• The Journal of Korean Institute of Communications and Information Sciences
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• v.35 no.11A
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• pp.1091-1096
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• 2010

Stiction in microelectromechanical systems (MEMS) has been a major failure mechanism. Especially, in RF MEMS switches, moving parts often suffered in-use and release related stiction problems. Some materials and methods have been used to prevent this problem. Diamond-like carbon (DLC) has not only been used as a protective material owing to its good mechanical properties but also has been used as a hydrophobic material. Its properties could be controlled by post annealing treatment in various conditions. We synthesized DLC films using a radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. Then, the change of the hydrophobic property of the films was investigated undervarious annealing temperatures in nitrogen and in oxygen ambient. The films, that were annealed above $700^{\circ}C$ in nitrogen ambient, showed a high contact angle of water (> $90^{\circ}$) even though their mechanical property was sacrificed to some degree. The structural variation and the changes of the hydrophobic and mechanical properties of the DLC films were analyzed by Raman spectrum, contact angle measurement, surface profiler, and a nanoindentation test.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.364-364
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• 2009

The solar cell is in the spotlight as a future green energy source. In the solar cells based on silicon wafer, the improvement of efficiency is one of crucial issues. One of techniques for high efficiency is texturing on the surface of solar cells. We studied the laser texturing on the surface of multi-crystalline silicon solar cells. The laser texturing followed by chemical etching is adequate for the multi-crystalline structure which have random crystallographic directions. We used the fiber laser for texturing and the SiNx as a masking layer for etching process. We investigated the shapes of holes for texturing in the various laser power conditions and analyzed the holes after removal of thermal damages caused by laser ablation through a 3D profiler.

• 한국신재생에너지학회:학술대회논문집
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• 2008.10a
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• pp.274-277
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• 2008

To evaluate high-resolution wind resources for local and coastal area with complex terrain was attemped to combine the prognostic MM5 mesoscale model with CALMET diagnostic modeling this study. Firstly, MM5 was simulated for 1km resolution, nested fine domain, with FDDA using QuikSCAT seawinds data was employed to improve initial meteorological fields. Wind field and other meteorological variables from MM5 with all vertical levels used as initial guess field for CALMET. And 5 surface and 1 radio sonde observation data is performed objective analysis whole domain cells. Initial and boundary condition are given by 3 hourly RDAPS data of KMA in prognostic MM5 simulation. Geophysical data was used high-resolution terrain elevation and land cover(30 seconds) data from USGS with MM5 simulation. On the other hand SRTM 90m resolution and EGIS 30m landuse was adopted for CALMET diagnostic simulation. The simulation was performed on whole year for 2007. Vertical wind field a hour from CALMET and latest results of MM5 simulation was comparison with wind profiler(KEOP-2007 campaign) data at HAENAM site.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.4
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• pp.2883-2890
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• 2015

As the research about increasing the efficiency of dredging soil transport, the technology, which reduce the friction between pipe wall and fluid in the pipe and disturbed generating pipe blockage, has been developed. So for the purpose of applying this technology to real construction site, main test has been tried at the real scale test in field(500m dredging soil transport length). As a test result, this paper will show 30% flow efficiency increasing by permitted electro magnetic force to the pipe. And test result was evaluated as a ultra sonic velocity profiler.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.8
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• pp.325-329
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• 2003

Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at $600^{\circ}C$ for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I$_{D}$I$_{G}$ intensity ratio, sp$^3$ hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp$^3$ fraction and the increase of I$_{D}$I$_{G}$ intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp$^3$ fraction) of as-deposited film.ed film.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.9
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• pp.665-671
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• 1999

The paper represents the effects of the drive-in process parameters on the residual stress profile of the $p^+$ silicon film. Since the residual stress profile is notuniform along the direction normal to the surface, the residual stress is assumed to be a polynomial function of the depth. All the coefficients of the polynomial can be determined by measuring of the thicknesses and the deflections of cantilevers and the deflection of a rotating beam with a surface profiler meter and a microscope. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual tensile stress decreases. Then, near the surface of the $p^+$ film the residual tensile stress is transformed into the residual compressive stress and its magnitude increases.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.8
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• pp.701-706
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• 2006

In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. We examined the effects of the post annealing temperature on the structural variation of the DLC films. The films were annealed at temperatures ranging from 300 to $900^{\circ}C$ in steps of $200^{\circ}C$ using RTA equipment in nitrogen ambient. The thickness of the film and interface between film and substrate were observed by surface profiler, field emission scanning electron microscopy (FESEM), high resolution transmission electron microscopy (HRTEM), respectively. Raman and X-ray photoelectron spectroscopy (XPS) analysis showed that DLC films were graphitized ($I_D/I_G$, G-peak position and $sp^2/sp^3$ increased) ratio at higher annealing temperature. The variation of surface as a function of annealing treatment was verified by a AFM and contact angle method.

• Journal of Korean Society for Geospatial Information Science
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• v.16 no.3
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• pp.65-69
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• 2008

This study is aimed to develope a remote control ship for acquisition of various underwater information. Remote control ship equipped with GPS, echosounder, sidescan sonar, subbottom profiler. Remote control ship is an automatic system for acquisition of inland water and coast information. For the development of remote control ship, underwater information acquisition of reservoir, dam, polluted area is expected. Also, multibeam echosounder, image sensor, water analysis sensor, etc. could be equipped in one ship. So robot-ship will be applied for the most part of industry managing water resources and preventing the flood by making bed topographic map and estimating water volumes.

• Atmosphere
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• v.26 no.1
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• pp.47-58
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• 2016

On 10 July 2014, tornado outbreak occurred over Goyang province in Korea. This was the first supercell tornado ever reported or documented in Korea. The characteristics of the supercell tornado were investigated using an X-band polarimetric radar, surface meteorological observation, wind profiler, and operational numerical weather prediction (Regional Data Assimilation and Prediction System, RDAPS). The supercell tornado developed along a preexisting dryline that was contributed to surface wind shear. The radar analyses examined here show that the supercell tornado indicated a hook echo with mesocyclone. The decending reflectivity core as well was detected before tornadogenesis and prior to intensification of supercell. The supercell tornado exhibited characteristics similar to typical supercell tornado over the Great Plains of the United States, such as hook echo, bounded weak echo region, and slower movement speed relative to the mean wind. Compared to the typical supercell tornado over U.S., this tornado showed horizontal scale of the mesocyclone was relatively smaller and left-mover.

• Journal of Korean Society for Atmospheric Environment
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• v.12 no.4
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• pp.369-376
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• 1996

Major atmospheric stability classification methods were evaluated with meteorological data obtained by scoustic sounding profiler (SODAR/RASS) in Seoul. The Psequill classificatio method, the method most widely used because of its good agreement in respect of synoptic scope under the steady state, fails to describe the time lag, the response time on stability by heating or cooling caused by daily insolation or noctrunal surface radiation. Horizontal and vertical standard deviation of wind fluctuation $(\sigma_A and \sigma_E)$ method tend to classify night-time stable condition (E, F class) into unstable condition (A, B class). The classification matrix tables for Vogt's vertical temperature difference and wind speed using method ($\Delta$T $\cdot$ U) and bulk Richardson number (Rb) were amended for practical use over Seoul. The modified tables for $\Delta$T $\cdot$ U and Rb method were made by using comprehensive frequency distribution from Pasquill's method and other existing results, and the correlation coefficient(r) was equal to 0.829. It was confirmed that atmospheric stability could be changed with monitoring site characteristics, height and vertical difference between sensors of monitoring station, and classification method itself.