• Title/Summary/Keyword: profiler

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Fabrication of 3D Micro Structure by Dual Diffuser Lithography (듀얼 디퓨저 리소그래피를 이용한 3 차원 마이크로 구조의 제작)

  • Han, Dong-Ho;Hafeez, Hassan;Ryu, Heon-Yul;Cho, Si-Hyeong;Park, Jin-Goo
    • Korean Journal of Materials Research
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    • v.23 no.8
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    • pp.447-452
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    • 2013
  • Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.

Fabrication of Diffractive Optical Element for Objective Lens of Small form Factor Data Storage Device (초소형 광정보저장기기용 웨이퍼 스케일 대물렌즈 제작을 위한 회절광학소자 성형기술 개발)

  • Bae H.;Lim J.;Jeong K.;Han J.;Yoo J.;Park N.;Kang S.
    • Transactions of Materials Processing
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    • v.15 no.1 s.82
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    • pp.3-8
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    • 2006
  • The demand fer small and high-capacity optical data storage devices has rapidly increased. The areal density of optical disk is increased by using higher numerical aperture objective lens and shorter wavelength source. A wafer-scale stacked micro objective lens with a numerical aperture of 0.85 and a focal length of 0.467mm for the 405nm blue- violet laser was designed and fabricated. A diffractive optical element (DOE) was used to compensate the spherical aberration of the objective lens. Among the various fabrication methods for micro DOE, the UV-replication process is more suitable fur mass-production. In this study, an 8-stepped DOE pattern as a master was fabricated by photolithography and reactive ion etching process. A flexible mold was fabricated for improving the releasing properties and shape accuracy in UV-replication process. In the replication process, the effects of exposing time and applied pressure on the replication quality were analyzed. Finally, the surface profiles of master, mold and molded pattern were measured by optical scanning profiler. The geometrical deviation between the master and the molded DOE was less than $0.1{\mu}m$. The diffraction efficiency of the molded DOE was measured by DOE efficiency measurement system which consists of laser source, sample holder, aperture and optical power meter, and the measured value was $84.5\%$.

Validation of Assessment for Mean Flow Field Using Spatial Averaging of Instantaneous ADCP Velocity Measurements (ADCP 자료의 공간평균을 이용한 평균유속장 산정에 대한 검증)

  • Kim, Dong-Su;Kang, Boo-Sik
    • Journal of Environmental Science International
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    • v.20 no.1
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    • pp.107-118
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    • 2011
  • While the assessment of mean flow field is very important to characterize the hydrodynamic aspect of the flow regime in river, the conventional methodologies have required very time-consuming efforts and cost to obtain the mean flow field. The paper provides an efficient technique to quickly assess mean flow field by developing and applying spatial averaging method utilizing repeatedly surveyed acoustic Doppler current profiler(ADCP)'s cross-sectional measurements. ADCP has been widely used in measuring the detailed velocity and discharge in the last two decades. In order to validate the proposed spatial averaging method, the averaged velocity filed using the spatial averaging was compared with the bench-mark data computed by the time-averaging of the consistent fix-point ADCP measurement, which has been known as a valid but a bit inefficient way to obtain mean velocity field. The comparison showed a good agreement between two methods, which indicates that the spatial averaging method is able to be used as a surrogate way to assess the mean flow field. Bed shear stress distribution, which is a derived hydrodynamic quantity from the mean velocity field, was additionally computed by using both spatial and time-averaging methods, and they were compared each other so as to validate the spatial averaging method. This comparison also gave a good agreement. Therefore, such comparisons proved the validity of the spatial averaging to quickly assess mean flow field. The mean velocity field and its derived riverine quantities can be actively used for characterizing the flow dynamics as well as potentially applicable for validating numerical simulations.

A preliminary study on the development of detection techniques for CO2 gas bubble plumes (CO2 가스 기포 누출 탐지 기술 개발을 위한 예비 연구)

  • Kum, Byung-Cheol;Cho, Jin Hyung;Shin, Dong-Hyeok
    • Journal of Advanced Marine Engineering and Technology
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    • v.38 no.9
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    • pp.1163-1169
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    • 2014
  • As a preliminary study for detection techniques of $CO_2$ gas bubble plumes, we have conducted a comparative experiment on artificially generated $CO_2$ gas bubbles plume by using multibeam echosounder (MBES), single beam echosounder (SBES), and sub-bottom profiler (SBP). The rising speed of artificial gas bubbles is higher than references because of compulsory release of compressed gas in the tank. Compared to single beam acoustic equipments, the MBES detects wide swath coverage. It provides exact determination of the source position and 3D information on the gas bubble plumes in the water column. Therefore, it is shown that MBES can distinctly detect gas bubble plumes compared to single beam acoustic equipments. We can establish more effective complementary detection technique by simultaneous operation of MBES and SBES. Consequently, it contributes to improve qualitative and quantitative detection techniques by understanding the acoustic characteristics of the specific gas bubbles.

Comparison of the Temperature Profile with the Backscattering Strength by the ADCP Data in the Southwestern Part of the East Sea (동해 남서해역에서 ADCP 자료에 의한 후방산란 강도와 수온구조와의 비교)

  • 강돈혁;나정열
    • 한국해양학회지
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    • v.29 no.3
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    • pp.287-295
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    • 1994
  • The relationship between temperature profile and backscattering strength(S/SUB y/) computed by the ADCP data is studied in warm eddy of the southwestern parts of the East Sea of Korea in April, 1993. The result shows that S/SUB y/ with depth in N-S direction shows a symmetric shape that is almost the same as the warm eddy. But the profile of S/SUB y/ with depth in N-S direction shows a symmetric shape that is almost the same as the warm eddy. But the profile of S/SUB y/ in E-W direction shows asymmetric shape where the S/SUB y/ of the eastern parts is smaller than that of western parts. The asymmetric distribution may be due to the migration of a large number of scatterer(mainly zooplankton) carried by EKWC(East Korea Warm Current). Profile of the S/SUB y/ is similar to the temperature with depth in the ADCP data of CREAMS 93(Circulation Research of the East Asian Marginal Seas).

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Distribution of Current Structures between Sori Island and Yokji Island in the South Sea of Korea (한국 남해 소리도와 욕지도 사이 해역의 유동 분포)

  • Hwang, Suk-Bum;Choo, Hyo-Sang;Kim, Dae-Hyun;Kim, Dong-Sun
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.12 no.4 s.27
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    • pp.285-291
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    • 2006
  • In order to find the current structure between Sori Island and Yokji Island in the South Sea of Korea, water movements were measured in May, June, October and November of 2004 using ADCP(acoustic doppler current profiler). In the southwestern part of Yokji Island, northeastward flow in whole of depth was dominant by mean current The boundary layer between the upper layer and lower layer was formed between 15m and 20m and each layer different flow. The upper and lower layers have a different direction and speed of currents. In the calculated volume transport, the northeastward transport was greater than southwestward.

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Characteristics of Manganese Nodule Distribution Pattern using Sub-bottom Profile and Deep Tow Imaging System Data (천부지층자료와 심해영상자료를 활용한 망간단괴 분포 특성 연구)

  • Ko, Young-Tak;Park, Cheong-Kee;Kim, Jong-Guk;Lee, Tae-Gook
    • Journal of the Korean Geophysical Society
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    • v.9 no.4
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    • pp.427-441
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    • 2006
  • Sub-bottom profiler and deep tow imaging system were performed in the KODOS (Korea Deep Ocean Study) area in order to find out controlling factor in nodule formation from the relationship between distribution of Mn nodules and micro-scale topographic change. Although abundance of r- and t- types nodules increase on the seafloor of thin upper transparent layer, no significant correlation was found between the thickness of upper transparent layer and total nodule abundance in the study area. Our results show that distribution pattern of nodule, including abundance, continuity, and facies, can vary with small scale in similar abyssal plain.

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A precision analysis of Baengnyeongdo Multi-beam echosounder data using acoustic ray theory (음선이론을 이용한 백령도 부근해역 다중빔 수심측량 자료의 수직.수평 오차 분석)

  • You, Seung-Ki;Joo, Jong-Min;Choi, Jee-Woong;Kim, Young-Bae;Jung, Hyun;Kim, Seo-Cheol;Park, Sung-Kyeu
    • 한국지구물리탐사학회:학술대회논문집
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    • 2009.10a
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    • pp.167-173
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    • 2009
  • Bathymetry survey around the Baengnyeong-do was made by the Korea Hydrographic and Oceanographic Administration (KHOA), using the Simrad EM3000 Multi-Beam EchoSounder (MBES) mounted at the hull of the R/V Badaro 1. Sound velocity were monitored with frequent sound velocity profiler(SVP) casts during the acoustic measurements. The depth distribution and fluctuation of thermocline varied locally owing to the effect of several current flows such as Kuroshio current and Yellow sea coastal waters. These uncertainties cause the falling-off in accuracy of MBES results. In this paper, the bathymetry results will be presented and their accuracy will be discussed along with comparisons to the time and spatial variations in sound velocity profile.

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Comparative Analysis of ADCP Flow Measurement According to River Bed Material (하상재료에 따른 ADCP의 유량측정 비교 분석)

  • Choi, Jin-Woo;Hong, Chang-Su;Shin, Kyung-Yong;Lee, Jin Uk;Kim, Jeong-ae;Cho, Yong-Chul;Yu, Soon-Ju
    • Ecology and Resilient Infrastructure
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    • v.5 no.3
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    • pp.156-162
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    • 2018
  • This research aimed at analyzing comparison results between in gravel and sand bed with respect to the detailed Acoustic Doppler Current Profiler (ADCP) measurement in a velocity, depth, and flow rate data based on Acoustic Doppler Velocimeter (ADV) measurement result. Conclusionally, similar results were shown for gravel and sand bed in velocity, depth and flow rate data using ADV and ADCP measurement. The results of the flow rate show a relative error mean of 3.5 - 4.8% in the gravel bed and 0.02 - 3.2% in the sand bed, which is better performance than the mean error of 5% suggested by United States Geological Survey (USGS). The results can be used as a basis data for the measurement of ADCP and potentially able to be utilized for the more detailed uncertainty analysis of ADCP flow rate measurement.

Thermal Transfer Pixel Patterning by Using an Infrared Lamp Source for Organic LED Display (유기 발광 소자 디스플레이를 위한 적외선 램프 소스를 활용한 열 전사 픽셀 패터닝)

  • Bae, Hyeong Woo;Jang, Youngchan;An, Myungchan;Park, Gyeongtae;Lee, Donggu
    • Journal of Sensor Science and Technology
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    • v.29 no.1
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    • pp.27-32
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    • 2020
  • This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO2), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiNx) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.