• 제목/요약/키워드: pressing force

검색결과 100건 처리시간 0.022초

Silicon/Pad Pressure Measurements During Chemical Mechanical Polishing

  • Danyluk, Steven;Ng, Gary;Yoon, In-Ho;Higgs, Fred;Zhou, Chun-Hong
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.433-434
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    • 2002
  • Chemical mechanical polishing refers to a process by which silicon and partially-processed integrated circuits (IC's) built on silicon substrates are polished to produce planar surfaces for the continued manufacturing of IC's. Chemical mechanical polishing is done by pressing the silicon wafer, face down, onto a rotating platen that is covered by a rough polyurethane pad. During rotation, the pad is flooded with a slurry that contains nanoscale particles. The pad deforms and the roughness of the surface entrains the slurry into the interface. The asperities contact the wafer and the surface is polished in a three-body abrasion process. The contact of the wafer with the 'soft' pad produces a unique elastohydrodynamic situation in which a suction force is imposed at the interface. This added force is non-uniform and can be on the order of the applied pressure on the wafer. We have measured the magnitude and spatial distribution of this suction force. This force will be described within the context of a model of the sliding of hard surfaces on soft substrates.

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Force Sensing Resistor(FSR) Sensor를 이용한 전기인공후두 "Evada"의 기능적 특성에 대한 연구 (A Study on Functional Characteristics of Electrolarynx "Evada" Using Force Sensing Resistor(FSR) Sensor)

  • 박용재;최홍식;이주형;이성민;김광문
    • 대한후두음성언어의학회지
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    • 제9권1호
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    • pp.11-16
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    • 1998
  • Background and Objectives : Electrolarynx has been used as one of the methods of rehabilitation for the laryngectomees. Previous electrolarynx could not alter frequency and intensity simultaneously. This institute developed an electrolarynx named "Evada" using FSR(force sensing resistor) sensor, which can control the frequency(and/or intensity) simultaneously. This study was performed for the normal control and laryngectomees with three types of electrolarynx (Evada, Servox-inton, Nu-vois) to reveal functional characteristics of Evada Materials and Methods : five laryngectomees and five normal adults were made to express there sentences(discriptive sentence, "You stay here" ; question sentence, "You stay here?" ; exclamation sentence, "You!! stay here!"), using three types of electrolarynx. Frequency change and intensity change from first and last vowel was calculated in three sentences and analyzed statistically by paired T-test. Results : The frequency change in the question sentence and exclamation sentence was more prominent in Evada than in Servox-inton and Nu-vois. The intensity change in the question sentence and exclamation sentence was also more prominent in Evada than in Servox-inton and Nu-vois. Conclusions : Evada could control frequency and intensity simultaneously and control degree of frequency(and/or intensity) according to the pressing force into the button. Evada could adjust continuously frequency and intensity during conversation. So, Evada is better in producing intonation and contrastive stress than Nu-vois and Servox-inton.

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인공개재물 이식법을 통한 항공기용 티타늄 주물의 피로설계 (An Artificial Inclusion Seeding Methodology for Fatigue Design of Aerospace Ti Castings)

  • ;박용국;김진곤
    • 한국주조공학회지
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    • 제26권4호
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    • pp.184-190
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    • 2006
  • Presence of inclusions in Ti castings imparts detrimental effects on the mechanical performance of castings. However, actual inclusions do not occur very frequently and they are difficult to locate. As a result, acquirement of specimens for mechanical tests and thus in-depth research of the adverse influence of inclusions are challenging. To address this problem, artificial inclusion seeding methodology is developed to emulate actual inclusions in Ti investment castings. Firstly, to validate that this new methodology does not result in inherent mechanical property degradation, Ti specimens with machined, backfilled and HIPed holes are produced and compared to control (unaltered), cast Ti material. Fatigue test results indicate that this 'machine-and-HIP methodology without seeding' does not result in any fundamental mechanical property alteration, which would bias ensuing comparative results. Secondly, based on this result, validation of the artificially seeded inclusions being equivalent to 'as cast' inclusions is performed by comparing their fatigue behaviors. Test specimens created by the novel artificial inclusion seeding methodology are equivalent to Ti casting specimens containing actual cast-in inclusions, and an adverse effect of inclusions in investment castings is confirmed.

근력과 관절력 예측을 위한 손의 생체역학 모델 (Biomechanical Model of Hand to Predict Muscle Force and Joint Force)

  • 김경수;김윤혁
    • 대한인간공학회지
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    • 제28권3호
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    • pp.1-6
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    • 2009
  • Recently, importance of the rehabilitation of hand pathologies as well as the development of high-technology hand robot has been increased. The biomechanical model of hand is indispensable due to the difficulty of direct measurement of muscle forces and joint forces in hands. In this study, a three-dimensional biomechanical model of four fingers including three joints and ten muscles in each finger was developed and a mathematical relationship between neural commands and finger forces which represents the enslaving effect and the force deficit effect was proposed. When pressing a plate under the flexed posture, the muscle forces and the joint forces were predicted by the optimization technique. The results showed that the major activated muscles were flexion muscles (flexor digitorum profundus, radial interosseous, and ulnar interosseous). In addition, it was found that the antagonistic muscles were also activated rather than the previous models, which is more realistic phenomenon. The present model has considered the interaction among fingers, thus can be more powerful while developing a robot hand that can totally control the multiple fingers like human.

원주가압형 디스크의 형상변화가 온도분포에 미치는 영향에 관한 연구 (A Study on Effect of Temperature Distribution in Shape Change of the Circumferential Pressing Type Disc)

  • 김형훈;이성욱;한동섭;한근조
    • 한국기계가공학회지
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    • 제6권4호
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    • pp.86-91
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    • 2007
  • The heat generated by the brake system of vehicles results in reduction of friction force on the brake surface and vibration when breaking. These problems play essential part in break's performance. To solve these problems, extensive research has been conducted such as drilling cooling holes on the brake pud, accommodating ventilated holes and etc. In this study, we suggest the compression of brake in circumferential direction in order to improve its cooling performance. And we analyzed comparing temperature distribution which is generated accomplishing heat analysis at each disc.

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박판 금속의 회전 전단가공에 관한 연구 (A Study on the Rotary Shearing Operation of Sheet Metal)

  • 서윤수;박재우;김영호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 춘계학술대회 논문집
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    • pp.747-752
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    • 2000
  • Rotary shearing using of rotating and locally shear force has been studied. It is possible to be obtained in any case for requested blank diameters. In this paper, different local forming zones, that are clearances between upper roller and vertically taped low roller, were investigated. Required shearing force is calculated by undecided coefficient method for clearances and strokes of upper roller. Rotary shearing is completed undergoing some processes composed of pressing steps and standing steps. The reason for using these processes is to avoid jamming or tearing of blank by means of upper roller during shearing.

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뇌졸중 환자의 손가락 재활운동을 위한 손 및 손가락 고정장치 개발 (Development of Hand and Fingers Fixing System for Stroke Patient's Rehabilitation Exercise)

  • 김현민;김갑순
    • 한국정밀공학회지
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    • 제29권7호
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    • pp.753-761
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    • 2012
  • This paper describes development of a hand and finger fixing system for the rehabilitation exercise of patient's fingers. In order to exercise the finger rehabilitation using a finger rehabilitation robot, a patient's hand or fingers are fixed safely. In this paper, The hand and fingers fixing system can safely fix stroke patient's hand and fingers by pressing with force control system. The characteristic test of the system was carried out. It is thought that the system could be used for fixing their fingers in stroke patient's finger rehabilitation exercise.

선형 운동하는 $L_1-B_8$ 모드 초음파 전동기의 효율과 토크 특성 (The Characteristics of Efficiency and Torque in $L_1-B_8$ mode USM Having Linear Movement)

  • 우상호;신순인;김진수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.585-588
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    • 2002
  • The USM uses friction between a mobile part (rotor) and a vibration part(stator), which is different from the principle of the conventional motor based on the interaction of electric and magnetic fields. In this thesis, a flat-type $L_1-B_8$ mode USM was designed and fabricated the characteristics of an ultrasonic vibration. The results of fabricated USM are as follows: (1) In case of ultrasonic motor with elastic-body of stainless, when applied voltage, frequency, pressing force of rotor were 50 [V], 27.9 [kHz], 1.5 [N], 5.0[mN m] respectively, the speed of revolution could be presented up to 0 [cm/s]. (2) In case of ultrasonic motor with elastic-body of brass, when applied voltage, frequency, pressing force of rotor were 50 [V], 21.4 [kHz], 1.5 [N], 1.4[mN m]respectively, the speed of rotor revolution was presented up to 0 [cm/s]. (3) The USM of elastic-body of stainless showing 1.17[%], somewhat low, in the maximum efficiency according to torque was superior to the USM of elastic-body of brass showing 0.34 [%]. The Flat-type $L_1-B_8$ mode USM had characteristics of typical drooping torque-speed, large torque and high speed, and operating in both directions by phase reversal.

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언로드 성능 형상을 위한 디스크 범퍼의 제작 및 실험 연구 (Fabrication and Experimental Research of the Disk Bump to Improve the Unloading Performance)

  • 이용은;이용현;이형준;박노철;박경수;박영필
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2007년도 추계학술대회논문집
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    • pp.1276-1279
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    • 2007
  • The main objectives of the Load/Unload are no slider-disk contact and no media damage. But, it remains unsolved technical problems on the unloading process. While the slider climbs up the ramp at the outer edge of the disk, the possibility of the slider-disk contact by lift-off force and rebound of the slider increases. Keeping in mind of these points, to prevent the slider-disk contact, we apply the disk bump on disk outer edge proceeding unload. First, referring to the simulation results, we select the optimal bump shapes to improve unload performance by unload analysis. Second, the disk bump is mechanically manufactured by pressing disk surface using tungsten tips. The bumps are variously processed by changing pressing pressure of tungsten tips. After confirming bump shape by nano-scanner, the optimal bump shape is applied to experimental unload process. Through this experiment, it is conformed that the unload performance was improved by using the optimal disk bump to prevent the slider-disk contact.

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HDD에서 언로드 성능향상을 위한 디스크 범프의 설계 및 실험 연구 (Design and Experiment investigation of disk bump to improve unload performance in HDD)

  • 이형준;이용현;박경수;박노철;박영필
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2007년도 춘계학술대회논문집
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    • pp.833-836
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    • 2007
  • Load/Unload technology has more benefits than the conventional CSS technology. However, it remains unsolved technical problem on the unloading process. While the slider climbs up the ramp at the outer edge of the disk, the possibility of the slider-disk contact by lift-off force and rebound of the slider increases. This paper focuses on no slider-disk contact. To prevent the slider-disk contact, we apply the disk bump on disk outer edge proceeding unload. Firstly, in the simulation, the bump dimension is determined by changing bump design parameters. Secondly, dynamic stability of slider have to be checked on disk bump before unload analysis, and unload analysis is performed by applying stable bump shapes to unload simulation. Thirdly, we select optimal bump shape to improve unload performance by unload analysis. Finally, in the experiment, the disk bump is mechanically manufactured by pressing disk surface using diamond tip. That is variously processed by changing pressing pressure. After confirming bump shape by nano-scanner, proper bump shape is applied to real experimental unload process. Through this investigation, we propose the optimal bump design to prevent the slider-disk contact, and then we can realize improved unloading performance.

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