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Structure Analysis of TiO Film on the MgO(001) Surface by Time-Of-Flight Impact-Collision Ion Scattering Spectroscopy  

Hwang, Yeon (Department of Materials Science & Engineering Seoul National University of Technology)
Lee, Tae-Kun (Department of Materials Science & Engineering Seoul National University of Technology)
Park, Byung-Kyu (Department of Materials Science & Engineering Seoul National University of Technology)
Publication Information
Korean Journal of Crystallography / v.13, no.2, 2002 , pp. 57-62 More about this Journal
Abstract
Time-of-flight impact-collision ion scattering spectroscopy (TOF-ICISS) was applied to study the geometrical structure of epitaxially grown TiO layers on a MgO(001) surface. The hetero-epitaxial TiO layer was deposited by thermal evaporation of titanium onto the MgO(001) surface and subsequent exposure to oxygen at 400℃. The well-ordered TiO structure was confirmed with the 1×1 RHEED pattern. TOF-ICISS results revealed that the TiO layer was formed at the on-top sites of the MgO(001) substrate and that the lateral lattice constant of TiO layer was the same as that of the MgO substrate. The surface of the deposited epitaxial TiO layer was smooth without the three dimensional islands.
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