• 멤브레인
• /
• 제2권1호
• /
• pp.21-32
• /
• 1992

화학증착법을 사용하여 다공성 Vycor 유리에 선택적 수소 투과성 실리카 막을 제조하였다. 화학증착에는 $SiCl_4$의 가수분해 반응이 이용되었으며, 반응물인 $SiCl_4$와 물을 서로 반대 방향으로 주입하여 막을 제조하는 opposing-reactants film deposition방법과, 반응물을 다공성 유리관의 한쪽으로만 공급하는 one-sided film deposition 방법을 모두 사용하였다. 제조된 실리카 막을 통한 수소의 투과도는 $600^{\circ}C$ 이상의 온도에서 $0.01-0.25cm^3(STP)/cm^2-min-atm$의 범위에 있었으며, 수소의 질소에 대한 투과도 비는 1000정도였고, 온도의 증가에 따라 실리카 막을 통한 수소 및 질소의 투과도는 증가하였다. Opposing reactants film deposition 방법으로 제조된 실리카 막은 비교적 안정성은 높으나 수소의 투과도가 낮은 반면, one-sided film deposition 방법을 사용하면 수소의 투과도는 높으나 안정성이 낮은 막이 얻어졌다. 이러한 실리카 막은 고온에서의 기체분리 및 분리막 반응기에 응용하기 위하여는 높은 선택적투과성 및 안정성이 요구되며 막 제조 조건 및 방법이 최적화되어야 함을 알 수 있었다.

• 센서학회지
• /
• 제1권2호
• /
• pp.183-194
• /
• 1992

실리콘 기판을 HF용액 내에서 양극반응을 시켜 electropolishing법 또는 PSL 형성법으로 센서와 actuator에 유용한 다양한 모양의 실리콘 미세 기계구조를 제조하였다. 미세구조는 시편의 결정면에 관계없이 형성되었으며, 저농도 도핑된 단결정 실리콘이다. $n^{+}/n$ 실리콘 시편을 HF용액(20-48%)내에서 양극반응시켜 $n^{+}$ 영역에 선택적으로 PSL을 형성하였으며, HF농도, 반응전압 및 반응시간에 따른 PSL 형성의 특성을 조사였다. $n^{+}$ 영역에만 PSL이 형성되었으며 PSL의 다공도는 HF 농도 증가에 따라 감소하였으며, 반응전압에는 무관하였다. $n/n^{+}/n$형 구조를 이용하여 미세구조를 제조한 경우, 식각된 실리콘 표면이 균일하고 cusp가 제거되었으며, 미세구조의 두께는 전 영역을 통하여 n-epi.층의 두께로 일정하였다. HF용액(5 wt%)에서의 양극반응과 planar기술을 이용하여 가속도센서를 제조하여 기존의 IC 공정기술과 함께 사용이 가능함을 확인하였다. 또 모터의 회전자, 기어 등의 미세 기계구조를 PSL 형성법으로 제조하고 SEM 사진으로 조사하였다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
• /
• pp.241-241
• /
• 2008

Macrofore formation in silicon and other semiconductors using electrochemical etching processes has been, in the last years, a subject of great attention of both theory and practice. Its first reason of concern is new areas of macropore silicone applications arising from microelectromechanical systems processing (MEMS), membrane techniques, solar cells, sensors, photonic crystals, and new technologies like a silicon-on-nothing (SON) technology. Its formation mechanism with a rich variety of controllable microstructures and their many potential applications have been studied extensively recently. Porous silicon is formed by anodic etching of crystalline silicon in hydrofluoric acid. During the etching process holes are required to enable the dissolution of the silicon anode. For p-type silicon, holes are the majority charge carriers, therefore porous silicon can be formed under the action of a positive bias on the silicon anode. For n-type silicon, holes to dissolve silicon is supplied by illuminating n-type silicon with above-band-gap light which allows sufficient generation of holes. To make a desired three-dimensional nano- or micro-structures, pre-structuring the masked surface in KOH solution to form a periodic array of etch pits before electrochemical etching. Due to enhanced electric field, the holes are efficiently collected at the pore tips for etching. The depletion of holes in the space charge region prevents silicon dissolution at the sidewalls, enabling anisotropic etching for the trenches. This is correct theoretical explanation for n-type Si etching. However, there are a few experimental repors in p-type silicon, while a number of theoretical models have been worked out to explain experimental dependence observed. To perform ordered macrofore formaion for p-type silicon, various kinds of mask patterns to make initial KOH etch pits were used. In order to understand the roles played by the kinds of etching solution in the formation of pillar arrays, we have undertaken a systematic study of the solvent effects in mixtures of HF, N-dimethylformamide (DMF), iso-propanol, and mixtures of HF with water on the macrofore structure formation on monocrystalline p-type silicon with a resistivity varying between 10 ~ 0.01 $\Omega$ cm. The etching solution including the iso-propanol produced a best three dimensional pillar structures. The experimental results are discussed on the base of Lehmann's comprehensive model based on SCR width.

• 한국세라믹학회지
• /
• 제45권9호
• /
• pp.561-566
• /
• 2008

Carbon fiber fabric-silicon carbide composites were fabricated by liquid silicon infiltration (LSI) process. The porous two-dimensional carbon fiber fabric performs were prepared by 13 plies of 2D-plain-weave fabric in a three laminating method, [0/90], [${\pm}45$], [$0/90/{\pm}45$] lay-up, respectively. Before laminating, a thin pyrolytic carbon (PyC) layer deposited on the surface of 2D-plain weave fabric sheets as interfacial layer with $C_3H_8$ and $N_2$ gas at $900^{\circ}C$. A densification of the preforms for $C_f-Si-SiC$ matrix composite was achieved according to the LSI process at $1650^{\circ}C$ for 30 min. in vacuum atmosphere. The bending strength of the each composite were measured and the microstructural consideration was performed by a FE-SEM.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
• /
• pp.116-117
• /
• 2006

We investigated selective emitter effect of Porous Silicon (PSI) as antireflection coatings (ARC). The thin PSi layer, less than 100nm, was electrochemically formed by electrochemical method in about $3{\mu}m$ thick $n^+$ emitter on single crystalline silicon wafer (sc-Si). The appropriate PSi formations for selective emitter effect were carried out a two steps. A first set of samples allowed to be etched after metal-contact processing and a second one to evaporate Ag front-side metallization on PSi layer, by evaluating the I-V features The PSi has reflectance less than 20% in wavelength for 450-1000nm and porosity is about 60%. The cell made after front-contact has improved cell efficiency of about in comparison with the one made after PSi. The observed increase of efficiency for samples with PSi coating could be explained not only by the reduction of the reflection loss and surface recombination but also by the increased short-circuit current (Isc) within selective emitter. The assumption was confirmed by numerical modeling. The obtained results point out that it would be possible to prepare a solar cell over 15% efficiency by the proposed simple technology.

• 센서학회지
• /
• 제16권6호
• /
• pp.395-400
• /
• 2007

Ambient drying sol-gel processing was used for monolithic silica ambigels in the temperature range of $130-250^{\circ}C$. A new method of mesopore ambigels, which mean the aerogels prepared by ambient pressure drying process synthesis, is suggested at first. This method includes two important approaches. The first point is that $SiO_{2}$ surface modification of wet gel was performed by trimethylchlorosilane in n-butanol solution. This procedure is provided the silica gel mesopore structure formation. The second point is a creation of the ternary azeotropic mixture water/n-butanol/octane as porous liquid, which is effectively provided removing of water such a low temperature by 2 step drying condition under ambient pressure. The silica aerogels, which were prepared by ambient pressure drying from azeotropic mixture of water/n-butanol/octane, are transparent, crack-free and mesoporous (pore size ${\sim}$ 5.6 nm) with surface area of ${\sim}$ $923{\;}m^2/g$, bulk density of $0.4{\;}g/cm^3$ and porosity of 85 %.

• 멤브레인
• /
• 제24권3호
• /
• pp.177-184
• /
• 2014

본 연구에서 고투과도를 갖는 실리카 분리막은 콜로이달 실리카 졸과 고분자형 실리카 졸 두 가지를 DRFF법과 SRFF법으로 다공성 금속 지지체 위에 코팅하여 제조되었다. 실리카 졸은 졸-겔법으로 테트라에톡시실란(TEOS)에 의하여 제조되었고, 각각의 졸은 동적광산란법(DLS), 전계방사 주사전자현미경(FE-SEM), 질소 흡착법 등을 이용하여 그 특성을 평가하였다. 다공성 금속 지지체위에 콜로이달 실리카 졸로 중간층을 형성하여 치밀한 구조의 실리카 층을 형성한 후 그 위에 분리층으로 고분자형 실리카 졸을 코팅하여 핀홀을 줄이는 방법으로 기체분리용 분리막을 제조하였다. FE-SEM으로 분리막의 코팅 층을 분석한 결과 분리층은 중간층보다 침밀한 구조를 가지고 있음을 확인하였고 기체투과 결과 수소 투과도 $(6.63-9.21){\times}10^{-5}mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ 분포를 보였다.

• Bulletin of the Korean Chemical Society
• /
• 제25권9호
• /
• pp.1371-1378
• /
• 2004

A porous stainless steel (SUS) as a substrate of silica composite membranes for hydrogen purification was used to improve mechanical strength of the membranes for industrial application. The SUS support was successfully modified by using submicron Ni powder, $SiO_2$ sols with particle size of 500 nm and 150 nm in turns. Silica top layer was coated on the modified supports under various preparation conditions such as calcination temperature, dipping time and repeating number of dipping-drying process. The calcination temperature for proper sintering was between H ttig temperature and Tamman temperature of the coating materials. Maximum hydrogen selectivity was investigated by changing dipping time. As repeating number of dipping-drying process increased, permeances of nitrogen and hydrogen were decreased and $H_2/N_2$ selectivity was increased due to the reduction of non-selective pinholes and mesopores. For the silica membrane prepared under optimized conditions, permeance of hydrogen was about $3\;{\times}\;10^{-5}\;cm^3{\cdot}cm^{-2}{\cdot}s^{-1}{\cdot}cmHg^{-1}$ combined with $H_2/N_2$ seletivity of about 20.

• Advances in environmental research
• /
• 제4권2호
• /
• pp.69-81
• /
• 2015

A new magnetite-silica core/shell nanocomposite ($Fe_3O4@nSiO_2@mSiO_2$) was synthesized and functionalized with trimethylchlorosilane (TMCS). The prepared nanocomposite was used for the removal of diesel oil from aqueous media. The characterization of magnetite-silica nanocomposite was studied by X-ray diffraction (XRD), Fourier transform infrared (FTIR), transmission electron microscopy (TEM), surface area measurement, and vibrating sample magnetization (VSM). Results have shown that the desired structure was obtained and surface modification was successfully carried out. FTIR analysis has confirmed the presence of TMCS on the surface of magnetite silica nanocomposites. The low- angle XRD pattern of nanocomposites indicated the mesoscopic structure of silica shell. Furthermore, TEM results have shown the core/shell structure with porous silica shell. Adsorption kinetic studies indicated that the nanocomposite was able to remove 80% of the oil contaminant during 2 h and fit well with the pseudo-second order model. Equilibrium studies at room temperature showed that the experimental data fitted well with Freundlich isotherm. The magnetic property of nanocomposite facilitated the separation of solid phase from aqueous solution.

• Bulletin of the Korean Chemical Society
• /
• 제28권11호
• /
• pp.2069-2074
• /
• 2007

The 27Al multiple quantum magic angle spinning (MQMAS) nuclear magnetic resonance (NMR) spectra of mordenite zeolites were simulated using the point charge model (PCM). The spectra simulated by the PCM considering nearest neighbor atoms only (PCM-n) or including atoms up to the 3rd layer (PCM-m) were not different from those generated by the Hartree-Fock (HF) molecular orbital calculation method. In contrast to the HF and density functional theory methods, the PCM method is simple and convenient to use and does not require sophisticated and expensive computer programs along with specialists to run them. Thus, our results indicate that the spectral simulation of the 27Al MQMAS NMR spectra obtained with the PCM-n is useful, despite its simplicity, especially for porous samples like zeolites with large unit cells and a high volume density of pores. However, it should be pointed out that this conclusion might apply only for the atomic sites with small quadrupole coupling constants.