• 제목/요약/키워드: pre-cu

검색결과 246건 처리시간 0.027초

Au/Si(100)기판상에서 Cu-MOCVD 박막의 성장과 상호확산거동 (Growth and Interdiffusion Behavior of Copper MOCVD Films on Au/Si(100) Substrates)

  • 김정열;이영기;박동구;조범래
    • 한국재료학회지
    • /
    • 제7권8호
    • /
    • pp.668-678
    • /
    • 1997
  • Si(100)기판상에 여러 가지 두께의 Au박막을 선행 증착(pre-deposition)한 후, 각각의 Au박막상에서의 Cu-MOCVD박막의 초기 핵생성과 성장 기구를 고찰하였고, 또한 각 계면에서의 상호 확산 거동을 여러가지의 분석 장비를 이용하여 조사하였다. 30$\AA$두께의 Au 박막은 수소 가스 분위기중의 열처리에 의하여 평탄한 표면 상태에서 불연속의 응집된 도상(island)형태로 변화(Si 전체 표면중 약 20%)하였다. 반면에 1500$\AA$두께의 Au박막상에서 성장한 Cu-MOCVD박막은 두께 증가에 따른 미세구조의 차이, 즉 Cu박막중으로 Au원자의 확산여부는 Au박막에 유기되는 열응력(thermal stress)을 완화하는 과정에서 일어난 결과이다.

  • PDF

스퍼터링 방식에 의한 Y-Ba-Cu-O 고온 초전도 박박의 제작에 관한 연구 (A study on the fabrication of Y-Ba-Cu-O High Tc superconducting thin film by sputtering system)

  • 채기병;강기성;소대화
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1992년도 추계학술대회 논문집
    • /
    • pp.81-83
    • /
    • 1992
  • The superconducting thin films deposited on $SiO_x$ substrate by R.F magnetron sputter using $YBa_2Cu_3O_x$ single target have been made and annealed at $940^{\circ}C$ for 30 min. The thickness of films were 1000-2000${\AA}$ with a rate of 20-25${\AA}/min$ and superconducting properties of thin films depended on the compositions of pre-annealed the thin films. It has been analyzed by SEM photo-analysis and X-ray diffraction patterns of these samples obtained under the various conditions of this sputtering methods. and recognized the supperconducting thin films by electric properties.

  • PDF

황동층의 형성과 선택적 아연 에칭을 통한 구리 필라 상 다공성 구리층의 제조와 구리-구리 플립칩 접합 (Fabrication of Porous Cu Layers on Cu Pillars through Formation of Brass Layers and Selective Zn Etching, and Cu-to-Cu Flip-chip Bonding)

  • 이완근;최광성;엄용성;이종현
    • 마이크로전자및패키징학회지
    • /
    • 제30권4호
    • /
    • pp.98-104
    • /
    • 2023
  • 대기 중 구리-구리 플립칩(flip-chip) 접합을 위해 제안된 효율적 공정의 실현 가능성을 평가하고자 구리(Cu) 필라(pillar) 상 다공성 구리층의 형성 및 액상 환원제 투입 후 열압착 접합을 실시하였다. 구리 필라 상 다공성 구리층은 아연(Zn) 도금-합금화 열처리-선택적 아연 에칭(etching)의 3단계 공정으로 제조되었는데, 형성된 다공성 구리층의 두께는 평균 약 2.3 ㎛였다. 본 플립칩 접합은 형성 다공성 구리층에 환원성 용제를 침투시킨 후, 반건조 과정을 거쳐 열압착 소결접합으로 진행하였다. 용제로 인한 구리 산화막의 환원 거동과 함께 추가 산화가 최대한 억제되면서 열압착 동안 다공성 구리층은 약 1.1 ㎛의 두께로 치밀해지며 결국 구리-구리 플립칩 접합이 완수되었다. 그 결과 10 MPa의 가압력 하에서 대기 중 300 ℃에서 5분간 접합 시 약 11.2 MPa의 접합부 전단강도를 확보할 수 있었는데, 이는 약 50% 이하의 필라들만이 접합된 결과로서, 공정 최적화를 통해 모든 필라들의 접합을 유도할 경우 20 MPa 이상의 강도값을 쉽게 얻을 수 있을 것으로 분석되었다.

수소 플라즈마 처리를 이용한 구리-구리 저온 본딩 (H2 Plasma Pre-treatment for Low Temperature Cu-Cu Bonding)

  • 최동훈;한승은;추혁진;김인주;김성동
    • 마이크로전자및패키징학회지
    • /
    • 제28권4호
    • /
    • pp.109-114
    • /
    • 2021
  • 상압 수소 플라즈마 전처리가 구리-구리 직접 본딩에 미치는 영향에 대해서 조사하였다. 상압 수소 플라즈마 처리를 통해 구리 박막의 표면 산화층을 환원시킬 수 있었음을 GIXRD 분석을 통해 확인하였다. 플라즈마 파워가 크고 플라즈마 처리 시간이 길수록 환원력 및 표면 거칠기 관점에서 효과적이었다. DCB를 이용한 계면 결합 에너지 측정에서 상압 수소 플라즈마 전처리 후 300℃에서 본딩한 경우 양호한 계면 결합 에너지를 나타내었으나, 본딩 온도가 낮아질수록 계면 결합 에너지가 낮아져 200℃에서는 본딩이 이루어지지 않았다. 습식 전처리의 경우 250℃ 이상에서 본딩한 경우 강한 결합력을 보였으며, 200℃에서는 낮은 계면 결합 에너지를 나타내었다.

CuO Nanograss as a Substrate for Surface Enhanced Raman Spectroscopy

  • Lee, Jun-Young;Park, Jiyun;Kim, Jeong-Hyun;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
    • /
    • pp.249-249
    • /
    • 2013
  • Surface-enhanced Raman spectroscopy (SERS) is a sensitive approach to detect and to identify a variety of molecules. To enhance the Raman signal, optimization of the gap between nanostructures is quite important. One-dimensional materials such as nanowires, nanotubes, and nanograsses have great potential to be used in SERS due to their unique sizes and shape dependent characteristics. In this study we investigate a simple way to fabricate SERS substrates based on randomly grown copper oxide (CuO) nanowires. CuO nanograss is fabricated on pre-cleaned Cu foils. Cu oxidized in an ammonium ambient solution of 2.5 M NaOH and 0.1 M $(NH_4)_2S_2O_8$ at $4^{\circ}C$ for 10, 30, and 60 minutes. Then, Cu(OH)2 nanostructures are formed and dried at $180^{\circ}C$ for 2 h. With the drying process, the Cu(OH)2 nanostructure is transformed to CuO nanograss by dehydration reaction. CuO nanograss are grown randomly on Cu foil with the average length of 10 ${\mu}m$ and the average diameter of a 100 nm. CuO nanograsses are covered by Ag with various thicknesses from 10 to 30 nm using a thermal evaporator. Then, we immerse uncoated and Ag coated CuO nanowire samples of various oxidation times in a 0.001M methanol-based 4-mercaptopyridine (4-Mpy) in order to evaluate SERS enhancement. Raman shift and SERS enhancement are measured using a Raman spectrometer (Horiba, LabRAM ARAMIS Spectrometer) with the laser wavelength of 532 nm. Raman scattering is believed to be enhanced by the interaction between CuO nanograss and Ag island film. The gaps between Ag covered CuO nanograsses are diverse from <10 nm at the bottom to ~200 nm at the top of nanograsses. SERS signal are improved where the gaps are minimized to near 10s of nanometers. There are many spots that provide sufficiently narrow gap between the structures on randomly grown CuO nanograss surface. Then we may find optimal enhancement of Raman signal using the mapping data of average results. Fabrication of CuO nanograss based on a solution method is relatively simple and fast so this result can potentially provide a path toward cost effective fabrication of SERS substrate for sensing applications.

  • PDF

소방의 매염 및 염색특성에 관한 연구 (A Study on the mordanting and dyeing properties of Caesalpinia Sappan, L.Dye)

  • 주영주
    • 복식
    • /
    • 제36권
    • /
    • pp.109-119
    • /
    • 1998
  • For the purpose of standardization and practicability of natural dyeing, the mordanting and dyeing properties of Caseaslpinia Sappan, L. and Brazilin were studied. Appropriate extraction, dyeing and mordanting condition of Caeaslpinia Sappan, L. were determined, and the effect of mordanting method on dye up-take adn color fastness of dyed fabric was investigated. The most absorbance of Caeaslpinia Sappan, L. solution was 445nm, Brazilin was 448nm. The color of bazilin solution was affected by pH 7~9. The optimum temperature to extract Caesalpinia Sappan, L. was 10$0^{\circ}C$ adn dyeing solution for 1 hour. In case mordants concentration, the most absorbance was 0.3%. In case mordanting test, the best and proper temperature to quantities of absorbed mordants in silk was 8$0^{\circ}C$ and the most quantities of absorbed mordants in silk was mordant treatment by Cu. Effective dyeing time to silk was 60min. Effective mordanting temperature was 8$0^{\circ}C$, and its time was 30min. K/S value of dyeing fabrics was recoginazed by mordanting treat-ment, specially Fe, Sn, Al, Cu. K/S value of pre-mordanting was higher than post-mordanting. After soaping treatment K/S value of pre- and post-mordanting silk was decreased and 0.1%(W/V) quantity of mordant was sufficient for treatment. In the case of Caeaslpinia Sappan, L. fastness was increased by mordanting treatment. Mordants and mordanting treatment method affected the amount of absorption and color change of dyed silk.

  • PDF

비대칭적으로 삼고리화된 벤젠의 합성 (Synthesis of Unsymmetrical Trisannelated Benzenes)

  • Mahmoodi, Nosrat O.;Fatemeh, Mostaghni
    • 대한화학회지
    • /
    • 제46권1호
    • /
    • pp.52-56
    • /
    • 2002
  • 2,3,4,5,6,7,8,9,10,11-데카하이드로-1H-사이클로펜타[l]페난트렌(1c)과 1,2,3,4,5,6,7,8,9,10-데카하이드로사이클로헥사[e]-as-인다센(1d) 같이 비대칭적으로 삼고리화된 벤젠을 합성하였다. 합성의 접근방법으로 사이클로펜탄온과 사이클로헥산온의 존재하에 무수 $CuCl_2$를 촉매로 사용하여 미리 형성된 바이사이클로헥실리덴-2-온 (3), 바이사이클로헥실-1''-엔-2-온 (4) 과 바이사이클로펜틸리덴-2-온(5) 같은 엔온들의 효율적인 축합반응을 사용하였다.

Seasonal Dynamics of Arbuscular Mycorrhizal Fungi (AMF) in Forest Trees of Chittagong University Campus in Bangladesh

  • Nandi, Rajasree;Mridha, M.A.U.;Bhuiyan, Md. Kalimuddin
    • Journal of Forest and Environmental Science
    • /
    • 제30권3호
    • /
    • pp.277-284
    • /
    • 2014
  • Status of Arbuscular Mycorrhizal (AM) colonization in seven tree species (Albizia saman, Acacia auriculiformis A. Cunn. ex Benth., Albizia lebbeck, Chickrassia tabularis A. Juss., Eucalyptus camaldulensis Dehnn., Gmelina arborea (Roxb) DC, Swietenia macrophylla King.) collected from the hilly areas of Chittagong University (CU) was investigated. Roots and rhizosphere soil samples were collected in different seasons (pre-monsoon, monsoon and post monsoon). Percentage of AM colonization in root and number of spores/100 gm dry soil were assessed. The result of the investigation reveals that the intensity and percentage of AM colonization varied in different forest tree species in different seasons. In this study, maximum AM colonization and spore population were found in pre-monsoon and minimum were in monsoon season. The intensity of colonization was maximum in C. tabularis (74.43%) in pre-monsoon, A. lebbeck (69.45%) in monsoon and S. macrophylla (67.8%) in post monsoon seasons and minimum in A. auriculiformis (53.75%) during pre-monsoon, A. saman (24.4%) in monsoon and A. saman (19.36%) in post monsoon. The number of spores found per 100 g dry soil ranged between 164-376 during pre-monsoon, 27-310 during monsoon and 194-299 in post monsoon season. Out of six recognized genera of AM fungi, Glomus, Sclerocystis, Entrophospora, Scutellospora, Acaulospora and other unidentified spores were observed.

산벗나무의 열매를 이용한 천연염색 (Natural Dyeing of Silk Fabric with Sargent Cherry of Prunus Sargentii Rehder)

  • 배상경
    • 복식
    • /
    • 제56권6호
    • /
    • pp.145-152
    • /
    • 2006
  • Dyeing properties of sargent cherry of Prunus sargentii Rehder were investigated with silk fabrics. The absorbed wave lengths at UV-VIS spectrometer were 362nm, 386nm, 430nm, and 512nm. The K/S value showed high in following conditions: 100%(w/w) stock solution, 60 minutes of dyeing time, 80$^{\circ}C$ of dyeing temperature, and 5 times of dyeing repetition. The K/S value showed higher in post-mordant than in pre-mordant, and the change of color did not appear in pre-mordant samples. They were colored greenish yellow in post-mordanted Cu and Fe. The highest dyeability and $\Delta$E showed in post-mordanted Fe. The light fastness showed 3-4 in post-mordanted Fe, 1-2 in pre-mordanted Al, and washing and perspiration fastnesses showed also good results in post-mordanted Fe.