• 제목/요약/키워드: residual vibration

검색결과 285건 처리시간 0.033초

입력성형을 통한 웨이퍼 이송장치의 잔류진동 감쇠 (Reduction of Residual Vibration in Wafer Positioning System Using Input Shaping)

  • 임재철;안태길;조중근
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2005년도 추계학술대회논문집
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    • pp.559-563
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    • 2005
  • The wafer positioning robot used in the semiconductor industry is required to operate at high speed for the improvement of productivity. However, the residual vibration produced by the high speed of the wafer positioning robot makes the life of the robot shorter and the cycle time longer. In this study, the input shaping and the path of the system are designed for the reduction of the residual vibration and the optimization of the cycle time. The followings are the process for the reduction and the optimization; 1)System modeling of wafer positioning robot, 2)Verification of dynamic characteristic of wafer positioning robot, 3)Input shaping plan using impulse response reiteration, 4)Simulation test using simulink, 6)Analysis of result.

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입력설계기법에 의한 유연구조물의 잔류진동제어 (A Suppression of Residual Vibration on the Flexible Structures by Input Shaping)

  • 박명호;한명석;박성종
    • 대한공업교육학회지
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    • 제31권2호
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    • pp.364-380
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    • 2006
  • 본 연구는 모델링 오차를 갖는 유연구조물의 잔류진동을 억제하는 입력설계에 대한 방법이다. 개루프 제어방법으로 시간지연방법을 이용하여 여러 가지 형태로 설계된 입력을 사용하여 유연구조물의 강체운동과 잔류진동을 억제함을 시뮬레이션과 실험을 통해 비교 확인해 보았다. 또한 모델 오차에 대한 강인성 측면에서도 해석적으로 개루프 시스템에서 검토해 보았다. 여기서 사용된 입력설계(Input-Shaping) 방법은 일련의 임펄스 콘볼류션을 이용하여 진동이 제어되는 입력을 설계한다. 실린더 모양의 허브와 양쪽에 유연한 날개 모양을 가진 모델이 실험에 이용되었으며 제안된 입력설계 명령과 설계되지 않은 명령에 대한 강체운동과 구조물의 잔류진동을 측정하여 입력설계 방법의 효과를 확인하였다. 날개모양의 구조물은 길고 유연하여 운동 상태에서 낮은 주파수 진동을 수반하는 구조물이다. 또한, 적절히 설계된 입력이 폐루프 제어시스템의 입력으로 사용할 때의 응답을 개루프 제어시스템의 응답과 비교하기 위해 해석적 방법을 통해 살펴보았다. 제어의 목적은 강체의 빠른 정착시간, 유연 구조물의 빠른 잔류진동 감쇄, 모델의 불확실성에 대한 강인성 등을 검토해 보는 것이다.

임의 성형시간에 잔류진동을 제거할 수 있는 SD성형기 (An SD Shaper to Suppress Residual Vibration at an Arbitrarily Specified Duration)

  • 강병현
    • 로봇학회논문지
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    • 제18권1호
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    • pp.127-134
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    • 2023
  • Recently, various input shapers have been introduced to reduce residual vibrations of flexible robots. However, there have been no studies on the design of an input shaper that can suppress residual vibration at an arbitrarily specified duration. In this paper, a novel input shaper called an SD (specified-duration) shaper is proposed for an undamped or underdamped system, which can suppress residual vibration at an arbitrarily given specified duration. If the specified duration is larger than a half period, a positive SD shaper composed of all positive impulses is designed, and if the specified duration is smaller than a half period, a negative SD shaper including a negative impulse is designed. As the specified duration is increased every half period after a half period, the number of impulses of the positive SD shaper is increased one by one, and the robustness of the SD shaper to modeling errors is increased. The performance of the SD shaper is analyzed through simulation studies for an undamped and underdamped second-order systems. The validity of the SD shapers is demonstrated experimentally using an experimental device that can generate container transport motions.

동적 시스템의 잔류진동 제거를 위한 새로운 다모드 입력성형기 설계 방법 (A New Design Method for Multi-mode Input Shapers to Eliminate Residual Vibration in Dynamic Systems)

  • 박상원;홍성욱
    • 한국정밀공학회지
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    • 제26권4호
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    • pp.100-106
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    • 2009
  • The current tendency toward light weight and fast machines has lead to a need to suppress vibration of flexible dynamic systems. Input shaping is an efficient tool to eliminate transient and residual vibration caused by motion of these systems. This paper proposes a new formulation of the design method for multi-mode input shapers to eliminate residual vibration in flexible dynamic systems. The essence of the proposed method is to minimize the number of impulses to be n+1 for n-mode input shapers. This paper also suggests a solution procedure to solve the complex-valued nonlinear matrix equation for the input shapers. The proposed method is applied to two-mode input shapers. This paper discusses characteristics of several input shapers obtained under the same condition. Simulations and experiments show that the proposed method is very useful for designing multi-mode input shapers.

로터-베어링 시스템의 잔류불평형량을 결정하는 방법에 대한 연구 (A Study about Way to Decide on Residual Unbalance of Rotor-Bearing system)

  • 이형우;이동환;박노길;김인환
    • 한국정밀공학회지
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    • 제21권9호
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    • pp.158-166
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    • 2004
  • A new method to measure residual unbalance of rotor - bearing system was proposed. The method which determine residual unbalance based on polar plot and an analytical method which calculates the residual unbalance of the rotor from the vibration response of the Jeffcott rotor are proposed in this study with respect to a real rotor system of which the residual unbalance is unknown. The unbalance eccentricity of the produced experimental model is 3.78 mil, developing the measurement method of the residual unbalance more convenient than the proposed method of ISO and API standard. The proposed method was experimentally compared with the ISO standard, and the two methods were exactly correspondent to each other within an error of 1%.

Tip mass를 갖는 병진운동 1-링크 탄성암 선단의 위치제어 (Tip position control of translational 1-link flexible arm with tip mass)

  • 이영춘;방두열;이성철
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국내학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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    • pp.1036-1041
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    • 1993
  • The tip of the flexible robot arm has to be controlled by the active control reducing vibration because it has residual vibration after getting to desired position. This paper presents an end-point position control of a 1-link flexible robot arm having tip mass by the PID control algorithm. The system is composed of a flexible arm with tip mass, dc servomotor and ballscrew mechanism under translational motion. The feedback signal composed of the tip displacement measured by laser sensor, estimated velocity and acceleration is used to control the base motion. Theoretical results are obtained by applying the Laplace transform and the numerical inversion method to the governing equations. After the flexible robot arm reaches to. the desired position, the residual vibration is controlled by the PID algorithm. This paper gives the simulation and experimental results of end-point responses according to changing tip-mass and arm length. And this algorithm shows good effects of reducing the residual vibration. Approximately, theoretical response is in good agreement with experimental one.

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등가입력성형기를 이용한 크레인의 잔류진동 제어 (Control of the Residual Vibration of Crane Using Equivalent Input Shaper)

  • 박운환;이재원;노상현;윤지섭;박병석
    • 한국정밀공학회지
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    • 제19권1호
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    • pp.135-142
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    • 2002
  • Input shaping is a method for reducing residual vibration in computer controlled machines. Vibration is eliminated by convolving a sequence of impulses, an input shaper, with a desired system command to produce a shaped input. This paper shows the shape of sensitivity curve of input shaper as impulse interval T and analysis of robustness for input shaper on the z-plane. And a method is presented for designing equivalent input shaper considering sampling time $T_s$. And then we applied equivalent input shaper to crane system.

유연구조물의 강인한 입력설계기법의 실험적 연구 (An Experiment Study on the Robust Input Shaping of Flexible Structures)

  • 배재성;현영오;곽동기;박영근;황재혁
    • 한국항공운항학회지
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    • 제14권4호
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    • pp.31-37
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    • 2006
  • In this paper, an experimental study on the robust input shaping for control of the residual vibration of flexible structures has been investigated. Two approaches has been used for the robustness of input shaping: the first method is to increase the number of impulses, and the other includes an EI shaper using vector diagram. The input case designed by the application of the above methods has been applied to a control problem involving residual vibration of a rotating hub with two flexible appendages. It has been found by a series of experiments that the input shaper designed in this paper works well for the residual vibration control of the flexible structure.

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병진 또는 회전하여 위치 이동하는 유연 외팔보의 잔류진동 저감 방법 (Reduction of the Residual Vibrations of a Flexible Cantilever Beam Subjected to a Transient Translation or Rotation Motion)

  • 신기홍
    • 한국소음진동공학회논문집
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    • 제18권1호
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    • pp.3-10
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    • 2008
  • In this paper, the optimal command input is considered in order to minimize the residual vibrations of a flexible cantilever beam when the beam simply changes its position by translation or rotation. Although a cantilever beam has many modes of vibration, it is shown that the consideration of the first mode is sufficient in this case. Thus, the problem becomes a single-degree-of-freedom system subjected to a ground excitation. Two simple methods are proposed to find the optimal command input based on the shock response spectrum (SRS). The first method is the simplest and can be applied to lightly damped cases, and the second method is applicable to more general problems. The second method gives almost the same results as the input shaping method. However the proposed method gives a easier and clearer control strategy.

위치결정 스테이지의 고속 정밀 위치결정을 위한 입력성형명령 생성 기법 (Command Generation Method for High-Speed and Precise Positioning of Positioning Stage)

  • 장준원;박상원;홍성욱
    • 한국정밀공학회지
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    • 제25권10호
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    • pp.122-129
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    • 2008
  • This paper deals with precise positioning of a high-speed positioning stage without inducing residual vibration by using an input shaping technique. Input shaping is well known to be a very effective tool for suppressing the residual vibration of flexible structures. However, the ordinary input shaping for positioning stages is designated mostly for velocity regulation, not for the residual vibration at the target position. The main difficulties in implementing input shaping along with precise positioning are the time delay caused by the servo system characteristics and the s-curve feature often employed in some motor controllers. This paper analyzes the dynamic responses of a single-mode-dominate stage system subjected to input shaping. A theoretical model is developed io investigate the nature of system. In order to overcome the difficulty, this paper proposes an improved input shaper based on modified command profile generation. The proposed method is proved effective through experiments and simulations.