• 한국재료학회지
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• 제15권6호
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• pp.426-430
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• 2005

Chemical mechanical polishing (CMP) is an essential process in the production of integrated circuits containing copper interconnects. The effect of alanine in reactive slurries representative of those that might be used in copper CMP was studied with the aim of improving selectivity between copper(Cu) film and tantalum-nitride(TaN) film. We investigated the pH effect of nano-colloidal silica slurry containing alanine through the chemical mechanical polishing test for the 8(inch) blanket wafers as deposited Cu and TaN film, respectively. The copper and tantalum-nitride removal rate decreased with the increase of pH and reaches the neutral at pH 7, then, with the further increase of pH to alkaline, the removal rate rise to increase soddenly. It was found that alkaline slurry has a higher removal rate than acidic and neutral slurries for copper film, but the removal rate of tantalum-nitride does not change much. These tests indicated that alanine may improve the CMP process by controlling the selectivity between Cu and TaN film.

• 한국산학기술학회논문지
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• 제3권3호
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• pp.194-197
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• 2002

이온교환은 액체상 이온과 고체상 이온간의 화학반응이며 연수 및 탈염공정, 특정물질의 제거 및 회수, 토양을 통한 이온성 물질의 이동에서 널리 이용되고 있다. 이온 선택도는 원자가가 높을수록, 수화반경이 작을수록 증가한다. 본 연구는 평형 이온교환에서 결정된 이온 선택도가 칼럼 이온교환에 적용되는 가를 조사하였다. 음이온 교환수지에 대한 이온 선택도 순서는 OH/sup -/ < F/sup -/ < HCO/sup -/ < Cl/sup -/ < Br/sup -/ ≤ NO₃/sup -/ < SO₄/sup 2-/ 이였으며, 음이온 칼럼교환에서도 동일하였다. 또한 바탕 양이온의 전하가 낮을수록 이온교환이 빠르게 진행됨을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• 한국음향학회지
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• 제24권8호
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• pp.454-461
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• 2005

수중음향채널의 다중경로에 의한 수신신호의 지연확산은 ISI (Inter-Symbol Interference)를 유발하여 수중음향 통신시스템의 성능을 저하시킨다. 본 연구에서 적용하는 수동 페이저 컨쥬게이션 기법은 신호대 다중경로 간섭 신호비를 크게 하여 다중경로에 의한 주파수 선택성을 경감시켜 ISI를 줄이는 다이버시티 통신기법이다. 신호 대 다중경로 간섭신호비의 개선과 이에 따른 주파수 선택성은 수동 페이저 컨쥬게이션에 적용하는 수신기 배열의 배열 센서 개수, 송수신기의 상대운동에 의해 좌우되며, 따라서 비트 오류특성이 결정된다. 본 연구에서는 이들의 특성을 수치모의 실험으로 해석하였다.

• 멤브레인
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• 제9권2호
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• pp.107-113
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• 1999

상업용 PDMS(polydimethylsiloxiane) 복합막과 플라즈마 처리된 PP(polypropylene)막을 사용하여 투과증발에 의한 알코올 농축을 수행하였고, 공정 조업 변수에 따른 영향을 조사하였다. PDMS막에 대한 부탄올의 친화력과 물의 친화력보다 크기 때문에 공급액의 부탄올 농도가 증가함에 따라 투과량의 선택도가 모두 증가하였다. 조업 온도가 증가함에 따라 고분자 사슬내의 자유 부피)free volume)가 증가하고 막에 대한 알코올과 물의 용해도 및 확산계수도 증가하여 투과량은 증가하였지만, 선택도는 감소하였다. PDMS 막과 용해도 계수(solubility parameter)값의 차가 적은 알코올일수록 높은 투과량과 선택도를 나타내었다. PP막을 메탄올로 플라즈마 처리한 경우 PDMS 복합막과 유사한 분리효율을 나타내면서도 투과량은 6배나 증가하였다. 플라즈마 처리 시간에 따라 투과량과 선택도는 모두 향상되었으나 일정 시간 이후에는 기공의 막힘 현상으로 투과량은 감소하였다.

• Bulletin of the Korean Chemical Society
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• 제30권3호
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• pp.599-607
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• 2009

A series of conjugated cyclic and linear enkephalin analogs, Tyr-c[D-A2bu-Gly-Phe-Asp(NH-X)], where X = methyl, stearyl or$ PEG_350$, and Tyr-D-Ala-Gly-Phe-Cys(S-X), where X = methyl, octyl, or farnesyl, were synthesized in solution to investigate the receptor selectivity of opioids based on Schwyzer's membrane compartment $concepts.^{5,6}$ Cyclizations of the target compounds were achieved in high yields (> 60%) employing BOP, $NaHCO_3$ in DMF despite the steric hindrance of the bulky pendant groups. In the binding assay, the hydrophobic fatty acyl conjugates retained $\mu$-receptor selectivity. The unsaturated farnesyl conjugate exhibited the increased binding affinity than the saturated stearyl conjugate for both $\mu$-and $\delta$-opioid receptors. The PEG conjugates displayed the $\delta$-receptor selectivity. The low molecular weight $PEG_350$ conjugate exhibited the increase selectivity than the high molecular weight $PEG_5000$ conjugate to the $\delta$-receptor. The results of this study support the membrane compartment concepts.

• 한국통신학회논문지
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• 제33권3A호
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• pp.248-255
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• 2008

OFDMA 시스템에서 주파수축에서의 다중사용자 스케줄링의 성능은 채널의 주파수 선택적 특성과 상관이 있다. 채널이 주파수축에서 평탄하면 다중사용자 스케줄링의 이득이 줄어들 수 있으며 반대로 주파수 선택적 특성이 너무 커서 할당 대역폭 내에서 채널의 변화가 심하게 일어난다면 충분한 스케줄링 이득을 얻기 어려워진다. 다중 사용자 스케줄링 이득을 최대화하기 위해서는 순환지연 다이버시티를 적용하여 채널의 주파수 선택적 특성을 조절할 수 있다. 이 논문에서는 할당 대역폭과 채널 특성을 고려하여 순환지연 다이버시티를 적용할 때의 최적의 지연값을 결정하는 방법을 제안한다.

• Journal of Electrical Engineering and information Science
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• 제2권5호
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• pp.108-113
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• 1997

In this paper, the optimum condition of (110) Si etching with the potassium hydroxide(KOH) etchant is presented. Although several researches on (110) Si anisotropic etching have been studied, there has been lack of effects of mask quality and etching conditions on the selectivity and the roughness o the etched surface. Three kinds of masks (film, emulsion and E-beam mask) were used in order to verify the effect of etching properties. Anisotropic bulk etching depends on the crystalline orientation and the concentration and temperature of the etchant. In order to investigate the effect of etching conditions on selectivity and the roughness of the etched surface, the concentration of the etchant was varied from 35 to 45 per cent in weight with increments by 5 per cent and the temperature was changed from 70 to 90$^{\circ}C$ with increments by 10$^{\circ}C$. The combination of the temperature of 70$^{\circ}C$ and the concentration of 40wt.% was found to be the optimum etching condition for high selectivity. Etched surfaces show minimum surfaces show minimum surface roughness at a temperature of 80$^{\circ}C$ and a concentation of 40wt.%. Comb structures with various comb widths were fabricated and the lengths of the combs wree measured with several etching time durations. A micro comb structure 525$\mu\textrm{m}$ high was fabricated for MEMS application.

• Weed & Turfgrass Science
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• 제5권4호
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• pp.191-195
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• 2016

Tefuryltrione is a new hydroxyphenylpyruvate dioxygenase (HPPD) inhibitor, which has been recently registered for the use for paddy rice, Korea. Dose-response studies were conducted to compare rice safety and weed control efficacy of tefuryltrione against Eleocharis kuroguwai. When rice and E. kuroguwai were applied at a range of doses of tefuryltrione, $GR_{90}$ values (the dose required to inhibit weed growth by 90%) of E. kuroguwai were $82.38-93.39g\;a.i.\;ha^{-1}$ in two independent experiments. The $GR_{10}$ values (the dose required to inhibit rice growth by 10%) of tefuryltrione for rice were $297.77-471.54g\;a.i.\;ha^{-1}$. As a result, the selectivity indices ($GR_{10}$ for $rice/GR_{90}$ for E. kuroguwai) of tefuryltrione were 3.19-5.72. Therefore, these results demonstrate that tefuryltrione has a relatively high selectivity between rice and E. kuroguwai with a high herbicidal activity against E. kuroguwai and a good rice safety.

• 수산해양기술연구
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• 제55권3호
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• pp.181-189
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• 2019

Discarding juvenile fishes under girth 16 cm nearly equal to inner perimeter of codend mesh size collected by a cover net method in bottom trawl. The body size of the main five species (mackerel, horse mackerel, sea bream, melon seed and black throat seaperch) was measured for their body length, girth, weight, height and width and analyzed size selectivity. Frequency of penetrating fish as retention in a cover net was less than 40% of total number of juvenile discarding fish. The most of body length or girth of five species were significantly different between in the codend and in the cover net. The 50% selection girth in the cover net ranged 8-11 cm were smaller than those in the codend ranged 9-13 cm by the species respectively. The 50% selection body length was significantly related with the ratio of body height (H) by body width (W) both for in the codend or in the cover net while 50% selection girth was not significantly related with H/W. Furthermore 50% selection fish size by fish species between in the codend and in the cover net was not significantly different both in body length or girth. Therefore, the girth selectivity represented possibly as one unique value regarding fish body shape was considered as more useful method for multi-species catch in trawl.