• Journal of the Korean Vacuum Society
• /
• v.6 no.4
• /
• pp.364-371
• /
• 1997

Silicon trench etching has been carried out using a magnetically enhanced reactive ion etching system in HBr plasma containing He-$O_2$, $CF_4$. The changes of etch rate and etch profile, the degree of residue formation, and the change of surface chemical state were investigated as a function of additive gas flow rate. A severe lateral etching was observed when pure HBr plasma was used to etch the silicon, resulted in a pot shaped trench. When He-$O_2$, $SiF_4$ additives were added to HBr plasma, the lateral etching was almost eliminated and a better trench etch profile was obtained. The surface etched in HBr/He-$O_2/SiF_4$ plasma showed relatively low contamination and residue elements compared to the surface etched in HBr/He-$O-2/CF_4$plasma. In addition, the etching characteristics including low residue formation and chemically clean etched surface were obtained by using HBr containing He-$O_2$ or $SiF_4$ additive gases instead of $CF_4$ gas, which were confirmed by X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscopy (AFM).

• The Journal of the Korea Contents Association
• /
• v.13 no.12
• /
• pp.48-61
• /
• 2013

At the dawn of a new digital era, people's way of spending their leisure time and leisure activity preferences changed. Accordingly, Leisure culture is in the midst of change, such as watching movie and performance, enjoy golf etc. Due to its nature as an interactive medium, the digital game offers uniquely different approaches to the leisure activity. Leisure as state of mind is much more subjective in that it considers the individual's perception of an activity. In that regard, we used the digital games for leisure activity. Digital games are powerful environments for fun, including functional nature. For that reason digital leisure culture keep creative evolving. This paper proposes a serious games as a branch of digital games that meaningful digital leisure, and introduced the concept of serious games for a serious purpose other than pure entertainment. Many recent studies have identified the benefits of using serious games in a variety of purposes. Games technology is fun and entertaining for people of all ages. Ultimately, serious games become meaningful and valuable performance tools as the Digital Leisure Culture.

• Korean Journal of Materials Research
• /
• v.11 no.8
• /
• pp.671-678
• /
• 2001

All solid-state thin film micro supercapacitor, which consists of $RuO_2$/LiPON/$RuO_2$ multi layer structure, was fabricated on Pt/Ti/Si substrate using a $RuO_2$ electrode. Bottom $RuO_2$ electrode was grown by dc reactive sputtering system with increasing $O_2/[Ar+O_2]$ ratio at room temperature, and a LiPON electrolyte film was subsequently deposited on the bottom $RuO_2$ electrode at pure nitrogen ambient by rf reactive sputtering system. Room temperature charge-discharge measurements based on a symmetric $RuO_2$/LiPON/$RuO_2$ structure clearly demonstrates the cyclibility dependence on the microstructure of the $RuO_2$ electrode. Using both glancing angle x-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the microstructure of the $RuO_2$ electrode was dependent on the oxygen flow ratio. In addition, x- ray photoelectron spectroscopy(XPS) examination shows that the Ru-O binding energy is affected by increasing oxygen flow ratio. Furthermore, TEM and AES depth profile analysis after cycling demonstrates that the interface layer formed by interfacial reaction between LiPON and $RuO_2$ act as a main factor in the degradation of the cyclibility of the thin film micro-supercapacitor.

• Journal of the Economic Geographical Society of Korea
• /
• v.18 no.1
• /
• pp.115-135
• /
• 2015

In the glocalization a common phenomenon of several nations reveals knowledge innovation and growth by the important subject of region and state and is studied at theory and practice. the successful cases of regional development in an advanced country have leading innovation through regional innovation system and cluster. therefore we are necessary to analyse how the knowledge spillovers in innovative cluster as the reduced model of regional innovation system guide firm innovation and region growth. this article reviews theories and empirical studies of the knowledge spillovers in the regional innovation system and innovative cluster of innovative geography and proposes a new research issues for further explorations of the knowledge spillovers. Previous studies assist that knowledge spillovers exist in knowledge-based industries of specific local area and local innovation accomplishes through pure knowledge spillover. but limits of these studies include narrow region and technological area, few analytical variable and exclusion of rent knowledge spillover. therefore new research topics related with that exemplifies geographical dimension(concentration and decentralization), technological dimension(knowledge based industry), category of analytic variables(previous indicators, time, and social capital), conceptualization(appropriation means, markets for technology) etc.

• Journal of the Korean Institute of Intelligent Systems
• /
• v.14 no.3
• /
• pp.253-261
• /
• 2004

Game theory is mathematical analysis developed to study involved in making decisions. In 1928, Von Neumann proved that every two-person, zero-sum game with finitely many pure strategies for each player is deterministic. As well, in the early 50's, Nash presented another concept as the basis for a generalization of Von Neumann's theorem. Another central achievement of game theory is the introduction of evolutionary game theory, by which agents can play optimal strategies in the absence of rationality. Not the rationality but through the process of Darwinian selection, a population of agents can evolve to an Evolutionary Stable Strategy (ESS) introduced by Maynard Smith. Keeping pace with these game theoretical studies, the first computer simulation of co-evolution was tried out by Hillis in 1991. Moreover, Kauffman proposed NK model to analyze co-evolutionary dynamics between different species. He showed how co-evolutionary phenomenon reaches static states and that these states are Nash equilibrium or ESS introduced in game theory. Since the studies about co-evolutionary phenomenon were started, however many other researchers have developed co-evolutionary algorithms, in this paper we propose Game theory based Co-Evolutionary Algorithm (GCEA) and confirm that this algorithm can be a solution of evolutionary problems by searching the ESS.To evaluate newly designed GCEA approach, we solve several test Multi-objective Optimization Problems (MOPs). From the results of these evaluations, we confirm that evolutionary game can be embodied by co-evolutionary algorithm and analyze optimization performance of GCEA by comparing experimental results using GCEA with the results using other evolutionary optimization algorithms.

• Journal of the Korean Electrochemical Society
• /
• v.4 no.2
• /
• pp.53-57
• /
• 2001

When an EV is parked for a long period time, the battery capacity naturally decreases due to selfdischarge. Therefore, this effect must be considered for the accurate measurement of the state of charge of EV battery. Battery selfdischarge simulations using the design of experiments among computer simulation methods are compared with experimental data for Ni/MH batteries for electric vehicles. The motivation is to predict the selfdischarge rate of the battery for electric vehicle at all temperature conditions and standing time when electric vehicle could be operated. We developed a general equation representing the seudischarge rate of the electric vehicle battery using design of experiments, and the equation is determined by temperature and standing time of the battery. We selected Ni/MH battery, 12 V-95 Ah, for pure electric vehicle for this study. ID develop the equation using design of experiments we selected temperature range of $-20^{\circ}~30^{\circ}C$ and standing time of 1 day$\~15$ days. We conducted several selfdischarge tests of Ni/MH battery to verify the integrity of the equation. The results showed that the computation values were in good agreement with experimental data.

• Korean Journal of Environment and Ecology
• /
• v.30 no.4
• /
• pp.783-792
• /
• 2016

The purpose of this study is to investigate the characteristics of the vegetation structure and the location environment of Albizzia kalkora (AK) growing in Mt. Yudal located in Mokpo city and in the nearby islands. The AK community in Mt. Yudal in Mokpo city (Community I) is located in a region which is relatively high above the sea level. The average age of the major kinds of trees found in the region is about 30 years. The vegetation structure in the community shows an early stage of vegetation development due to continued disturbance. In Community IV, on the sandy soil in the flatland near the seashores, the average age of the major kinds of trees is about 9 years. In this community, a pure forest is presumed to have been formed in a poor environment which is artificially disturbed in relatively recent times even as AK with its strong adoptability was introduced into the region. In other communities (II, III), the vegetation state shows a competition between AK and deciduous oak trees, and the average age of the major kinds of trees is about 13 to 30 years. AK communities with a better developed vegetation structure are located on the higher steep slopes near the seashore. In the early stage of vegetation development, the forest floor received more effective light for photosynthesis, and thus more seedlings of AK emerged and grew. The probability of AK appearing in the damaged or sterile soil near the seashore was high because of its strong adaptability. However, as the vegetation structure developed further and the soil fertility increased, the domination of AK in the vegetation structure decreased as deciduous oak trees won the competition with AK.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.183-183
• /
• 2014

Recently, multiferroic materials gain much attention due to their fascinating fundamental physical properties. These materials offer wide range of potential applications such as data storage, spintronic devices and sensors, where both electronic and magnetic polarizations can be coupled. Among single-phase multiferroic materials, $BiFeO_3$ is typical because of the room-temperature magnetoelectric coupling in view of long-range magnetic- and ferroelectric-ordering temperatures. However, $BiFeO_3$ is well known to have large leakage current and small spontaneous polarization due to the existence of oxygen vacancies and other defects. Furthermore the magnetic moment of pure $BiFeO_3$ is very weak owing to its antiferromagnetic nature. Recently, various attempts have been performed to improve the multiferroic properties of $BiFeO_3$ through the co-doping at the A and the B sites, by making use of the fact that the intrinsic polarization and magnetization are associated with the lone pair of $Bi^{3+}$ ions at the A sites and the partially-filled 3d orbitals of $Fe^{3+}$ ions at the B sites, respectively. In this study, $BiFeO_3$, $Bi_{0.9}Ho_{0.1}FeO_3$, $BiFe_{0.97}Ni_{0.03}O_3$ and $Bi_{0.9}Ho_{0.1}Fe_{0.97}Ni_{0.03}O_3$ bulk compounds were prepared by solid-state reaction and rapid sintering. High-purity $Bi_2O_3$, $Ho_2O_3$, $Fe_2O_3$ and $NiO_2$ powders with the stoichiometric proportions were mixed, and calcined at $500^{\circ}C$ for 24 h to produce the samples. The samples were immediately put into an oven, which was heated up to $800^{\circ}C$ and sintered in air for 1 h. The crystalline structure of samples was investigated at room temperature by using a Rigaku Miniflex powder diffractometer. The field-dependent and temperature-dependent magnetization measurements were performed with a vibrating-sample magnetometer and superconducting quantum-interference device.

• Journal of the Korean institute of surface engineering
• /
• v.45 no.1
• /
• pp.15-19
• /
• 2012

Tris(8-quinolinolato)aluminum(III); $Alq_3$ has been frequently used as an electron transporting layer in organic light-emitting diodes. Either Ba with a low work function or Au with a high work function was deposited on $Alq_3$ layer in vacuum. And then, the behaviors of electron transition at the $Alq_3$/Ba and $Alq_3$/Au interfaces were investigated by using the near edge x-ray absorption fine structure (NEXAFS) spectroscopy. In the each interface, the energy levels of unoccupied obitals were assigned as ${\pi}^*$(LUMO, LUMO+1, LUMO+2 and LUMO+3) and ${\sigma}^*$. And the relative intensities of these peaks were investigated. In an oxygen atom composing $Alq_3$ molecule, the relative intensities for a transition from K-edge to LUMO+2 were largely increased as Ba coverage (${\Theta}_{Ba}$, 2.7 eV) with a low work function was in-situ sequentially increased on $Alq_3$ layer. In contrast, the relative intensities for the LUMO+2 peak were reduced as Au coverage (${\Theta}_{Au}$, 5.1 eV) with a high work function were increased on $Alq_3$ layer. This means that the electron transition by photon in oxygen atom which consists in the unoccupied orbitals in $Alq_3$ molecule, largely depends on work function of a metal. Meanwhile, in the case of electron transition in a carbon atom, as ${\Theta}_{Ba}$ was increased on $Alq_3$, the relative intensity from K-edge to ${\pi}_1{^*}$ (LUMO and LUMO+1) was slightly decreased, and from K-edge to ${\pi}_2{^*}$ (LUMO+2 and LUMO+3) was somewhat increased. This rising of the energy state from ${\pi}_1{^*}$ to ${\pi}_2{^*}$ exhibits that electrons provided by Ba would contribute to the process of electron transition in the $Alq_3$/Ba interfaces. As shown in above observation, the analyses of NEXAFS spectra in each interface could be important as a basic data to understand the process of electron transition by photon in pure organic materials.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.377-377
• /
• 2012

Microprocessor technology now relies on copper for most of its electrical interconnections. Because of the high diffusivity of copper, Atomic layer deposition (ALD) $TaN_x$ is used as a diffusion barrier to prevent copper diffusion into the Si or $SiO_2$. Another problem with copper is that it has weak adhesion to most materials. Strong adhesion to copper is an essential characteristic for the new barrier layer because copper films prepared by electroplating peel off easily in the damascene process. Thus adhesion-enhancing layer of cobalt is placed between the $TaN_x$ and the copper. Because, cobalt has strong adhesion to the copper layer and possible seedless electro-plating of copper. Until now, metal film has generally been deposited by physical vapor deposition. However, one draw-back of this method is poor step coverage in applications of ultralarge-scale integration metallization technology. Metal organic chemical vapor deposition (MOCVD) is a good approach to address this problem. In addition, the MOCVD method has several advantages, such as conformal coverage, uniform deposition over large substrate areas and less substrate damage. For this reasons, cobalt films have been studied using MOCVD and various metal-organic precursors. In this study, we used $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) as a cobalt precursor because of its high vapor pressure and volatility, a liquid state and its excellent thermal stability under normal conditions. Furthermore, the cobalt film was also deposited at various $H_2/NH_3$ gas ratio(1, 1:1,2,6,8) producing pure cobalt thin films with excellent conformality. Compared to MOCVD cobalt using $H_2$ gas as a reactant, the cobalt thin film deposited by MOCVD using $H_2$ with $NH_3$ showed a low roughness, a low resistivity, and a low carbon impurity. It was found that Co/$TaN_x$ film can achieve a low resistivity of $90{\mu}{\Omega}-cm$, a low root-mean-square roughness of 0.97 nm at a growth temperature of $150^{\circ}C$ and a low carbon impurity of 4~6% carbon concentration.