• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.559-563
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• 2005

The wafer positioning robot used in the semiconductor industry is required to operate at high speed for the improvement of productivity. However, the residual vibration produced by the high speed of the wafer positioning robot makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the optimization of the cycle time. The followings are the process for the reduction and the optimization; 1)System modeling of wafer positioning robot, 2)Verification of dynamic characteristic of wafer positioning robot, 3)Input shaping plan using impulse response reiteration, 4)Simulation test using simulink, 6)Analysis of result.

• 대한공업교육학회지
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• v.31 no.2
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• pp.364-380
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• 2006

This paper presents a procedure for designing command to maneuver flexible structure with very little residual vibration, even in the presence of modeling errors. For the open loop maneuver, the various shaped profiles using multiple step inputs delayed in time are considered for robustness and compared with the responses of rigid body and flexible body in virtue of simulations and experiments. Input shaping generates vibration-reducing shaped commands through convolution of an impulse sequence with the desired command. A flexible model with a cylindrical hub and four symmetric appendages is considered to examine the responses to real plant, and to illustrate the effectiveness of the proposed shapers. The appendages are long and flexible, leading to low frequency vibration under any control action. It is shown by a series of simulation that a properly designed feedback controller with input shaper performs well, as compared with open loop controller with input shaper. The control objective is to achieve a fast settling time of residual vibration to flexible structure and robustness (insensitivity)to plant uncertainty, to eliminate residual vibration.

• The Journal of Korea Robotics Society
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• v.18 no.1
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• pp.127-134
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• 2023

Recently, various input shapers have been introduced to reduce residual vibrations of flexible robots. However, there have been no studies on the design of an input shaper that can suppress residual vibration at an arbitrarily specified duration. In this paper, a novel input shaper called an SD (specified-duration) shaper is proposed for an undamped or underdamped system, which can suppress residual vibration at an arbitrarily given specified duration. If the specified duration is larger than a half period, a positive SD shaper composed of all positive impulses is designed, and if the specified duration is smaller than a half period, a negative SD shaper including a negative impulse is designed. As the specified duration is increased every half period after a half period, the number of impulses of the positive SD shaper is increased one by one, and the robustness of the SD shaper to modeling errors is increased. The performance of the SD shaper is analyzed through simulation studies for an undamped and underdamped second-order systems. The validity of the SD shapers is demonstrated experimentally using an experimental device that can generate container transport motions.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.4
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• pp.100-106
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• 2009

The current tendency toward light weight and fast machines has lead to a need to suppress vibration of flexible dynamic systems. Input shaping is an efficient tool to eliminate transient and residual vibration caused by motion of these systems. This paper proposes a new formulation of the design method for multi-mode input shapers to eliminate residual vibration in flexible dynamic systems. The essence of the proposed method is to minimize the number of impulses to be n+1 for n-mode input shapers. This paper also suggests a solution procedure to solve the complex-valued nonlinear matrix equation for the input shapers. The proposed method is applied to two-mode input shapers. This paper discusses characteristics of several input shapers obtained under the same condition. Simulations and experiments show that the proposed method is very useful for designing multi-mode input shapers.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.158-166
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• 2004

A new method to measure residual unbalance of rotor - bearing system was proposed. The method which determine residual unbalance based on polar plot and an analytical method which calculates the residual unbalance of the rotor from the vibration response of the Jeffcott rotor are proposed in this study with respect to a real rotor system of which the residual unbalance is unknown. The unbalance eccentricity of the produced experimental model is 3.78 mil, developing the measurement method of the residual unbalance more convenient than the proposed method of ISO and API standard. The proposed method was experimentally compared with the ISO standard, and the two methods were exactly correspondent to each other within an error of 1%.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10a
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• pp.1036-1041
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• 1993

The tip of the flexible robot arm has to be controlled by the active control reducing vibration because it has residual vibration after getting to desired position. This paper presents an end-point position control of a 1-link flexible robot arm having tip mass by the PID control algorithm. The system is composed of a flexible arm with tip mass, dc servomotor and ballscrew mechanism under translational motion. The feedback signal composed of the tip displacement measured by laser sensor, estimated velocity and acceleration is used to control the base motion. Theoretical results are obtained by applying the Laplace transform and the numerical inversion method to the governing equations. After the flexible robot arm reaches to. the desired position, the residual vibration is controlled by the PID algorithm. This paper gives the simulation and experimental results of end-point responses according to changing tip-mass and arm length. And this algorithm shows good effects of reducing the residual vibration. Approximately, theoretical response is in good agreement with experimental one.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.135-142
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• 2002

Input shaping is a method for reducing residual vibration in computer controlled machines. Vibration is eliminated by convolving a sequence of impulses, an input shaper, with a desired system command to produce a shaped input. This paper shows the shape of sensitivity curve of input shaper as impulse interval T and analysis of robustness for input shaper on the z-plane. And a method is presented for designing equivalent input shaper considering sampling time $T_s$. And then we applied equivalent input shaper to crane system.

• Journal of the Korean Society for Aviation and Aeronautics
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• v.14 no.4
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• pp.31-37
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• 2006

In this paper, an experimental study on the robust input shaping for control of the residual vibration of flexible structures has been investigated. Two approaches has been used for the robustness of input shaping: the first method is to increase the number of impulses, and the other includes an EI shaper using vector diagram. The input case designed by the application of the above methods has been applied to a control problem involving residual vibration of a rotating hub with two flexible appendages. It has been found by a series of experiments that the input shaper designed in this paper works well for the residual vibration control of the flexible structure.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.1
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• pp.3-10
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• 2008

In this paper, the optimal command input is considered in order to minimize the residual vibrations of a flexible cantilever beam when the beam simply changes its position by translation or rotation. Although a cantilever beam has many modes of vibration, it is shown that the consideration of the first mode is sufficient in this case. Thus, the problem becomes a single-degree-of-freedom system subjected to a ground excitation. Two simple methods are proposed to find the optimal command input based on the shock response spectrum (SRS). The first method is the simplest and can be applied to lightly damped cases, and the second method is applicable to more general problems. The second method gives almost the same results as the input shaping method. However the proposed method gives a easier and clearer control strategy.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.10
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• pp.122-129
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• 2008

This paper deals with precise positioning of a high-speed positioning stage without inducing residual vibration by using an input shaping technique. Input shaping is well known to be a very effective tool for suppressing the residual vibration of flexible structures. However, the ordinary input shaping for positioning stages is designated mostly for velocity regulation, not for the residual vibration at the target position. The main difficulties in implementing input shaping along with precise positioning are the time delay caused by the servo system characteristics and the s-curve feature often employed in some motor controllers. This paper analyzes the dynamic responses of a single-mode-dominate stage system subjected to input shaping. A theoretical model is developed io investigate the nature of system. In order to overcome the difficulty, this paper proposes an improved input shaper based on modified command profile generation. The proposed method is proved effective through experiments and simulations.