• Journal of Mechanical Science and Technology
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• v.20 no.9
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• pp.1492-1501
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• 2006

A transportation system of single wafer has been developed to be applied to semiconductor manufacturing process of the next generation. In this study, the experimental apparatus consists of two kinds of track, one is for propelling a wafer, so called control track, the other is for generating an air film to transfer a wafer, so called transfer track. The wafer transportation speed has been evaluated by the numerical and the experimental methods for three types of nozzle position a..ay (i.e., the front-, face- and rear-array) in an air levitation system. Test facility for 300mm wafer has been equipped with two control tracks and one transfer track of 1500mm length from the starting point to the stopping point. From the present results, it is found that the experimental values of the wafer transportation speed are well in agreement with the computed ones. Namely, the computed values of the maximum wafer transportation speed $V_{max}$ are slightly higher than the experimental ones by about $15{\times}20%$. The disparities in $V_{max}$ between the numerical and the experimental results become smaller as the air velocity increases. Also, at the same air flow rate, the order of wafer transportation speeds is : $V_{max}$ for the front-array > $V_{max}$ for the face-array > $V_{max}$ for the rear-array. However, the face-array is rather more stable than any other type of nozzle array to ensure safe transportation of a wafer.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1997.04a
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• pp.43-51
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• 1997

Steady and unsteady numerical simulations are conducted for the experiments performed to investigate the ram accelerator flow field by using the expansion tube facility in Stanford University. Navier-Stokes equations for chemically reacting flows are analyzed by fully implicit and time accurate numerical methods with Jachimowski's detailed chemistry model for hydrogen-air combustion involving 9 species and 19 reaction steps. Although the steady state assumption shows a good agreement with the experimental schlieren and OH PLIF images for the case of $2H_2$+$O_2$+$17N_2$, it fails in reproducing the combustion region behind the shock intersection point shown in the case of $2H_2$+$O_2$+$12N_2$, mixture. Therefore, an unsteady numerical simulation is conducted for this case and the result shows all the detailed flow stabilization process. The experimental result is revealed to be an instantaneous result during the flow stabilization process. The combustion behind the shock intersection point is the result of a normal detonation formed by the intersection of strong oblique shocks that exist at early stage of the stabilization process. At final stage, the combustion region behind the shock intersection point disappears and the steady state result is retained. The time required for stabilization of the reacting flow in the model ram accelerator is found to be very long in comparison with the experimental test time.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.694-696
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• 2011

The high enthalpy plasma research center in Chonbuk national university is under construction for four types of plasma equipments. The equipments are 1set of 0.4 MW class enhanced Huels type plasma equipment, 1 set of 2.4 MW class enhanced Huels type plasma quipment, 1 set of 60 kW RF plasma equipment and 1 set of 200 kW RF plasma equipment. 60kW RF plasma system is R&D and pilot scale production equipment of nano powder synthesis and plasma spray coating. 200kW RF plasma system is mass production equipment with high power capacity of nano powder synthesis. 0.4MW plasma system can be applied to the ground test facility for material testing under re-entry conditions for space vehicles.

• Journal of the Korean Society of Propulsion Engineers
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• v.17 no.3
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• pp.9-14
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• 2013

Combustion tests were conducted for a hydrogen-fueled Mach 5 scramjet engine model using a blow-down facility. No fuel and two fuel flow rate cases were tested for two different model configurations. Time history of the wall static pressures inside the model and their time-averaged spatial distribution were used for the analysis of the flow and combustion characteristics. For shorter model, supersonic combustion was occurred for both of the fuel flow rate cases. For longer model, supersonic combustion was occurred for less fuel case, whereas thermal choking and subsonic combustion were occurred for more fuel case. Intake started even for this subsonic combustion case.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.85-92
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• 2004

As a research to develop a SCRAM jet engine is actively conducted, a necessity to produce a high-enthalpy flow in a laboratory is increasing. In order to develop the SCRAM-jet engine, stabilized combustion in a supersonic flow-field should be attained, in which a duration time of flow is extremely short. Therefore, a mixing process of breathed air and fuel, which is injected into supersonic flow-fields is one of the most important problem. Since, the flow inside SCRAM jet engine has high-enthalpy, an experimental facility is required to produce such high-enthalpy flow-field. In this study, a detonation-driven shock tunnel was built and was used to produce high-enthalpy flow. Further-more, SCRAM jet engine model equipped backward-facing step was installed at test section and flow-fields were visualized using color-schlieren technique and high speed video camera. The fuel was injected perpendicular to the flow of Mach number three behind backward-facing step. The height of the step, distance of injection and injection pressure were changed to investigate the effects of step on a mixing characteristic between air and fuel. The schlieren photograph and pressure histories show that the fuel was ignited behind the step.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.05a
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• pp.417-420
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• 2010

The high enthalpy plasma research center in Chonbuk national university is under construction with the support of the ministry of the education, science and technology as a fundamental research project The project periods are five year and started at July, 1, 2009. The total project budget is about 39,300 million Won. Four types of plasma equipment will be installed in this research center during the project periods. The equipments are 1 set of 0.4 MW class enhanced Huels type plasma equipment, 1 set of 2.4MW class enhanced Huels type plasma equipment, 1 set of 60Kw RF plasma equipment and 1s set of 200 kW RF plasma equipment.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.1192-1195
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• 2017

This paper describes the heat resistance characteristics of the imaging device installed in behind the engine due to monitoring the engine condition, and this paper includes the introduction and development of the imaging probe. Because the imaging device which is at the rear end of the engine is exposed to a high temperature and high pressure, the stability of the device should be secured by changing the device shape and supplying cooling water. The imaging probe in ADD engine test facility is installed at the rear end of the engine, and it is designed by reflecting the heat resistance characteristics to ensure the stability of the device.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.923-927
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• 2017

Metal exposed to high temperature/high pressure/oxidizer-rich environment may cause rapid oxidation(ignition and combustion). Therefore, this study was performed for the selection of metal appropriate for high temperature/high pressure/oxidizer-rich environment. In order to make the high temperature, high pressure and oxidizer-rich environment, the test facility utilizing the catalytic reaction of hydrogen peroxide was constructed and the metal oxidation and ignition of the STS series metals were evaluated. The result showed that the change of the selected material (discoloration) and the surface roughness were observed, but the change in the weight and thickness of the specimen was not significant.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.460-468
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• 2008

Recent activities on the scramjet and rocket-ramjet combined-cycle engine of Japan Aerospace Exploration Agency(JAXA) are herein presented. The scramjet engines and combined-cycle engines have been studied in the world and JAXA has also studied such the engines experimentally, numerically and conceptually. Based on the studies, 2 to 3 m long, hydrogen-fueled engine models were designed and tested at the Ramjet Engine Test Facility(RJTF) and the High Enthalpy Shock Tunnel(HIEST). A scramjet engine model was tested in Mach 10 to 14 flight condition at HIEST. A 3 m long scramjet engine model was designed to reduce a dissociation energy loss in a high temperature condition. Drag reduction by a tangential injection and two ways of a transverse fuel injection were examined. Combustor model tests at three operating modes of the combined-cycle engine were conducted, demonstrating the combustor operation and producing data for the engine design at each mode. Aerodynamic engine model tests were conducted in a transonic wind tunnel, demonstrating the engine operation in the ejector-jet mode. A 3 m long combined-cycle engine model has been tested in the ejector-jet mode and the ramjet mode since March 2007. Carbon composite material was examined for application to the engines. Production of the cooling channel on a nickel alloy plate succeeded by the electro-chemical etching.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• v.y2005m4
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• pp.309-312
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• 2005

High altitude ignition test was performed to understand high altitude ignition characteristics of slinger combustor. To verify ignition limits, test was carried out with variation of altitude and fuel nozzle rotational speed using AETF(Altitude Engine Test Facility) in KARI(Korea Aerospace Research Institute). From the result, the effect of major factors which affect on ignition characteristics was observed. The reduction of ignition limit with increasing altitude and expansion of ignition limit with increasing rotational speed of fuel nozzle was verified. Also minimum rotational speed of fuel nozzle at high altitude must be greater than that of seal level condition.