• 센서학회지
• /
• 제30권6호
• /
• pp.376-380
• /
• 2021

The accurate detection of hydrogen gas molecules is considered to be important for industrial safety. However, the selective detection of the gas using semiconductive metal oxides (SMOs)-based sensors is challenging. Here, we describe the fabrication of H₂ sensors in which a nanocellulose/graphene oxide (GO) hybrid membrane is attached to SnO₂ nanosheets (NSs). One-dimensional (1D) nanocellulose fibrils are attached to the surface of GO NSs (GONC membrane) by mixing GO and nanocellulose in a solution. The as-prepared GONC membrane is employed as a sacrificial template for SnO₂ NSs as well as a molecular sieving membrane for selective H₂ filtration. The combination of GONC membrane and SnO₂ NSs showed substantial selectivity to hydrogen gas (R_air / R_gas > 10 @ 0.8 % H₂, 100 ℃) with noise level responses to interfering gases (H₂S, CO, CH₃COCH₃, C₂H₅OH, and NO₂). These remarkable sensing results are attributed mainly to the molecular sieving effect of the GONC membrane. These results can facilitate the development of a highly selective H₂ detector using SMO sensors.

• 청정기술
• /
• 제18권3호
• /
• pp.280-286
• /
• 2012

초임계 이산화탄소를 이용하여 희생 $SiO_2$층에 대한 건식 식각 실험을 진행하였다. HF/pyridine (HF/py) 식각액과 알콜 첨가제를 사용하여 이중 챔버 시스템 방식으로 boron phosphor silica glass (BPSG), tetraethyl orthosilicate (TEOS), thermal $SiO_2$와 Si-nitride (SiN)의 박막 층에 대한 식각 성능을 조사하였다. 메탄올의 첨가에 의하여 실리카 희생막에 대한 HF/py의 식각률이 높아지는 것을 확인할 수 있었다. BPSG를 제외하고는 메탄올이 가장 높은 식각률을 보여줬지만, BPSG의 SiN에 대한 식각 선택비는 이소프로판올이 가장 높았다. HF/py/MeOH 계의 건식 식각반응에서 반응 온도에 따라서 박막별 식각률이 증가하였다. 특히 반응 온도 증가에 따라 BPSG의 식각 속도의 증가폭이 매우 높게 나타났다. HF/py에 알콜 공용매를 첨가하여도 식각 부산물 감소에는 크게 효과가 없었다. HF/$H_2O$의 식각률이 HF/py/alcohol 보다 높게 나타났지만 HF/$H_2O$에 알콜 공용매를 첨가하였을 때는 오히려 식각률이 감소되었다. 캔틸레버 빔 구조를 초임계 이산화탄소 건식 식각으로 제조하여 높은 종횡비의 패턴구조물을 손상 없이 성공적으로 식각할 수 있었다.

• 한국재료학회지
• /
• 제24권9호
• /
• pp.458-464
• /
• 2014

Light scattering enhancement is widely used to enhance the optical absorption efficiency of dye-sensitized solar cells. In this work, we systematically analyzed the effects of spherical voids distributed as light-scattering centers in photoanode films made of an assembly of zinc oxide nanoparticles. Spherical voids in electrode films were formed using a sacrificial template of polystyrene (PS) spheres. The diameter and volume concentration of these spheres was varied to optimize the efficiency of dye-sensitized solar cells. The effects of film thickness on this efficiency was also examined. Electrochemical impedance spectroscopy was performed to study electron transport in the electrodes. The highest power conversion efficiency of 4.07 % was observed with $12{\mu}m$ film thickness. This relatively low optimum thickness of the electrode film is due to the enhanced light absorption caused by the light scattering centers of voids distributed in the film.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
• /
• pp.558-561
• /
• 2001

Vanadium oxide ($VO_x$) thin films are very good candidate material for uncooled infrared (IR) detectors due to their high temperature coefficient of resistance (TCR) at room temperature. But, the deposition of $VO_x$ thin films showing good electrical properties is very difficult in micro bolometer fabrication process using sacrificial layer removal because of its low process temperature and thickness of thin films less than $1000{\AA}$. This paper presents a new fabrication process of $VO_x$ thin films having high TCR and low resistance. Through sandwich structure of $VO_{x}(100{\AA})/V(80{\AA})/VO_{x}(500{\AA})$ by sputter method and post-annealing at oxygen ambient, we have achieved high TCR more than $-2%/^{\circ}C$ and low resistance less than $10K\Omega$ at room temperature.

• 반도체디스플레이기술학회지
• /
• 제10권3호
• /
• pp.15-19
• /
• 2011

The performance of the DRAM is strongly dependent on the purity and surface roughness of the TIT (TiN/Insulator/ TiN) capacitor electrodes. Hence, in the present study, we evaluate the effects of organic contamination and change of surface roughness on the cylindrical TIT capacitor electrodes during the wet cleaning process by various analytical techniques such as TDMS, AFM, XRD and V-SEM. Once the sacrificial oxide and PR (Photo Resist) are removed by HF, the organic contamination and surface oxide films on the bottom Ti/TiN electrode become visible. With prolonged HF process, the surface roughness of the electrode is increased, whereas the amount of oxidized Ti/TiN is reduced due to the HF chemicals. In the 80nm DRAM device fabrication, the organic contamination of the cylindrical TIT capacitor may cause defects like SBD (Storage node Bridge Defect). The SBD fail bit portion is increased as the surface roughness is increased by HF chemicals reactions.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 추계학술대회 논문집
• /
• pp.558-561
• /
• 2001

Vanadium oxide ($VO_{x}$) thin films are very good candidate material for uncooked infrared (IR) detectors due to their high temperature coefficient of resistance (TCR) at room temperature. But, the deposition of $VO_{x}$ thin films showing good electrical properties is very difficult in micro bolometer fabrication process using sacrificial layer removal because of its low process temperature and thickness of thin films less than 1000${\AA}$. This paper presents a new fabrication process of $VO_{x}$ thin films having high TCR and low resistance. Through sandwich structure of $VO_{x}$(100${\AA}$)/V(80${\AA}$)/$VO_{x}$(500${\AA}$) by sputter method and post-annealing at oxygen ambient, we have achieved high TCR more than -2%/$^{\circ}C$ and low resistance less than $10K\Omega$ at room temperature.

• Corrosion Science and Technology
• /
• 제17권6호
• /
• pp.301-309
• /
• 2018

If galvanized steel is exposed to an outdoor environment, atmospheric corrosion will occur with time and red rust will form when the sacrificial protection capacity of zinc reaches its limit. With corrosion, the surface appearance of steel changes, and the properties of the exterior materials degrade. In this study, two kinds of galvanized steel, (GA and GI specimens) were subjected to an outdoor exposure test for 36 months in six regions of Korea. Chrominance (color, chroma, and brightness) and glossiness surface analyses were performed. The color change was not significant, regardless of the exposed area or the specimens tested. With increasing exposure times, the GA specimen became blackened by the formation of zinc oxide, and red coloration was increased by the formation of red rust. As the exposure time of GI specimen increased, the surface proceeded to blacken, but no red rust was formed and the color did not change significantly. Regardless of the outdoor exposure area or the specimen, longer exposure times led to lower glossiness, and this behavior appears to be influenced by the formation of zinc oxide.

• 대한화학회지
• /
• 제46권5호
• /
• pp.444-456
• /
• 2002

차체의 산화를 방지하기 위하여 희생적 양극을 사용한 산화방지 장치를 개발하였다. 희생적 양극은 철보다 산화 전위가 높은 Mg, Al, Zn으로 만들어 졌고 이것은 차체의 철이나 철합금보다 먼저 산화되어 차체의 부식을 방지한다. 차체 산화방지 장치를 제작하여 철시편을 염산, 질산 및 황산에 대한 방식효과를 시간에 따라 측정하였고 SEM과 XPS를 이용하여 철시편 표면의 방식효과를 분석하였다. 철시편을 산화 방지 장치에 연결하면 산화되어 산성용액 속으로 녹아 들어가는 철의 양이 현저하게 감소하고 철시편 표면의 산화가 방지되며 산화된 철은 $Fe_2O_3$의 산화형태를 가짐을 확인하였다. 따라서 차체 산화방지를 차체에 직접 부착한다면 차체의 부식 및 산화를 효과적으로 방지할 것으로 기대된다.

• 전자공학회논문지D
• /
• 제35D권9호
• /
• pp.48-53
• /
• 1998

실리콘 벌크 마이크로머시닝과 표면 마이크로머시닝기술을 혼합하여 새로운 구조의 정전렌즈를 제작하였다. 표면 마이크로머시닝을 위한 구조층과 희생층으로는 폴리실리콘을 사용하였으며 구조층을 열산화막으로 보호하여 실리콘 습식 식각시 손상되지 않도록 하였다. 이전의 마이크로컬럼에 사용되던 정전렌즈에 비하여 이 구조가 갖는 장점은 1) 양극 접합의 수를 줄일 수 있어 구멍간 정렬, 렌즈의 생산성, 신뢰도, 손상 면에서 우수하고, 2) 마이크로컬럼의 집적화를 통한 arrayed lithography에도 유리하다는 것이다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2008년도 추계학술대회A
• /
• pp.1727-1732
• /
• 2008

We present a facile, yet versatile carbon nanofabrication method using electron beam lithography and resist pyrolysis. Various resist nanopatterns were fabricated using a negative electron beam resist, SAL-601, and were then subjected to heat treatment in an inert atmosphere to obtain carbon nanopatterns. Suspended carbon nanostructures were fabricated by wet-etching of an underlying sacrificial oxide layer. Free-standing carbon nanostructures, which contain 122 nm-wide, 15 nm-thick, and 2 ${\mu}m$-long nanobridges, were fabricated by resist pyrolysis and nanomachining processes. Electron beam exposure dose effects on resist thickness and pattern widening were studied. The thickness of the carbon nanostructures was thinned down by etching with oxygen plasma. An electrical biosensor utilizing carbon nanostructures as a conducting channel was studied. Conductance modulations of the carbon device due to streptavidin-biotin binding and pH variations were observed.