• 제목/요약/키워드: process diagnosis

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하수처리시설의 질산화 진단기반 제어 방법의 개발 및 실규모 플랜트 적용을 통한 평가 (Evaluation of Diagnosis-based Control Strategy for NH4-N and NOX-N Removal of a Full-scale Wastewater Treatment Process)

  • 김예진;김효수
    • 한국환경과학회지
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    • 제27권6호
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    • pp.447-456
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    • 2018
  • In this research, the target process was a modified type of a conventional aeration tank with four different influent feeding points and alternated aeration to obtain nitrogen removal. For more accurate switching of influent feeding, the process was operated under a designed control strategy based on monitoring of $NH_4-N$ and $NO_X-N$ concentrations in the tank. However, the strategy did have some limitations. For example, it was not sensitive to detecting the end of each reaction when losing the balance between nitrification and denitrification of each opposite part of biological tank. To overcome the limitations of the existing control strategy, a diagnosis-based control strategy was suggested in this research using the diagnosis results classified as normal (N), ammonia accumulation (AA) and nitrate accumulation (NA). Using the pre-designed rules for control actions, the aeration and volume of the aerated part of the reactor could be increased or decreased at a fixed mode time. In simulations of the suggested diagnosis-based control strategy, the $NH_4-N$ and $NO_X-N$ removal rates in the reactor were maintained at higher levels than those of the existing control strategy.

In-situ Process Monitoring Data from 30-Paired Oxide-Nitride Dielectric Stack Deposition for 3D-NAND Memory Fabrication

  • Min Ho Kim;Hyun Ken Park;Sang Jeen Hong
    • 반도체디스플레이기술학회지
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    • 제22권4호
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    • pp.53-58
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    • 2023
  • The storage capacity of 3D-NAND flash memory has been enhanced by the multi-layer dielectrics. The deposition process has become more challenging due to the tight process margin and the demand for accurate process control. To reduce product costs and ensure successful processes, process diagnosis techniques incorporating artificial intelligence (AI) have been adopted in semiconductor manufacturing. Recently there is a growing interest in process diagnosis, and numerous studies have been conducted in this field. For higher model accuracy, various process and sensor data are required, such as optical emission spectroscopy (OES), quadrupole mass spectrometer (QMS), and equipment control state. Among them, OES is usually used for plasma diagnostic. However, OES data can be distorted by viewport contamination, leading to misunderstandings in plasma diagnosis. This issue is particularly emphasized in multi-dielectric deposition processes, such as oxide and nitride (ON) stack. Thus, it is crucial to understand the potential misunderstandings related to OES data distortion due to viewport contamination. This paper explores the potential for misunderstanding OES data due to data distortion in the ON stack process. It suggests the possibility of excessively evaluating process drift through comparisons with a QMS. This understanding can be utilized to develop diagnostic models and identify the effects of viewport contamination in ON stack processes.

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부호유향그래프와 동적 부분최소자승법에 기반한 화학공정의 다중이상진단 (Multiple-Fault Diagnosis for Chemical Processes Based on Signed Digraph and Dynamic Partial Least Squares)

  • 이기백;신동일;윤인섭
    • 제어로봇시스템학회논문지
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    • 제9권2호
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    • pp.159-167
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    • 2003
  • This study suggests the hybrid fault diagnosis method of signed digraph (SDG) and partial least squares (PLS). SDG offers a simple and graphical representation for the causal relationships between process variables. The proposed method is based on SDG to utilize the advantage that the model building needs less information than other methods and can be performed automatically. PLS model is built on local cause-effect relationships of each variable in SDG. In addition to the current values of cause variables, the past values of cause and effect variables are inputted to PLS model to represent the Process armies. The measured value and predicted one by dynamic PLS are compared to diagnose the fault. The diagnosis example of CSTR shows the proposed method improves diagnosis resolution and facilitates diagnosis of masked multiple-fault.

모듈신경망을 이용한 다중고장 진단기법 (Multiple Fault Diagnosis Method by Modular Artificial Neural Network)

  • 배용환;이석희
    • 한국정밀공학회지
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    • 제15권2호
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    • pp.35-44
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    • 1998
  • This paper describes multiple fault diagnosis method in complex system with hierarchical structure. Complex system is divided into subsystem, item and component. For diagnosing this hierarchical complex system, it is necessary to implement special neural network. We introduced Modular Artificial Neural Network(MANN) for this purpose. MANN consists of four level neural network, first level for symptom classification, second level for item fault diagnosis, third level for component symptom classification, forth level for component fault diagnosis. Each network is multi layer perceptron with 7 inputs, 30 hidden node and 7 outputs trained by backpropagation. UNIX IPC(Inter Process Communication) is used for implementing MANN with multitasking and message transfer between processes in SUN workstation. We tested MANN in reactor system.

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렌즈 사출성형 공정 상태 특징 추출 및 진단 알고리즘의 개발 (A Development of Feature Extraction and Condition Diagnosis Algorithm for Lens Injection Molding Process)

  • 백대성;남정수;이상원
    • 한국정밀공학회지
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    • 제31권11호
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    • pp.1031-1040
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    • 2014
  • In this paper, a new condition diagnosis algorithm for the lens injection molding process using various features extracted from cavity pressure, nozzle pressure and screw position signals is developed with the aid of probability neural network (PNN) method. A new feature extraction method is developed for identifying five (5), seven (7) and two (2) critical features from cavity pressure, nozzle pressure and screw position signals, respectively. The node energies extracted from cavity and nozzle pressure signals are also considered based on wavelet packet decomposition (WPD). The PNN method is introduced to build the condition diagnosis model by considering the extracted features and node energies. A series of the lens injection molding experiments are conducted to validate the model, and it is demonstrated that the proposed condition diagnosis model is useful with high diagnosis accuracy.

품질경영진단모델을 통한 프로세스 혁신에 관한 연구 (A Study on Process Innovation through Quality Management Diagnosis Model)

  • 김종국;유진삼;김창은
    • 대한안전경영과학회:학술대회논문집
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    • 대한안전경영과학회 2012년 춘계학술대회
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    • pp.547-559
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    • 2012
  • This thesis introduced a model of diagnosing a company's quality management, and a process of achieving quality innovation based on the model. As for study methods, books and theses related to quality and process innovation were collected for investigation, a survey on internal employees to investigate major issues of quality and standard consciousness was conducted, and 5DP was discussed for balanced process analysis.

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에이젼트기반 실시간 고장진단 시뮬레이션기법 (Agent based real-time fault diagnosis simulation)

  • 배용환;이석희;배태용;이형국
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1994년도 추계학술대회 논문집
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    • pp.670-675
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    • 1994
  • Yhis paper describes a fault diagnosis simulation of the Real-Time Multiple Fault Dignosis System (RTMFDS) for forcasting faults in a system and deciding current machine state from signal information. Comparing with other diagnosis system for single fault,the system developed deals with multiple fault diagnosis,comprising two main parts. One is a remotesignal generating and transimission terminal and the other is a host system for fault diagnosis. Signal generator generate the random fault signal and the image information, and send this information to host. Host consists of various modules and agents such as Signal Processing Module(SPM) for sinal preprocessing, Performence Monotoring Module(PMM) for subsystem performance monitoring, Trigger Module(TM) for multi-triggering subsystem fault diagnosis, Subsystem Fault Diagnosis Agent(SFDA) for receiving trigger signal, formulating subsystem fault D\ulcornerB and initiating diagnosis, Fault Diagnosis Module(FDM) for simulating component fault with Hierarchical Artificial Neural Network (HANN), numerical models and Hofield network,Result Agent(RA) for receiving simulation result and sending to Treatment solver and Graphic Agent(GA). Each agent represents a separate process in UNIX operating system, information exchange and cooperation between agents was doen by IPC(Inter Process Communication : message queue, semaphore, signal, pipe). Numerical models are used to deseribe structure, function and behavior of total system, subsystems and their components. Hierarchical data structure for diagnosing the fault system is implemented by HANN. Signal generation and transmittion was performed on PC. As a host, SUN workstation with X-Windows(Motif)is used for graphic representation.

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페푸프 제어 시스템을 위한 퍼지-신경망 기방 고장 진단 시스템의 개발 (Development of Neuro-Fuzzy-Based Fault Diagnostic System for Closed-Loop Control system)

  • 김성호;이성룡;강정규
    • 제어로봇시스템학회논문지
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    • 제7권6호
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    • pp.494-501
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    • 2001
  • In this paper an ANFIS(Adativo Neuro-Fuzzy Inference System)- based fault detection and diagnosis for a closed loop control system is proposed. The proposed diagnostic system contains two ANFIS. One is run as a parallel model within the model in closed loop control(MCL) and the other is run as a series-parallel model within the process in closed loop(PCL) for the generation of relevant symptoms for fault diagnosis. These symptoms are further processed by another classification logic with simple rules and neural network for process and controller fault diagnosis. Experimental results for a DC shunt motor control system illustrate the effectiveness of the proposed diagnostic scheme.

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사례기반의 암전류 원인 진단 모델링 및 표준화 (Case Based Diagnosis Modeling of Dark Current Causes and Standardization of Diagnosis Process)

  • 조행득
    • 한국자동차공학회논문집
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    • 제25권2호
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    • pp.149-156
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    • 2017
  • Various kinds of accessories(e.g., clock, radio, automatic door locks, alarm devices, etc.) or unit components (e.g., black box, navigation system, alarm, private audio, etc.) require dark current even when the vehicle power is turned off. However, accessories or unit components can be the causes of excessive dark current generation. It results in battery discharge and the vehicle's failure to start. Therefore, immediate detection of abnormal dark current and response are very important for a successful repair job. In this paper, we can increase the maintenance efficiency by presenting a standardized diagnostic process for the measurement of the dark current and the existing problem. As a result of the absence of a system to block the dark current in a vehicle, diagnosis and repair were performed immediately by using a standardized dark current diagnostic process.

산후신통의 감별 진단에 대한 연구 (A Study on the Differential Diagnosis of Postpartum Pain)

  • 박장경
    • 대한한방부인과학회지
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    • 제33권1호
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    • pp.104-115
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    • 2020
  • Objectives: The purpose of this study is to discuss the differential diagnosis of postpartum pain. Methods: In this study, postpartum pain cases reported in the Journal of Korean Medicine were investigated, and a case of postpartum patient who diagnosed syringomyelia was reported. Results: Patients with autoimmune diseases who complained of postpartum pain had a different course of treatment process and they had related family history. Patients with syringomyelia also differed from the usual treatment process. Conclusions: In patients with postpartum pain who differ from usual treatment process, differential diagnosis of autoimmune disease and syringomyelia is necessary.