• Korean Journal of Materials Research
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• v.23 no.5
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• pp.260-265
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• 2013

Silicon nanoparticle is a promising material for electronic devices, photovoltaics, and biological applications. Here, we synthesize silicon nanoparticles via $CO_2$ laser pyrolysis and study the hydrogen flow effects on the characteristics of silicon nanoparticles using high resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), and UV-Vis-NIR spectrophotometry. In $CO_2$ laser pyrolysis, used to synthesize the silicon nanoparticles, the wavelength of the $CO_2$ laser matches the absorption cross section of silane. Silane absorbs the $CO_2$ laser energy at a wavelength of $10.6{\mu}m$. Therefore, the laser excites silane, dissociating it to Si radical. Finally, nucleation and growth of the Si radicals generates various silicon nanoparticle. In addition, researchers can introduce hydrogen gas into silane to control the characteristics of silicon nanoparticles. Changing the hydrogen flow rate affects the nanoparticle size and crystallinity of silicon nanoparticles. Specifically, a high hydrogen flow rate produces small silicon nanoparticles and induces low crystallinity. We attribute these characteristics to the low density of the Si precursor, high hydrogen passivation probability on the surface of the silicon nanoparticles, and low reaction temperature during the synthesis.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.255-255
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• 2011

Zinc oxide based thin films have been extensively studied in recent several years because they have very interesting properties and zinc oxide is non-poisonous, abundant and cheap material. ZnO films are employed in different applications like transparent conductive layers in solar cells, protective coatings and so on. Wide industrial application of the ZnO films requires of development of cheap, effective and scalable technology. Typically used technologies don't completely satisfy the industrial requirements. In the present work, we studied effect of the deposition parameters on the structure and properties of ZnO films deposited by DC arc plasmatron. The varied parameters were gas flow rates, precursor composition, substrate temperature and post-deposition annealing temperature. Vapor of Zinc acetylacetone was used as source materials, oxygen was used as working gas and argon was used as the cathode protective gas and a transport gas for the vapor. The plasmatron power was varied in the range of 700-1500 watts. Flow rate of the gases and substrate temperature rate were varied in the wide range to optimize the properties of the deposited coatings. After deposition films were annealed in the hydrogen atmosphere in the wide range of temperatures. Structure of coatings was investigated using XRD and SEM. Chemical composition was analyzed using x-ray photoelectron spectroscopy. Sheet conductivity was measured by 4-point probe method. Optical properties of the transparent ZnO-based coatings were studied by the spectroscopy. It was shown that deposition by a DC Arc plasmatron can be used for low-cost production of zinc oxide films with good optical and electrical properties. Increasing of the oxygen content in the gas mixture during deposition allow to obtain high-resistive protective and insulation coatings with high adhesion to the metallic surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.353-353
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• 2011

Titanium dioxide is a suitable material for industrial use at present and in the future because titanium dioxide has efficient photoactivity, good stability and low cost [1]. Among the three phases (anatase, rutile, brookite) of titanium dioxide, the anatase form is particularly photocatalytically active under ultraviolet (UV) light. In fabrication of photocatalytic devices based on catalytic nanodiodes [2], it is challenging to obtain a photocatalytically active TiO2 thin film that can be prepared at low temperature (< 200$^{\circ}C$). Here, we present the synthesis of a titanium dioxide film using TiO2 nanoparticles and sol-gel methods. Titanium tetra-isopropoxide was used as the precursor and alcohol as the solvent. Titanium dioxide thin films were made using spin coating. The change of atomic structure was monitored after heating the thin film at 200$^{\circ}C$ and at 350$^{\circ}C$. The prepared samples have been characterized by X-ray diffraction (XRD), scanning electron microcopy, X-ray photoelectron spectroscopy, transmission electron microscopy, ultraviolet-visible spectroscopy (UV-vis), and ellipsometry. XRD spectra show an anatase phase at low temperature, 200$^{\circ}C$. UV-vis confirms the anatase phase band gap energy (3.2 eV) when using the photocatalyst. TEM images reveal crystallization of the titanium dioxide at 200$^{\circ}C$. We will discuss the switching behavior of the Pt /sol-gel TiO2 /Pt layers that can be a new type of resistive random-access memory.

• Applied Chemistry for Engineering
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• v.25 no.6
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• pp.564-569
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• 2014

Zirconia nanoparticles were synthesized by hydrothermal process, and experimental parameters such as reaction temperature, reaction time, kind and concentration of precipitator, kind of precursor were varied. Particle sizes and crystalline phases of each synthesized nanoparticles were analyzed with X-ray diffraction and FE-scanning electron microscope (SEM). The particle size and crystallization of zirconia increased with increasing concentration of precipitator. The growth rate of particle sizes when NaOH as a precipitator was used also increased more than that of KOH. Therefore, the use of KOH rather than NaOH was more effective in the control of particle sizes. An amorphous zirconia nanoparticle was found in 4 h of hydrothermal reaction, but the monoclinic zirconia nanoparticle was found in 8 h and over of hydrothermal reaction, and the width of nanoparticles was slightly slimmed and the length of nanoparticles was slightly extended with increasing reaction time. The smallest particle size was produced at the same synthesis condition when zirconium chloride among the precursors such as zirconium (IV) acetate, zirconium nitrate and zirconium chloride was used.

• Journal of the Korean Ceramic Society
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• v.34 no.6
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• pp.652-658
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• 1997

The phase stability in the interface of Sr-doped LaMnO3(LSM)/Gd-doped CeO2(CGO) was examined in this study in order to check the feasibility of using LSM as the cathode material in a low-temperature SOFC(solid oxide fuel cell) using CGO as the electrolyte. For the purpose, CGO powders of Ce0.82Gd0.18O0.91 and two LSM powders having different compositions, La0.9Sr0.1MnO3(LSM10) and La0.5Sr0.5MnO3(LSM50), were synthesized using Pechini method. Then, specimens having the LSM/CGO interface were prepared, heat-treated at 130$0^{\circ}C$ for up to 3 days, and analyzed by XRD and STEM/EDX. Face-centered cubic CGO powders of less than 10 nm size were obtained by calcination of polymeric precursor formed in the process at 45$0^{\circ}C$. Higher calcination temperature of $700^{\circ}C$ was necessary for monoclinic LSM10 and cubic LSM50 powders. LSM powders were coarser than CGO and observed to be in the range of 50~100 nm. No trace of LSM-CGO interaction product was found in the XRD pattern. Also it was known from the concentration profile in the vicinity of the interface that interdiffusion was occurred over only a small penetration depth of ~100 nm order.

• Polymer(Korea)
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• v.25 no.2
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• pp.254-262
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• 2001

Epoxy resin based upon the N,N'-diglycidylaniline which is widely used in optic, electronic and composite material. We modified this epoxy resin with poly(amic acid) (PAA) that is a precursor of polyimide. To improve the mechanical property we controlled PAA content and imidization ratio. PI-modified epoxy blends were prepared for the formation of IPN structure. The possible reaction in the epoxy resin/PAA blends were investigated by FT-IR and inherent viscosity techniques. Thermal properties are measured by TGA, DSC, and TMA. Mechanical properties are measured by UTM and impact test machine. Morphology is investigated by SEM. Thermal stability improved with increasing the content of PAA in blends. As the content of PAA increases in blend, the glass transition temperature and thermal expansion coefficient decreases. Increasing impact strengths in J/m in the range of 920∼2412 were observed in blends. The PAA segment may act as a toughening agent in the epoxy networks, thus contributing the impact strength improvement of the blends.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.20 no.4
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• pp.274-279
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• 2008

In the perspective of saving energy in buildings, high performance of insulation and air tightness for improving the heating and the cooling efficiency has brought the positive effect in an economical view. However, these building energy saving technologies cause the lack of ventilation, which is the direct cause of increasing the indoor contaminants, and it is also very harmful to residents because they spend over 90% of their time in the indoor area. Therefore, the ventilation is important to keep indoor environment clean and it can also save energy consumption. In this study, a HEPA type breathing wall is designed as a passive ventilation system to collect airborne particles and to supply fresh outdoor air. To make fine porous structures, polymer nano fibers which were made by electro spinning method are used as a precursor. The nano fibers are coated with SiO2 nano particles and finally the HEPA type breathing wall is made by sintering in the electric furnace at $300\sim500^{\circ}C$. The pressure drops of nano ceramic structure are 8.2, 25.5 and 44.9 mmAq at the face velocity of 2.0, 5.9 and 8.8 cm/s, respectively. Also the water vapor permeability is $3.6g/m^2{\cdot}h{\cdot}mmHg$. In this research, the porous nano ceramic structures are obtained and the possibility for the usage of a material for HEPA type breathing wall can be obtained.

• Bulletin of the Korean Chemical Society
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• v.34 no.10
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• pp.3033-3038
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• 2013

Nanoscale Chevrel $Mo_6S_8$ powders are synthesized by molten salt synthesis. Synthesized $Mo_6S_8$ powders have different mean particle sizes which are dependent on a ratio of salt to precursor. The particle sizes of $Mo_6S_8$ powders changes along with the ratio increase. $Mo_6S_8$ (6:1) demonstrates the best electrochemical characteristics among the synthesized $Mo_6S_8$ powders although the $Mo_6S_8$ (4:1) has the smallest particle size. $Mo_6S_8$ (6:1) shows a reversible capacity of 83.9 $mAhg^{-1}$, which is 27.5% and 33% improved value over $Mo_6S_8$ (2:1) and $Mo_6S_8$ (4:1) at a current density of 0.2C, respectively. The superior electrochemical properties of $Mo_6S_8$ (6:1) are attributed to the balanced particle size which provides proper contact area with electrolyte and the shortened $Mg^{2+}$ diffusion length. The $Mo_6S_8$ (4:1) has the smallest particle size but further reduction of particle size from $Mo_6S_8$ (6:1) is not advantageous.

• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1082-1089
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• 1998

To obtain fine dispersion of Ag particles in $YBa_2$$Cu_3$$O_{7-y}$ (123) superconductors, 123 samples were made by pyrophoric synthetic method using malic acid and the subsequent solid- state reaction. As the pyrophoric synthetic powder was used as a precursor material, fine 123 powder of submicron size was produced in a short reaction time. The added $Ag_2$O was converted to metallic Ag during Pyrophoric reaction and it accelerated both the formation of 123 phase and the grain growth via the enhanced mass transfer. The Ag particles of the sample sintered using the pyrephoric synthetic powder were more finely dispersed in the 123 matrix, compared to those of the sample sintered using the mechanically mixed powder, attributing to the improvement of the superconducting properties.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.139-145
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• 2005

In the study, in order to deposit TaN thin film using diffusion barrier and bottom electrode we made the Plasma Assisted ALD equipment and confirmed the electrical characteristic of TaN thin films deposited PAALD method, PAALD equipment depositing TaN thin film using PEMAT(pentakis(ethylmethlyamlno) tantalum) Precursor and $NH_3$ reaction gas is aware that TaN thin film deposited of high density and amorphous phase with XRD measurement The degree of diffusion and react ion taking place in Cu/TaN(deposited using 150 W PAALD)/$SiO_2$/Si systems with increasing annealing temperature was estimated from MOS capacitor property and the $SiO_2(600\;\AA)$/Si system surface analysis by C-V measurement and secondary ion material spectrometer(SIMS) after Cu/TaN/$SiO_2(400\;\AA)$ system etching. TaN thin film deposited PAALD method diffusion barrier have a good diffusion barrier property up to $500^{\circ}C$.