• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.68-68
• /
• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• Magazine of the Korean Society of Agricultural Engineers
• /
• v.33 no.3
• /
• pp.51-62
• /
• 1991

A comprehensive laboratory investigation of the liquefaction characteristics of Jumunjin standard sand. Seoul sand and Hongsung sand was peformed by the undrained cyclic triaxial compression test under different relative densities, confining pressures and cyclic deviator stresses. The results obtained are as follows ; 1. Liquefaction potential was dominated by the stress ratio at a given number of cycle. That is, the number of cycle required to cause initial liquefaction became samller as the stress ratio increased. 2. Liquefaction potential of a sand was infliuenced by initial relative density or void ratio. Under a given relative density. liquefaction potential of Jumunjin standard sand and Seoul sand was smaller than that of Hongsung sand. 3. The pore pressure ratio of Hongsung sand was the smallest three under a given relative density and stress ratio, and it showed higher value when the cyclic stress and the shear strain were high. 4. An excessive pore pressure ratio not found when initial shear was smaller than 0.01%, and the pore pressure ratio started to increase when initial shear became greater than 0.01%. 5. Soil texture is an important factor to cause liquefaction, and liquefaction potential decreased a the mean grain size decreased. however the sand having fine grain such as Hongsung sand showed somewhat higher liquefaction potential. 6. Based on the analysis of the specimens whose number of the cycles to cause liquefaction was 8~12, it was found that the relationship between density and stress ratio was linear. The curves for Hongsung sand was steeper than the other. 7. From the above results and the method suggested by Seed-Idriss, it may be considered that the damages by Hongsung earthquake was not directly caused by liquefaction.

• KOREAN JOURNAL OF CROP SCIENCE
• /
• v.56 no.3
• /
• pp.244-249
• /
• 2011

A sensitive and rapid high-performance liquid chromatographic-tandem mass spectrometric (HPLC/MS/MS) assay was developed for the determination of soyasaponins in soybean. Among soyasaponins, soyasaponin I was isolated and characterized from methanol extracts of soybean as analytical standards and the development of a new analytical procedure for quantification of its content in various cultivars. The structures of these compound was elucidated by $^1H$, $^{13}C$ NMR experiments and by mass spectrometric analysis. Aqueous ethanol extracts of soybean samples were injected on an Agilent XDB-C18 column ($4.6mm{\times}50mm$, $1.8{\mu}m$) with a mobile phase consisting of 10 mM ammonium acetate-acetonitrile, a flow rate of 0.3 mL/min and a total run time of 8 min. Detection was performed by mass spectrometer bin the multiple reaction monitoring (MRM) mode with negative electrospray ionization (ESI) m/z at 941 ${\rightarrow}$ 615 for soyasaponin I. In the 9 soybean samples, contents of soyasaponin I ranged from 205 to 726 mg/kg, and correlated negatively with seed size.

• Development and Reproduction
• /
• v.19 no.4
• /
• pp.209-215
• /
• 2015

Red spotted grouper, Epinephelus akaara is a popular aquaculture species in many Asian countries. This species is a protogynous hermaphrodite that first differentiates into female and changes to male later. Due to this reproductive characteristic, stable supply of male and female gametes is a key to the success of seed production in this species. Thus, understanding early gonadal differentiation is required to develop effective sex control techniques. Red spotted grouper were reared in indoor tanks and sampled every 5 days from 40 days post-hatch (DPH) to 130 DPH. Changes of gonadal tissues were examined and analyzed by means of histology. A pair of gonadal primordium has already existed underneath the kidney in the posterior part of the body cavity at 38 DPH when this study began. Gonadal primordia of 38, 40 DPH consisted of germ cells surrounded by a few somatic cells. The blood vessel was observed in the gonadal primordium at 45 DPH. The number of somatic cells and size of gonadal primordium increased age-dependently up to 60 DPH. Formation of ovarian cavity was obvious by two protuberant aggregations of somatic cells at 65 DPH. Completed ovarian cavity and oogonia were first observed in the gonad of one fish sample at 105 DPH. Based on these histological observations, it can be suggested that induction of primary male differentiation could be more successfully applied at around 60 DPH in this species.

• Journal of the Korean Society of Fisheries and Ocean Technology
• /
• v.46 no.4
• /
• pp.302-312
• /
• 2010

In order to describe the performance of a wedge type jellyfish excluder device, a series of fishing experiments was carried out in the coastal areas of Yokji Island, southern Korea in 2009, using a trawl net with a cover net. The body size and weight of each individual (fish or jellyfish) caught in the experimental fishing were measured. In the case of giant jellyfish the bell diameter and weight were measured. The catch species was composed of giant jellyfish (Nemopilema nomurai), silver croaker (Pennahia argentata), yellow croaker (Larimichthys polyactics), finespotted flounder (Pleuronichthys cornutus), largehead hairtail (Trichiuruslepturus), melon seed (Psenopsisanomala) and so on. The weight ratio and individual ratio of total fish escaped through the outlet of the excluder device were 0.322 and 0.320, respectively. The weight ratios of giant jellyfish excluded from the trawl net ranged from 0.740 to 0.921 (average 0.852/haul). It means that the wedge type jellyfish excluder device performed well and allowed the most of the giant jellyfish to exclude through the trawl net. The approximately 70% of fish entered in trawl net was caught. The wedge type excluder device needs some improvements to minimize the fish escape from the trawl nets in the future.

• Journal of the Microelectronics and Packaging Society
• /
• v.7 no.3
• /
• pp.31-36
• /
• 2000

We developed embedded inductors in MCM-D substrate for RF applications. The increasing demand for high density packaging was the driving forces to the development of MCM-D technology. Most of these development efforts have been focused on high performance digital circuits. However, recently there is a great need fur mixed mode circuits with a combination of digital, analog and microwave devices. Mixed mode modules often have a large number of passive components that are connected to a small number of active devices. Integration of passive components into the high density MCM substrate becomes desirable to further reduce cost, size, and weight of electronic systems while improving their performance and reliability. The proposed MCM-D substrate was based on Cu/photosensitive BCB multilayer and Ti/Cu is used to form the interconnect layer. Seed metal was formed with 1000 $\AA$ Ti/3000 $\AA$ Cu by sputtering method and main metal was formed with 3 $\mu\textrm{m}$ Cu by electrical plating method. The multi-turn sprial inductors were designed in coplanar fashion. This paper describe the manufacturing process of integrated inductors in MCM-D substrate and the results of electrical performance test.

• Korean Journal of Medicinal Crop Science
• /
• v.3 no.1
• /
• pp.61-65
• /
• 1995

Karyotype analysis was carried out in four lines of Bupleurum falcatum L. cultivated in Korea and SDS-PAGE was applied to determine the seed protein profiles among the lines. Chromosomes were classified into two groups, large and small ones. Two kinds of karyotype, 2n=20 and 2n=26, were identified. Chromosome 1 of 2n=20 were all submedian, while that of 2n=26 were median. Chromosomes 2, 3 and 5 of 2n=20 showed polymorphism in size and arm-ratio. Chromosome 2 was submedian, while others were median in the line of 2n=26. Karyotypcs of cultivars native of Korea were similiar each other, while those introduced from Japan showed different patterns. In SDS PAGE gels, qualitative difference s in high molecular weight proteins, more than 45KD, were detected among the lines. The numbers of specific band were three in lines of 2n=20 and two in 2n=26.

• Korean Journal of Medicinal Crop Science
• /
• v.18 no.1
• /
• pp.46-50
• /
• 2010

In order to development medicinal Artemisia herbs of high quality, Korean A. annua L. were investigated with its ecological and morphological characteristics, and basic statistical data of agronomic characteristics. This species, which is annual herb, is mainly distributed to marginal land, riverside, roadside, grassland. Ecological niche is low species in competition of the others. Its pollination is basically anemogamous, but is frequency pollinated by insects. This species is characterized as tap root, 1~3 pinnate compound leaf of ovate or narrowly ovate, stem is green, erect and solitary. Inflorescence is paniculate, receptacle is not hair. Capitulum, consist of ray floret and disk floret, is subglobose shape. Additionally, this species could be easily discriminated from related Artemisia herbs by the capitulum size. Ray floret is female, disk floret is bisexual. Flowering season is from August to October. Seed is achene unattached hair. Stem length ranged from 179 cm to 225 cm, and stem diameter and number of branch were $17.14\;{\pm}\;1.68\;mm$, $2.43\;{\pm}\;0.51\;mm$, respectively. Length and width of leaf were $14.5\;{\pm}\;0.5\;cm$, $15.0\;{\pm}\;1.0\;cm$, and leaf number of main stem were $48.06\;{\pm}\;10.57\;cm$, respectively. Fresh weight of aerial parts and root were $364.7\;{\pm}\;14.1\;g$, $32.6\;{\pm}\;5.1\;g$, and its dry weight were $136.6\;{\pm}\;10.0\;g$, $14.9\;{\pm}\;2.34\;g$, respectively.

• Korean Journal of Medicinal Crop Science
• /
• v.21 no.6
• /
• pp.433-438
• /
• 2013

This study was conducted to obtain the basic data for using the Artemisia anuua as a new economic crop, thus Artemisia anuua was investigated their cultivation characteristics, yield, and variation of artemisinin contents by planting density and harvesting times. Seed characteristics of A. anuua have observed micro-size, and their germination optimum temperature was at 15 to 20 celsius degree. Planting density on the yield of A. anuua was increased high density better than low density. The highest yield was planted in the space of $30{\times}10$cm. Moreover, optimum harvesting time of A. anuua was investigated in early september and a periods of most highly detected artemisinin was time of before and after blooming of A. anuua.

• Korean Journal of Fisheries and Aquatic Sciences
• /
• v.40 no.5
• /
• pp.323-331
• /
• 2007

Barren ground is an abnormal phenomenon in coastal ecosystems where seaweeds are destroyed and largely replaced by coralline algae containing calcium carbonate components. To restore the seaweed forest, we attempted reconstruction in an area of Samcheok, Korea, where barrenness is extensive. We developed two methods of seaforest construction underwater longline and seed transplantation for the brown seaweed Laminaria japonica, a fast-growing edible seaweed. The blade length of L. japonica attached to an underwater long line was $93.9{\pm}38.2cm$ and blade weight $7.6{\pm}2.1g$ in February 2004. Seaweed size declined after August 2004. A Similar pattern was observed using the transplantation method with maxima of $179.3{\pm}40.3cm\;and\;14.9{\pm}3.2g$ for blade length and weight, respectively in July 2004. The transplanted seaweeds matured in October as did a wild population. These results indicate that transplanted seaweed acclimate to new environments.