• 한국전기전자재료학회논문지
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• 제18권1호
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• pp.24-29
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• 2005

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. Copper has been the candidate metallization material for ultra-large scale integrated circuits (ULSIs), owing to its excellent electro-migration resistance and low electrical resistance. However, it still has various problems in copper CMP process. Thus, it is important to understand the effect of the process variables such as turntable speed, head speed, down force and back pressure are very important parameters that must be carefully formulated in order to achieve desired the removal rates and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the variables and the interaction between the various parameters during CMP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate, non-uniformity and ETC (edge to center) is achieved by using the statistical analysis techniques. In the experimental tests, the optimum parameters which were derived from the statistical analysis could be found for higher removal rate and lower non-uniformity through the above DOE results.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.120-124
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• 2000

In this paper, the effect of magnetic field was measured on NOx(NO+NO2) removal and consumption power for wire-plate plasma reactor with magnetic field applied to electric field vertically. NOx of the simulated diesel engine flue gas were removed by the corona discharge generated by DC, AC and Pulsed voltages in wire-plate reactor. Consumption power increased with discharge voltage. However, when magnetic field was applied to electric field vertically, consumption power slightly decreased. NOx removal rate and arc transition voltage for plasma reactor with magnetic field were higher than those for plasma reactor without magnetic field. Consumption power decreased, however NOx removal significantly increased, when water vapour bubbled by dry air was put into simulated flue gas.

• 환경생물
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• 제25권2호
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• pp.139-148
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• 2007

In 2005, an unrecorded bryozoan, Bantariella sp., invading on black corals was observed at Munseom in Jejudo Island. An intensive study was performed in the portion of 180 m width and $10{\sim}30m$ deep of Hangae-chang at Munseom during the period from Jan. to Nov. 2006. The following two black corals, Antipathes japonica and A. lata are occurring in this area. To investigate the quantitative change of invasion rates, 26 colonies with initial invasion rate of 0%, 30%, 70% and 100% respectively were individually tagged at the beginning of this study. After that, the change of reinvasion rates was monitored in a timely manner with the pictures taken by underwater camera and ensile observation. These data were analyzed as to host species, depth and initial invasion rates. According to host species, the removal effect was higher in A. lata than A. japonica. The reinvasion rate of black corals showed a maximal effect at $20{\sim}30m$ deep, and the most successful removal effect appeared in the colonies of initial invasion rates of $30{\sim}70%$. Especially, the invasion of Bantariella sp. on black corals is related to seawater temperature in seasonal manner and this appearance was limitedly observed at Munseom. This study is to document the impact by bryozoan proposing removal methods and its proper time of removal. It could contribute to the conservation of black corals and furthermore help to predict the change of marine environments.

• 상하수도학회지
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• 제11권4호
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• pp.43-53
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• 1997

In this research, the synthetic livestock wastewater was prepared to study the characteristics of organic matter removal, the change of VFA production, and the amount of gas production with respect to the change of ammonium nitrogen concentration in the waste using anaerobic fixed bed process, which is an anaerobic biofilm process. The HRT and operation temperature were 1 day and $35{\pm}1^{\circ}C$, respectively. Also, the characteristics of organic matter removal and the inhibitory effect on microorganism in the anaerobic process were studied on the organic loading and ammonium nitrogen concentration. The results obtained were as follows: For COD loading of $10kg/m^3$-day and five levels of ammonium nitrogen concentration ranging from 1,000 to 5,000 mg/L, organic removal efficiencies were about 81, 74, 67, 58, and 51%, and gas productions were 3,860, 3,520, 3,240, 3,020, and 2,790 ml/l-day, respectively. Average methane contents in the gas produced on COD loading of $10kg/m^3$-day was about 76%. Throughout the whole period of experiment, remaining VFA (as COD base) in the effluent was over 90% of remaining COD. This result indicated the inhibitory effect of high concentration of ammonium nitrogen through the facts that accumulated VFA was almost COD and organic removal efficiency decreased also with the increase of ammonium nitrogen. Especially, that implys which high concentration of ammonium nitrogen not only inhibits methane forming bacteria, but also acid forming bacteria.

• 대한가정학회지
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• 제35권4호
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• pp.257-268
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• 1997

The effects of water-and oil-repellent finishes on the deposition and removal of oily soils from polyseter fabrics were investigated in this study. The polyester fabrics treated with three kinds of fluoropolymers(TG-410H, TG-990) were soiled with mixed oily soils and washed by using Terg-O-Tometer at various conditions. It was found that TG-410H and TG-527 treated polyester fabrics reduced significantly the deposition of oily soils than untreated and TG-990 treated polyester fabrics. The removal of oily soils from polyester fabrics was increased in porportion to increasing of surfactant concentration up to a certain point(0.2% owb) but it levelled off above the point. The removal effect was high in the order of TG-990 treated polyester fabrics > untreated polyester fabrics > TG-527 treated polyester fabrics > TBG-410H treasted polyester fabrics. Especially the removal of oily soils from polyester fabrics was more effectively removed in triton X-100 solution. In general the removal of oily soils from polyester fabrics treated with fluoropolymers was increased up to a miximum near 6$0^{\circ}C$ and than decreased above 6$0^{\circ}C$. And efficient removal could be achieved within relatively short time (30min) The removal of oily soils from polyester fabrics was increased in proportion to increasing of pH range up to a certain point(9.5 or 11.0) but it began to decrease above the point. Furthermore the removal of oily soils was increased with th increase of mechanical agitation, but it began to decrease above 160 rpm.

• 상하수도학회지
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• 제10권3호
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• pp.73-82
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• 1996

The removal efficiencies of organic substrates, nitrogen and phosphorus in the anaerobic-aerobic biological phosphorus removal process were investigated by addition of acetic acid, propionic acid and butyric acid which are normal volatile fatty acids contained in anaerobic digester supernatants. Substrate utilization coefficients for the phosphorus release and uptake were also estimated. The effect of a VFA, which showed higher phosphorus removal efficiency than the other VFAs did, was also studied in an anaerobic-aerobic-anoxic biological nutrient removal process. For the anaerobic-aerobic process added by VFA, the phosphorus removal efficiencies were up to about 68%, 55% and 61% for the reactors of acetic acid, propionic acid and butyric acid added, respectively, which indicates the efficiencies were increased by about 8-21%, comparing to that of 47% for the reactor with no VFA added. There were no significant difference in removal efficiencies for organic substrate and $NH_3-N$ without regard to addition of VFA. However, the removal efficiency of total nitrogen was increased in the case of VFA added, since $NO_3-N$ was less produced. For the anaerobic-aerobic-anoxic process added VFA, the removal efficiencies for $NH_3-N$ and $PO{_4}^{3-}-P$ were increased by 5% and 13%, respectively, comparing with them in the reactors not added VFA.

• 한국환경보건학회지
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• 제40권4호
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• pp.322-329
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• 2014

Objectives: The purpose of this study was to investigate the effect of BIO-CLOD on advanced wastewater treatment for enhanced removal efficiency and meeting the stringent discharge water requirements of wastewater treatment plants. Methods: Two experimental apparatuses consisting of anaerobic, anoxic and aeration tanks were operated. One included a BIO-CLOD cultivation tank. Organic and nutrient parameters and removal efficiency were analyzed by pH, BOD, CODcr, SS, T-N and T-P. Results: The average removal efficiencies of BOD, COD and SS from the apparatus with BIO-CLOD tank installation were 95.5%, 88.6% and 92.9%, respectively, and these were higher than the results from the apparatus without BIO-CLOD. The average TP removal efficiency with BIO-CLOD tank marked 56.0%, higher than the 47.3% from the apparatus without one. BIO-CLOD showed a higher performance for TN removal at 49.6%, compared to the result without BIO-CLOD of 34.3% Conclusion: By reaction with BIO-CLOD, ammonia removal was effective in the aeration tank, as was phosphorus release in the anaerobic tank. Phosphorus luxury uptake and nitrification in aeration tank proceeded smoothly. The application of BIO-CLOD can improve the decrease of odor and settleability of activated sludge in a wastewater treatment plant, as well as increase the removal efficiency of organic and nutrient materials in water.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2003년도 추계학술발표회
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• pp.78-82
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• 2003

Development of hematite-coated sand was evaluated for the application of the PRB (permeable reactive barrier) in the arsenic-contaminated subsurface of the metal mining areas. The removal efficiency of As(III) and As(V), the effect of anion competition and the capability of arsenic removal in the flow system were investigated through the experiments of adsorption isotherm, arsenic removal kinetics against anion competition and column removal. Hematite-coated sand followed a linear adsorption isotherm with high adsorption capacity at low level concentrations of arsenic (< 1.0 mg/l). When As(III) and As(V) underwent adsorption reactions in the presence of anions (sulfate, nitrate and bicarbonate), sulfate caused strong inhibition of arsenic removal, and bicarbonate and nitrate caused weak inhibition due to specific and nonspecific adsorption onto hematite, respectively. In the column experiments, high content of hematite-coated sand enhance the arsenic removal, but the amount of the arsenic removal decreased due to the higher affinity of As(V) than As(III) and reduced adsorption kinetics in the flow system, Therefore, the amount of hematite-coated sand, the adsorption affinity of arsenic species and removal kinetics determined the removal efficiency of arsenic in the flow system. arsenic, hematite-coated sand, permeable reactive barrier, anion competition, adsorption.

• 한국수산과학회지
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• 제37권2호
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• pp.85-90
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• 2004

The effect of the hydraulic residence time (HRT) for the removal of aquarium waste, such as protein, total suspended solids (TSS) and turbidity were investigated by using a foam separator Protein, TSS and turbidity removal efficiencies were increased with the increase of hydraulic residence time. The optimum hydraulic residence time was 0.5 min, and the highest protein and TSS removal rates were $14.4\;g/L{\cdot}day\;and\;38.9\;g/L{\cdot}day,$ respectively. The tendency of turbidity removal rate and efficiency was similar to that of protein.

• Environmental Engineering Research
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• 제19권4호
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• pp.381-385
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• 2014

Microwave (MW) radiation was developed to remove and recover ammonia nitrogen in the real swine wastewater. The effect of operating parameters of MW radiation such as initial pH, power, radiation time, aeration, and stirring for removal ammonia nitrogen in swine wastewater was determined. The pH, radiation time, and power were significantly influenced on the removal of ammonia nitrogen, and aeration and stirring showed relatively minor effect on the removal of ammonia nitrogen. Optimum condition was achieved to retrieve the nitrogen efficiently at pH 11, 700 W for 5 min in MW radiation process. Through this process, 83.1% of ammonia nitrogen concentration was reduced in swine wastewater and also 82.6% of ammonia nitrogen was recovered as ammonium sulfate at the optimized condition. The high ammonia removal and recovery efficiency of the MW radiation method indicated that MW radiation was an effective technique to remove and recover ammonia nitrogen in the swine wastewater.