• 제목/요약/키워드: secondary ions

검색결과 224건 처리시간 0.027초

고밀도 $CF_{4}/Ar$ 플라즈마에서 $YMnO_3$ 박막의 식각 매카니즘 (Etching Mechanism of $YMnO_3$ Thin Films in High Density $CF_{4}/Ar$ Plasma)

  • 이철인;김동표;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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    • pp.12-16
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    • 2001
  • We investigated the etching characteristics of $YMnO_3$ thin films in high-density plasma etching system. In this study. $YMnO_3$ thin films were etched with $CF_{4}/Ar$ gas chemistries in inductively coupled plasma (ICP). Etch rates of $YMnO_3$ were measured according to gas mixing ratios. The maximum etch rate of $YMnO_3$ is 18 nm/min at $CF_{4}/(CF_{4}+Ar)$ of 20%. In optical emission spectroscopy (OES) analysis, F radical and Ar* ions in plasma at various gas chemistries decreased with increasing $CF_4$ content. Chemical states of $YMnO_3$ films exposed in plasma were investigated with x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS). There is a chemical reaction between metal (Y, Mn) and F and metal-fluorides were removed effectively by Ar ion sputtering. $YF_x$, $MnF_x$ such as YF, $YF_2$, $YF_3$ and $MnF_3$ Were detected using SIMS analysis. The etch slope is about $65^{\circ}C$ and free of residues.

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냉음극형 대면적 펄스 전자빔 가속기의 빔인출 특성 (Characteristics of Electron Beam Extraction in Cold Cathode Type Large Cross-Sectional Pulsed Electron Beam Generator)

  • 우성훈;이광식;이동인;이홍식
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 C
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    • pp.1609-1611
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    • 2001
  • A large cross-section pulsed electron beam generator of cold cathode type has been developed for industrial applications, for example, waste water cleaning, flue gas cleaning, and pasteurization etc. The operational principle is based on the emission of secondary electrons from cold cathode when ions in the plasma hit the cathode, which are accelerated toward exit window by the gradient of an electric potential. The conventional electron beam generators need an electron scanning beam because the small cross section thermal electron emitter is used. The electron beam of large cross-section pulsed electron beam generator do not need to be scanned over target material because the beam cross section is large by 300$cm^2$. We have fabricated the large cross-sectional pulsed electron beam generator with the peak energy of 200keV and beam diameter of 200mm and obtained the large area electron beam in the air. The electron beam current has been investigated as a function of accelerating voltage, glow discharge current, helium pressure, distance from the exit window and radial distribution in front of the exit window.

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Replacement of the antifreeze-like domain of human N-acetylneuraminic acid phosphate synthase with the mouse antifreeze-like domain impacts both N-acetylneuraminic acid 9-phosphate synthase and 2-keto-3-deoxy-D-glycero-Dgalacto- nonulosonic acid 9-phosphate synthase activities

  • Reaves, Marshall Louis;Lopez, Linda Carolyn;Daskalova, Sasha Milcheva
    • BMB Reports
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    • 제41권1호
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    • pp.72-78
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    • 2008
  • Human NeuNAc-9-P synthase is a two-domain protein with ability to synthesize both NeuNAc-9-P and KDN-9-P. Its mouse counterpart differs by only 20 out of 359 amino acids but does not produce KDN-9-P. By replacing the AFL domain of the human NeuNAc-9-P synthase which accommodates 12 of these differences, with the mouse AFL domain we examined its importance for the secondary KDN-9-P synthetic activity. The chimeric protein retained almost half of the ability of the human enzyme for KDN-9-P synthesis while the NeuNAc-9-P production was reduced to less than 10%. Data from the homology modeling and the effect of divalent ions and temperature on the enzyme activities suggest conformational differences between the human and mouse AFL domains that alter the shape of the cavity accommodating the substrates. Therefore, although the AFL domain itself does not define the ability of the human enzyme for KDN-9-P synthesis, it is important for both activities by aiding optimal positioning of the substrates.

Solvent Extraction Separation of Co, Mn and Zn from leaching solution from Ni-Cd battery by Na-PC88A

  • Ahn Jong-Gwan;Park Kyoung-Ho;Sohn Jeong-Soo;Kim Dong-Jin;Lee Jaereyeong;Jeong HunSaeong
    • 한국지구물리탐사학회:학술대회논문집
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    • 한국지구물리탐사학회 2003년도 Proceedings of the international symposium on the fusion technology
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    • pp.618-623
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    • 2003
  • Solvent extraction experiments for separation of impurities from Ni-rich solution were carried out for manufacturing of high purity Ni compounds from acid leaching solution of spent Ni-Cd secondary battery. Artificial and leaching solutions were used as aqueous phases and PC88A saponified by sodium in kerosene were used as organic phase. The extraction order is Zn>Mn>Co>Ni and extraction percentage of metal ions was increased with increase of the concentration of extractant, initial pH of aqueous phase and ratio of O/A. The separation of cobalt, zinc and manganese from nickel was effectively accomplished at the condition of extraction stage=l, O/A=1 and initial pH 5.0 with 1.0 $mol/dm^3$ PC88A saponified to $50\%$ with NaOH.

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High performance pervaporative desalination of saline waters using Na-X zeolite membrane

  • Malekpour, Akbar;Nasiri, Hamed
    • Membrane and Water Treatment
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    • 제8권5호
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    • pp.437-448
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    • 2017
  • A high quality Na-X zeolite membrane was synthesized on a seeded ${\alpha}-alumina$ disc by the secondary growth method. Structural characterization was done by X-ray spectroscopy, FT-IR spectroscopy, SEM and AFM imaging. The performance evaluation of the membrane was firstly tested in separation of glucose/water solutions by pervaporation process. There was obtained a separation factor $182.7{\pm}8.8$, while the flux through the membrane was $3.6{\pm}0.3kg\;m^{-2}\;h^{-1}$. The zeolite membrane was then used for desalination of aqueous solutions consisting of $Na^+$, $Ca^{2+}$, $Cs^+$ and $Sr^{2+}$ because of the importance of these ions in water and wastewater treatments. The effects of some parameters such as temperature and solution concentration on the desalination process were studied for investigating of diffusion/adsorption mechanism in membrane separation. Finally, high water fluxes ranged from 2 up to $9kg\;m^{-2}\;h^{-1}$ were obtained and the rejection factors were resulted more than 95% for $Na^+$ and $Ca^{2+}$ and near to 99% for $Cs^+$ and $Sr^{2+}$. Based on the results, fluxes were significantly improved due to convenient passage of water molecules from large pores of NaX, while the fouling was declining dramatically. Based on the results, NaX zeolite can efficiently use for the removal of different cations from wastewaters.

수용모델(CMB)을 이용한 한반도에서 관측된 황사의 발원지 추정과 기여도에 대한 연구 (Source Apportionment and the Origin of Asian Dust Observed in Korea by Receptor Modelling (CMB))

  • 신선아;한진석;김신도
    • 한국대기환경학회지
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    • 제22권2호
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    • pp.157-166
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    • 2006
  • Ambient TSP at four sites in Korea and soil samples from the source regions of Asian Dust in northern China were collected and analyzed for 15 metal components and 6 water-soluble ions to conduct a chemical mass balance (CMB). CMB receptor model was used to estimate the source contribution of TSP during the Asian Dust period, and the model results showed that China soil was the largest source contributor, accounting for 81% of TSP ($458.2{\mu}g/m^3$). Vehicle emission and geological sources contributed to about 8.8% and 4.4% of aerosol mass, followed by sea salt (1.5%) and secondary aerosol (2.9%). Fuel combustion and industrial process sources were found to be relatively minor contributors to TSP (${\leq}1%$). In addition to source contribution estimates, this study tried to identify the origin of Asian Dust observed in Korea. Among all 13 China soil profiles presented in this study, the most adoptable profile which can project the case well was selected and considered as the origin of the applied case.

용액에서의 아미노산 및 단백질 자유기에 관한 ESR 연구 제3보 $Ti-H_2O_2$ Flow System으로 만든 Lysozyme 자유기의 ESR 연구 (An ESR Study of Amino Acid and Protein Free Radicals in Solution Part Ⅲ. ESR Study of Lysozyme Free Radical Produced by $Ti-H_2O_2$ Flow System)

  • 홍순주
    • 대한화학회지
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    • 제15권4호
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    • pp.177-181
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    • 1971
  • Free radicals of lysozyme produced by $Ti-H_2O_2$ system were studied in aqueous solution at room temperature using ESR with a continuous flow-mixing. The spectra, each consisting of a doublet with 5.5 G splitting and a broad resonance covering 80 G splitting are closely similar in shape to that for solid irradiated in vacuum at $77^{\circ}K$ and observed at room temperature immediately on warming. The result is assumed to indicate that the secondary protein radical components formed within 0.01 second, dead time of the mixing chamber, and initiated by hydrogen atom abstraction at ${\alpha}$-carbon atom of peptide chain in liquid solution at room temperature are identical to those resulting from the initial formation of a mixture of positive holes and negative ions by ionization processes as well as radical fragments by the rupture of chemical bonds in the solid during similar time at the same temperature. A broad resonance is observed with considerable amplitude on the high field side of the doublet, which is quite dissimilar to the spectra of irradiated solid lysozyme. This resonance was tentatively attributed to the polypeptide free radical in which unpaired electrons are localized on side chain.

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부식작용으로 인하여 디스크면으로 이동된 코발트가 Thermal Asperity 현상에 미치는 영향 (The Study of Corrosion Induced Co migration and Its Effect on Thermal Asperity Phenomenon)

  • 좌성훈
    • Tribology and Lubricants
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    • 제15권4호
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    • pp.335-342
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    • 1999
  • Corrosion of the disk has been an ongoing concern for the manufacturers of hard disk drives. With the advent of magnetoresistive (MR) head, very low levels of corrosion and contamination become more critical since the raised defects and corrosion products on the disk surface-anything that heats the MR sensor due to the contact-can distort the output signal of the head. This phenomenon is called as thermal asperity. In this paper, the effect of corrosion as a form of Co migration on the occurrence of thermal asperity in MR drives was investigated. The corrosion test at high temperature (60$^{\circ}C$) and high relative humidity (80%) was emphasized in this study and the testing results at ambient condition were compared. The corrosion on the disks was characterized as the amount of Co ion migration using an ion chromatography (IC) and a time-of-flight secondary ion mass spectroscopy (TOF-SIMS). It is proved that corrosion on the disk surface after storage testing is closely correlated to the amount of Co ions migration from the magnetic layer to disk surfaces and higher Co migration causes more thermal asperities in the drive. In order to reduce Co migration, several methods such as burnishing process and structure of the carbon overcoat were investigated. It is found that the hydrogenated carbon overcoat shows the least Co migration among different types of overcoat layer. However, the most effective way to reduce Co migration is the application of Cr layer between the overcoat and the magnetic alloy layer.

Conversion from SIMS depth profiling to compositional depth profiling of multi-layer films

  • Jang, Jong-Shik;Hwang, Hye-Hyen;Kang, Hee-Jae;Kim, Kyung-Joong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.347-347
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    • 2011
  • Secondary ion mass spectrometry (SIMS) was fascinated by a quantitative analysis and a depth profiling and it was convinced of a in-depth analysis of multi-layer films. Precision determination of the interfaces of multi-layer films is important for conversion from the original SIMS depth profiling to the compositional depth profiling and the investigation of structure of multi-layer films. However, the determining of the interface between two kinds of species of the SIMS depth profile is distorted from original structure by the several effects due to sputtering with energetic ions. In this study, the feasibility of 50 atomic % definition for the determination of interface between two kinds of species in SIMS depth profiling of multilayer films was investigated by Si/Ge and Ti/Si multi-layer films. The original SIMS depth profiles were converted into compositional depth profiles by the relative sensitivity factors from Si-Ge and Si-Ti alloy reference films. The atomic compositions of Si-Ge and Si-Ti alloy films determined by Rutherford backscattering spectroscopy (RBS).

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Flavobacterium odoratum의 TOL 플라스미드를 전달받은 광합성세균으로부터의 수소 생성 ($H_{2}$ production of photosynthetic bacteria transferred TOL plasmid from flavobacterium odoratum)

  • 오순옥;조인성;이희경;민경희
    • 미생물학회지
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    • 제29권6호
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    • pp.408-415
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    • 1991
  • TOL plsmid size of Flavobacterium odoratum SUB53 was estimated as 83 Md and the optimum concentration of m-toluate degradation by TOL plasmid was 5 mM. $H_{2}$ production by Rhodopseudomonas sphaeroides KCTC1425 was largely dependent on nitrogenase activity and showed the highest at 30 mM malate with 7 mM glutamate as nitrogen source. Nitrogenase activities were inhibited by 0.3 mM $NH_{4}^{+}$ions, to be appeared the decrease of $H_{2}$ production. Conjugation of TOL plasmids from F. odoratum SUB53 and Pseudomonas putida mt-2 to R. sphaeroides showed the optimum at the exponential stage of recipient cells in presence of helper plasmid pRK2013. According to the investigation of catechol-1,2-oxygenase (C-1, 2-O) and catechol-2,3-oxygenase (C-2,3-O) activities of R. sphaeroides C1 (TOL SUB53) and C2 (TOL mt-2), the gene for C-2,3-O is located on TOL plasmid and gene for C-1, 2-O on the chromosome of R. sphaeroides. m-Toluate was biodegraded by TOL plasmid in R. sphaeroides C1 and C2, presumably to be produced $H_{2}$ gas from the secondary metabolites of m-toluate.e.

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