• Title/Summary/Keyword: positioning control

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Design of Ultra-precision Micro Stage using Response Surface Methodology (반응표면분석법을 이용한 초정밀 마이크로스테이지의 설계)

  • Ye, Sang-Don;Min, Byeong-Hyeon;Lee, Jae-Kwang
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.5 no.1
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    • pp.39-44
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    • 2006
  • Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

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Ultra precision positioning system for Servo Motor-Piezo actualtor using dual servo loop (이중서보제어루프를 통한 서보모터-압전구동기의 초정밀위치결정 시스템)

  • 이동성;박종호;박희재
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.437-441
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    • 1995
  • In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

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A Study on the Design Parameters of Controller for Dynamic Positioning System (자기위치 유지시스템 제어기의 설계변수에 관한 연구)

  • 이동연;하문근
    • Journal of the Society of Naval Architects of Korea
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    • v.40 no.1
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    • pp.8-19
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    • 2003
  • Special purpose vessels such as drillship and ocean research vessels install the DPS(Dynamic Positioning System) to maintain the position and heading for long-time operation. This paper deals with the design parameters for the control theory and filter algorithms of DP system. for the environmental loadings wind forces, current forces and wave forces were considered. In order to estimate the low frequency motions without first-order wave motion, the Kalman filter was used and it was assumed that the first-order wave forces correspond to system noises and first-order wave motions are measurement noises. In this simulation, the length of research vessel is 65 meters and it has four thrusters to maintain the position. The ability of keeping position and heading was confirmed. For the calculation of thruster input the LQR and LOI control theory were adopted and the effects of gain were investigated.

A Performance Comparison of Positioning Methods Considering Measurement Noise (측정 잡음을 고려한 위치 결정 기법의 성능비교)

  • Park, Chan-Sik;Yim, Jae-Geol
    • Journal of Institute of Control, Robotics and Systems
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    • v.16 no.12
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    • pp.1176-1181
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    • 2010
  • This paper proposes three positioning algorithms using TOA measurements: 1) The well-known linearization method using Taylor series, 2) a modified Savarese method considering measurement noise, which does not need linearization, and 3) a modified Bancroft method where TOA measurements instead of pseudorange measurements are considered. Furthermore, through an error analysis, for Savarese method, divergence of altitude is anticipated if the transmitters are located at the same height. To prevent height divergence, the Savarese method is modified again for receivers which assumed moving on the even plane. Error analysis also shows the relationship between Bancroft and Savarese method. From the analysis it is expected that the performance of Savarese method is worse than Bancroft method because of error amplification during difference operation. Experiments using real TOA measurement from the time difference of ultra sound and RF validate the proposed methods and show that analysis is correct.

Localization of a Mobile Robot Using Multiple Ceiling Lights (여러 개의 조명등을 이용한 이동 로봇의 위치 추정)

  • Han, Yeon-Ju;Park, Tae-Hyoung
    • Journal of Institute of Control, Robotics and Systems
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    • v.19 no.4
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    • pp.379-384
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    • 2013
  • We propose a new global positioning method for the indoor mobile robots. The multiple indoor lights fixed in ceiling are used as the landmarks of positioning system. The ceiling images are acquired by the fisheye lens camera mounted on the moving robot. The position and orientation of the lights are extracted by binarization and labeling techniques. Also the boundary lines between ceiling and walls are extracted to identify the order of each light. The robot position is then calculated from the extracted position and known position of the lights. The proposed system can increase the accuracy and reduce the computation time comparing with the other positioning methods using natural landmark. Experimental results are presented to show the performance of the method.

Characteristic Test of High Force Linear Motor Feed Unit for High Speed Machine Tool (고속가공기용 고추력 리니어모터 이송계의 특성 평가)

  • 송창규;황주호;박천홍;이후상;정재한
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.977-981
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    • 2000
  • Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.

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Performance Analysis of MLAT System Receiver for Aircraft Flight Control System

  • Yoo, Sang-Hoon;Oh, Jeong-Hun;Koh, Young-Mok;Kim, Su-Hong;Sung, Tae-Kyung
    • Journal of Positioning, Navigation, and Timing
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    • v.5 no.1
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    • pp.29-36
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    • 2016
  • In this paper, performance on receivers of multilateration (MLAT) system that uses ADS-B signal, which is recently becoming popular, was analyzed to overcome shortcomings of existing aircraft flight control systems or reinforce the capabilities. A link budget was analyzed using a channel model in the airport environment with regard to Local Area Multilateration (LAM) for ground-controlled landing around the airport. In order to detect signals that arrived at the receiver successfully, sensitivity of receiver was analyzed using a signal-to-noise ratio (SNR) worksheet, and a method that improves accuracy of the distance measurement was proposed by adopting a peak estimation using sampling signals. Through simulations, optimum specifications of receivers were analyzed to have high precision positioning of LAM, and accuracy of LAM distance measurements was presented.

A Piezo-driven Fine Manipulation System Based on Flexure Hinges for Manipulating Micro Parts (미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니플레이션 시스템)

  • Choi, Kee-Bong;Lee, Jae-Jong;Kim, Gee-Hong;Ko, Kuk-Won
    • Journal of Institute of Control, Robotics and Systems
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    • v.15 no.9
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    • pp.881-886
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    • 2009
  • This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

Photogrammetric Modeling of KOMPSAT Stereo Strips Using Minimum Control

  • Yoo, Hwan-Hee;Sohn, Hong-Gyoo;Kim, Seong-Sam;Jueng, Joo-Kweon
    • Korean Journal of Geomatics
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    • v.2 no.1
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    • pp.31-35
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    • 2002
  • This paper describes an experiment for three-dimensional positioning for a pair of KOMPSAT stereostrips using the ancillary data and a single ground control point. The photogrammetric model for three-dimensional positioning was performed as follows: first, initialization of orbital and attitude parameters derived from ancillary data; second, adjustment of orbital and attitude parameters for the satellite to minimize the ground position error with respect to a GCP using the collinearity condition; third, determination of actual satellite position; and lastly, space intersection. This model was tested for a pair of stereo strips with 0.6 base-to-height ratio and GCPs identified from a 1:5,000 scale digital map. As the result, the satellite position of offset was corrected by only one GCP and the accuracy for the geometric modeling showed 38.89m RMSE.

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Robust Positioning-Sensing for n Ubiquitous Mobile Robot (유비쿼터스 모바일 로봇의 강인한 위치 추정 기법)

  • Choi, Hyo-Sik;Hwang, Jin-Ah;Lee, Jang-Myung
    • Journal of Institute of Control, Robotics and Systems
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    • v.14 no.11
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    • pp.1139-1145
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    • 2008
  • A robust position sensing system is proposed in this paper for a ubiquitous mobile robot which moves indoors as well as outdoors. The Differential GPS (DGPS) which has a position estimation error of less than 5 m is a general solution when the mobile robot is moving outdoor, while an active beacon system (ABS) with embedded ultrasonic sensors is reliable as an indoor positioning system. The switching from the outdoor to indoor or vice versa causes unstable measurements on account of the reference coordinates and algorithm changes. To minimize the switching time in the position estimation and to stabilize the measurement, a robust position sensing system is proposed. In the system, to minimize the switching delay, the door positions are stored and updated in a database. Using the database, the approaching status of the mobile robot from indoor to outdoor or vice versa has been checked and the switching conditions are prepared before the mobile robot actually moves out or moves into the door. The reliability and accuracy of the robust positioning system based on DGPS and ABS are verified and demonstrated through the real experiments using a mobile robot prepared for this research.