and semi-conductor fields. To apply heat to the micro wires, we introduced the direct wire heating method which generates the thermal energy by the electrical resistance of the wire itself. To avoid the deterioration of the wire surface by the environment, such as the oxidation or the hydration, the $N_2$ gas was filled in the glass pipe in which the straightening process was being performed. A precision tension meter was also attached to control the tension of the wire during the heating and straightening process. In order to control the straightening process, several experimental investigations with varying the tension, the feeding velocity and the temperature (current) was carried out. As a result of experiments, we obtained the optimal processing conditions satisfying the straightness requirement of the micro wires.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.123-127
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• 1997

Recently, it is gradually raised necessity that interface is measured accurately and managed in industrial circles and medical world, An Ultrasonic wave transmitted from a focused beam transducer is being expected as a powerful tool for NDE of micro-defect. The ultrasonic NDE of the defect is based on the form of the wave reflected form the interface In this study, regarding to the thickness of film which is in opaque object and thickness measurement was done by MEM-cepstrum analysis of received ultrasonic wave. In measument results, film thickness which is beyond distance resolution capacity was measured accurately. Also, automatically repeated discrimination analysis method can be decided in the category of all kinds of defects on semiconductor package.

• Journal of the Korean Ceramic Society
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• v.54 no.4
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• pp.331-339
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• 2017

Porous alumina-based ceramics are of special interest due to their outstanding mechanical properties and their thermal and chemical stability. Nevertheless, the high electrical resistance of alumina-based ceramics, due to the generation of static electricity, leads to difficulty in applying a vacuum chuck in the semi-conductor process. Therefore, development of alumina-based ceramics for applications with vacuum chucks aims to have primary properties of low electrical resistance and high air permeability. In this study, we tailored the electrical resistance of porous alumina-based ceramics by adjusting the amount of $MnO_2$ (with $TiO_2$ fixed at an amount of 2 wt%) and by using coarse alumina powder for high air permeability. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimeter, capillary flow porosimetry, universal testing machine, X-ray diffraction and high-resistance meter.