• 제목/요약/키워드: scattering film

검색결과 299건 처리시간 0.027초

비행시간형 직층돌 이온산란 분광법을 사용한 MgO(001) 면에 성장된 TiO막의 구조해석 (Structure Analysis of TiO Film on the MgO(001) Surface by Time-Of-Flight Impact-Collision Ion Scattering Spectroscopy)

  • 황연;이태근;박병규
    • 한국결정학회지
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    • 제13권2호
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    • pp.57-62
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    • 2002
  • MgO(001)면 위에 Ti 금속을 증착시킨 후 400℃에서 산소에 노출시킴으로써 헤테로 에피탁시 TiO 막을 성장시켰다. 성장된 TiO막의 원자구조를 비행시간형 직충돌 이온산란 분광법을 사용하여 해석하였다. MgO(001)면에 성장된 에피탁시 TiO막은 다음과 같은 구조를 갖고 있음이 밝혀졌다. Ti및 O 원자가 MgO 원자의 위에 위치하여 면내방향의 격자상수는 MgO의 격자상수와 일치하고, TiO막의 표면은 3차원적 섬 형상이 없는 평활한 구조를 가지고 있다.

Investigation on the phonon behavior of MgB2 films via polarized Raman spectra

  • R. P. Putra;J. Y. Oh;G. H. An;H. S. Lee;B. Kang
    • 한국초전도ㆍ저온공학회논문지
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    • 제26권1호
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    • pp.14-19
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    • 2024
  • In this study, we explore the anisotropy of electron-phonon coupling (EPC) constant in epitaxially grown MgB2 films on c-axis oriented Al2O3, examining its correlation with the critical temperature (Tc) and local structural disorder assessed through polarized Raman scattering. Analysis of the polarized Raman spectra reveals angle-dependent variations in the intensity of the phonon spectra. The Raman active mode originating from the boron plane, along with two additional phonon modes from the phonon density of states (PDOS) induced by lattice distortion, was distinctly observed. Persistent impurity scattering, likely attributed to oxygen diffusion, was noted at consistent frequencies across all measurement angles. The EPC values derived from the primary Raman active phonon do not significantly vary with changing observation angles, followed by that the Tc values calculated using the Allen and Dynes formula remain relatively constant across all polarization angles. Although the E2g phonon mode plays a crucial role in the EPC mechanism, the determination of Tc values in MgB2 involves not only electron-E2g coupling but also contributions from other phonon modes.

구리배선용 베리어메탈로 쓰이는 Ta-N/Ta/Si(001)박막에 관한 X-선 산란연구 (X-ray Scattering Study of Reactive Sputtered Ta-N/Ta/Si(001)Film as a Barrier Metal for Cu Interconnection)

  • 김상수;강현철;노도영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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    • pp.79-83
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    • 2001
  • In order to compare the barrier properties of Ta-N/Si(001) with those of Ta-N/Ta/Si(001), we studied structural properties of films grown by RF magnetron sputtering with various $Ar/N_2$ ratios. To evaluate the barrier properties, the samples were annealed in a vacuum chamber. Ex-situ x-ray scattering measurements were done using an in-house x-ray system. With increasing nitrogen ratio in Ta-N/Si(001), the barrier property of Ta-N/Si(001) was enhanced, finally failed at $750^{\circ}C$ due to the crystallization and silicide formation. Compared with Ta-N/Si(001), Ta-N/Ta/Si(001) forms silicides at $650^{\circ}C$. However it does not crystallize even at $750^{\circ}C$. With increasing nitrogen composition in Ta-N/Ta/Si(001), the formation of tantalum silicide was reduced and the surface roughness was improved. To observe the surface morphology of Ta-N/Ta/Si(001) during annealing, we performed an in-situ x-ray scattering experiment using synchrotron radiation of the 5C2 at Pohang Light Source(PLS). Addition of Ta layer between Ta-N and Si(001) improved the surface morphology and reduced the surface degradation at high temperatures. In addition, increasing $N_2/Ar$ flow ratio reduced the formation of tantalum silicide and enhanced the barrier properties.

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Brillouin Light Scattering을 이용한 GaAs/Fe/Au 구조의 자기이방성 (Brillouin Light Scattering Study of Magnetic Anisotropy in GaAs/Fe/Au System)

  • 하승석;유천열;이석목
    • 한국자기학회지
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    • 제18권4호
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    • pp.147-153
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    • 2008
  • GaAs 기판위에 Fe을 성장시킨 이종 접합 구조는 두 물질의 lattice mismatch가 1.4 % 정도로 작기 때문에 결정 상태가 매우 좋은 Fe층을 성장시킬 수 있는 것으로 알려져있다. GaAs/Fe의 계면에서는 많은 흥미로운 현상이 관찰되며, 또한 스핀주입을 이용한 산업적 응용 면으로 가치가 있는 구조로서 활발한 연구가 진행되어 왔다. 본 연구에서는 GaAs(100) 표면에 Fe층을 쐐기모양으로 두께를 $0{\sim}3.4$ nm로 바꾸어 성장시키고 5 nm 두께의 Au층을 추가 증착시킨 시료를 Brillouin light scattering(BLS) 측정방법을 이용, 자기이방성에 대해 조사하였다. Fe층 두께를 변화시켜가며 자화 용이축과 곤란축 방향으로 외부자기장의 세기에 대한 스핀파 들뜸의 의존도와 외부자기장의 방위각에 대한 스핀파 들뜸의 의존도를 조사하였다. 측정된 결과의 정량적 분석을 통해 Fe층의 두께에 따라 일축 자기이방성 상수와 이축 자기이방성 상수를 구하였다. GaAs층 위에서 성장된 Fe층의 자기이방성은 GaAs 기판에 영향을 받아 Fe층의 두께가 얇을수록 큰 일축 자기이방성을 가지고 박막의 두께가 증가함에 따라서 Fe 본래의 이축 이방성의 크기가 증가함을 확인하였다.

Therapeutic Proton Beam Range Measurement with EBT3 Film and Comparison with Tool for Particle Simulation

  • Lee, Nuri;Kim, Chankyu;Song, Mi Hee;Lee, Se Byeong
    • 한국의학물리학회지:의학물리
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    • 제30권4호
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    • pp.112-119
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    • 2019
  • Purpose: The advantages of ocular proton therapy are that it spares the optic nerve and delivers the minimal dose to normal surrounding tissues. In this study, it developed a solid eye phantom that enabled us to perform quality assurance (QA) to verify the dose and beam range for passive single scattering proton therapy using a single phantom. For this purpose, a new solid eye phantom with a polymethyl-methacrylate (PMMA) wedge was developed using film dosimetry and an ionization chamber. Methods: The typical beam shape used for eye treatment is approximately 3 cm in diameter and the beam range is below 5 cm. Since proton therapy has a problem with beam range uncertainty due to differences in the stopping power of normal tissue, bone, air, etc, the beam range should be confirmed before treatment. A film can be placed on the slope of the phantom to evaluate the Spread-out Bragg Peak based on the water equivalent thickness value of PMMA on the film. In addition, an ionization chamber (Pin-point, PTW 31014) can be inserted into a hole in the phantom to measure the absolute dose. Results: The eye phantom was used for independent patient-specific QA. The differences in the output and beam range between the measurement and the planned treatment were less than 1.5% and 0.1 cm, respectively. Conclusions: An eye phantom was developed and the performance was successfully validated. The phantom can be employed to verify the output and beam range for ocular proton therapy.

PRAM 기록막용 Sb2Te3 박막의 질소 첨가에 대한 영향 (The Effect of N2 Gas Doping on Sb2Te3Thin Film for PRAM Recording Layer)

  • 배준현;차준호;김경호;김병근;이홍림
    • 한국세라믹학회지
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    • 제45권5호
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    • pp.276-279
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    • 2008
  • In this research, properties of $N_2$-doped $Sb_2Te_3$ thin film were evaluated using 4-point probe, XRD and AFM. $Sb_2Te_3$ material has faster crystallization rate than $Ge_2Sb_2Te_5$, but sheet resistance difference between amorphous and crystallization state is very low. This low sheet resistance difference decreases sensing margin in reading operation at PRAM device operation. Therefore, in order to overcome this weak point, $N_2$ gas was doped on $Sb_2Te_3$ thin film. Sheet resistance difference between amorphous and crystallized state of $N_2$-doped $Sb_2Te_3$ thin film showed about $10^4$ times higher than Un-doped $Sb_2Te_3$ thin film because of the grain boundary scattering.

펄스형 레이저 증착법으로 제조된 에피탁시 BST 박막의 구조 분석 (Analysis of structural properties of epitaxial BST thin films prepared by pulsed laser deposition)

  • 김상섭;제정호
    • 한국진공학회지
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    • 제7권4호
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    • pp.355-360
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    • 1998
  • 250$\AA$과 1340$\AA$두께의 에피탁시($Ba_{0.5}Sr_{0.5}$)$TiO_3$(혹은 BST)박막을 MgO(001)단결정기 판에 펄스형 레이저 증착법(pulsed laser deposition)으로 제조한 후 방사광 X선 산란을 이 용하여 분석하였다. 박막은 초기에 MgO(001)단결정 기판과cube-on-cube관계로 증착되며, 박막이 성장함에 따라 이 관계를 계속 유지하면서 성장하는 것으로 판단된다. 한편 박막이 성장함에 따라 박막의 표면은 급격하게 거칠어지는 반면 기판과 박막 사이의 계면의 거칠기 는 크게 변하지 않았다. 에피탁시 BST박막의 초기상태에서는 c축이 기판과 수직한 방향으 로 배향된 정방정구조를 지녔으며, 아울러 기판의 수직(out-of-plane) 및 평형(in-plane)방향 으로의 모자익(mosaic)분포가 좁아짐을 확인하였다.

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문화재 방사선 조사에서 발생하는 산란 방사선의 특성과 영향 (Characteristics and Influence of Scattering Radiation in Cultural Heritage Radiography)

  • 송정일;박영환;유지혜
    • 보존과학회지
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    • 제34권6호
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    • pp.539-548
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    • 2018
  • 본 연구는 문화재 방사선 조사에서 고려하지 않았던 산란 방사선의 영향을 확인하기 위해 관전압 (kVp)과 필름-바닥 거리(film-floor-distance: FFD) 납스크린 배치를 달리하여 평가하였다. 연구결과, 실험시편의 투과농도와 산란 방사선의 투과 농도는 관전압에 따라 증가되었다. 실험시편의 투과농도는 평균 1.4 D의 편차를 보이며, 60 kVp에서 0.17 D, 160 kVp에서 1.54 D, 220 kVp에서 2.97 D로 확인되었다. 산란 방사선의 평균 투과농도는 60 kVp에서 0.10 D, 160 kVp에서 0.40 D, 220 kVp에서 0.46 D로 확인되었다. FFD 거리가 바닥면과 멀어질수록 관전압(60 kVp-160 kVp)구간의 경우 투과농도 (D)가 커지는 경향을 보였으나, 고전압(160 kVp-220 kVp)구간은 FFD 거리 증가에 따른 투과농도 변화가 확인되지 않았다. 납스크린 없는 조건과 바닥면(floor)을 납스크린으로 대체한 경우는 FFD 50 mm, 100 mm, 200 mm 거리에서 산란 방사선이 확인되었고, FFD 0 mm 거리는 확인되지 않았다. 식별률은 관전압 160 kVp에서 FFD에 따라 2.08~2.67% 범위이며, 관전압 220 kVp에서는 2.67~3.33% 범위로 측정되었다.

A study of the light trapping mechanism in periodically honeycomb texture-etched substrate for thin film silicon solar cells

  • Kim, Yongjun;Shin, Munghun;Park, Hyeongsik;Yi, Junsin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.147.2-148
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    • 2016
  • Light management technology is very important for thin film solar cells, which can reduce optical reflection from the surface of thin film solar cells or enhance optical path, increasing the absorption of the incident solar light. Using proper light trapping structures in hydrogenated amorphous silicon (a-Si:H) solar cells, the thickness of absorber layers can be reduced. Instead, the internal electric field in the absorber can be strengthened, which helps to collect photon generated carriers very effectively and to reduce light-induced loss under long-term light exposure. In this work, we introduced a chemical etching technology to make honey-comb textures on glass substrates and analyzed the optical properties for the textured surface such as transmission, reflection and scattering effects. Using ray optics and finite difference time domain method (FDTD) we represented the behaviors of light waves near the etched surfaces of the glass substrates and discussed to obtain haze parameters for the different honey-comb structures. The simulation results showed that high haze values were maintained up to the long wavelength range over 700 nm, and with the proper design of the honey-comb structure, reflection or transmission of the glass substrates can be enhanced, which will be very useful for the multi-junction (tandem or triple junction) thin film a-Si:H solar cells.

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물분해용 Cu2O 박막/ZnO 나노막대 산화물 p-n 이종접합 광전극의 광전기화학적 특성 (Photoelectrochemical Properties of a Cu2O Film/ZnO Nanorods Oxide p-n Heterojunction Photoelectrode for Solar-Driven Water Splitting)

  • 박정환;김효진;김도진
    • 한국재료학회지
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    • 제28권4호
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    • pp.214-220
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    • 2018
  • We report on the fabrication and photoelectrochemical(PEC) properties of a $Cu_2O$ thin film/ZnO nanorod array oxide p-n heterojunction structure with ZnO nanorods embedded in $Cu_2O$ thin film as an efficient photoelectrode for solar-driven water splitting. A vertically oriented n-type ZnO nanorod array was first prepared on an indium-tin-oxide-coated glass substrate via a seed-mediated hydrothermal synthesis method and then a p-type $Cu_2O$ thin film was directly electrodeposited onto the vertically oriented ZnO nanorods array to form an oxide semiconductor heterostructure. The crystalline phases and morphologies of the heterojunction materials were characterized using X-ray diffraction and scanning electron microscopy as well as Raman scattering. The PEC properties of the fabricated $Cu_2O/ZnO$ p-n heterojunction photoelectrode were evaluated by photocurrent conversion efficiency measurements under white light illumination. From the observed PEC current density versus voltage (J-V) behavior, the $Cu_2O/ZnO$ photoelectrode was found to exhibit a negligible dark current and high photocurrent density, e.g., $0.77mA/cm^2$ at 0.5 V vs $Hg/HgCl_2$ in a $1mM\;Na_2SO_4$ electrolyte, revealing an effective operation of the oxide heterostructure. In particular, a significant PEC performance was observed even at an applied bias of 0 V vs $Hg/HgCl_2$, which made the device self-powered. The observed PEC performance was attributed to some synergistic effect of the p-n bilayer heterostructure on the formation of a built-in potential, including the light absorption and separation processes of photoinduced charge carriers.