• 제목/요약/키워드: scanning system

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주사형 맥스웰 응력 현미경을 이용한 박막의 Nanometer-scale 이미지 (Nanometer-scale Imaging in Thin Films by Scanning Maxwell-stress Microscopy)

  • 신훈규;유승엽;권영수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.133-136
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    • 1998
  • The scanning Maxwell-stress microscopy (SMM) is a dynamic noncontact electric force microscopy that allows simultaneous access to the electrical properties of molecular system such as surface potential, surface charge, dielectric constant and conductivity along with the topography. Here we report our recent results of its application to nanoscopic study of domain structures and electrical functionality in organic thin films prepared by the Langmuir-Blodgett technique.

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비연속 시스템 제어를 위한 확장된 safe petri net 모델과 실시간제어를 위한 scanning algorithm의 개발 (Development of extended safe petri net model for discrete system control and scanning algorithm for real time control)

  • 황창선;서정일;이재만
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1988년도 한국자동제어학술회의논문집(국내학술편); 한국전력공사연수원, 서울; 21-22 Oct. 1988
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    • pp.338-342
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    • 1988
  • Recently, in sequence control systems, high flexibility and maintenance of control software are required. This is because product life cycles become shorter and control specification must be changed frequently. The authors extend the concept of Safe Petri Net to develop the design and analysis tool for sequence control systems taking the safeness and notation of input/output functions into consideration. Extended Safe Petri Net (S-Net) is proposed as such a new graph model and real time scanning algorithm based on S-Net is developed.

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Digital PID Control을 적용한 Scanning Probe Microscopy의 Nano-grating 측정 (The Measurement of Nano-grating by Scanning Probe Microscopy Using Digital PID Control)

  • 박경덕;지원수;김대찬;장동훈;오범환;박세근;이일항;이승걸
    • 한국광학회:학술대회논문집
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    • 한국광학회 2008년도 하계학술발표회 논문집
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    • pp.185-186
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    • 2008
  • In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.

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XY 스캐너의 아베 오차 최소화를 위한 최적 설계 및 나노 정밀도의 원자 현미경 피치 측정 불확도 평가 (Optimal design of a flexure hinge-based XY AFM scanner for minimizing Abbe errors and the evaluation of pitch measuring uncertainty of a nano-accuracy AFM system)

  • 김동민;이동연;권대갑
    • 한국정밀공학회지
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    • 제23권6호
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    • pp.96-103
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    • 2006
  • To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

Automatic Hand Measurement System from 2D Hand Image for Customized Glove Production

  • Han, Hyun Sook;Park, Chang Kyu
    • 한국의류산업학회지
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    • 제18권4호
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    • pp.468-476
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    • 2016
  • Recent advancements in optics technology enable us to realize fast scans of hands using two-dimensional (2D) image scanners. In this paper, we propose an automatic hand measurement system using 2D image scanners for customized glove production. To develop the automatic hand measurement system, firstly hand scanning devices has been constructed. The devices are designed to block external lights and have user interface to guide hand posture during scanning. After hands are scanned, hand contour is extracted using binary image processing, noise elimination and outline tracing. And then, 19 hand landmarks are automatically detected using an automatic hand landmark detection algorithm based on geometric feature analysis. Then, automatic hand measurement program is executed based on the automatically extracted landmarks and measurement algorithms. The automatic hand measurement algorithms have been developed for 18 hand measurements required for custom-made glove pattern making. The program has been coded using the C++ programming language. We have implemented experiments to demonstrate the validity of the system using 11 subjects (8 males, 3 females) by comparing automatic 2D scan measurements with manual measurements. The result shows that the automatic 2D scan measurements are acceptable in the customized glove making industry. Our evaluation results confirm its effectiveness and robustness.

Performance prediction of gamma electron vertex imaging (GEVI) system for interfractional range shift detection in spot scanning proton therapy

  • Kim, Sung Hun;Jeong, Jong Hwi;Ku, Youngmo;Jung, Jaerin;Kim, Chan Hyeong
    • Nuclear Engineering and Technology
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    • 제54권6호
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    • pp.2213-2220
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    • 2022
  • The maximum dose delivery at the end of the beam range provides the main advantage of using proton therapy. The range of the proton beam, however, is subject to uncertainties, which limit the clinical benefits of proton therapy and, therefore, accurate in vivo verification of the beam range is desirable. For the beam range verification in spot scanning proton therapy, a prompt gamma detection system, called as gamma electron vertex imaging (GEVI) system, is under development and, in the present study, the performance of the GEVI system in spot scanning proton therapy was predicted with Geant4 Monte Carlo simulations in terms of shift detection sensitivity, accuracy and precision. The simulation results indicated that the GEVI system can detect the interfractional range shifts down to 1 mm shift for the cases considered in the present study. The results also showed that both the evaluated accuracy and precision were less than 1-2 mm, except for the scenarios where we consider all spots in the energy layer for a local shifting. It was very encouraging results that the accuracy and precision satisfied the smallest distal safety margin of the investigated beam energy (i.e., 4.88 mm for 134.9 MeV).

구강 내 스캐너를 사용하여 CAD/CAM으로 제작된 왁스 코핑의 적합도 평가 (Evaluation of marginal and internal gap of wax coping fabricated by CAD/CAM system using intraoral scanner)

  • 김동연;정일도;이재준;김지환;김명배;김웅철
    • 대한치과기공학회지
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    • 제37권1호
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    • pp.1-7
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    • 2015
  • Purpose: The aim of this study was to evaluate the marginal and internal gap of wax copings fabricated from extraoral scanning with intraoral scanning. Methods: Fifteen study models(abutment of teeth 16) were made by PMMA. STL files of thirty abutment were prepared by intraoral scanning with extraoral scanning. Wax copings of thirty fabricated using CAD/CAM system. Marginal and internal gap of wax copings of thirty were measured by silicone replica technique and digital microscope(${\times}140$). Date were analyzed by using independent samples t-test. Results: Mean (SD) of two group were measured $55.61(27.42){\mu}m$ for totally gap of ES group and $60.67(33.14){\mu}m$ for totally gap of IS group. But marginal and internal gap of two group were not differences statistically significant(p>0.05). Conclusion: Evaluation of marginal and internal gap of two group showed that no differences statistically significant and clinically acceptable results.