• Title/Summary/Keyword: pyramid film

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Highly (111)-oriented SiC Films on Glassy Carbon Prepared by Laser Chemical Vapor Deposition

  • Li, Ying;Katsui, Hirokazu;Goto, Takashi
    • Journal of the Korean Ceramic Society
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    • v.53 no.6
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    • pp.647-651
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    • 2016
  • SiC films were prepared on glassy carbon substrates by laser chemical vapor deposition under a high pressure of $10^4Pa$ using a diode laser (wavelength = 808 nm) and a polysilaethylene precursor. (111)-oriented SiC films were formed at a deposition temperature ($T_{dep}$) range of 1150 - 1422 K. At $T_{dep}=1262K$, the SiC film with a high Lotgering factor of above 0.96 showed an exhibited pyramid-like surface morphology and flower-like grains. The highest deposition rate ($R_{dep}$) was $220{\mu}m\;h^{-1}$ at $T_{dep}=1262K$.

PIXEL-BASED CORRECTION METHOD FOR GAFCHROMIC®EBT FILM DOSIMETRY

  • Jeong, Hae-Sun;Han, Young-Yih;Kum, O-Yeon;Kim, Chan-Hyeong;Ju, Sang-Gyu;Shin, Jung-Suk;Kim, Jin-Sung;Park, Joo-Hwan
    • Nuclear Engineering and Technology
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    • v.42 no.6
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    • pp.670-679
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    • 2010
  • In this paper, a new approach using a pixel-based correction method was developed to fix the non-uniform responses of flat-bed type scanners used for radiochromic film dosimetry. In order to validate the method's performance, two cases were tested: the first consisted of simple dose distributions delivered by a single port; the second was a complicated dose distribution composed of multiple beams. In the case of the simple individual dose condition, ten different doses, from 8.3 cGy to 307.1 cGy, were measured, horizontal profiles were analyzed using the pixel-based correcton method and compared with results measured by an ionization chamber and results corrected using the existing correction method. A complicated inverse pyramid dose distribution was made by piling up four different field shapes, which were measured with GAFCHROMIC$^{(R)}$EBT film and compared with the Monte Carlo calculation; as well as the dose distribution corrected using a conventional method. The results showed that a pixel-based correction method reduced dose difference from the reference measurement down to 1% in the flat dose distribution region or 2 mm in a steep dose gradient region compared to the reference data, which were ionization chamber measurement data for simple cases and the MC computed data for the complicated case, with an exception for very low doses of less than about 10 cGy in the simple case. Therefore, the pixel-based scanner correction method is expected to enhance the accuracy of GAFCHROMIC$^{(R)}$EBT film dosimetry, which is a widely used tool for two-dimensional dosimetry.

Fabrication of the pyramid-type silicon tunneling devices for displacement sensor applications (변위센서응용을 위한 피라미드형 실리콘 턴널링소자의 제조)

  • Ma, Tae-Young;Park, Ki-Cheol;Kim, Jeong-Gyoo
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.177-181
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    • 2000
  • The tunneling current is exponentially dependent on the separation gap between a pair of conductors. The detection of displacement can be, therefore, carried out by measurment of a variation in the tunneling current. In this experiment, we fabricated pyramid-type silicon tunneling devices in which a tunneling current flow between a micro-tip and $Si_3N_4$ thin film membrane. A MEMS process was used for the fabrication of the tunneling devices. The micro-tips were formed on Si wafers by undercutting a differently oriented square of $SiO_2$ with KOH. The stiffness of the $Si_3N_4$ films were observed and the model for the stiffness calculation, which is useful in predicting the stiffness even when the stiffness ranges beyond the scope of the normal experimental condition, was suggested.

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Properties of fluorine-doped $SnO_2$ films perpared by the in-line APCVD system (In-line APCVD에 의해 제작된 $SnO_2(:F)$ film의 특성)

  • Sei Woong Yoo;Byung Seok Yu;Jeong Hoon Lee
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.4 no.2
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    • pp.157-168
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    • 1994
  • The surface morphology, electrical properties, and optical properties of textured $SnO_2(:F)$ films according to deposition parameters such as HF and $H_2O$ content was studies. The electron concentration, resistivity, and mobility was $3{\Times}10^{20}/cm^3$, $7{\Times}10^4~9{\Times}10^4{Omega}cm$ and $18~25cm^2/V.sec$, respectively, when HF bubbling rate over 0.9 slm. The surface morphology was sharp edged pyramid shape without bubbling $H_2O$ but changed to round edged hemispherical shape when $H_2O$ was added.

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fabrication of the tunneling devices for the minimal displacement sensing (미세변위 측정을 위한 턴널링소자의 제조)

  • 심대근;양영신;마대영
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.107-110
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    • 2000
  • In this experiment, we fabricated pyramid-type silicon tunneling devices in which a tunneling current flow between a micro-tip and Si$_3$N$_4$ thin film membrane. A MEMS process was used for the fabrication of the tunneling devices. The micro-tips were formed on Si wafers by undercutting a differently oriented square of SiO$_2$ with KOH. The stiffness of the Si$_3$N$_4$ films were observed and the model for the stiffness calculation, which is useful in predicting the stiffness even when the stiffness ranges beyond the scope of the normal experimental condition, was suggested.

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Characteristic Study for Defect of Top Si and Buried Oxide Layer on the Bonded SOI Wafer (Bonded SOI wafer의 top Si과 buried oxide layer의 결함에 대한 연구)

  • Kim Suk-Goo;Paik Un-gyu;Park Jea-Gun
    • Korean Journal of Materials Research
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    • v.14 no.6
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    • pp.413-419
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    • 2004
  • Recently, Silicon On Insulator (SOI) devices emerged to achieve better device characteristics such as higher operation speed, lower power consumption and latch-up immunity. Nevertheless, there are many detrimental defects in SOI wafers such as hydrofluoric-acid (HF)-defects, pinhole, islands, threading dislocations (TD), pyramid stacking faults (PSF), and surface roughness originating from quality of buried oxide film layer. Although the number of defects in SOI wafers has been greatly reduced over the past decade, the turn over of high-speed microprocessors using SOI wafers has been delayed because of unknown defects in SOI wafers. A new characterization method is proposed to investigate the crystalline quality, the buried oxide integrity and some electrical parameters of bonded SOI wafers. In this study, major surface defects in bonded SOI are reviewed using HF dipping, Secco etching, Cu-decoration followed by focused ion beam (FIB) and transmission electron microscope (TEM).

Dynamics of Nanopore on the Apex of the Pyramid

  • Choi, Seong-Soo;Yamaguchi, Tokuro;Park, Myoung-Jin;Kim, Sung-In;Kim, Kyung-Jin;Kim, Kun-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.187-187
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    • 2012
  • In this report, the plasmonic nanopores of less than 5 nm diameter were fabricated on the apex of the pyramidal cavity array. The metallic pyramidal pit cavity can also utilized as the plasmonic bioreactor, and the fabricated Au or Al metallic nanopore can provide the controllable translocation speed down using the plasmonic optical force. Initially, the SiO2 nanopore on the pyramidal pit cavity were fabricated using conventional microfabrication techniques. Then, the metallic thin film was sputter-deposited, followed by surface modification of the nanometer thick membrane using FESEM, TEM and EPMA. The huge electron intensity of FESEM with ~microsecond scan speed can provide the rapid solid phase surface transformation. However, the moderate electron beam intensity from the normal TEM without high speed scanning can only provide the liquid phase surface modification. After metal deposition, the 100 nm diameter aperture using FIB beam drilling was obtained in order to obtain the uniform nano-aperture. Then, the nanometer size aperture was reduced down to ~50 nm using electron beam surface modification using high speed scanning FESEM. The followed EPMA electron beam exposure without high speed scanning presents the reduction of the nanosize aperture down to 10 nm. During these processes, the widening or the shrinking of the nanometer pore was observed depending upon the electron beam intensity. Finally, using 200 keV TEM, the diameter of the nanopore was successively down from 10 nm down to 1.5 nm.

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Korean Clinic Based Outcome Measure Studies (한방 병-의원에서 하는 임상지표 연구)

  • Park, Jong-Bae
    • Journal of Pharmacopuncture
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    • v.6 no.1
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    • pp.35-36
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    • 2003
  • Background: Evidence based medicine has become main tools for medical practice. However, conducting a highly ranked in the evidence hierarchy pyramid is not easy or feasible at all times and places. There remains a room for descriptive clinical outcome measure studies with admitting the limit of the intepretation. Aims: Presents three Korean clinic based outcome measure studies with a view to encouraging Korean clinicians to conduct similar studies. Methods: Three studies are presented briefly here in치uding 1) Quality of Life of liver cancer patients after 8 Constitutional acupuncture; 2) Developing a Korean version of Measuring yourself Medical Outcome profile (MYMOP); and 3) Survey on 5 Shu points: a pilot In the first study, we have included 4 primary or secondary liver cancer patients collecting their diagnostic X-ray film and clinical data f개m their hospital, and asked them to fill in the European Organization Research and Treatment of Cancer, Quality of Life Questionnaire before the commencement of the treatment. The acupuncture treatment is set up format but not disclosed yet. The translation and developing a Korean version of outcome measures that is Korean clinician friendly has been sought for MYMOP is one of the most appropriate one. The permission was granted, the translation into Korean was done, then back translated into English only based on the Korean translation by the researcher who is bilingual in both languages. The back translation was compared by the original developer of MYMOP and confirmed usable. In order to test the existence of acupoints and meridians through popular forms of Korean acupuncture regimes, we aim at collecting opinions from 101 Korean clinicians that have used those forms. The questions asked include most effective symptoms, 5 Shu points, points those are least likely to use due to either adverse events or the lack of effectiveness, theoretical reasons for the above proposals, proposing outcome measures, and the time from insertion to be effective. The questionnaire is posted on the virtual notice board of the homepage of the communication KOMA (The official tool of Association of Korean Oriental Medicine).

Formation of GaN microstructures using metal catalysts on the vertex of GaN pyramids (금속촉매를 이용한 GaN 피라미드 꼭지점 위의 마이크로 GaN 구조 형성)

  • Yun, W.I.;Jo, D.W.;Ok, J.E.;Jeon, H.S.;Lee, G.S.;Jung, S.K.;Bae, S.M.;Ahn, H.S.;Yang, M.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.3
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    • pp.110-113
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    • 2011
  • In this paper, we propose a new method for the fabrication of GaN microstructures formed only on the vertex of GaN pyramid by using of metal catalysts. GaN pyramidal structures were selectively grown on 3 ${\mu}m$ $SiO_2$ dot patterns followed by thin film deposition of Au and Cr only on the vertex area of the GaN pyramids with precisely controlled photolithography. After the metal deposition, the samples were loaded in the MOVPE reactor for the growth of GaN microstructures for 10 minutes. Temperature for the growth of the GaN microstructures was changed from $650^{\circ}C$ to $750^{\circ}C$. Rod type GaN microstructures were grown in the direction of vertical to the six {1-101} facets and the shape of the GaN microstructures was changed depend on the type of metal.

Function and Utility of Musical Action Songs - Focoused on the Musical (뮤지컬 '액션송' 기능과 효용성 연구 - 뮤지컬 <공포의 꽃가게>를 중심으로 -)

  • Shin, Dong-A;Kim, Hak-Min
    • Journal of Korea Entertainment Industry Association
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    • v.14 no.8
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    • pp.49-62
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    • 2020
  • Musicals are plays in which songs and dances are closely aligned with the plot development of the play, and songs and dances develop specific situations and a series of events. In particular, songs perform a fuction of causing the significant changes and emotional ventilation and amplification in the play by specifically capturing the goals and actions the characters are aiming for. This paper focuses on the song that takes on the function of the plot deployment, defines songs that embody actions and stories on stage' as 'action songs' and highlights their role and importance. Action Song is not a clearly defined or prescribed term in Musical. However, 'Action Song' is a song about how a character's desire or motivation for action, given as a 'character song' inserted at the beginning of an integrated musical play, provides a conflict that is a central event of action. In other words, 'action song' means a song that organically combines music and narrative by conveying the action on the stage as a song with lyrics. In addition, it is a song that moves the plot forward and contains a series of events or actions that are the material of the plot. This paper is intended to summarize the concept of'Action song which is not well known to us, and to lay the foundation of the stud, learned the concept, function and efficiency by the analyses of script and music of the musical . As a result, action songs accumulate and amplify tension caused by conflicts and induce the audience to immerse in their emotions. At the same time, the action song multiplies fun and interest of the play while the audience's expectation increased for the next scene after the action song and the progression of the play with single action makes the contents of the drama to be understood clearly.