• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.189-193
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• 1997

(S $r_{0.85}$/C $a_{0.15}$)Ti $O_3$(SCT) thin films at various deposition temperature and rf power were grown by rf magnetron sputtering method on optimized Pt-based electrodes (Pt/TiN/ $SiO_2$/Si). The crystallinity of the films increases with increasing deposition temperature. SCT thin film is depend on the surface morphology and crystallinity of Pt films for bottom electrode. Dielectric constant of (S $r_{0.85}$C $a_{0.15}$)Ti $O_3$ thin films deposited on Si wafer substrate are larger with the increase of deposition temperature and gain size.in size.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.893-896
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• 2000

The SrBi$_2$Ta$_2$O$\sub$9/(SBT) thin films are deposited on Pt-coated electrode(Pt/TiO$_2$/SiO$_2$/Si) using RF sputtering method. The SBT thin films deposited on substrate at 400-500[$^{\circ}C$]. SBT thin film deposited on Pt-coated electrodes have the cubic perovskite structure and polycrystalline state. With increasing annealing temperature from 600[$^{\circ}C$] to 850[$^{\circ}C$], flourite Phase was crystalized to 650[$^{\circ}C$] and Bi-layered perovskite phase was crystalized above 700[$^{\circ}C$]. The maximum remanent polarization is 11.73 ${\mu}$C/cm$^2$at 500[$^{\circ}C$] of substrate temperature and 750[$^{\circ}C$] annealing temperature for 30min.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1338_1339
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• 2009

Dye-sensitized solar cell (DSC) consists of photo electrode, counter electrode and electrolyte. Photo electrode has titanium oxide layer with dye molecule to create electrons. And counter electrode is made of one layer that has catalytic ability for redox system such as the iodide/triiodide couple. Most DSC researchers use platinum as catalyst on counter electrode because platinum has good catalytic ability and conductivity. Platinum is doped on fluorine-doped tin oxide glass with different methods such as sputtering method, electrochemical method and so on. In this paper, we deposit platinum on counter electrode glass with two methods. One is the radio frequency (RF) sputtering method and the other is the chemical method with heating treatment. Finally, we compare the photovoltaic characteristics of DSCs that are assembled using two different counter electrodes.

• Transactions on Electrical and Electronic Materials
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• v.6 no.5
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• pp.238-242
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• 2005

The Pt counter electrode of a dye-sensitized solar cell (DSSC) plays a role in helping redox reaction of iodine ions in electrolyte, also, transferring electrons into electrolyte. In this case, it is expected that characteristics of Pt electrodes strongly depend on fabrication process and its surface condition. In this study, Pt electrodes were prepared by a electro-deposition and a RF magnetron sputtering. Electrochemical behavior of Pt electrodes was compared using cyclic-voltammetry and impedance spectroscopy. Surface morphology of Pt electrodes was investigated by FE-SEM and AFM. I-V characteristics of DSSC were measured and discussed in association with the surface properties of counter electrode. As a result, electrochemical properties of electro-deposited Pt electrode were superior to that of sputtered Pt electrode. This is likely that enlarged area of surface in electro-deposited Pt electrode in comparison with the case of sputtered Pt electrode playa role in enhancing such electrochemical properties.

• Journal of the Semiconductor & Display Technology
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• v.13 no.3
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• pp.39-43
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• 2014

The effect of electrode charging on the ion energy distribution (IED) was investigated in the dual-frequency capacitively coupled plasma source which was powered of 100 MHz RF at the top electrode and 400 kHz bias on the bottom electrode. The charging property was analyzed with the distortion of the measured current and voltage waveforms. The capacitance and the resistance of electrode sheath can change the property of ion and electron charging on the electrode so it is sensitive to the plasma density which is controlled by the main power. The ion energy distribution was estimated by equivalent circuit model, being compared with the measured distribution obtained from the ion energy analyzer. Results show that the low frequency bias power changes effectively the low energy population of ion in the energy distribution.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.419-421
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• 2008

Sputter deposition on a Pt counter electrode was studied using RF plasma as the improvement of conversion efficiency for dye-sensitized solar cells (DSC). The effects of the sputtering thickness and incident angle on a Pt counter electrode for DSC was scrutinized. We conducted the experiment to get the optimal sputtering time for the performance of the DSC. Under the sputtering time condition of 120 seconds, we varied the incident angles of substrate from $0^{\circ}$ to $60^{\circ}$. Under standard test condition (AM 1.5, 100mW/$cm^2$), we obtained the maximum efficiency of 4.61% at the incident angle of $40^{\circ}$ with an active cell area of $1cm^2$.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1469-1472
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• 2006

We investigated the electrical and optical properties of ZnO:Al thin films as a function of the thermal process conditions. The film was prepared by RF magnetron sputtering followed by annealing in a box furnace in air. An ZnO:Al (98:2) alloy with the purity of 99.99% (3 inch diameter) was used as the target material. The electrical properties of the transparent electrode, exhibited surface oxidation as a result of rapid oxygen absorption with increasing annealing temperature. The processed ZnO:Al films and commercial ITO(indium-tin-oxide) were applied to an OLED stack to investigate the current density and luminescence efficiency. The efficiency of the device using the ZnO:Al electrode was higher than that from the device using the ITO electrode.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.49-52
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• 2003

The role of gas ratio with the crystallization behavior and electrical properties in $Bi_{3.25}La_{0.75}Ti_3O_{12}$(BLT) thin films by rf magnetron sputtering method has not been precisely defined. In this work, the ferroelectric properties of these films with gas variation was investigated. BLT thin films were deposited on the Pt/Ti bottom electrode by rf magnetron sputtering method and then they were crystallized by rapid thermal annealing (RTA). The experiment showed that all BLT films indicated perovskite polycrystalline structure with preferred orientation (020) and (0012). And no pyrochlore phase was observed. The fabricated film annealed with $O_2$ of 15 sccm showed that value of leakage current was $9.67{\times}10^{-7}A/cm^2$ at 50kV /em, and the value of remanent polarization (2Pr=Pr+-Pr-) was $11.8{\mu}C/cm^2$. Therefore we induce access to memory device application by rf-magnetron sputtering method in this report.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.6
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• pp.1186-1193
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• 2009

Wearable ECG monitoring is regarded as one of the most essential part in the ubiquitous healthcare environment and subsequently day-life monitoring of a heart condition has been pursued especially for the elder people. However, there are many problems to accomplish this task such as; i) implementation of long-term monitoring device, ii) development of non-irritating electrode on skin and iii) stable signal acquisition. With these aims, we have focused on implementing a non-irritating electrode with an endurable monitoring device for day-life. To accomplish our tasks, we basically developed four different types of textile electrodes that are adapted by both shape and the composed material; flat or convex shape and Ag-conductive paste material or not. It turns out to be that a convex shape and Ag-paste textile electrode has the best performance in terms of both signal-to-noise ratio (SNR) and Impedance/Phase characteristics. Furthermore, ECG amplifier (35 ${\times}$ 35 mm) has developed to resolve the ECG signal and transfer the signal to desktop computing device or portable one by RF serial communication.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.339-339
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• 2013

We study on the optical and electrical properties of indium-free ZTO(ZnSnO)/Ag/ZTO (ZAZ) multilayer electrodes for the low-cost transparent electrode. In the first step, each single layer was deposited using rf magnetron in-line sputter with various working pressure based on $O_2$/$Ar+O_2$ ratio (0~3%) and power at room temperature. Secondly, we studied the optical and electrical properties by analyzing the refractive index, extinction coefficient, transmittance and resistivity of each layer. Finally, we optimized the thickness of each layer using macleod simulation program based on the analyzed optical properties and fabricated the multilayer electrode. As a result, We achieved a low sheet resistance of $11{\Omega}$/sq and anaverage transmittance of 80% in the visible region of light (380~780 nm). This indicates that indium-free ZAZ multilayer electrode is a promising low-cost and low-temperature processing electrode scheme.