Microstructural Characteristics of Electro-Plated Cu Films by DC and Pulse Systems |
Yoon, Jisook
(Education Program for Samsung Advanced Integrated Circuit, Pusan National University)
Park, Chansu (Department of Materials Science and Engineering, Pusan National University) Hong, Soonhyun (Department of Materials Science and Engineering, Pusan National University) Lee, Hyunju (Department of Materials Science and Engineering, Pusan National University) Lee, Seungjun (Education Program for Samsung Advanced Integrated Circuit, Pusan National University) Kim, Yangdo (Department of Materials Science and Engineering, Pusan National University) |
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