• 제목/요약/키워드: positioning precision

검색결과 816건 처리시간 0.042초

PZT를 이용한 초정밀 구동의 문헌적 고찰 (Review of A High Precision Actuator Mechanism Using PZT)

  • 최현석;이준;정명철;윤덕원;한창수;홍원표;강응구;최헌종
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.524-529
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    • 2004
  • Recently High precision positioning device is used in many kinds of manufacturing and scientific instruments. Piezoelectric transducer is applied to the positioning devive as actuator, PZT has a high resolution, however, moving range is short. Many researcher have developed the mechanism for increasing a motion range. The types of increasing motion range mechanism with PZT are inertial slider, friction driver, ultrasonic motor, etc. In this paper we discuss the review of the hish precision actuator mechanism with PZT. Many kinds of mechanism for high precision are shown and compared.

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실험계획법을 이용한 마이크로 스테이지 설계에 관한 연구 (A Study on Design of Micro Stage using Design of Experiment)

  • 예상돈;정재훈;이재광;민병현
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1394-1397
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    • 2005
  • The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the $1^{st}$ natural frequency and equivalent stresses, FEM simulation was performed using the table of orthogonal arrays and Taguchi method was used to determine the optimal design parameters. As results of this study, the size of 1st natural frequency and equivalent stresses on micro stage was influenced significantly by a thickness of hinge and a length of arm.

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정밀위치결정을 위한 캠 형상 설계 (Cam Profile Design for Precision Positioning)

  • 이종호;이종길;김병희;전병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 춘계학술대회논문집
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    • pp.204-209
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    • 2003
  • Cam mechanisms are one of the most popular devices for generating intermittent motion and are widely used in many areas. Also, as being interested in research of precision field, cam mechanism is required high accuracy and continuity, In. In this paper, the cam mechanism of filament automatic assembly machine design for precision motion is proposed. The modelling of a cam mechanism, cam profile functions, and the design of the cam considering the precision positioning of the cam mechanism is studied. And, simulation of designed cam mechanism had been carried out dynamic analysis.

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The conceptual design of the x y $\theta$ fine stage and its optimal design to obtain fast response in lithography system.

  • Kim, Dong-Min;Kim, Ki-Hyun;Lee, Sung-Q.;Gweon, Dae-Gab
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2001년도 ICCAS
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    • pp.37.3-37
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    • 2001
  • The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

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PZT 액추에이터를 이용한 mm범위의 위치결정용 정밀스테이지의 개발 (Development of precision-stage for the millimeter dynamic range by using the PZT actuato)

  • 정동호;남기호;권현규
    • 한국기계가공학회지
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    • 제7권1호
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    • pp.32-37
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    • 2008
  • This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact part of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper.

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초정밀가공 시 임피던스 측정을 통한 시편 수평맞춤 및 공구의 기준위치 설정 (Workpiece Horizontality and Reference Positioning of Cutting Tool by Measuring Impedance in Ultra-Precision-Machining)

  • 이호철;김기대
    • 한국정밀공학회지
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    • 제28권12호
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    • pp.1366-1371
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    • 2011
  • In ultra precision machining, it is necessary to adjust the horizontality and reference position of a workpiece in a noncontact manner. For this, a simple process by measuring impedance between a tool tip and a workpiece which are connected to impedance analyzer is proposed. As the distance between the tool and the workpiece gets closer, the reduction rate of impedance becomes higher over all frequency ranges. By setting threshold value of impedance reduction rate at specific frequencies through preliminary experiments, the distance between the tool and the workpiece can be predicted and it directly enables us to horizontalize the workpiece and to set the tool to the desired reference position.

ENHANCING THE PRECISION OF GPS STATIC RELATIVE POSITIONING USING THE OCEAN TIDE LOADING CORRECTION

  • Yeh, Ta-Kang;Chang, Ming-Han;Liou, Yuei-An;Chen, Chun-Sung
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2006년도 Proceedings of ISRS 2006 PORSEC Volume II
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    • pp.756-759
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    • 2006
  • The ocean tide loading (OTL) is an important factor for the GPS positioning, especially in the height direction. The shorter of the distance to the ocean, the larger of the error by the OTL. The influence will be changed when we measure in different place and the order of magnitude is from few centimeters to ten centimeters. In this study, more than ten kinds of the OTL models were collected and applied on the GPS static relative positioning in Taiwan. The GPS observations including five stations were obtained from Nov. 9, 2004 to Feb. 23, 2005 and we used the Bernese GPS software to execute the data processing. In this period, the average amplitudes of the 3-D coordinates are as follows: N is 0.4 cm, E is 0.7 cm, h is 1.8 cm at Kinmen station; N is 0.7 cm, E is 1.3 cm, h is 2.3 cm at Lanyu station; N is 0.5 cm, E is 0.7 cm, h is 2.0 cm at Matsu station; N is 0.6 cm, E is 0.6 cm, h is 2.0 cm at Penghu station and N is 0.5 cm, E is 1.2 cm, h is 1.7 cm at Hsinchu station. Moreover, we will analyze the advantage and disadvantage of every kind of the OTL models in different environments to offer some information to the GPS users and enhance the precision of the GPS positioning.

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DETERMINATION OF GPS RECEIVER CLOCK ERRORS USING UNDIFFERENCE PHASE DATA

  • Yeh, Ta-Kang;Chung, Chen-Yu;Chang, Yu-Chung;Luo, Yu-Hsin
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2008년도 International Symposium on Remote Sensing
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    • pp.277-280
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    • 2008
  • Enhancing the positioning precision is the primary pursuit of GPS users. To achieve this goal, most studies have focused on the relationship between GPS receiver clock errors and GPS positioning precision. This study utilizes undifferentiated phase data to calculate GPS clock errors and to compare with the frequency of cesium clock directly, thus verifying estimated clock errors by the method used in this paper. The relative frequency offsets from this paper and from National Standard Time and Frequency Laboratory of Taiwan match to $1.5{\times}10^{12}$ in the frequency instability, suggesting that the proposed technique has reached a certain level of quality. The built-in quartz clocks in the GPS receivers yield relative frequency offsets that are 3 to 4 orders higher than those of rubidium clocks. The frequency instability of the quartz clocks is on average two orders worse than that of the rubidium clock. Using the rubidium clock instead of the quartz clock, the horizontal and vertical positioning accuracies were improved by 26-78% (0.6-3.6 mm) and 20-34% (1.3-3.0 mm), respectively, for a short baseline. These improvements are 7-25% (0.3-1.7 mm) and 11% (1.7 mm) for a long baseline. Our experiments show that the frequency instability of clock, rather than relative frequency offset, is the governing factor of positioning accuracy.

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DATUM PROBLEM OF NETWORK-BASED RTK-GPS POSITIONING IN TAIWAN

  • Yeh, Ta-Kang;Hu, Yu-Sheng;Chang, Ming-Han;Lee, Zu-Yu;Liou, Yuei-An
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2007년도 Proceedings of ISRS 2007
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    • pp.90-94
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    • 2007
  • The conventional single-reference station positioning is affected by systematic errors such as ionospheric and tropospheric delay, so that the rover must be located within 10 km from the reference station in order to acquire centimeter-level accuracy. The medium-range real-time kinematic has been proven feasible and can be used for high precision applications. However, the longer of the baseline, the more of the time for resolving the integral ambiguity is required. This is due to the fact that systematic errors can not be eliminated effectively by double-differencing. Recently, network approaches have been proposed to overcome the limitation of the single-reference station positioning. The real-time systematic error modeling can be achieved with the use of GPS network. For expanding the effective range and decreasing the density of the reference stations, Land Survey Bureau, Ministry of the Interior in Taiwan set up a national GPS network. In order to obtain the high precision positioning and provide the multi-goals services, a GPS network including 66 stations already been constructed in Taiwan. The users can download the corrections from the data center via the wireless internet and obtain the centimeter-level accuracy positioning. The service is very useful for surveyors and the high precision coordinates can be obtained real time.

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