Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2013.02a
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- Pages.339-339
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- 2013
Characteristics and Fabrication of ZTO/Ag/ ZTO Multilayer Transparent Conducting Electrode
- Cho, Se-Hee (Interface Control Research Center, Korea Institute of Science and Technology) ;
- Yang, Jeong-Do (Interface Control Research Center, Korea Institute of Science and Technology) ;
- Wei, Chang-Hwan (Interface Control Research Center, Korea Institute of Science and Technology) ;
- Pandeyd, Rina (Interface Control Research Center, Korea Institute of Science and Technology) ;
- Byun, Dong-Jin (Department of Materials Science and Engineering, Korea University) ;
- Choia, Won-Kook (Interface Control Research Center, Korea Institute of Science and Technology)
- Published : 2013.02.18
Abstract
We study on the optical and electrical properties of indium-free ZTO(ZnSnO)/Ag/ZTO (ZAZ) multilayer electrodes for the low-cost transparent electrode. In the first step, each single layer was deposited using rf magnetron in-line sputter with various working pressure based on
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