Effect of Alanine on Cu/TaN Selectivity in Cu-CMP |
Park Jin-Hyung
(Nano-SOI Process Laboratory, Hanyang University)
Kim Min-Seok (Nano-SOI Process Laboratory, Hanyang University) Paik Ungyu (Department of Ceramic Engineering, Hanyang University) Park Jea-Gun (Nano-SOI Process Laboratory, Hanyang University) |
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