• 제목/요약/키워드: preferred density

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DC, pulse 조건에 따른 구리 도금층 미세 조직 관찰 (Microstructural Characteristics of Electro-Plated Cu Films by DC and Pulse Systems)

  • 윤지숙;박찬수;홍순현;이현주;이승준;김양도
    • 한국재료학회지
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    • 제24권2호
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    • pp.105-110
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    • 2014
  • The aim of this work was to investigate the effects of electrodeposition conditions on the microstructural characteristics of copper thin films. The microstructure of electroplated Cu films was found to be highly dependent on electrodeposition conditions such as system current and current density, as well as the bath solution itself. The current density significantly changed the preferred orientation of electroplated Cu films in a DC system, while the solution itself had very significant effects on microstructural characteristics in a pulse-reverse pulse current system. In the DC system, polarization at high current above 30 mA, changed the preferred orientation of Cu films from (220) to (111). However, Cu films showed (220) preferred orientation for all ranges of current density in the pulse-reverse pulse current system. The grain size decreased with increasing current density in the DC system while it remained relatively constant in the pulse-reverse pulse current system. The sheet resistance increased with increasing current density in the DC system due to the decreased grain size.

기판온도 및 스퍼터가스에 따른 ZnO 박막의 우선배향성, 화학조성, 물리적특성 변화 (Effects of Substrate Temperature and Sputter Gas on the Physical Characteristics, Chemical Composition and Preferred Orientation of ZnO Thin Films)

  • 김병진;조남희
    • 한국세라믹학회지
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    • 제34권12호
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    • pp.1227-1234
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    • 1997
  • ZnO thin films were prepared by rf-magnetron sputter at various conditions. Crystallinity, microstructure, chemical composition, and optical composition, and optical properties of the films were investigated as functions of substrate temperature (R. T.-50$0^{\circ}C$) an sputter gas (O2/Ar=0-50%). ZnO thin films grown at 50$0^{\circ}C$ with sputter gas of pure argon as well as at R. T. with sputter gas of a mixture of argon & oxygen(O2/Ar=2%) exhibit a strong tendency of (002) preferred orientation, compared with a considerable random orientation at the other conditions. The thin films with (002) preferred orientation has a chemical stoichiometry of Zn/O-1.01, a band gap of 3.3eV, and a packing density of 98% respectively.

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레이저 어블레이션에 의한 $(Pb,La)TiO_3$ 박막의 제작 (Fabrication of $(Pb,La)TiO_3$ Thin Films by Pulsed Laser Ablation)

  • 박정흠;김준한;이상렬;박종우;박창엽
    • 한국전기전자재료학회논문지
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    • 제11권2호
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    • pp.133-137
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    • 1998
  • $(Pb_{0.72}La_{0.28})Ti_{0.93}O_3(PLT(28))$ thin films were fabricated by pulsed laser deposition. PLT films deposited on $Pt/Ti/SiO_2/Si$ at $600^{\circ}C$ had a preferred orientation in (111) plane and at $550^{\circ}C$ had a (100) preferred orientation. We found that (111) preferred oriented films had well grown normal to substrate surface. This PLT(28) thin films of $1{\mu}m$ thickness had dielectric properties of ${\varepsilon}_r$=1300, dielectric $loss{\fallingdotseq}0.03 $. and had charge storage density of 10 [${\mu}C/cm^2$] and leakage current density of less than $10^{-6}[A/cm^2]$ at 100[kV/cm]. These results indicated that the PLT(28) thin films fabricated by pulsed laser deposition are suitable for DRAM capacitor application.

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납-주석합금 도금층의 조성 및 조직특성 (Composition and microstructure of Lead-Tin alloy electrodeposits)

  • 예길촌;지창훈
    • 한국표면공학회지
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    • 제34권2호
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    • pp.151-160
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    • 2001
  • The composition and the microstructure of the lead-tin alloy electrodeposited in a gluconate bath were invesitigated according to electrolysis conditions. The tin content of the lead-tin alloy electrodeposits increased with increasing current density and EDTA addition, while it decreased with increasing temperature and sodium gluconate concentration. The preferred orientation of the alloy deposits changed from the (220) plane through (200) to (200) + (111) planes with increasing cathode overpotential. The surface morphology of the films was closely related to both the preferred orientation and the alloy composition.

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黃酸亞鉛 電解液을 使用한 亞鉛電着層의 顯微鏡 組織 (Microstructure of zinc electrodeposits in acid sulfate solution)

  • 예길촌;안덕수;김용웅
    • 한국표면공학회지
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    • 제18권2호
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    • pp.53-60
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    • 1985
  • The microstructure of zine electrodeposits was investigated by using zinc sulfate solution in still bath. The cathode current efficiency decreased with increasing current density, and decreasing temperature. The preferred orientation of the zinc electrodeposits changed from (10.3) texture to(10.${\ell}$)-(00.1)(${\ell}$=1, 2, 3) texture through (10.2)-(10.3) preferred orientation with increasing cathode over potential. The surface morphology of zinc electrodeposits changed from the dendritic growth with granular crystallites to the blocks of hexagonal crystallites packed together with increasing current density. The microstructure of cross section of the above deposits are the rough granular structure and columnar structure respectively.

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Effect of various MgO E-beam evaporation sources on the characteristics of MgO protecting layer of AC-PDP

  • Park, Sun-Young;Lee, Mi-Jung;Kim, Soo-Gil;Kim, Hyeong-Joon;Moon, Sung-Hwan;Kim, Jong-Kuk
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.223-226
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    • 2004
  • MgO thin films were deposited bye-beam evaporation on $SiO_2$/Si wafers for the application of a protective layer in alternating current plasma display panels (AC-PDPs). Three different MgO sources, single crystal, melted polycrystal and sintered polycrystal, were used to find out the change of the properties of MgO protective layer depending on the source type. The properties of MgO thin films such as density, orientation and surface morphology were influenced by the source type. MgO thin films deposited with the melted polycrystal source had the highest density with the highest (100) preferred orientation, whereas the films deposited with the sintered polycrystal source had the lowest density with less preferred orientation. Such a result seems to be originated from the different mobility of adatoms on the surface of the deposited MgO thin films. Different microstructures of MgO thin films deposited even in the same deposition condition were observed depending on the MgO source type, resulting in different discharge characteristics.

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크롬 전착층의 표면광택에 미치는 펄스도금의 영향 (The Effects of Pulse Current on the Surface Appearance of Chromium Plating)

  • 한성호;권식철;여운관
    • 한국표면공학회지
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    • 제14권4호
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    • pp.215-220
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    • 1981
  • The surface appearance of chromium electrodeposit was studied by employing a pulse curr-ent plating in self-regulating high speed (SRHS) bath containing 20 g/$\ell$, K2SiF6 7.5 g/$\ell$ SrSO4 and 250 g/$\ell$ CrO3. As the pulse frequency increased, the surface appearance changed suddenly from bright a-ppearance in a direct current plating condition to gray one in the range of pulse frequency less than about 20KHz. However the bright appearance is recovered as the pulse frequen-cy exceeded 20 KHz. This phenomena seemed to be related with the preferred orientation of electrodeposits, considering the relationship between the preferred orientation of elect-rodeposits and surface appearance in a SRHS bath. Direct current plating was also applied to both Sargent and SRHS bath and investigat-ion on surface appearance was extended to the high current density of 400 A/dm2. In a Sa-rgent bath, the increase in bath temperature was necessary for bright appearance as the current density was increased within 150 A/dm2, but bright region was shown in the cons-tant temperature of 70-75$^{\circ}C$ above the current density of 150A/dm2. On the other hand, two regions of surface brightness was found in a SRHS bath. One is region in the low temperature less than 25$^{\circ}C$ and the other in the moderate temperature range from 55$^{\circ}C$ to 65$^{\circ}C$.

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폐경후 여성의 골밀도와 갱년기 자각증상, 생활습관 및 짠맛에 대한 기호도와의 관련성 (Relationships Between Bone Mineral Density and Menopausal Symptoms, Life Habits, Preference of Food Saltiness in Postmenopausal Women)

  • 이보경;김은미;장유경
    • 대한가정학회지
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    • 제37권12호
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    • pp.69-78
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    • 1999
  • This study was desingned to investigate the relationships between bone mineral density(BMD) of the lumbar spine($L2\rightarrowL4$) and menopausal symptoms, health conciousness, bone health status, activity intensity, preference of food saltiness in 41 postmenopausal women. Lumbago was main menopausal symptom, and BMD of the subjects with lumbago was significantly low compared with BMD of the subjects without lumbago(p<0.01). BMD of the subjects who felt healthy was significantly higher than BMD of them who felt inbetween or weak(p<0.05). BMD of the subjects who had good bone status of the lumbar spine was significantly higher than BMD of them who had bent lumbar spine or experienced bone fracture(p<0.001). BMD of the subjects who were active was significantly higher than BMD of them whose activity was moderate or sedentary(p<0.05). BMD of the subjects who preferred very insipid taste was significantly high compared with BMD of them who preferred insipid, moderate or salty taste, and BMD of the subjects who preferred very salty taste was significantly low(p<0.01). This study suggested that decrease of BMD of the lumbar spine was significantly related to lumbago, bone fracture and bent lumbar spine. And when they were active and not preferred salty taste, bone loss of the lumbar spine was decreased.

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시안화아연욕을 사랑한 아연 전착층의 조직특성 (Microstructure of Zinc electrodeposit in Cyanide Solution)

  • 예길촌;조은형
    • 한국표면공학회지
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    • 제17권2호
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    • pp.41-58
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    • 1984
  • Zinc was electrodeposited from cyanide solutions at temperature from 20$^{\circ}C\;to\;40^{\circ}C$ in the range of current density from 0.5 to 8A/$dm^2$. The preferred orientation changed from (10.3)+(11.0) to (11.0) texture with increasing cathode overpotential in the additive free solution, while the (11.0) preferred orientation developed at lower overpotentials (800-1270 mV) and the (11.0)+(10.0) preferred orientation was formed at higher overpotential (1300-1400mV) in the solution with brightner. Mossy type of morphology developed mostly in the additive free deposits and the microstructure of the cross section of the above deposits changed from columar structure to granular structure with increasing overpotential. The surface appearance of the deposits with additive having (11.0) texture was the smooth deposit of very small crystallite, while that of the deposits having (11.0)+(10.0) texture was fine crystalline deposit. The microstructure of the cross section of them was the fine field oriented type of structure.

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X-선 산란을 이용한$SnO_{2}$ 박막의 결정구조 정밀화 (Crystal Structure Refinement of $SnO_{2}$ Thin Film Using X-ray Scattering)

  • 김용일;남승훈;박종서
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.1939-1943
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    • 2003
  • The precise structural analysis of $SnO_{2}$ thin film, which was prepared by PECVD and thickness 2400 ${\AA}$, was tried to do the structural refinement using X -ray diffraction data. The observed diffraction patterns of $SnO_{2}$ thin film had the strongly preferred orientation effect. WIMV method was used to correct the preferred orientation effect. The final weighted R-factor, $R_{WD}$ was 7.92 %. The lattice parameters, a = b == 4.7366(1) ${\AA}$ and c = 3.1937(1) ${\AA}$, were almost in accordance with ones of $SnO_{2}$ powder.

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