• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.569-574
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• 2008

Nowadays, the equipment for a semiconductor process is required to raise accuracy and productivity. Therefore, the natural frequency of the equipment has been lowered because it has been precise, rapid, large, and light. In order to improve the efficiency of production, it is necessary for the equipment to increase the operation speed, which causes inevitable vibration problems. In this paper, influence analysis of ball-screw in the equipment and evaluation method for the vibration on the base are presented based on the analyses of dynamic characteristics for the mechanical structure through the modal test.

• 전기학회논문지
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• 제57권5호
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• pp.735-740
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• 2008

Recently, the research of PM (Preventive Maintenance) method on the RCM(Reliability-Centered Maintenance) of the system equipment is being actively advanced for a few years. For the most of the current power equipment maintenance, the state of the equipment after maintenance is assumed to be becoming 'as good as new ones' state. However, the state of the power equipment is maintained like the states of the between 'as good as new ones' and 'as bad as old ones' by imperfect maintenance that implies the life decrease of the equipment by frequent breakdown, the error of maintenance process, and so on. So, the Maintenance method considering the real case has to reflect Imperfect maintenance than perfect maintenance. This paper suggests the Preventive Maintenance method by using Quasi - Renewal Theory for the gas turbine equipment as deliberating the imperfect maintenance for the real cases.

• 디지털융복합연구
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• 제9권1호
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• pp.37-49
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• 2011

The purpose of this study is to develop a new equipment acceptance model in the industrial market and test it empirically using a field survey. To define new equipment acceptance factors of employees in the organization, we used the TAM as a useful model to analyze the acceptance process of new equipment. All of the data for the TAM were collected from the employees. Prior research studied the usage of general information technology using a computer and particular software, while we apply the TAM to the new equipment adoption. In this study, both theoretical review and empirical study were conducted and the model was set through the theoretical study which was tested through the empirical analysis. Management support and training/education were shown to have a positive effect on PU and PEOU. Personal innovativeness, management support, perceived usefulness and perceived ease of use were shown to have a positive effect on behavioral intention.

• 산업공학
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• 제10권1호
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• pp.15-22
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• 1997

In semiconductor manufacturing, the probe process between fabrication and assembly process is constrained mostly by the equipment capacity because most products pass through the similar procedures. The probe process is usually performed in a batch mode with relatively short cycle times. The capability of the probe process can be determined by the optimal combination of the equipments and the products. A probe line usually has several types of equipment with different capacity. In this study, the probe line is modeled in terms of capacity to give the efficient planning and control procedure. For the practical usage, the hierarchical capacity planning procedure is used. First, a monthly capacity plan is made to meet the monthly production plan of each product. Secondly, the daily capacity planning is performed by considering the monthly capacity plan and the daily fabrication output. Simple heuristic algorithms for daily capacity planning are developed and some experimental results are shown.

• 한국연소학회지
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• 제23권1호
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• pp.44-54
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• 2018

Heat and mass balance process modeling has been conducted for a coal-firing power plant to be used as a testbed facility for development of various plant systems and equipment. As the material and design of the boiler tube bundle and fuel conversion to the biomass have become major concerns, the process modeling is required to incorporate those features in its calculation. The simulation cases for two different generation load show the satisfying results compared to the operational data from the actual system. Based on the established process conditions, the hypothetical case using wood pellet has also been simulated. Additional calculations for the tube bundle has been conducted regarding the changes in the tube material and design.

• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.939-945
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• 2002

The rise throughput and the stability in the device fabrication can be obtained by applying chemical mechanical polishing (CMP) process in 0.18 $\mu\textrm{m}$ semiconductor device. However, it still has various problems due to the CMP equipment. Especially, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. In this paper, we studied the DOE (design of experiment) method in order to get the optimized CMP equipment variables. Various process parameters, such as table and head speed, slurry flow rate and down force, have investigated in the viewpoint of removal rate and non-uniformity. Through the above DOE results, we could set-up the optimal CMP process parameters.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1103-1106
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• 2008

For the current display process, the innovative micro pattern fabrication process using semiconductor process should be developed, which requires the expensive equipment, the limited process environment and the expensive optic-sensitive material. The effort of process innovation during past several years ends up the limit of cost reduction. The existing ink jet technologies such as a thermal bubble ink jet printing and a piezo ink jet printing are required to shorten the nozzle diameter in order to apply to the micro pattern fabrication. In this paper, as one way to cope these problems the micro pattern equipment based on the electrostatic ink jet has been developed and carried out some experiments.

• 한국CDE학회논문집
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• 제14권1호
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• pp.1-9
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• 2009

ISO 15926 is an international standard for the representation of process plant lifecycle data. However, it is not easy to implement the part 2-data model and the part 4-initial reference data because of their complexity in terms of data structure and shortages of related development toolkits. To overcome this problem, ISO 15926-7(part 7) is under development. ISO 15926-7 specifies implementation methods for sharing and exchange of process plant lifecycle data, which is based on semantic web technologies such as OWL, Web Services, and SPARQL. For the application of ISO 15926-7, this paper discusses how to represent technical specifications of process plant equipment by defining user-defined reference data and object information model with an example of reactor coolant pumps located in the reactor coolant system of an APR 1400 nuclear power plant.

• 대한안전경영과학회:학술대회논문집
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• 대한안전경영과학회 2009년도 추계학술대회
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• pp.187-201
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• 2009

Semiconductor industry is based on equipment industry and timing industry. In particular, semiconductor process is very complex and as semiconductor-chip width tails and is becoming equipment gradually more as a high technology. Equipment operation is primarily engaged in semiconductor manufacturing (engineers and operator) of being conducted by, equipment errors have also been raised. Equipment operational data related to the error of korea occupational safety and health agency were based on data and production engineers involved in the operator's questionnaire was drawn through the error factor. Equipment operating in the error factor of 9 big item and 36 detail item detailed argument based on the errors down, and 9 big item the equipment during operation of the correlation error factor was conducted. Each of the significance level was correlated with the tabulation and analysis. Using the maximum correlation coefficient, the correlation between the error factors to derive the relationship between factors were analyzed. Facility operating with the analysis of error factors (big and detail item) derive a relationship between the model saw. The end of the operation of the facility in operation on the part of the two factors appeared as prevention. Safety aspects and ergonomics aspects of the approach should be guided to the conclusion.

• International journal of advanced smart convergence
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• 제4권1호
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• pp.137-144
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• 2015

Development of the yarn sorting equipment (khonhook) by slide way due to the principle of engineering that cause of workers on the long of motion time. The data was collected from the weaving group Ban Nongkok village, Nakornratchasima Province, THAILAND. According to the study, the step of yarn sorting (konhook) was one of the steps that affect long of motion time. The problem was the inadequate capacity equipment. The objective of research was to study and develop the yarn sorting equipment (konhook). The fabric used in the study was 64 meters in length and 1 meter in width. Researchers studied the processes the yarn sorting (konhook) which it consists of seven sub steps, 1) the thread tube setting, 2) yarn bunching, 3) tying a knot at the end of yarn, 4) looping the yarn into a pillar, 5) sorting the yarn (konhook), 6) crossing pillars and 7) taking out the yarn. Researchers focused on studying yarn sorting process (konhook) by designing and creating a device for yarn sorting (konhook) for reducing yarn sorting (konhook) time by the original method performance indicators. The results found that the developed yarn sorting equipment (konhook) ) by slide way could reduce working time from 7.24 minutes to 6.08 minutes of the original equipment yarn sorting (konhook). This means it could make the process 16.02 % faster. This also helps reducing the distance of workers' movement from 2,234 meters to 8 meters. This is 99.64 % shorter.