• 대한전자공학회논문지SD
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• 제38권9호
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• pp.605-610
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• 2001

본 연구에서는 저전압 구동형 정전방식을 이용하여 마이크론 이하 간격(sub-micron gap)을 갖는 마이크로액추에이터를 제작하였다. 사각 팁과 삼각 팁의 두 가지 방식으로 마이크로액추에이터를 제작하여 비교하였다. 삼각 팁으로 제작된 마이크로액추에이터의 gap은 0.55㎛∼l.35㎛었다. 0.55㎛ gap을 갖는 제작된 마이크로액추에이터의 경우에 13V의 낮은 전압에서 1㎛의 변위와 2.3μN의 발생력을 나타내었다. 이 마이크로액추에이터의 1차 공진주파수의 측정값의 23kHz이었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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• pp.86-90
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• 2006

Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the f1at lamp lighting source to understand property of lighting source is very important. Distance of discharge electrode is 5.5mm and width is 16.5mm, we have measured electron temperature and electron density measured with single Langmuir probe in flat lamp. We have tested the discharge from 100 Torr to 300 Torr pressure. The pulse is rectangular pulse with frequency 20kHz and duty ratio 20%. In result, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

• 한국전자파학회논문지
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• 제29권4호
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• pp.277-284
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• 2018

본 논문은 향후 투명 디스플레이, 스마트글래스(smart glass) 등의 그 활용도가 증가 추세에 있는 투명전극과 관련된 논문이며, 본 논문에서는 투명 안테나 등의 투명 고주파 수동소자 설계 시, 투명 디스플레이 등에 가장 많이 사용되고 있는 ITO(Indium-Tin-Oxide)을 이용한 박막형(thin film type) 투명전극의 낮은 전기적 특성(면저항>$5({\Omega}/sq)$)으로 인한 성능저하를 개선하고자, 고주파 소자에 가장 일반적으로 사용되는 도체인 구리선(copper wire)으로 구현되는 정방형 메탈메쉬(square metal mesh)를 이용하여 투명전극을 구현하고, 이를 기본 단위로 하여 투명 패치 안테나를 구현하였고, 그 성능을 비교 분석하였다. 본 논문에서는 투명전극의 기본 설계 블록인 정방형 메탈메쉬의 광학적 특성(광 투과도) 및 전기적 특성(면저항)을 측정 및 분석하였고, 이를 이용하여 투명 패치 안테나를 설계, 측정, 분석하였다. 또한, 정방형 메탈메쉬는 광 투과도를 높이기 위해 얇은 구리선(w=0.2 mm)을 사용하였으며, 망(mesh) 크기(l=1, 2 mm)에 따른 광 투과도와 안테나 성능(방사이득, 방사패턴)과의 관계를 분석하였다. 투명 안테나 성능 측정 결과, 안테나 성능은 정방형 메탈메쉬의 광학적 특성과 반비례하며, 실제 활용 시에는 광학적 특성, 전기적 특성, 제작비용을 종합적으로 고려하여, 응용에 따른 투명 안테나의 활용이 필요하다.

• 한국의학물리학회:학술대회논문집
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• 한국의학물리학회 2004년도 제29회 추계학술대회 발표논문집
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• pp.85-87
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• 2004

원격조정 아프터로딩 시스템에 사용하는 폴리에틸렌 삽입관에 금박을 입혀 라디오파(RF) 안테나로도 병행사용할수 있는 열 방사선 병용삽입관 을 제작하였다. 30W의 RF 전력으로 15분간 한천 판톰에 가열하였을 때 폴리에틸렌관은 약 5oC 상승하였으나 금박으로 코팅 된 폴리에틸렌관은 약 20${\circ}$C 상승하여 RF 안테나로 대용할 수가 있었다. 한천 팬텀 중앙부에 길이가 2 cm 인 4개의 전극을 1 cm 간격으로 정사각형이 되도록 삽입하여 가열하였을 때 90%등온곡선이 반경 1.25 cm 의 원형으로 균일하게 분포되었고 2 cm 간격으로 삽일 하였을 때 1.75 cm 반경으로 거의 4 각형의 균일한 분포를 얻었다. 개의 뇌 실질에 정방형의 중심을 43${\circ}$C로 50분간 온열 요법을 시행한 후 관찰한 조직병리학적 소견에서 의미있는 변화를 보였다.

• Korean Chemical Engineering Research
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• 제49권2호
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• pp.195-199
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• 2011

DC 마그네트론 스퍼터링 방법을 이용하여 soda lime glass 위에 Mo 박막을 증착하였다. DC power와 증착 압력을 변화시키면서 상온에서 Mo 박막을 증착하였고 증착된 박막의 전기적 성질 및 구조적 성질을 조사하였다. DC power가 증가할수록 박막의 증착속도는 증가되었고 전기 저항도는 감소하였으며 박막의 결정성이 향상되는 것을 관찰할 수 있었다. 증착 압력이 감소할수록 박막의 증착속도와 전기 저항도가 감소하였으며 가늘고 긴 모양의 결정입자가 조밀하게 박막을 형성하였다. 압력이 증가함에 따라서 결정입자는 원형으로 변형되었으며 박막의 표면에 공극의 생성이 증가하였다. Mo 박막의 전기 저항도는 Mo 원자에 결합된 산소의 양이 많아질수록 증가하게 되고, 박막의 결정성이 높아지면 산소의 결합도가 감소하여 낮은 저항도를 갖게 되는 것을 확인하였다.

• International Journal of Precision Engineering and Manufacturing
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• 제9권1호
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• pp.39-46
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• 2008

The end plates of fuel cell assemblies are used to fasten the inner stacks, reduce the contact pressure, and provide a seal between Membrane-Electrode Assemblies (MEAs). They therefore require sufficient mechanical strength to withstand the tightening pressure, light weight to obtain high energy densities, and stable chemical/electrochemical properties, as well as provide electrical insulation. The design criteria for end plates can be divided into three parts: the material, connecting method, and shape. In the past, end plates were made from metals such as aluminum, titanium, and stainless steel alloys, but due to corrosion problems, thermal losses, and their excessive weight, alternative materials such as plastics have been considered. Composite materials consisting of combinations of two or more materials have also been proposed for end plates to enhance their mechanical strength. Tie-rods have been traditionally used to connect end plates, but since the number of connecting parts has increased, resulting in assembly difficulties, new types of connectors have been contemplated. Ideas such as adding reinforcement or flat plates, or using bands or boxes to replace tie-rods have been proposed. Typical end plates are rectangular or cylindrical solid plates. To minimize the weight and provide a uniform pressure distribution, new concepts such as ribbed-, bomb-, or bow-shaped plates have been considered. Even though end plates were not an issue in fuel cell system designs in the past, they now provide a great challenge for designers. Changes in the materials, connecting methods, and shapes of an end plate allow us to achieve lighter, stronger end plates, resulting in more efficient fuel cell systems.

• 한국정밀공학회지
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• 제29권7호
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• pp.711-716
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• 2012

The purpose of this study was to investigate how the modulation method affects the effectiveness of eliciting tactile sensations by electrical stimulation. Two methods were employed and the results were compared and analyzed; pulse amplitude modulation (PAM) and pulse width modulation (PWM). Thirty-five healthy subjects participated in the experiments to measure the stimulation intensity that began to elicit a tactile sensation - activation threshold (AT). Constant-current monophasic rectangular pulse trains were employed, and the stimulation intensity was varied from zero until the subject felt any uncomfortable sensation. The step size of the stimulation intensity was 100nC/pulse. After each experiment, the subject described the sensation both quantitatively and qualitatively. The two modulation methods did not make a significant difference as far as the AT values were concerned, but most of the subjects showed 'intra-individual' consistency. Also, it was confirmed that our range of the stimulation parameters enabled us to obtain three major tactile sensations; tickling, pressure and vibration. The results suggested that the stimulation parameters and the modulation type should be selected for each individual and that selective electrical stimulation of the mechanoreceptors needs more diversified researches on the electrode design, multi-channel stimulation protocol, waveforms of the pulse train, etc.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.276-279
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• 2004

Plasma enhanced chemical vapor deposition (PECVD) of silicon nitride (SiN) is a proven technique for obtaining layers that meet the needs of surface passivation and anti-reflection coating. In addition, the deposition process appears to provoke bulk passivation as well due to diffusion of atomic hydrogen. This bulk passivation is an important advantage of PECVD deposition when compared to the conventional CVD techniques. A further advantage of PECVD is that the process takes place at a relatively low temperature of 300t, keeping the total thermal budget of the cell processing to a minimum. In this work SiN deposition was performed using a horizontal PECVD reactor system consisting of a long horizontal quartz tube that was radiantly heated. Special and long rectangular graphite plates served as both the electrodes to establish the plasma and holders of the wafers. The electrode configuration was designed to provide a uniform plasma environment for each wafer and to ensure the film uniformity. These horizontally oriented graphite electrodes were stacked parallel to one another, side by side, with alternating plates serving as power and ground electrodes for the RF power supply. The plasma was formed in the space between each pair of plates. Also this paper deals with the fabrication of multicrystalline silicon solar cells with PECVD SiN layers combined with high-throughput screen printing and RTP firing. Using this sequence we were able to obtain solar cells with an efficiency of 14% for polished multi crystalline Si wafers of size 125 m square.

• Restorative Dentistry and Endodontics
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• 제16권2호
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• pp.85-98
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• 1991

The aim of this study was to investigate the effect of low - power laser used in the medical field for various purposes to suppress pain responses evoked by noxious electrical or mechanical stimuli. After both inferior alveolar nerves and the left anterior digastric muscle of cats under general anesthesia were exposed, a recording electrode for the jaw opening reflex was inserted into the anterior digastric muscle. The right inferior alveolar nerve was dissected under a surgical microscope until the response of the functional single nerve could be evoked by the electrical stimulation of the dental pulp or oral mucosa. The electrical stimulus was applied with a rectangular pulse of 10 ms duration for measuring the threshold intensity of a single nerve fiber in the inferior alveolar nerve which responds to stimulation of dental pulp and oral mucosa. Then a pulse of 1 ms duration was applied for determination of conduction velocity. A noxious mechanical stimulus to the oral mucosa was applied by clamping the receptive field with an arterial clamp. The Ga-As diodide laser(wave length, 904 nm ; frequency, 1,000 Hz) was irradiated to the prepared tooth cavity, inferior alveolar nerve and oral mucosa as a pulse wave of 2 mW for 6 minutes. This was followed by a continuous wave of 15 mW for 3 minutes. The action potential of the nerve and EMG of the digastric muscle evoked by the noxious electrical stimulus and nerve response to noxious mechanical stimulus were compared at intervals of before, immediately after, and at 5, 10, 20, 40, 60 minutes after laser irradiation. The results were as follows: The conduction velocity of the intrapulpal $A{\delta}$- nerve fiber recorded from the inferior alveolar nerve before irradiation had a mean value of $6.68{\pm}2.07m/sec$. The laser irradiation did not affect the conduction velocity of the AS - nerve fiber and did not change the threshold intensity or amplitude of the action potential either. The EMG of the digastric muscle evoked by noxious electrical stimulation to the tooth was not changed by the laser irradiation, whether in latency, threshold intensity or amplitude. The laser irradiated to the receptive field of the oral mucosa which was subjected to noxious stimuli did not affect the amplitude of the action potential or the frequency either.