• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.284-284
• /
• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.132-132
• /
• 2010

In the nano-scale Si processing, patterning processes based on multilevel resist structures becoming more critical due to continuously decreasing resist thickness and feature size. In particular, highly selective etching of the first dielectric layer with resist patterns are great importance. In this work, process window for the infinitely high etch selectivity of silicon oxynitride (SiON) layers and silicon nitride (Si3N4) with EUV resist was investigated during etching of SiON/EUV resist and Si3N4/EUV resist in a CH2F2/N2/Ar dual-frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters, such as the CH2F2 and N2 flow ratio and low-frequency source power (PLF). It was found that the CH2F2/N2 flow ratio was found to play a critical role in determining the process window for ultra high etch selectivity, due to the differences in change of the degree of polymerization on SiON, Si3N4, and EUV resist. Control of N2 flow ratio gave the possibility of obtaining the ultra high etch selectivity by keeping the steady-state hydrofluorocarbon layer thickness thin on the SiON and Si3N4 surface due to effective formation of HCN etch by-products and, in turn, in continuous SiON and Si3N4 etching, while the hydrofluorocarbon layer is deposited on the EUV resist surface.

• 전기학회논문지
• /
• 제60권6호
• /
• pp.1196-1203
• /
• 2011

The reduced frequency selectivity is a typical phenomenon of sensorineural hearing loss. In this paper, we compared two modeling methods for reduced frequency selectivity of hearing impaired people. The two models of reduced frequency selectivity were made using LPC(linear prediction coding) algorithm and bandwidth control algorithm based on ERB(equivalent rectangular bandwidth) of auditory filter, respectively. To compare the effectiveness of two models, we compared the result of PESQ (perceptual evaluation of speech quality) and LLR(log likelihood ratio) using 36 Korean words of two syllables. To verify the effect on noise condition, we mixed white and babble noise with 0dB and -3dB SNR to speech words. As the result, it is confirmed that the PESQ score of bandwidth control algorithm is higher than the score of LPC algorithm, on the other hands, and the LLR score of LPC algorithm is lower than the score of bandwidth control algorithm. It means that both non-linearity and widen auditory filter characteristics caused by reduced frequency selectivity could be more reflected in bandwidth control algorithm than in LPC algorithm.

• 수산해양기술연구
• /
• 제59권2호
• /
• pp.99-109
• /
• 2023

In this study, a comparative test operation was conducted through the alternate haul method to examine the selectivity of the four mesh sizes (60 mm, 90 mm, 110 mm, and 130 mm) of the trawl codend. The selectivity was analyzed using the SELECT model considering the fishing efficiency (split parameter) of each fishing gear in the comparative test fishing operation in the trawl and the maximum likelihood method for parameter estimation. A selectivity master curve was estimated for several mesh sizes using the extended-SELECT model. As a result of analyzing the selectivity for silver croaker based on the results of three times hauls for each experimental gear, it was found that the size of the fish caught increased as the size of the mesh size increased. When the selectivity for each mesh size analyzed by the SELECT model considering the split ratio was evaluated based on the size of the AIC value, the estimated split model was superior to the equal split model. Based on the master curve, the 50% selection length value was 2.893, which was estimated to be 136 mm based on the mesh size of 60 mm. In some selectivity models, there was a large deviance between observed and theoretical values due to the non-uniformity of the distribution of fished length classes. As a result, it is considered that appropriate sea trials and selectivity evaluation methods with high reliability should be applied to present trawl fishery resource management methods.

• 수산해양기술연구
• /
• 제33권1호
• /
• pp.1-8
• /
• 1997

To find the tooth selectivity of the dredge for catching the ark shell Scapharca broughtonii, the probabilities of the ark shells which are not sifting through the gaps between teeth were calculated for the various shell lengths. Considering that these probabilities are in proportion to the relative catching efficiencies, selectivity curves for the ark shell dredge were estimated for the various gaps between teeth. The ratio of the shell length of ark shell to the distance between teeth indicating the relative catching efficiencies of 0%, 50%, 100% respectively, were calculated by using these selectivity curves, and the values were 1.00, 1.32, 1.54 in the distance of 4.0cm between teeth and then, the ratios showed a slight tendency to decrease as the distance between teeth increased in the relative catching efficiency of 100%, In addition, the range of shell length for catching, that is, the range of selective shell length by the distance between teeth was 0.54 in the distance of 4.0cm between teeth.

• 한국지하수토양환경학회:학술대회논문집
• /
• 한국지하수토양환경학회 2001년도 총회 및 춘계학술발표회
• /
• pp.168-171
• /
• 2001

Organobentonite modified with hexadecyltrimethylammonium (HDTMA) was used to quantify an adsorption of heavy metals. Based on preliminary experiments, optimal soil/solution ratio, a range of pH, and electrolyte were selected. Adsorption experiments of cadmium and lead were conducted to quantify an adsorption selectivity to bentonite and organobentonite. Adsorption of cadmium and lead to bentonite was increased with increasing a soil/solution ratio. Adsorption of cadmium and lead to bentonite was increased with increasing a soil/solution ratio. Adsorptions of heavy metal to organobentonite were slightly reduced relative to bentonite. This study used the principle of hard-soft-acid-base (HBAB) to interpretate an adsorption mechanism. Because of competition between cadmium and lead. adsorption of cadmium and lead was reduced in mixture of heavy metals. Adsorption selectivity.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.307-307
• /
• 2013

초고집적 회로에 적용되는 반도체 소자의critical dimension (CD)이 수 nano 사이즈로 줄어들고 있기 때문에, 다양한 물질의 식각을 할 때, 건식식각의 중요성이 더 강조되고 있다. 특히 $SiO_2$와 같은 유전체 물질을 식각할 때, plasma process induced damages (P2IDs)가 관찰되어 왔고, 이러한 P2IDs를 줄이기 위해, pulsed-time modulation plasma가 광범위하게 연구되어 왔다. Pulsed plasma는 정기적으로 radio frequency (RF) power on과 off를 반복하여 rf power가 off된 동안, 평균전자 온도를 낮춤으로써, 웨이퍼로 입사되는 전하 축적을 효과적으로 줄일 수 있다. 또한 fluorocarbon plasmas를 사용하여 $SiO_2$를 식각하기 위해 Dual-Frequency Capacitive coupled plasma (DF-CCP)도 널리 연구되어 왔는데, 이것은 기존의 방법과는 다르게 plasma 밀도와 ion bombardment energy를 독립적으로 조절 가능하다는 장점이 있어서 미세 패턴을 식각할 때 효과적이다. 본 연구에서는 Source power에는 60 MHz pulsed radio frequency (RF)를, bias power에는 2 MHz continuous wave (CW) rf power가 사용된 system에서 Ar/$C_4$ F8/$O_2$ 가스 조합으로, amorphous carbon layer (ACL)가 hard mask로 사용된 $SiO_2$를 식각했다. 그리고 source pulse의 duty ratio와 pulse frequency의 효과에 따른 $SiO_2$의 식각특성을 연구하였다. 그 결과, duty ratio의 감소에 따라 $SiO_2$, ACL의 etch rate이 감소했지만, $SiO_2$/ACL의 etch selectivity는 증가하였다. 반면에 pulse frequency의 변화에 따른 두 물질의 etch selectivity는 크게 변화가 없었다. 그 이유는 pulse 조건인 duty ratio의 감소가 전자 온도 및 전자 에너지를 낮춰 $C_2F8$가스의 분해를 감소시켰으며, 이로 인해 식각된 $SiO_2$의 surface와 sidewall에 fluorocarbon polymer의 형성이 증가하였기 때문이다. 또한 duty ratio의 감소에 따라 etch selectivity뿐만 아니라 etch profile까지 향상되는 것을 확인할 수 있었다.

• Bulletin of the Korean Chemical Society
• /
• 제25권10호
• /
• pp.1465-1470
• /
• 2004

A short and efficient synthesis, solvent extraction and potentiometric measurements of new thiazole-containing naphtho-crown ethers are reported. The naphthalene moiety enhances the ammonium ion selectivity over potassium ion. The selectivity of ${NH_4}^+/K^+$ follows the trend $3\;{\approx}\;2\;>\;1$, indicating that the differences in conformational changes of 2 and 3 in forming ammonium complexes affect little on the resulting ammonium/potassium extraction selectivity ratio. The ammonium ion-selective electrodes were prepared with noctylphenyl ether plasticized poly(vinyl chloride) membranes containing 1-4 the effect of one naphthalene unit introduced on either right (2) or left (3) side of thiazolo-crown ether on their potentiometric properties (e.g., ammonium ion selectivity over other cations, response slopes, and detection limits) were not apparent. However, the ammonium ion selectivity of 1, 2 and 3 over other alkali metal and alkaline earth metal cations is 10-100 times higher than that of nonactin.

• 센서학회지
• /
• 제21권6호
• /
• pp.446-450
• /
• 2012

The important factors in sensors are sensitivity, selectivity, and response time. Oxide semiconductors are high sensitivity, fast response and the advantage of miniaturization. Zn-doped $SnO_2$ materials have been synthesized in order to improve the selectivity of the sensor. ZnO/$SnO_2$ crystals were prepared by a simple hydrothermal process and ultrasound pretreated hydrothermal process. ZnO/$SnO_2$ urchins were fabricated in the precursor solution with [$Zn^{2+}$]:[$Sn^{4+}$] ratio of 1:5 and rod structures were fabricated ratio of 1:1 and 1:3. Surface area ratio was increased by increasing the ratio of [$Sn^{4+}$]. The sensitivity of sensors were highest at the [$Zn^{2+}$]:[$Sn^{4+}$] ratio of 1:5 in ethanol, acetaldehyde, toluene, and nitric oxide.

• Korean Membrane Journal
• /
• 제5권1호
• /
• pp.43-53
• /
• 2003

The selectivity of a gas in the carbon molecular sieve membrane (CMSM) can be expressed as the ratio of the product of the diffusivity and the solubility of two different gases. The diffusivity is also expressed as the product of the entropy and the total energy (kinetic and potential energy) in the nano-sized pore of the membrane. The present study calculates the entropic-energy and selectivity of penetrant gases such as H$_2$, O$_2$, N$_2$, and CO$_2$ from the gas-in-a box theory to physically analyze the diffusivity of penetrant gas in slit-shaped pore of CMSM focusing on the restriction of gas motion based on the size difference between penetrant gas pairs. The contribution of each energy term is converted to entropic term separately. By the conjugated calculation for each entropic-energy, the entropic effects on diffusivity-selectivity for gas pairs such as H$_2$/N$_2$, CO$_2$/N$_2$, and O$_2$/N$_2$ were analyzed within active pore of CMSM. In the activated diffusion domain, the calculated value of entropic-selectivity lies between 9.25 and 111.6 for H$_2$/N$_2$, between 3.36 and 6.0 for CO$_2$/N$_2$, and between 1.25 and 16.94 for O$_2$/N$_2$, respectively. The size decrement of active pore in CMSM had the direct effect on the reduction of translational entropic-energy and the contribution of vibrational entropic-energy for N$_2$, O$_2$, and H$_2$ was almost negligible. However, the vibrational entropic term of CO$_2$ might extravagantly affect on the entropic-selectivity.