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Research on the Multi-electrode Plasma Discharge for the Large Area PECVD Processing

  • Lee, Yun-Seong;You, Dae-Ho;Seol, You-Bin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.478-478
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    • 2012
  • Recently, there are many researches in order to increase the deposition rate (D/R) and improve film uniformity and quality in the deposition of microcrystalline silicon thin film. These two factors are the most important issues in the fabrication of the thin film solar cell, and for the purpose of that, several process conditions, including the large area electrode (more than 1.1 X 1.3 (m2)), higher pressure (1 ~ 10 (Torr)), and very high frequency regime (VHF, 40 ~ 100 (MHz)), have been needed. But, in the case of large-area capacitively coupled discharges (CCP) driven at frequencies higher than the usual RF (13.56 (MHz)) frequency, the standing wave and skin effects should be the critical problems for obtaining the good plasma uniformity, and the ion damage on the thin film layer due to the high voltage between the substrate and the bulk plasma might cause the defects which degrade the film quality. In this study, we will propose the new concept of the large-area multi-electrode (a new multi-electrode concept for the large-area plasma source), which consists of a series of electrodes and grounds arranged by turns. The experimental results with this new electrode showed the processing performances of high D/R (1 ~ 2 (nm/sec)), controllable crystallinity (~70% and controllable), and good uniformity (less than 10%) at the conditions of the relatively high frequency of 40 MHz in the large-area electrode of 280 X 540 mm2. And, we also observed the SEM images of the deposited thin film at the conditions of peeling, normal microcrystalline, and powder formation, and discussed the mechanisms of the crystal formation and voids generation in the film in order to try the enhancement of the film quality compared to the cases of normal VHF capacitive discharges. Also, we will discuss the relation between the processing parameters (including gap length between electrode and substrate, operating pressure) and the processing results (D/R and crystallinity) with the process condition map for ${\mu}c$-Si:H formation at a fixed input power and gas flow rate. Finally, we will discuss the potential of the multi-electrode of the 3.5G-class large-area plasma processing (650 X 550 (mm2) to the possibility of the expansion of the new electrode concept to 8G class large-area plasma processing and the additional issues in order to improve the process efficiency.

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Development of Large-area Plasma Sources for Solar Cell and Display Panel Device Manufacturing

  • Seo, Sang-Hun;Lee, Yun-Seong;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.148-148
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    • 2011
  • Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

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Development of a Groundwater Sampler and Test in a Well Affected by Seawater Intrusion (지하수 샘플러 개발 및 해수침투 관측정에서의 평가)

  • Lee, Bong-Joo;Moon, Sang-Ho;Kim, Gee-Pyo;Kim, Yong-Cheol;Kim, Yong-Je;Koh, Gi-Won
    • The Journal of Engineering Geology
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    • v.18 no.3
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    • pp.331-338
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    • 2008
  • A new ground water sampler was developed and evaluated for target depth sampling under most rigorous field conditions. This new concept sampler comprises an air-cylinder, a hypodermic needle and a sampling bottle. Pressurized air or nitrogen gas can be used as a mechanical power source to operate the sampler. The air-cylinder is used to jab the hypodermic needle into the rubber cap of the sampling bottle. The hypodermic needle functions as a pathway to inject groundwater into the sampling bottle. Field test was conducted in a seawater intrusion monitoring well located at Handong district of Jeju Island. Water qualities in this well are periodically changed from the effects of sea water. Water sampling fir the same target depth in this well were tried at various times, and variations in electrical conductivity and pressure at the inside and outside of the sampler were measured using CTD divers. We found that the device could collect water samples only when it was actuated, and the pattern and range of variations in electrical conductivities and pressures measured at the inside and outside of the sampler were nearly identical. These results indicate that water samples using the sampler presented in this study represent correctly water qualities in which the samplings were made at a specific target depth in a well.

LED Source Optimization for the LED Chip Array of the LED Luminaires (LED 조명기구에서 LED 칩 배치에 따른 광원 최적화)

  • Yoon, Seok-Beom;Chang, Eun-Young
    • Journal of Digital Convergence
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    • v.14 no.4
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    • pp.419-424
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    • 2016
  • In this paper, we studied a light distribution for the LED chips arrangement using an optical design software. The structures of the edge type LED luminaires are reflector plane, LGP(lighting guide plane) and diffuse plane. The reflector plane is on the middle of the overall structure. We had simulation that placing LED chips on the reflector center of the reflector edge by changing the position of LED chips above the reflector center at 1mm, 2mm, and 3mm respectively. In the case, when LED chips are on the center of the reflector, it shows the light distribution of the general diffuse illumination, the semi-direct distribution with 0.56 efficiency and the direct distribution with 0.31 efficiency. And the wedge type LGP shows more efficiency than the flat type. Gradually increasing shape of semi-spherical type by 0.015mm has power of 1.02W, efficiency of 0.25, and maximum luminous intensity of 0.104W/sr, it also and shows the better optical characteristics than the reflector plane that have no patterns. This semi-spherical type shows the better optical characteristics than the reflector plane that have no patterns.

Phototoxic effect of blue light on the planktonic and biofilm state of anaerobic periodontal pathogens

  • Song, Hyun-Hwa;Lee, Jae-Kwan;Um, Heung-Sik;Chang, Beom-Seok;Lee, Si-Young;Lee, Min-Ku
    • Journal of Periodontal and Implant Science
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    • v.43 no.2
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    • pp.72-78
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    • 2013
  • Purpose: The purpose of this study was to compare the phototoxic effects of blue light exposure on periodontal pathogens in both planktonic and biofilm cultures. Methods: Strains of Aggregatibacter actinomycetemcomitans, Fusobacterium nucleatum, and Porphyromonas gingivalis, in planktonic or biofilm states, were exposed to visible light at wavelengths of 400.520 nm. A quartz-tungsten-halogen lamp at a power density of $500mW/cm^2$ was used for the light source. Each sample was exposed to 15, 30, 60, 90, or 120 seconds of each bacterial strain in the planktonic or biofilm state. Confocal scanning laser microscopy (CSLM) was used to observe the distribution of live/dead bacterial cells in biofilms. After light exposure, the bacterial killing rates were calculated from colony forming unit (CFU) counts. Results: CLSM images that were obtained from biofilms showed a mixture of dead and live bacterial cells extending to a depth of $30-45{\mu}m$. Obvious differences in the live-to-dead bacterial cell ratio were found in P. gingivalis biofilm according to light exposure time. In the planktonic state, almost all bacteria were killed with 60 seconds of light exposure to F. nucleatum (99.1%) and with 15 seconds to P. gingivalis (100%). In the biofilm state, however, only the CFU of P. gingivalis demonstrated a decreasing tendency with increasing light exposure time, and there was a lower efficacy of phototoxicity to P. gingivalis as biofilm than in the planktonic state. Conclusions: Blue light exposure using a dental halogen curing unit is effective in reducing periodontal pathogens in the planktonic state. It is recommended that an adjunctive exogenous photosensitizer be used and that pathogens be exposed to visible light for clinical antimicrobial periodontal therapy.

Measurement Method of Final Residual Radioactivity of Radioactive Metallic Waste for Clearance (규제해제 대상 방사성 금속 폐기물 최종잔류방사능 측정법)

  • Seo, Bumkyoung;Ji, Youngyong;Hong, Sangbum;Lee, Keunwoo;Moon, Jeikwon
    • Journal of Radiation Protection and Research
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    • v.38 no.4
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    • pp.228-233
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    • 2013
  • It has been continuously generated the requirement for the replacement of the main components such as a steam generator due to the deterioration of the nuclear power plant all around the world. Also, a large amount of radioactive metal was generated during the decommissioning in a short period. It is required to make an accurate measurement of the residual radioactivity for recycling the metal waste for releasing from regulatory control. In planning the measurement procedures, the influence of geometry, self-absorption, density and other relevant factors on the representativeness of the measurements should be considered for the decommissioning metal waste. In this study, the method for measurement procedures, the source term evaluation, the ways to secure representative samples, the measurement device for wide area and the self-absorption correction factors for different density were evaluated. The metal samples for measurement were prepared for securing the simple geometry and representative by melting process. The developed correction method for measuring the radioactivity a variety density of metal waste could improve the reliability of the evaluation results for clearance.

A Numerical Modeling of the Temperature Dependence on Electrochemical Properties for Solid Oxide Electrolysis Cell(SOEC) (고체 산화물 수전해 시스템(SOEC)에서 전기화학적 특성의 온도 의존성에 대한 수치 모델링)

  • Han, Kyoung Ho;Jung, Jung Yul;Yoon, Do Young
    • Journal of Energy Engineering
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    • v.29 no.2
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    • pp.1-9
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    • 2020
  • In recent days, fuel cell has received attention from the world as an alternative power source to hydrocarbon used in automobile engines. With the industrial advances of fuel cell, There have been a lot of researches actively conducted to find a way of generating hydrogen. Among many hydrogen production methods, Solid Oxide Electrolysis Cell(SOEC) is not only a basic way but also environment-friendly method to produce hydrogen gas. Solid Oxide Electrolysis Cell has lower electrical energy demands and high thermal efficiency since it is possible to operate under high temperature and high pressure conditions. For these reasons, experimental researches as well as studies on numerical modeling for Solid Oxide Electrolysis Cell have been under way. However, studies on numerical modeling are relatively less enough than experimental accomplishments and have limited performance prediction, which mostly is considered as a result from inadequate effects of electrochemical properties by temperature and pressure. In this study, various experimental studies of commercial Membrane Electrode Assembly (MEA) composed of Ni-YSZ (40wt%, Ni-60 wt% YSZ)/8-YSZ (TOSOH, TZ8Y)/LSM (La0.9Sr0.1MnO3) was utilized for improving effectiveness of SOEC model. After numerically analyzing effects of electrochemical properties according to operating temperature, causing the largest deviation between experiments and simulation are that Charge Transfer Coefficient (CTC), exchange current density, diffusion coefficient, electrical conductivity in SOEC. Analyzing temperature effect on parameter used in overpotential model is conducted for modeling of SOEC. cross-validation method is adopted for application of various MEA and evaluating feasibility of model. As a result, the study confirm that the numerical model of SOEC based on structured process of effectiveness evaluation makes performance prediction better.

Antioxidant and anti-inflammatory properties of extracts from Allium hookeri root (삼채(Allium hookeri) 뿌리 추출물의 항산화 및 항염증 특성)

  • Zhang, Chengmei;Tong, Tao;Kim, Chong-Kyung;Liu, Yajuan;Seo, Hyuk-Jun;Kim, Bo-Sup;Kang, Seong-Gook
    • Food Science and Preservation
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    • v.22 no.6
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    • pp.867-877
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    • 2015
  • In this study, antioxidant and anti-inflammatory activities of water, methanol, and ethanol extracts obtained from Allium hookeri root were evaluated. The ethanol extract of A. hookeri was found to possess the strongest reducing power and also exhibited dominant effects on scavenging of nitrites, DPPH radicals, and superoxide radicals. The water extract showed more efficient DPPH and hydroxyl radical-scavenging activities than those of the methanol extract. Furthermore, the inhibitory activity against nitric oxide (NO) production in RAW 264.7 macrophages was evaluated to elucidate the anti-inflammatory properties of the extracts. Results indicated that all the extracts of A. hookeri exerted inhibitory activities against NO production, especially the ethanol extract ($IC_{50}29.13{\mu}g/mL$). Total phenolic and total flavonoid contents were found to be abundant in the ethanol extract, with values of 24.96 mg gallic acid equivalent/g extract and 4.27 mg rutin equivalent/g extract, respectively. Total thiosulfinate content was determined for the first time and a high amount was present in the ethanol extract ($14.2{\mu}M/g$ extract). These results suggest that A. hookeri root has antioxidant and anti-inflammatory properties and could be used as a natural source for the development of pharmaceutical agents or functional foods.

Chemical Components and Anti-oxidant Activities of Black Currant (블랙 커런트의 화학성분 및 항산화 활성)

  • Jeong, Chang-Ho;Jang, Chi-Weon;Lee, Koo-Yul;Kim, Il-Hun;Shim, Ki-Hwan
    • Food Science and Preservation
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    • v.19 no.2
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    • pp.263-270
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    • 2012
  • The chemical components and anti-oxidant activities of black currant were investigated. The pH, soluble solid and total acidity values were 3.36, 15.11 $^{\circ}Brix$, and 1.65%, respectively. The Hunter L, a, and b values were 18.20, 5.13, and 1.08, respectively. The proximate compositions were as follows; moisture, 77.64%; nitrogen free extract, 17.41%; crude fiber, 3.08%; crude protein, 1.28%; crude ash, 0.31%; and crude lipid, 0.28%, respectively. The mineral elements were K (177.36 mg/100 g), P (54.74 mg/100 g), and Ca (26.45 mg/100 g). The free sugar components were glucose (7.71%) and fructose (5.88%). The amino acid contents of the black currant were very rich in glutamic acid (105.73 mg/100 g) and deficient in cystine (5.29 mg/100 g). The ascorbic acid and total phenolic contents were 112.19 mg/100 g and 34.48 mg GAE/g, respectively. The ABTS and DPPH radical scavenging activity levels were 99.48% and 89.03% at the 10 and 1.25 mg/mL concentrations. The reducing power and FRAP of the black currant were dose-dependent. Thus, black currant can be an effective source of functional food substances, i.e., natural anti-oxidants.

Anti-microbial, Anti-oxidant, and Anti-thrombosis Activities of the Lees of Bokbunja Wine (Rubus coreanus Miquel) (복분자주 주박의 항균, 항산화 및 항혈전 활성)

  • Kim, Mi-Sun;Kang, Dong-Kyoon;Shin, Woo-Chang;Sohn, Ho-Yong
    • Journal of Life Science
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    • v.25 no.7
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    • pp.757-764
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    • 2015
  • The immature fruit of Rubus coreanus Miquel (bokbunja in Korean) is mainly consumed as a fruit wine due to its sour taste and low sugar content. The lees (LBW) remaining after the production of bokbunja wine are discarded as they have no specific usage. The aim of this study was to develop high-value-added biomaterials for functional foods and beauty/health products by investigating the anti-microbial, anti-oxidant, and anti-thrombosis activities of LBW using ethanol and hot water extracts and their subsequent organic solvent fractions. The ethyl acetate (EA) fraction of LBW extracts has a high polyphenol content (413–459 mg/g), and showed strong anti-microbial activity against gram-positive bacteria. The EA fraction also showed excellent radical-scavenging activity against DPPH anion, ABTS cation, and nitrite, with strong reducing power. The polyphenol-enriched EA fraction strongly inhibited thrombin, prothrombin, and blood coagulation factors. The butanol fraction showed a specific inhibition of coagulation factors, as measured in activated partial thromboplastin time assay, which is linked to intrinsic blood coagulation. The butanol fraction also showed strong inhibition of platelet aggregation, at levels comparable to aspirin. The residue of the hot-water extract, which is produced by sequential solvent fractionation of the LBW extract, showed superior inhibition against platelet aggregation when compared to aspirin. Our results suggest that the LBW, which are currently discarded, are a promising source of novel functional foods and beauty/health products.