• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.173-176
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• 1999

Continuing improvement of microprocessor performance involves in the devece size. This allow greater device speed, an increase in device packing density, and an increase in the number of functions that can reside on a single chip. However this has led to propagation delay, crosstalk noise, and power dissipation due to resistance-capacitance(RC) coupling become significant due to increased wiring capacitance, especially interline capacitance between the metal lines on the same metal level. Becase of pattering MSSQ (Methylsilsequioxane), we use RIE(Reactive ton Etching) which is a good anisotrgpy. In this study, according as we control a flow rate of CF$_4$/O$_2$ gas, RF power, we analysis by using ${\alpha}$ -step, SEM and AFM,

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.10a
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• pp.87-90
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• 2008

Since fastener bolt for airplane require high specific strength and corrosion resistance, Ti-6Al-4V alloy is widely used. However, the Ti-6Al-4V bolt is generally manufactured by cutting and rolling because of their poor workability. The aim of present work is to develop hot forming technology for high strength Ti-6Al-4V. Various heat-treatments were applied to specimen in order to increase hot-workability and prevent galling with die Multiple forging were simulated with FE code to determine optimum process parameters including specimen temperature, strain rate, local strain, and thermal shrinkage. Forged samples were heat-treated again to increase their mechanical properties.

• Transactions of Materials Processing
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• v.18 no.3
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• pp.251-255
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• 2009

Since fastener bolt for airplane require high specific strength and corrosion resistance, Ti-6Al-4V alloy is widely used. However, the Ti-6Al-4V bolt is generally manufactured by cutting and rolling because of their poor workability. The aim of present work is to develop hot forming technology for high strength Ti-6Al-4V. Various heat-treatments were applied to specimen in order to increase hot-workability and prevent galling with die. Multiple forging were simulated with FE code to determine optimum process parameters including specimen temperature, strain rate, local strain, and thermal shrinkage. Forged samples were heat-treated again to increase their mechanical properties.

• Tribology and Lubricants
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• v.36 no.1
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• pp.47-54
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• 2020

In this study, the effects of ultrasonic nanocrystal surface modification (UNSM) treatment at room and high temperatures (RT and HT of 400℃) on friction and wear behavior of Ti-6Al-4V alloy prepared by selective laser melting (SLM) were investigated. The objective of this study is to improve the mechanical properties and frictional behavior of Ti-6Al-4V alloy by UNSM treatment. Dry friction and wear tests were conducted using a ball-on-disk method at RT with a bearing steel as the counter ball. Due to the high HT and UNSM treatment, the surface hardness tended to increase and surface roughness tended to reduce. X-ray diffraction (XRD) analysis showed that nanocrystallization structure and compressive residual stress were formed at the surface layer after UNSM treatment at both RT and HT. After UNSM treatment, it was observed that the wear rate was reduced by about 6% for the specimen treated at RT and a 28% reduction for the specimen treated at HT in comparison with the untreated one. Based on scanning electron microscope (SEM) images showed that the damage caused by fatigue wear occurred in the wear track of the heat-treated specimen, and it is believed to be the cause of the highest wear rate. Mechanical properties and wear resistance of Ti-6Al-4V alloy were improved and prospect of industrial application was confirmed. Further research is still required to improve the characteristics of SLM Ti-6Al-4V alloy to the level of wrought Ti-6Al-4V alloy.

• Journal of the Korean institute of surface engineering
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• v.46 no.1
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• pp.1-8
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• 2013

Cathodic current on a metal tends to increase the $OH^-$ neighboring to the metal surface, especially during electro-deposition in seawater. The increased pH at metal/seawater interface results in precipitation of brucite crystal structure-$Mg(OH)_2$ as following formula; $Mg^{2+}+2OH^-{\rightarrow}Mg(OH)_2$, that is typical mechanism of the main calcareous deposits-compound in electro deposited coating films. In this study, the effects of anode and current density on deposition rate, composition structure and morphology of the deposited films were systematically investigated by scanning electron microscopy(SEM) and x-ray diffraction(XRD), respectively in order to overcome the problems such as deposition rate and a weak adhesion between deposit film and metal surface. The adhesion and corrosion resistance of the coating films were also evaluated by anodic polarization test. The electro-deposited film formed by using AZ31-Mg anode had the most appropriate physical properties. Weight gain of electro-deposit films increased with increasing cathodic current. Electro-deposit prepared at $5A/cm^2$ current density shows better adhesion than that formed at $8{\sim}10A/cm^2$.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.130-135
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• 2023

Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

• Journal of the Korean Society for Heat Treatment
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• v.28 no.5
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• pp.229-238
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• 2015

The effects of Sn addition and solution treatment on corrosion behavior were studied in AZ91 magnesium casting alloy. The addition of 5%Sn contributed to the introduction of $Mg_2Sn$ phase, to the reduction in dendritic cell size and to the increase in the amount of secondary phases. After the solution treatment, trace amount of $Al_8Mn_5$ particles were observed in the ${\alpha}$-(Mg) matrix for the AZ91 alloy, while $Mg_2Sn$ phase with high thermal stability was additionally found in the AZ91-5%Sn alloy. Before the solution treatment, the AZ91-5%Sn alloy had better corrosion resistance than the Sn-free alloy, which is caused by the enhanced barrier effect of the (${\beta}+Mg_2Sn$) phases formed more continuously along the dendritic cell boundaries. It is interesting to note that after the solution treatment, the corrosion rate of both alloys became increased, but the Sn-added alloy showed higher corrosion rate than the Sn-free alloy. The microstructural examination on the corroded surfaces revealed that the remaining $Mg_2Sn$ particles in the solution-treated AZ91-5%Sn alloy play a role in accelerating corrosion by galvanic coupling with the ${\alpha}$-(Mg) matrix.

• Journal of Ocean Engineering and Technology
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• v.17 no.6
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• pp.23-31
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• 2003

As there are so many uncertainties associated with using the determinism analysis method in the design of rubble mound breakwater, it is impossible for a designed construction to provide ultimate stability. First of all, due to the uncertainty of Load and Resistance, a safety level concerning the destruction mode of construction must be given. Then, the optimization design should be processed. After all, we can say that it is a more reasonable design method than the design used by the stability rate. In this study, an established design process is accomplished using Hudson's equation and an economic analysis with the breakwater's section is also conducted. Hudson's equation is compared to Van der Meer's equation. These results are utilized to drop a damage rate, increase the stability of construction, and determine the optimization section of the breakwater.

• Proceedings of the KSR Conference
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• 2004.06a
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• pp.277-283
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• 2004

The time to ignition, heat release rate characteristics and carbon monoxide yield of fiber reinforced and sandwich phenol resin were investigated with cone calorimeter. The fire characteristics of unsaturated polyester, mostly being applied to the existing passenger train, and phenolic resin were compared. Thermal gravimetric analysis(TGA) was used to monitor the degree of thermal decomposition for the phenolic resin. According to the cone calorimeter data, the time to ignition, heat release rate and CO yield was faster and higher as the external heat flux increase. Under the same heat flux, the time to ignition of sandwich type phenolic resin was shorter than that of fiber reinforced. The result of comparison between unsaturated polyester and phenolic resin was that phenolic resin was shown to have better fire resistance than that of unsaturated polyester.

• Applied Chemistry for Engineering
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• v.3 no.4
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• pp.657-662
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• 1992

For describing the bipolar packed-bed electrode cell filled with graphite pellete electrode, the application of the model of equivalent circuit was studied. The ratio between the Faradaic current through bipolar electrodes and the applied current was dependent on the resistance coefficient, specific conductivity of electrolyte, and electrolyte circulation rate. The ratio of the Faradaic current through bipolar electrodes to the applied current increased with the applied current(or cell voltage), but decreased with the increase of electrolytic conductivity and circulation rate of the electrolyte.