• Title/Summary/Keyword: room temperature bonding

Search Result 153, Processing Time 0.023 seconds

Direct Bonding of SillSiO2/Si3N4llSi Wafer Fairs with a Fast Linear Annealing (선형가열기를 이용한 SillSiO2/Si3N4llSi 이종기판쌍의 직접접합)

  • 이상현;이상돈;송오성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.15 no.4
    • /
    • pp.301-307
    • /
    • 2002
  • Direct bonded SOI wafer pairs with $Si ll SiO_2/Si_3N_4 ll Si$ the heterogeneous insulating layers of SiO$_2$-Si$_3$N$_4$are able to apply to the micropumps and MEMS applications. Direct bonding should be executed at low temperature to avoid the warpage of the wafer pairs and inter-diffusion of materials at the interface. 10 cm diameter 2000 ${\AA}-SiO_2/Si(100}$ and 560 $\AA$- ${\AA}-Si_3N_4/Si(100}$ wafers were prepared, and wet cleaned to activate the surface as hydrophilic and hydrophobic states, respectively. Cleaned wafers were pre- mated with facing the mirror planes by a specially designed aligner in class-100 clean room immediately. We employed a heat treatment equipment so called fast linear annealing(FLA) with a halogen lamp to enhance the bonding of pre mated wafers We kept the scan velocity of 0.08 mm/sec, which implied bonding process time of 125 sec/wafer pairs, by varying the heat input at the range of 320~550 W. We measured the bonding area by using the infrared camera and the bonding strength by the razor blade clack opening method, respective1y. It was confirmed that the bonding area was between 80% and to 95% as FLA heat input increased. The bonding strength became the equal of $1000^{\circ}C$ heat treated $Si ll SiO_2/Si_3N_4 ll Si$ pair by an electric furnace. Bonding strength increased to 2500 mJ/$\textrm{m}^2$as heat input increased, which is identical value of annealing at $1000^{\circ}C$-2 hr with an electric furnace. Our results implies that we obtained the enough bonding strength using the FLA, in less process time of 125 seconds and at lowed annealing temperature of $400^{\circ}C$, comparing with the conventional electric furnace annealing.

A Novel One-Pot Synthesis of Quinoxaline Derivatives in Fluorinated Alcohols

  • Khaksar, Samad;Rostamnezhad, Fariba
    • Bulletin of the Korean Chemical Society
    • /
    • v.33 no.8
    • /
    • pp.2581-2584
    • /
    • 2012
  • Hexafluoroisopropanol (HFIP) is explored as an effective medium for the synthesis of quinoxaline derivatives in high yields at room temperature. The solvent (HFIP) can be readily separated from reaction products and recovered in excellent purity for direct reuse.

Spectroscopic Properties and Ligand Field Analysis of cis-Dinitrato(1,4,8,11-tetraazacyclotetradecane)chromium(III) Nitrate

  • 최종하
    • Bulletin of the Korean Chemical Society
    • /
    • v.18 no.8
    • /
    • pp.819-823
    • /
    • 1997
  • The luminescence and photoexcitation spectra of cis-[Cr(cyclam)(NO3)2]NO3·½ H2O (cyclam=1,4,8,11-tetraazacyclotetradecane) taken at 77 K are reported. The infrared and visible spectra at room-temperature are also measured. The vibrational intervals of the electronic ground state are extracted from the far-infrared and emission spectra. The ten electronic bands due to spin-allowed and spin-forbidden transitions are assigned. With observed transitions, a ligand field analysis has been performed to determine the bonding property of nitrate group in the chromium(Ⅲ) complex. According to the results, it is found that nitrate ligand has weak σ- and π-donor properties toward chromium(Ⅲ).

The consolidation of CNT/Cu mixture powder using equal channel angular pressing (Equal Channel Angular Pressing 공정을 이용한 CNT/Cu 복합분말의 고형화)

  • Yoon, S.C.;Quang, P.;Kim, H.S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2006.05a
    • /
    • pp.119-122
    • /
    • 2006
  • In this study, bottom-up type powder processing and top-down type SPD (severe plastic deformation) approaches were combined in order to achieve full density of 1 vol.% carbon nanotube (CNT)-metal matrix composites with superior mechanical properties by improved particle bonding and least grain growth, which were considered as a bottle neck of the bottom-up method using the conventional powder metallurgy of compaction and sintering. ECAP (equal channel angular pressing), the most promising method in SPD, was used for the CNT-Cu powder consolidation. The powder ECAP processing with 1, 2, 4 and 8 route C passes was conducted at room temperature. It was found by mechanical testing of the consolidated 1 vol.% CNT-Cu that high mechanical strength could be achieved effectively as a result of the Cu matrix strengthening and improved particle bonding during ECAP. The ECAP processing of powders is a viable method to achieve fully density CNT-Cu nanocomposites.

  • PDF

Bonding and Physical Characteristics of Diamond-like Carbon Films Prepared by Laser Ablation (레이저 어블레이션에 의해 증착된 비정질 다이아몬드 박막의 결합및 물리적 특성)

  • Park, Hwan-Tae;Hong, Young-Kyu;Kim, Jae-Ki;Kim, Jin-Seung;Park, Chan
    • Journal of the Korean Vacuum Society
    • /
    • v.5 no.1
    • /
    • pp.1-5
    • /
    • 1996
  • Noncrystalline films of diamond-like carbon (DLC) have been prepared by laser ablation technique at room temperature. A Q-switched Nd-YAG laser beam with wavelength of 1064 nm and pulse duration of 10 ns was focused onto a graphite target with power densities of about $10^9 W/\textrm{cm}^2$. The physical properties of the resulting films were analyzed with density, hardness, and resistivity measurements. The surface and bonding structure were investigated by atomic force microscopy (AFM), Raman spectroscopy, electron energy loss spectroscopy (EELS).

  • PDF

Densification and Thermo-Mechanical Properties of Al2O3-ZrO2(Y2O3) Composites

  • Kim, Hee-Seung;Seo, Mi-Young;Kim, Ik-Jin
    • Journal of the Korean Ceramic Society
    • /
    • v.43 no.9 s.292
    • /
    • pp.515-518
    • /
    • 2006
  • The microstructure of $ZrO_2$ toughened $Al_2O_3$ ceramics was carefully controlled so as to obtain dense and fine-grained ceramics, thereby improving the properties and reliability of the ceramics for capillary applications in semiconductor bonding technology. $Al_2O_3-ZrO_2(Y_2O_3)$ composite was produced via Ceramic Injection Molding (CIM) technology, followed by Sinter-HIP process. Room temperature strength, hardness, Young's modulus, thermal expansion coefficient and toughness were determined, as well as surface strengthening induced by the fine grained homogenous microstructure and the thermal treatment. The changes in alumina/zirconia grain size, sintering condition and HIP treatment were found to be correlated.

Molecular Bonding Force and Stiffness in Amine-Linked Single-Molecule Junctions Formed with Silver Electrodes

  • Kim, Taekyeong
    • Journal of the Korean Chemical Society
    • /
    • v.59 no.2
    • /
    • pp.132-135
    • /
    • 2015
  • Bonding force and stiffness in amine-linked single-molecule junctions for Ag electrodes were measured using a home-built conducting atomic force microscope under ambient conditions at room temperature. For comparison, Au electrodes were used to measure the rupture force and stiffness of the molecular junctions. The traces of the force along with the conductance showed a characteristic saw-tooth pattern owing to the breaking of the metal atomic contacts or the metal-molecule- metal junctions. We found the rupture force and stiffness for Ag are smaller than those for Au electrodes. Furthermore, we observed that the force required to break the amine-Ag bond in the conjugated molecule, 1,4-benzenediamine, is smaller than in 1,4-butanediamine which is fully saturated. These results consist with the previous theoretical calculations for the binding energies of the nitrogen bonded to Ag or Au atoms.

Application of Art Clay Silver in Manufacturing Necklace (목걸이 제작에 있어서 Art Clay Silver활용에 관한 연구)

  • Park, Su-Jung;Koh, Je-Man;Mun, Sung
    • Archives of design research
    • /
    • v.18 no.4 s.62
    • /
    • pp.35-44
    • /
    • 2005
  • In the world, most of the metal technologists were as called as adornment artists than other field of industrial arts strongly industrial characters functional materials and manufacturing technology many used in the present age. In the study, one of adornments researched and material character analyzed about Art Clay Silver. The shrinkage rate of shape was about 0.24%. A shrinking phenomenon drying time thought of evaporation of water linking bonding agents and powders. After calcination of Art Clay Silver, the EDX used that just Ag 100% analyzed a result from the surface assay in the room temperature. A binder with powder in the room temperature considered to disappear, because it was been fume and smoke at high calcined temperature. A study showed when handicrafted necklaces make by these characteristic as using in difficult and delicated operations rather than naturally and beautifully expressive products.

  • PDF

Evaluation of High Temperature Strength Characteric in Joint Metal (접합재의 고온강도 특성 평가)

  • Huh, Sun-Chul;Park, Young-Chul;Yun, Han-Ki;Park, Won-Jo
    • Proceedings of the KSME Conference
    • /
    • 2000.04a
    • /
    • pp.103-108
    • /
    • 2000
  • Since the ceramic/metal joint material is made at a high temperature, the residual stress development when it is cooled from bonding temperature to room temperature due to remarkable difference of thermal expansion coefficient between ceramic and metal. As residual stress at ceramic/metal joints influences the strength of joints, it is important to estimate residual stress quantitatively. In this study, it is attempted to estimate joint residual stress of $Si_3N_4/STS304$ joints quantitatively and to compare the strength of Joints. The difference of residual stress is measured when repeated thermal cycle is loaded under the conditions of the practical use of the ceramic/metal joint. And 4-point bending test is performed to examine the influence of residual stress on fracture strength. As a residual it is known that the stress of joint decreases as the number of thermal cycle increases.

  • PDF

EXCITED-STATE INTRAMOLECULAR PROTON TRANSFER IN DICOUMAROL, A $CH_2$-BRIDGED DIMER OF 4-HYDROXYCOUMARIN

  • Cho, Dae-Won
    • Journal of Photoscience
    • /
    • v.2 no.1
    • /
    • pp.13-18
    • /
    • 1995
  • The steady-state emission spectra of dicoumarol (DC) in ethanol and EPA have been examined at various temperatures (77-298 K). At room temperature, a fluorescence spectrum of DC in ethanol shows a emission maximum at 350 nm. In EPA a Stokes-shifted emission band appears around 470 nm in addition to the 350 nm emission, and its intensity is enhanced as temperature decreases. This emission is attributed to a zwitterionic tautomer of DC formed by a single excited-state intramolecular proton transfer (ESIPT) along the internal hydrogen-bonding. The fluorescence lifetimes have been measured at 350 and 450 nm as a function of temperature. The fluorescence decay at 350 nm is single exponential at any temperature, whereas the one at 450 nm becomes biexponential at temperatures below 250 K. These results are discussed in terms of a conformational change followed by the ESIPT. The activation energy barrier for the conformational change has been determined to be 3.7 $\pm$ 0.2 kJ/mole.

  • PDF